JPH0720837Y2 - イオン源 - Google Patents
イオン源Info
- Publication number
- JPH0720837Y2 JPH0720837Y2 JP1986004971U JP497186U JPH0720837Y2 JP H0720837 Y2 JPH0720837 Y2 JP H0720837Y2 JP 1986004971 U JP1986004971 U JP 1986004971U JP 497186 U JP497186 U JP 497186U JP H0720837 Y2 JPH0720837 Y2 JP H0720837Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- outside
- ion source
- mounting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 30
- 238000010884 ion-beam technique Methods 0.000 claims description 17
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 description 13
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986004971U JPH0720837Y2 (ja) | 1986-01-16 | 1986-01-16 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986004971U JPH0720837Y2 (ja) | 1986-01-16 | 1986-01-16 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62116435U JPS62116435U (enrdf_load_stackoverflow) | 1987-07-24 |
| JPH0720837Y2 true JPH0720837Y2 (ja) | 1995-05-15 |
Family
ID=30786124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986004971U Expired - Lifetime JPH0720837Y2 (ja) | 1986-01-16 | 1986-01-16 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0720837Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9318302B1 (en) * | 2015-03-31 | 2016-04-19 | Axcelis Technologies, Inc. | Integrated extraction electrode manipulator for ion source |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5947961U (ja) * | 1982-09-22 | 1984-03-30 | 株式会社明石製作所 | 電子銃 |
-
1986
- 1986-01-16 JP JP1986004971U patent/JPH0720837Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62116435U (enrdf_load_stackoverflow) | 1987-07-24 |
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