JPH07225342A - Illuminator for microscope - Google Patents

Illuminator for microscope

Info

Publication number
JPH07225342A
JPH07225342A JP6016145A JP1614594A JPH07225342A JP H07225342 A JPH07225342 A JP H07225342A JP 6016145 A JP6016145 A JP 6016145A JP 1614594 A JP1614594 A JP 1614594A JP H07225342 A JPH07225342 A JP H07225342A
Authority
JP
Japan
Prior art keywords
light source
microscope
light
light emitting
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6016145A
Other languages
Japanese (ja)
Inventor
Takayoshi Shino
敬悦 篠
Kenji Kobayashi
健二 小林
Masao Shinno
雅夫 新野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kowa Co Ltd
Original Assignee
Kowa Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kowa Co Ltd filed Critical Kowa Co Ltd
Priority to JP6016145A priority Critical patent/JPH07225342A/en
Publication of JPH07225342A publication Critical patent/JPH07225342A/en
Pending legal-status Critical Current

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  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE:To make the blurred image of the minute luminescent point of a sample similar to an original blurred image in the case of illuminating light from a point light source instead of a blurred image having the shape of the light emitting surface of the light source in the defocusing state of a microscope when the sample of the minute luminescent point-like shape is observed under the dark background of the microscope, in the illuminator of a microscope using a light source of the shape of a light emitting surface other than a circle with extremely irregular luminance and almost vertically irradiating the surface of a sample with the illuminating light from the light source from the object side of the microscope. CONSTITUTION:The illuminating light beam from the light emitting surface 4a of an LED 4 is diffused by a diffusing filter 5, converged by a condenser lens 3, reflected by a half mirror 2 and a sample surface 6 is vertically irradiated with the beam along the optical axis of an objective lens l. Since the illuminating beam is diffused by the diffusing filter 5, the shape of the light emitting surface having a hole is blurred as if it were illuminated by a point light source.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、顕微鏡において観察す
る試料を照明する照明装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an illuminating device for illuminating a sample to be observed with a microscope.

【0002】[0002]

【従来の技術】従来の試料面を照明する照明装置を内蔵
する顕微鏡においては、光源としてハロゲンランプ、タ
ングステンランプ、水銀ランプ、クセノンランプ等を使
用していた。また試料が不透明であるような場合は反射
型照明法が必要となってくる。図1に反射型ケーラー照
明法の基本的な構成を示す。図1において、光源面11
から発せられた光はコレクターレンズ12により集光さ
れ、開口絞り13及び視野絞り14を通って視野レンズ
15に導かれ、ハーフミラー16で反射されて対物レン
ズ17の光軸に沿うように導かれ、対物レンズ17の後
側焦点近傍に結像され、対物レンズ17により平行な光
束にされて試料面18に照射される。
2. Description of the Related Art In a conventional microscope having a built-in illuminating device for illuminating a sample surface, a halogen lamp, a tungsten lamp, a mercury lamp, a xenon lamp or the like has been used as a light source. Further, when the sample is opaque, the reflection type illumination method is required. FIG. 1 shows the basic configuration of the reflective Koehler illumination method. In FIG. 1, the light source surface 11
The light emitted from is collected by the collector lens 12, is guided to the field lens 15 through the aperture stop 13 and the field stop 14, is reflected by the half mirror 16, and is guided along the optical axis of the objective lens 17. An image is formed in the vicinity of the rear focal point of the objective lens 17, the parallel light flux is made by the objective lens 17, and the sample surface 18 is irradiated.

【0003】[0003]

【発明が解決しようとする課題】上記のような顕微鏡の
照明装置は、一般に光源のランプが大きく、またランプ
が熱を発生するために冷却部を設けると更に大きくな
る。そこで小型化を図る為に、熱の発生量が少なく、小
型化の容易な光源であるLED(発光ダイオード)を使
用することがある。
In the above-described microscope illuminator, the lamp of the light source is generally large, and the lamp is provided with a cooling unit to generate heat, which is further increased. Therefore, in order to achieve miniaturization, an LED (light emitting diode) that is a light source that generates a small amount of heat and is easily miniaturized may be used.

