JPH0722219B2 - Semiconductor laser light source - Google Patents

Semiconductor laser light source

Info

Publication number
JPH0722219B2
JPH0722219B2 JP3234422A JP23442291A JPH0722219B2 JP H0722219 B2 JPH0722219 B2 JP H0722219B2 JP 3234422 A JP3234422 A JP 3234422A JP 23442291 A JP23442291 A JP 23442291A JP H0722219 B2 JPH0722219 B2 JP H0722219B2
Authority
JP
Japan
Prior art keywords
semiconductor laser
light source
astigmatism
plane
parallel plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3234422A
Other languages
Japanese (ja)
Other versions
JPH04363084A (en
Inventor
公男 立野
昭 有本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koki Holdings Co Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Koki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Koki Co Ltd filed Critical Hitachi Ltd
Priority to JP3234422A priority Critical patent/JPH0722219B2/en
Publication of JPH04363084A publication Critical patent/JPH04363084A/en
Publication of JPH0722219B2 publication Critical patent/JPH0722219B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の利用分野】本発明は、光ディスク装置やレーザ
プリンタ装置の光源として用いて好適な非点収差を補正
した半導体レーザ光源に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser light source which is suitable for use as a light source for an optical disk device or a laser printer device and has astigmatism corrected.

【0002】[0002]

【従来の技術】半導体レーザは最近、横モードの安定
化,長寿命化,可視化など大幅な改善がなされ、光通信
への応用分野だけでなく、精密光学系を必要とする光デ
ィスク装置、レーザプリンタ装置などへの適用も盛んに
考えられている。半導体レーザは小型,高効率,高速か
つ直接変調可能などのすぐれた特長を有するが、その共
振器の構造からして、ビームウエスト位置が接合面に垂
直方向と、平行な方向とで、一般に光軸方向にずれてい
る。すなわち、非点隔差を有するため、理想的な点光源
がつくる無収差波面に比べて、波面即ち等位相面に歪み
をもたらすという問題を有する。半導体レーザに非点隔
差がある場合、接合面に垂直な方向のビームウエスト位
置が共振器の端面側に平行な方向のビームウエスト位置
が端面より奥にある。
2. Description of the Related Art Recently, semiconductor lasers have undergone significant improvements such as stabilization of transverse modes, long life, and visualization, and are applied not only to optical communication fields but also to optical disk devices and laser printers that require precision optical systems. Application to devices is also being actively considered. A semiconductor laser has the outstanding features of being compact, highly efficient, high-speed, and capable of direct modulation, but due to the structure of its resonator, the beam waist position is generally a light beam that is perpendicular to and parallel to the joint surface. Misaligned in the axial direction. That is, since there is an astigmatic difference, there is a problem in that the wavefront, that is, the equiphase surface, is distorted as compared with an aplanatic wavefront created by an ideal point light source. When the semiconductor laser has an astigmatic difference, the beam waist position in the direction perpendicular to the joining surface is in the direction parallel to the end face side of the resonator behind the end face.

【0003】図1はこのような非点隔差を持つ光源の結
像関係の一例を示す図である。図において、1は基準3
面体Oxyzの軸Ozに沿って光ビームを放出する光源、
Xは接合面に平行な軸Ox方向のビームウエスト位置、
Yは垂直な軸Oy方向のビームウエスト位置を示し、距
離XYが非点隔差である。また破線lは軸Ox方向の光
線、実線mは軸Oy方向の光線を示す。X′,Y′は結
像光学系2によるX,Yの像位置である。
FIG. 1 is a diagram showing an example of the image formation relationship of a light source having such an astigmatic difference. In the figure, 1 is standard 3
A light source that emits a light beam along the axis Oz of the face piece Oxyz,
X is the beam waist position in the axis Ox direction parallel to the joint surface,
Y represents the beam waist position in the direction of the vertical axis Oy, and the distance XY is the astigmatic difference. A broken line 1 indicates a light ray in the axis Ox direction, and a solid line m indicates a light ray in the axis Oy direction. X ′ and Y ′ are X and Y image positions by the image forming optical system 2.

