JPH0721107Y2 - リニアモータ - Google Patents
リニアモータInfo
- Publication number
- JPH0721107Y2 JPH0721107Y2 JP1988064059U JP6405988U JPH0721107Y2 JP H0721107 Y2 JPH0721107 Y2 JP H0721107Y2 JP 1988064059 U JP1988064059 U JP 1988064059U JP 6405988 U JP6405988 U JP 6405988U JP H0721107 Y2 JPH0721107 Y2 JP H0721107Y2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- linear motor
- magnet
- thrust
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988064059U JPH0721107Y2 (ja) | 1988-05-17 | 1988-05-17 | リニアモータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988064059U JPH0721107Y2 (ja) | 1988-05-17 | 1988-05-17 | リニアモータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01171586U JPH01171586U (US07534539-20090519-C00280.png) | 1989-12-05 |
JPH0721107Y2 true JPH0721107Y2 (ja) | 1995-05-15 |
Family
ID=31289542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988064059U Expired - Lifetime JPH0721107Y2 (ja) | 1988-05-17 | 1988-05-17 | リニアモータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0721107Y2 (US07534539-20090519-C00280.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010154596A (ja) * | 2008-12-24 | 2010-07-08 | Nikon Corp | リニアモータ、ステージ装置及び露光装置並びにデバイスの製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5922071B2 (ja) * | 1976-07-06 | 1984-05-24 | 株式会社荏原製作所 | ポンプ吸込水槽の渦発生防止装置 |
-
1988
- 1988-05-17 JP JP1988064059U patent/JPH0721107Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01171586U (US07534539-20090519-C00280.png) | 1989-12-05 |
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