【0004】しかし、この場合、バックグラウンドが暗
く微小な輝点状の試料を見ようとするとき、ピントの合
っている状態では明瞭に見えるが、ピントをずらしたと
き或いはピントの合っていない輝点の像は、輝点に対応
した本来のボケ像とならず、光源であるLEDの発光面
の中央に孔、つまり非発光部(電極部)を有する正方形
の形状がそのままボケ像として見えてしまうことがあ
る。これは単に見にくいというだけではなく、像のコン
トラスト等を利用してオートフォーカスを行う上で障害
となってしまう。すなわち、オートフォーカスのための
ピントが合っているか否かの判定を適正に行なえなくな
ってしまう。
In this case, however, when trying to see a minute bright spot-like sample with a dark background, it can be seen clearly in the focused state, but when the focused point is shifted or out of focus. Image does not become an original blurred image corresponding to the bright spot, and a square shape having a hole, that is, a non-light emitting portion (electrode portion), in the center of the light emitting surface of the LED, which is the light source, is directly seen as a blurred image. Sometimes. This is not only difficult to see, but also an obstacle to autofocusing by utilizing the image contrast and the like. That is, it becomes impossible to properly determine whether or not the focus for autofocus is in focus.

【0005】この現象は、試料の微小輝点が小径の絞り
として機能し、ピントが合っていない状態では、微小輝
点により反射される照明光が光源の発光面の形状の断面
を有する深度の深い光束となるためである。
This phenomenon is caused by the fact that the minute bright spots of the sample function as an aperture having a small diameter, and in a state where the minute bright spots are out of focus, the illumination light reflected by the minute bright spots has a depth of a cross section having the shape of the light emitting surface of the light source. This is because it becomes a deep light flux.

【0006】そこで本発明の課題は、上記のLEDのよ
うに発光面が円形以外の形状である、ないしは発光面に
非発光部があり極端な輝度むらがある光源を用い、照明
光を顕微鏡の対物レンズ側から試料面に対しほぼ垂直に
照射する顕微鏡の照明装置において、上記のような欠点
を解消し、顕微鏡でバックグラウンドが暗く微小な輝点
状の試料を観察する場合に、顕微鏡のピントの合ってい
ない状態で、試料の微小輝点のボケ像が光源の発光面の
形状のボケ像とならず、点光源による照明光の場合の本
来のボケ像と同様となるように照明を行なうことができ
る構成を提供することにある。
Therefore, an object of the present invention is to use a light source having a light emitting surface other than a circular shape, such as the above-described LED, or a light source having a non-light emitting portion and having extremely uneven brightness, and illuminating light of a microscope. In a microscope illuminator that irradiates the sample from the objective lens side almost perpendicularly to the sample surface, when focusing on the microscope's focus when observing a minute bright spot sample with a dark background by eliminating the above drawbacks. Illumination is performed so that the blurred image of the minute bright spots of the sample does not become the blurred image of the shape of the light emitting surface of the light source in the state where the light sources do not match, and is the same as the original blurred image of the illumination light from the point light source. It is to provide a configuration that can.

【0007】[0007]

【課題を解決するための手段】上記の課題を解決するた
め、本発明によれば、発光面が円形以外の形状である、
ないしは発光面に極端な輝度むらがある光源を用い、該
光源からの照明光を顕微鏡の対物レンズ側から試料面に
対しほぼ垂直に照射する顕微鏡の照明装置において、前
記光源からの照明光を拡散する拡散手段を設けた構成を
採用した。
In order to solve the above problems, according to the present invention, the light emitting surface has a shape other than a circle.
Or, in a microscope illuminating device that uses a light source having an extremely uneven brightness on its light emitting surface and illuminates the illumination light from the light source from the objective lens side of the microscope almost perpendicularly to the sample surface, diffuses the illumination light from the light source. A structure provided with a diffusing means is adopted.