【0004】図1に示したような非点隔差を持つ光源か
らの光線は、水平面xOz内に含まれる光線lと、これ
に垂直な平面yOz内に含まれる光線mとで、収束する
位置ずれΔSをもたらす。この像位置ずれΔSを非点収
差という。
A light ray from a light source having an astigmatic difference as shown in FIG. 1 converges between a light ray 1 included in a horizontal plane xOz and a light ray m included in a plane yOz perpendicular to the horizontal plane xOz so as to be displaced. Results in ΔS. This image position deviation ΔS is called astigmatism.

【0005】このような収差が存在すると、半導体レー
ザを、光ディスク装置、レーザプリンタ装置などの精密
光学系の光源として使用する場合、レンズ,ミラーなど
の光源以外の光学系が無収差となっていても、いわゆる
回折限界の系を得ることはできない。したがって、光学
系の解像度を充分保証し、かつ光源の光利用効率を向上
させるためには、半導体レーザ自身のもつ収差を補正す
ることが必要である。従来から、半導体レーザの非点収
差を補正するためシリンドリカルレンズを利用したもの
がある。しかし、シリンドリカルレンズは光軸に対し、
回転対称となっていないため、調整が極めて困難であっ
た。
[0005] When such a aberration exists, when the semiconductor laser is used as a light source of a precision optical system such as an optical disk device or a laser printer device, the optical system other than the light source such as a lens and a mirror is aberration-free. However, a so-called diffraction-limited system cannot be obtained. Therefore, in order to sufficiently ensure the resolution of the optical system and improve the light utilization efficiency of the light source, it is necessary to correct the aberration of the semiconductor laser itself. Conventionally, there has been one that uses a cylindrical lens to correct astigmatism of a semiconductor laser. However, the cylindrical lens is
The adjustment was extremely difficult because it was not rotationally symmetrical.

【0006】すなわち、シリンドリカルレンズは収束パ
ワーが方向によって異なるため、光軸に対する角度位置
の他、光軸方向における位置、非点収差に対するパワー
の方向性の位置を調整する必要があり、位置調整が困難
であるという欠点があった。また、半導体レーザの収差
量にバラツキがある場合には、個々の半導体レーザの特
性に応じたシリンドリカルレンズの設計・製作が必要で
ある等の欠点もあり、しかも半導体レーザと一体化して
取扱うことは不可能であった。
That is, since the converging power of the cylindrical lens varies depending on the direction, it is necessary to adjust not only the angular position with respect to the optical axis, but also the position in the optical axis direction and the position of power directivity with respect to astigmatism. It had the drawback of being difficult. In addition, when there are variations in the amount of aberration of semiconductor lasers, there are drawbacks such as the need to design and manufacture cylindrical lenses according to the characteristics of individual semiconductor lasers. It was impossible.

【0007】[0007]

【発明が解決しようとする課題】本発明の目的は、半導
体レーザの有する非点収差を、設計・製作が簡単でかつ
安価な光学素子でもって補正することができ、しかも半
導体レーザと一体化して非点収差の補正された光源とし
て取扱うことができる小型で安価な半導体レーザ光源を
提供することである。
SUMMARY OF THE INVENTION An object of the present invention is to correct astigmatism of a semiconductor laser with an optical element that is simple in design and manufacturing and inexpensive, and is integrated with the semiconductor laser. It is an object of the present invention to provide a small and inexpensive semiconductor laser light source that can be handled as a light source with corrected astigmatism.

【0008】[0008]

【課題を解決するための手段】本発明は、かかる目的を
達成するために、設計・製作が簡単でかつ安価な平行平
面板を用い、この平面平面板を半導体レーザから送出さ
れる光束中に傾けて半導体レーザとともに固定配置し、
半導体レーザと平行平面板を一体化して非点収差の補正
された光源とすることを特徴とする
In order to achieve the above object, the present invention uses a plane parallel plate which is simple and inexpensive to design and manufacture, and the plane plane plate is placed in a light beam emitted from a semiconductor laser. Tilt and fix with laser diode,
A semiconductor laser and a plane-parallel plate are integrated to form a light source with astigmatism corrected.

