JPH0719170Y2 - 半導体放射線検出器 - Google Patents

半導体放射線検出器

Info

Publication number
JPH0719170Y2
JPH0719170Y2 JP1988140879U JP14087988U JPH0719170Y2 JP H0719170 Y2 JPH0719170 Y2 JP H0719170Y2 JP 1988140879 U JP1988140879 U JP 1988140879U JP 14087988 U JP14087988 U JP 14087988U JP H0719170 Y2 JPH0719170 Y2 JP H0719170Y2
Authority
JP
Japan
Prior art keywords
film
radiation
vapor deposition
semiconductor substrate
gold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988140879U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0262746U (enExample
Inventor
敏行 松中
信之 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Aloka Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aloka Co Ltd filed Critical Aloka Co Ltd
Priority to JP1988140879U priority Critical patent/JPH0719170Y2/ja
Publication of JPH0262746U publication Critical patent/JPH0262746U/ja
Application granted granted Critical
Publication of JPH0719170Y2 publication Critical patent/JPH0719170Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988140879U 1988-10-28 1988-10-28 半導体放射線検出器 Expired - Lifetime JPH0719170Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988140879U JPH0719170Y2 (ja) 1988-10-28 1988-10-28 半導体放射線検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988140879U JPH0719170Y2 (ja) 1988-10-28 1988-10-28 半導体放射線検出器

Publications (2)

Publication Number Publication Date
JPH0262746U JPH0262746U (enExample) 1990-05-10
JPH0719170Y2 true JPH0719170Y2 (ja) 1995-05-01

Family

ID=31405451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988140879U Expired - Lifetime JPH0719170Y2 (ja) 1988-10-28 1988-10-28 半導体放射線検出器

Country Status (1)

Country Link
JP (1) JPH0719170Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52131485A (en) * 1976-04-28 1977-11-04 Nippon Toki Kk Element for measuring quantity of radiation
JPS5813033B2 (ja) * 1977-01-20 1983-03-11 株式会社東芝 半導体放射線検出器

Also Published As

Publication number Publication date
JPH0262746U (enExample) 1990-05-10

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