【0008】[0008]

【作用】このような構成によれば、照明光が拡散される
ことにより、光源の形状ないし輝度むらがぼかされ、あ
たかも点光源によって照明されているようになる。この
ため、バックグラウンドが暗く、微小な輝点状の試料を
見る時には、ピントの合っている時は明瞭に見え、ピン
トの合っていない時の微小な輝点のボケ像は、点光源に
よる照明光の場合の本来のボケ像と同様になり、ピント
のずれ量に比例して丸くぼけていく。
According to such a structure, the illumination light is diffused so that the shape or brightness unevenness of the light source is blurred, and it is as if it were illuminated by a point light source. For this reason, when a sample with a small dark spot and a small bright spot is seen, it can be seen clearly when the subject is in focus. It becomes the same as the original blurred image in the case of light, and the image becomes rounded in proportion to the amount of focus shift.

【0009】[0009]

【実施例】以下、図を参照して本発明の実施例を説明す
る。
Embodiments of the present invention will be described below with reference to the drawings.

【0010】図2は本発明による顕微鏡の照明装置の1
実施例の構成を示している。この構成は反射型ケーラー
法により顕微鏡の対物レンズの視野を落射照明する、す
なわち顕微鏡の対物レンズ側から同レンズの光軸に沿っ
て平行な照明光束を試料面に対しほぼ垂直に照射するも
のである。
FIG. 2 shows a microscope illuminator 1 according to the present invention.
The structure of an Example is shown. With this configuration, the field of view of the microscope objective lens is epi-illuminated by the reflection type Koehler method, that is, an illumination light flux parallel to the optical axis of the microscope objective lens side is irradiated almost perpendicularly to the sample surface. is there.

【0011】図2おいて、1は顕微鏡の対物レンズ、2
はハーフミラー、3は照明系のコンデンサレンズ(集光
レンズ)、4は光源であるLED(発光ダイオード)、
5は拡散フィルター、6は試料の物体が配置される試料
面、7は顕微鏡の対物レンズ1の結像面である。拡散フ
ィルター5はLED4から発せられる照明光を均一に拡
散、散乱する拡散手段であり、スリガラス、紙、あるい
は半透明で片面または両面を拡散面としたプラスチック
板などからなり、LED4とコンデンサレンズ3間でL
ED4の近傍に配置される。
In FIG. 2, reference numeral 1 denotes a microscope objective lens, and 2
Is a half mirror, 3 is an illumination system condenser lens (condensing lens), 4 is a light source LED (light emitting diode),
Reference numeral 5 is a diffusion filter, 6 is a sample surface on which a sample object is arranged, and 7 is an image forming surface of the objective lens 1 of the microscope. The diffusion filter 5 is a diffusion means that uniformly diffuses and scatters the illumination light emitted from the LED 4, and is made of frosted glass, paper, or a semitransparent plastic plate with one or both sides as the diffusion surface, and between the LED 4 and the condenser lens 3. At L
It is arranged near the ED4.

【0012】LED4の発光面4aから発せられた照明
光は、拡散フィルター5により拡散され、コンデンサレ
ンズ3により集光され、ハーフミラー2により反射され
て進路を90゜折曲され、対物レンズ1の光軸に沿って
導かれる。
The illumination light emitted from the light emitting surface 4a of the LED 4 is diffused by the diffusion filter 5, condensed by the condenser lens 3, reflected by the half mirror 2 and bent along the path by 90 °, and the objective lens 1 is illuminated. Guided along the optical axis.

【0013】ここで対物レンズ1の視野を落射照明する
ために、LED4の発光面4aの像が対物レンズ1の後
側焦点位置近傍に結像するようにコンデンサレンズ3が
配置されている。これにより、照明光は対物レンズによ
り平行な光束とされ、対物レンズ1の光軸に沿って試料
面6に対し垂直に照射される。
Here, in order to carry out epi-illumination of the visual field of the objective lens 1, the condenser lens 3 is arranged so that the image of the light emitting surface 4a of the LED 4 is formed in the vicinity of the rear focus position of the objective lens 1. As a result, the illumination light is made into a parallel light flux by the objective lens and is irradiated perpendicularly to the sample surface 6 along the optical axis of the objective lens 1.