【0009】[0009]

【作用】一般に、平行平面板を結像光学系に挿入したと
き、該平行平面板の厚み、屈折率及び光線の入射角度に
応じて非点収差が生じる現象はよく知られている(例え
ば、久保田広著「光学」岩波書店、1964年、第12
8頁〜第131頁)。本発明は、この現象を逆に利用
し、半導体レーザから送出される非点収差をもった光束
中に平行平面板を傾けて配置することによって、光源自
体の非点収差を補正するものである。
In general, it is well known that when a plane-parallel plate is inserted into an image-forming optical system, astigmatism occurs depending on the thickness of the plane-parallel plate, the refractive index, and the incident angle of a light ray (for example, Hiroshi Kubota "Optics" Iwanami Shoten, 1964, 12th
8 to 131). The present invention reversely utilizes this phenomenon, and corrects the astigmatism of the light source itself by arranging the plane-parallel plate in a light beam having astigmatism emitted from the semiconductor laser with inclination. .

【0010】収束光束が傾けられた平行平面板を通過す
るとき、非点収差が発生することは従来から知られてい
ることであるが、これは非点収差が全くない点光源から
の光束が平行平面板を通過するとどれくらいの非点収差
が発生するかを示したものであり、非点収差のない点光
源の場合を扱ったものである。これに対し本発明は、半
導体レーザ自身の有する非点収差つまり光源自身の非点
収差を問題としており、平行平面板が光源自体の非点収
差の補正に極めて有用であることを見出し、半導体レー
ザから送出される非点収差をもった光束中に平行平面板
を傾けて配置するとともに、半導体レーザと平行平面板
を一体化することによって、非点収差をもつ半導体レー
ザを光ディスク装置やレーザプリンタ装置などの光源と
して使用するに際して、非点収差による悪影響のない点
光源として扱えるようにした点に本発明の特徴がある。
It is well known that astigmatism occurs when a convergent light flux passes through an inclined plane-parallel plate. This is because a light flux from a point light source having no astigmatism is generated. It shows how much astigmatism occurs when passing through a plane-parallel plate, and deals with the case of a point light source with no astigmatism. On the other hand, the present invention has a problem of the astigmatism of the semiconductor laser itself, that is, the astigmatism of the light source itself, and has found that the plane-parallel plate is extremely useful for correcting the astigmatism of the light source itself. A semiconductor laser having astigmatism by arranging the plane-parallel plate in a light beam having astigmatism transmitted from the optical axis and tilting it, and integrating the semiconductor laser and the plane-parallel plate. The present invention is characterized in that it can be used as a point light source that is not adversely affected by astigmatism when used as a light source such as.

【0011】また半導体レーザと平行平面板を一体化し
て接近配置することによって、正確に非点収差を補正す
ることが出来る。即ち、前述したように、半導体レーザ
からの光線は、接合面内に含まれる光線と、これに垂直
な平面内に含まれる光線とで、収束する位置ずれを有す
る。この位置ずれ(非点収差)を正確に補正するために
は平行平面板の傾きを、どちらかの平面内に正確に合わ
せる必要がある。また傾きの角度が設計式通りにならな
くても補正は出来ない。このような正確な位置合わせの
ためには、半導体レーザと平行平面板が出来るだけ接近
して且つ強固に配置されるのが望ましい。従って本願発
明のように一体化した構成とする必要がある。
Further, the astigmatism can be accurately corrected by integrally arranging the semiconductor laser and the plane-parallel plate close to each other. That is, as described above, the light beam from the semiconductor laser has a position shift that converges between the light beam included in the bonding surface and the light beam included in the plane perpendicular thereto. In order to correct this positional deviation (astigmatism) accurately, it is necessary to accurately match the inclination of the plane-parallel plate within either plane. In addition, even if the angle of inclination does not conform to the design formula, it cannot be corrected. For such accurate alignment, it is desirable that the semiconductor laser and the plane-parallel plate are arranged as close to each other and strong as possible. Therefore, it is necessary to have an integrated structure as in the present invention.