【0014】ところで、LЕD4の発光面4aは、一般
的に図3に示すような形状になっている。すなわち、斜
線部分で示されるように、中央に円形の孔4b、つまり
非発光部(電極部)を有する正方形になっている。
By the way, the light emitting surface 4a of the LΦD4 is generally shaped as shown in FIG. That is, as shown by the hatched portion, it is a square having a circular hole 4b in the center, that is, a non-light emitting portion (electrode portion).

【0015】ここで、図2の構成で拡散フィルター5が
ないとすると、LED4の孔4bを有する形状の発光面
4aを出た光は、そのままコンデンサレンズ3を通り、
ハーフミラー2で折り曲げられ、対物レンズ1を通り、
試料面6に対してほぼ垂直に照射されるが、先述のよう
に、バックグラウンドが暗く、微小な輝点状の試料を見
ようとするとき、ピントの合っている状態では明瞭に見
えるが、ピントをずらしたとき或いはピントの合ってい
ないときの輝点の像は、発光面4aの孔4bを有する形
状がそのままボケ像として見えてしまう。これは、見に
くいと言うことだけではなく、コントラスト等を利用し
てオートフォーカスを行う上では障害になる。
If there is no diffusion filter 5 in the configuration of FIG. 2, the light emitted from the light emitting surface 4a of the LED 4 having the hole 4b passes through the condenser lens 3 as it is,
It is bent by the half mirror 2, passes through the objective lens 1,
The sample surface 6 is irradiated almost perpendicularly, but as described above, when trying to see a minute bright spot-like sample with a dark background, it can be clearly seen in the focused state, but the focus is clear. In the image of the bright spots when the light is shifted or out of focus, the shape of the light emitting surface 4a having the holes 4b appears as a blurred image. This is not only difficult to see, but also an obstacle to autofocusing using contrast and the like.

【0016】これに対し、図2に示したようにLED4
の近傍に拡散フィルター5を入れると、LED4からの
照明光が均一に拡散されることにより、発光面4aの孔
4bを有する形状がぼかされ、あたかも点光源によって
照明されているようになる。
On the other hand, as shown in FIG.
When the diffusion filter 5 is inserted in the vicinity of, the illumination light from the LED 4 is uniformly diffused, so that the shape of the light emitting surface 4a having the hole 4b is blurred and it is as if illuminated by a point light source.

【0017】このため、バックグラウンドが暗く、微小
な輝点状の試料を見る時には、ピントの合っている時は
明瞭に見え、ピントをずらした時或いはピントの合って
いない時の微小な輝点のボケ像は、点光源による照明光
の場合の本来のボケ像と同様になり、ピントのずれ量に
比例して丸くぼけていく。
Therefore, when a sample having a small bright spot with a dark background is seen, it is clearly visible when the subject is in focus, and a minute bright spot when the subject is out of focus or out of focus. The blurred image is similar to the original blurred image in the case of the illumination light from the point light source, and the image becomes rounded in proportion to the focus shift amount.

【0018】従って、観察者にとって見易いとともに、
オートフォーカスを行なう場合、ピントが合っているか
否かの判定を適正に行なうことができ、オートフォーカ
スを良好に行なうことができる。
Therefore, it is easy for the observer to see,
When performing autofocus, it can be properly determined whether or not the focus is achieved, and the autofocus can be favorably performed.

【0019】ところで、図2のようにLED4とコンデ
ンサレンズ3間でLED4の近傍に拡散フィルター5を
配置してもよいが、コンデンサレンズ3とハーフミラー
2の間に拡散フィルター5を配置しても良い。また、拡
散フィルター5を設ける代わりに、LED4の照明光を
拡散する手段として、コンデンサレンズ3のLED4側
またはハーフミラー2側の表面あるいは両側の表面を拡
散面に形成する、または、LED4の発光面4aを覆う
レンズ部4cの表面を拡散面に形成する等の方法もあ
る。
By the way, the diffusion filter 5 may be arranged between the LED 4 and the condenser lens 3 in the vicinity of the LED 4 as shown in FIG. 2, but the diffusion filter 5 may be arranged between the condenser lens 3 and the half mirror 2. good. Further, instead of providing the diffusion filter 5, as a means for diffusing the illumination light of the LED 4, the surface of the condenser lens 3 on the LED 4 side or the half mirror 2 side or both surfaces is formed as a diffusion surface, or the light emitting surface of the LED 4 is formed. There is also a method of forming the surface of the lens portion 4c covering 4a as a diffusion surface.

【0020】なお、LED4の発光面4aの形状は図3
に示した形状に限らないのは勿論であり、円形以外の孔
(非発光部)を有した面形状、あるいは凹凸を有した面
形状でもよい。また、光源もLEDに限らず、発光面が
円形以外の形状である、ないしは発光面に極端な輝度む
らがある光源ならば同様にその照明光を拡散して同様の
効果が得られる。
The shape of the light emitting surface 4a of the LED 4 is shown in FIG.
It is needless to say that the shape is not limited to the shape shown in (1), and may be a surface shape having a hole (non-light emitting portion) other than a circular shape or a surface shape having unevenness. Further, the light source is not limited to the LED, and if the light emitting surface has a shape other than a circular shape, or if the light emitting surface has an extremely uneven brightness, the illumination light is similarly diffused to obtain the same effect.

【0021】[0021]

【発明の効果】以上の説明から明らかなように、本発明
によれば、発光面が円形以外の形状である、ないしは発
光面に極端な輝度むらがある光源を用い、該光源からの
照明光を顕微鏡の対物レンズ側から試料面に対しほぼ垂
直に照射する顕微鏡の照明装置において、前記光源から
の照明光を拡散する拡散手段を設けた構成を採用したの
で、顕微鏡でバックグラウンドが暗く、微小な輝点状の
試料を観察するときでピントの合っていない場合、微小
な輝点のボケ像は、光源の発光面の形状のボケ像となら
ず、点光源による照明光の場合の本来のボケ像と同様と
なり、観察者にとって見易いとともに、オートフォーカ
スを行なう場合、ピントが合っているか否かの判定を適
正に行なうことができ、オートフォーカスを良好に行な
うことができるという優れた効果が得られる。
As is apparent from the above description, according to the present invention, a light source having a light emitting surface having a shape other than a circle, or having an extremely uneven brightness on the light emitting surface is used, and illumination light from the light source is used. In the illuminating device of the microscope, which irradiates the sample from the objective lens side of the microscope almost perpendicularly to the sample surface, since the structure is provided with the diffusing means for diffusing the illumination light from the light source, the background is dark in the microscope, When observing a sample in the form of a bright spot, if the image is out of focus, the blurred image of the minute bright spot does not become a blurred image of the shape of the light emitting surface of the light source, and the It is similar to a blurred image and is easy for the observer to see, and when performing autofocus, it is possible to properly determine whether or not focus is achieved, and it is possible to perform good autofocus. Cormorants excellent effect can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】従来の顕微鏡の照明装置の構成を示す構成図で
ある。
FIG. 1 is a configuration diagram showing a configuration of a conventional illumination device for a microscope.

【図2】本発明による顕微鏡の照明装置の実施例の構成
を示す構成図である。
FIG. 2 is a configuration diagram showing a configuration of an embodiment of a microscope illumination device according to the present invention.

【図3】同装置の光源のLEDの発光面の形状を示す説
明図である。
FIG. 3 is an explanatory diagram showing a shape of a light emitting surface of an LED of a light source of the device.

【符号の説明】[Explanation of symbols]

1 対物レンズ 2 ハーフミラー 3 コンデンサレンズ 4 LED 5 拡散フィルター 6 試料面 7 結像面 1 Objective Lens 2 Half Mirror 3 Condenser Lens 4 LED 5 Diffusion Filter 6 Sample Surface 7 Imaging Surface