【0012】[0012]

【実施例】以下、本発明の実施例を用いて詳細に説明す
る。図2は本発明の一実施例を示す図である。図におい
て、1は半導体レーザであり、この半導体レーザ1から
は、図1に示したように接合面に平行な方向とこれに垂
直な方向とでは収束点が異なる非点収差をもつ光ビーム
が放出される。3は厚みd,屈折率nの平行平面板であ
り、半導体レーザ1から送出される光ビーム中に傾けて
配置されている。この平行平面板によって生じる非点隔
差Δは、前述の久保田広著「光学」(岩波書店、196
4年)第131頁によれば、 Δ =(d/ncosi’){1−(cos2i/cos2i’)} で与えられる。但し、iは入射角(傾き角)、i′は屈
折角であり、i′=sin-1( sin i / n )である。こ
の式にもとづいて、平行平面板の厚さd,屈折率n,入
射角(傾き角)iを選定することにより、半導体レーザ
1で生じる非点収差を補正することができる。
Embodiments will be described in detail below with reference to embodiments of the present invention. FIG. 2 is a diagram showing an embodiment of the present invention. In the figure, reference numeral 1 denotes a semiconductor laser. As shown in FIG. 1, a semiconductor laser 1 emits a light beam having astigmatism whose convergence points are different between a direction parallel to the cemented surface and a direction perpendicular thereto. Is released. Reference numeral 3 denotes a plane-parallel plate having a thickness d and a refractive index n, which is tilted in the light beam emitted from the semiconductor laser 1. The astigmatic difference Δ produced by the plane-parallel plate is described by Hiroshi Kubota in “Optics” (Iwanami Shoten, 196).
4 years) According to page 131, Δ = (d / ncosi ′) {1- (cos 2 i / cos 2 i ′)}. However, i is an incident angle (tilt angle), i'is a refraction angle, and i '= sin- 1 (sini / n). Astigmatism occurring in the semiconductor laser 1 can be corrected by selecting the thickness d, the refractive index n, and the incident angle (tilt angle) i of the plane-parallel plate based on this equation.

【0013】図3は一例としてn=1.5とした場合の
iとΔとの関係をdをパラメータとして図示したもので
ある。例えば、厚さ0.5mm、屈折率1.5の平行平
面板を使用すれば、入射角(傾き角)20°で非点収差
22μmの補正が可能である。また、本実施例では、半
導体レーザ1と平行平面板3を同一のマウント5上に配
置し、角度調整板6を矢印の如く移動することにより、
平行平面板3の角度を調整した後これを固定すれば、半
導体レーザ1と平行平面板3を一体化して非点収差の補
正された光源を得ることができ、半導体レーザの持つ、
超小型、低コストなコヒーレント光源としての特徴を生
かすことができる。
As an example, FIG. 3 shows the relationship between i and Δ when n = 1.5 with d as a parameter. For example, if a plane parallel plate having a thickness of 0.5 mm and a refractive index of 1.5 is used, it is possible to correct astigmatism of 22 μm at an incident angle (tilt angle) of 20 °. Further, in the present embodiment, the semiconductor laser 1 and the plane-parallel plate 3 are arranged on the same mount 5, and the angle adjusting plate 6 is moved as shown by the arrow.
If the angle of the plane-parallel plate 3 is adjusted and then fixed, the semiconductor laser 1 and the plane-parallel plate 3 can be integrated to obtain a light source with astigmatism corrected.
It is possible to take advantage of the characteristics of a coherent light source that is ultra-small and low-cost.

【0014】[0014]

【発明の効果】以上の如く本発明によれば、半導体レー
ザの有する非点収差を、設計・製作が簡単でかつ安価な
平行平面板でもって補正することができ、しかも半導体
レーザと平行平面板を一体化して非点収差の補正された
光源とするので、光ディスク装置やレーザプリンタ装置
などの光源として用いることにより、回折限界の光スポ
ットを得ることができ、かつ光源の光利用効率を向上さ
せることとができる。このように本発明によれば、非点
収差のある半導体レーザを用いるにもかかわらず、この
非点収差を十分低レベルに抑えた点光源として扱える小
型で安価な半導体レーザ光源を得ることができる。
As described above, according to the present invention, astigmatism of a semiconductor laser can be corrected by a parallel plane plate which is simple in design and manufacturing and inexpensive, and moreover, the semiconductor laser and the plane parallel plate can be corrected. Are integrated into a light source with corrected astigmatism, so that by using it as a light source for an optical disk device, a laser printer device, etc., a diffraction-limited light spot can be obtained and the light utilization efficiency of the light source is improved. You can do things. As described above, according to the present invention, it is possible to obtain a small and inexpensive semiconductor laser light source that can be used as a point light source in which the astigmatism is suppressed to a sufficiently low level, even though a semiconductor laser having astigmatism is used. .

【図面の簡単な説明】[Brief description of drawings]

【図1】非点収差を持つ光源の結像関係を示す模式図FIG. 1 is a schematic diagram showing an image formation relationship of a light source having astigmatism.

【図2】本発明の一実施例の構成を示す概念図FIG. 2 is a conceptual diagram showing a configuration of an embodiment of the present invention.

【図3】本発明の動作を説明するグラフの図FIG. 3 is a graph illustrating the operation of the present invention.

【符号の説明】[Explanation of symbols]

1…半導体レーザ、2…結像光学系、3…平行平面板、
X…接合面に平行な方向のビームウエスト位置、Y…接
合面に垂直な方向のビームウエスト位置。
1 ... Semiconductor laser, 2 ... Imaging optical system, 3 ... Parallel plane plate,
X ... Beam waist position in a direction parallel to the joint surface, Y ... Beam waist position in a direction perpendicular to the joint surface.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】非点隔差Δを有する半導体レーザと、該半
導体レーザから送出される光束中に、該光束が入射角i
で入射するように傾けて挿入される屈折率n、厚さdの
透光性平行平面板とを一体に構成し、 Δ ≒(d/ncosi’){1−(cos2i/cos
2i’)} i’=sin〜1(sini/n) の条件を略満足するように構成され、かつ、上記半導体
レーザの接合面に平行または垂直な面内で上記平行平面
板が傾いていることを特徴とする半導体レーザ光源。
1. A semiconductor laser having an astigmatic difference Δ, and a light beam emitted from the semiconductor laser, the light beam having an incident angle i.
, A translucent parallel plane plate having a refractive index n and a thickness d, which is inserted so as to be incident at, is combined with Δ ≈ (d / ncosi ′) {1- (cos 2 i / cos
2 i ′)} i ′ = sin to 1 (sin i / n), and the parallel plane plate is tilted in a plane parallel or perpendicular to the bonding surface of the semiconductor laser. A semiconductor laser light source characterized in that
【請求項2】前記並行平面板の厚さが1.0mm〜0.
25mmの範囲にあることを特徴とする請求項1記載の
半導体レーザ光源。
2. The parallel flat plate has a thickness of 1.0 mm to 0.
The semiconductor laser light source according to claim 1, wherein the semiconductor laser light source is in the range of 25 mm.
JP3234422A 1991-09-13 1991-09-13 Semiconductor laser light source Expired - Lifetime JPH0722219B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3234422A JPH0722219B2 (en) 1991-09-13 1991-09-13 Semiconductor laser light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3234422A JPH0722219B2 (en) 1991-09-13 1991-09-13 Semiconductor laser light source

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP61213950A Division JPS6290990A (en) 1986-09-12 1986-09-12 Semiconductor laser

Publications (2)

Publication Number Publication Date
JPH04363084A JPH04363084A (en) 1992-12-15
JPH0722219B2 true JPH0722219B2 (en) 1995-03-08

Family

ID=16970775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3234422A Expired - Lifetime JPH0722219B2 (en) 1991-09-13 1991-09-13 Semiconductor laser light source

Country Status (1)

Country Link
JP (1) JPH0722219B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5777961A (en) * 1994-06-27 1998-07-07 Nec Corporation Astigmatic difference correcting method for optical head and apparatus therefor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6290990A (en) * 1986-09-12 1987-04-25 Hitachi Ltd Semiconductor laser

Also Published As

Publication number Publication date
JPH04363084A (en) 1992-12-15

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