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 発光面が円形以外の形状である、ないし
は発光面に極端な輝度むらがある光源を用い、該光源か
らの照明光を顕微鏡の対物レンズ側から試料面に対しほ
ぼ垂直に照射する顕微鏡の照明装置において、前記光源
からの照明光を拡散する拡散手段を設けたことを特徴と
する顕微鏡の照明装置。
1. A light source whose light emitting surface has a shape other than a circular shape or whose light emitting surface has extremely uneven brightness is used, and the illumination light from the light source is irradiated from the objective lens side of the microscope substantially perpendicularly to the sample surface. The illuminating device for a microscope, wherein the illuminating device for a microscope is provided with a diffusing unit for diffusing the illumination light from the light source.
【請求項2】 前記拡散手段として拡散フィルターを前
記光源の近傍に設けたことを特徴とする請求項1に記載
の顕微鏡の照明装置。
2. The illumination device for a microscope according to claim 1, wherein a diffusion filter is provided as the diffusion means near the light source.
【請求項3】 前記光源からの照明光を集光する集光レ
ンズと、該集光レンズにより集光された照明光を反射し
て顕微鏡の対物レンズの光軸に沿って導くハーフミラー
を有し、前記拡散手段として拡散フィルターを前記集光
レンズとハーフミラーの間に配置したことを特徴とする
請求項1に記載の顕微鏡の照明装置。
3. A condensing lens that condenses the illumination light from the light source, and a half mirror that reflects the illumination light condensed by the condensing lens and guides it along the optical axis of the objective lens of the microscope. The illumination device for a microscope according to claim 1, wherein a diffusion filter as the diffusion means is arranged between the condenser lens and a half mirror.
【請求項4】 前記光源からの照明光を集光する集光レ
ンズを有し、前記拡散手段として前記集光レンズの表面
を拡散面に形成したことを特徴とする請求項1に記載の
顕微鏡の照明装置。
4. The microscope according to claim 1, further comprising a condenser lens that condenses the illumination light from the light source, and a surface of the condenser lens is formed as a diffusion surface as the diffusion means. Lighting equipment.
【請求項5】 前記光源として発光ダイオードを用いた
ことを特徴とする請求項1から4までのいずれか1項に
記載の顕微鏡の照明装置。
5. The illumination device for a microscope according to claim 1, wherein a light emitting diode is used as the light source.
【請求項6】 前記光源として発光ダイオードを用い、
前記拡散手段として前記発光ダイオードの発光面を覆う
レンズ部の表面を拡散面に形成したことを特徴とする請
求項1に記載の顕微鏡の照明装置。
6. A light emitting diode is used as the light source,
The illumination device for a microscope according to claim 1, wherein a surface of a lens portion that covers a light emitting surface of the light emitting diode is formed as a diffusion surface as the diffusion means.
JP6016145A 1994-02-10 1994-02-10 Illuminator for microscope Pending JPH07225342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6016145A JPH07225342A (en) 1994-02-10 1994-02-10 Illuminator for microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6016145A JPH07225342A (en) 1994-02-10 1994-02-10 Illuminator for microscope

Publications (1)

Publication Number Publication Date
JPH07225342A true JPH07225342A (en) 1995-08-22

Family

ID=11908339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6016145A Pending JPH07225342A (en) 1994-02-10 1994-02-10 Illuminator for microscope

Country Status (1)

Country Link
JP (1) JPH07225342A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195962A (en) * 2004-01-08 2005-07-21 Sysmex Corp Illuminator
JP2007033790A (en) * 2005-07-26 2007-02-08 Olympus Corp Illuminator for microscope
JP2015227801A (en) * 2014-05-30 2015-12-17 シーシーエス株式会社 Inspection illumination method and inspection illumination device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57170113U (en) * 1982-03-19 1982-10-26
JPH04125609A (en) * 1990-09-18 1992-04-27 Satoshi Kawada Optical microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57170113U (en) * 1982-03-19 1982-10-26
JPH04125609A (en) * 1990-09-18 1992-04-27 Satoshi Kawada Optical microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195962A (en) * 2004-01-08 2005-07-21 Sysmex Corp Illuminator
JP4533634B2 (en) * 2004-01-08 2010-09-01 シスメックス株式会社 Particle measuring device
JP2007033790A (en) * 2005-07-26 2007-02-08 Olympus Corp Illuminator for microscope
JP2015227801A (en) * 2014-05-30 2015-12-17 シーシーエス株式会社 Inspection illumination method and inspection illumination device

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