JPH07187775A - Piezoelectric porcelain composition - Google Patents
Piezoelectric porcelain compositionInfo
- Publication number
- JPH07187775A JPH07187775A JP5330791A JP33079193A JPH07187775A JP H07187775 A JPH07187775 A JP H07187775A JP 5330791 A JP5330791 A JP 5330791A JP 33079193 A JP33079193 A JP 33079193A JP H07187775 A JPH07187775 A JP H07187775A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- heat resistance
- electromechanical coupling
- porcelain composition
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 31
- 229910052573 porcelain Inorganic materials 0.000 title abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 6
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 5
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 5
- 239000002131 composite material Substances 0.000 claims abstract description 4
- 150000001875 compounds Chemical class 0.000 claims abstract description 4
- 229910052745 lead Inorganic materials 0.000 claims abstract description 3
- 239000002184 metal Substances 0.000 claims abstract description 3
- 239000000919 ceramic Substances 0.000 claims description 19
- 230000008878 coupling Effects 0.000 abstract description 18
- 238000010168 coupling process Methods 0.000 abstract description 18
- 238000005859 coupling reaction Methods 0.000 abstract description 18
- 229910052719 titanium Inorganic materials 0.000 abstract description 5
- 229910052742 iron Inorganic materials 0.000 abstract description 4
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 7
- 230000007423 decrease Effects 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- -1 Nb 2 O 5 or MnO 2 Chemical class 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧電磁器組成物に係わ
り、例えばセラミックフィルタ，セラミックレゾネー
タ，超音波応用振動子，圧電ブザー，圧電点火ユニッ
ト，超音波モータ，圧電ファン，圧電センサ，圧電アク
チュエータ等、特に表面弾性波（Ｓｕｒｆａｃｅ Ａｃ
ｏｕｓｔｉｃ Ｗａｖｅ）フィルタに最適な圧電磁器組
成物に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric ceramic composition, for example, a ceramic filter, a ceramic resonator, an ultrasonic transducer, a piezoelectric buzzer, a piezoelectric ignition unit, an ultrasonic motor, a piezoelectric fan, a piezoelectric sensor, a piezoelectric actuator. Etc., especially surface acoustic waves (Surface Ac
The present invention relates to a piezoelectric porcelain composition which is most suitable for an acoustic wave filter.
【０００２】[0002]
【従来技術】従来から、圧電磁器組成物を利用した製品
としては、例えばセラミックフィルタ，セラミックレゾ
ネータ，超音波応用振動子，圧電ブザー，圧電点火ユニ
ット，超音波モータ，圧電ファン，圧電センサ，圧電ア
クチュエータ等がある。2. Description of the Related Art Conventionally, products using a piezoelectric ceramic composition include, for example, ceramic filters, ceramic resonators, ultrasonic applied vibrators, piezoelectric buzzers, piezoelectric ignition units, ultrasonic motors, piezoelectric fans, piezoelectric sensors, piezoelectric actuators. Etc.
【０００３】ここで、セラミックフィルタ，セラミック
レゾネータ等の素子としては、ＰｂＺｒＯ3 −ＰｂＴｉ
Ｏ3 を主成分とした磁器組成物が利用されており、これ
によりＮｂ2 Ｏ5 やＭｎＯ2 等の金属酸化物、Ｐｂ（Ｎ
ｂ2/3 Ｍｇ1/3 ）Ｏ3 やＰｂ（Ｎｂ2/3 Ｃｏ1/3 ）Ｏ3
等の複合ペロブスカイト酸化物を添加したり置換するこ
とにより圧電特性の向上が図られている。Here, as elements such as ceramic filters and ceramic resonators, PbZrO 3 -PbTi is used.
A porcelain composition containing O 3 as a main component has been used, whereby a metal oxide such as Nb 2 O 5 or MnO 2 , Pb (N
b 2/3 Mg 1/3 ) O 3 and Pb (Nb 2/3 Co 1/3 ) O 3
The piezoelectric characteristics have been improved by adding or substituting a composite perovskite oxide such as.
【０００４】そして、機械的品質係数Ｑｍ、電気機械結
合係数Ｋｐが大きく誘電率が小さく、最適焼成温度が広
い性質を有する圧電磁器組成物としては、Ｐｂ（Ｎｂ
2/3 Ｍｎ1/3 ）Ｏ3 −ＰｂＺｒＯ3 −ＰｂＴｉＯ3 の三
成分固溶体からなる圧電磁気組成物が開示されている
（特公昭４６−１６６３２号公報参照）。また、電気機
械結合係数Ｋｐが大きく圧電性に優れた材料として、例
えば、Ｐｂ（Ｍｎ2/3 Ｗ1/ 3 ）Ｏ3 −ＰｂＺｒＯ3 −Ｐ
ｂＴｉＯ3 系の磁器組成物が知られている。A piezoelectric ceramic composition having a large mechanical quality factor Qm, a large electromechanical coupling factor Kp, a small dielectric constant, and a wide optimum firing temperature is Pb (Nb).
A piezoelectric magnetic composition comprising a ternary solid solution of 2/3 Mn 1/3 ) O 3 -PbZrO 3 -PbTiO 3 is disclosed (see Japanese Patent Publication No. 46-16632). Further, as a material electromechanical coupling factor Kp is excellent in large piezoelectric property, for example, Pb (Mn 2/3 W 1/ 3) O 3 -PbZrO 3 -P
A bTiO 3 -based porcelain composition is known.
【０００５】一方、近年では、数十メガヘルツ帯のＳＡ
Ｗフィルター材料として圧電セラミックスの表面弾性波
を利用した材料が使用されており、このような圧電セラ
ミックスとして、Ｐｒ6 Ｏ11を含有したＰｂ（Ｎｂ2/3
Ｍｎ1/3 ）Ｏ3 −ＰｂＺｒＯ3 −ＰｂＴｉＯ3 が知られ
ている（特公昭５６ー５０４３４号公報）。ＳＡＷフィ
ルター材料の圧電セラミックスとしては、比較的高い周
波数領域で使用されることから誘電率が低く、電気機械
結合係数が高く、特性の温度変化率が小さい材料が望ま
れている。従って従来のＰｂＺｒＯ3 −ＰｂＴｉＯ3 組
成系の組成相境界（ＭＰＢ）近傍の組成は利用されてお
らず、菱面体晶が主結晶相となる組成領域の材料が利用
されている。On the other hand, in recent years, SA of several tens of megahertz band
As a W filter material, a material utilizing surface acoustic waves of piezoelectric ceramics is used. As such a piezoelectric ceramic, Pb (Nb 2/3) containing Pr 6 O 11 is used.
Mn 1/3 ) O 3 —PbZrO 3 —PbTiO 3 is known (Japanese Patent Publication No. 56-50434). As a piezoelectric ceramic of a SAW filter material, a material having a low dielectric constant, a high electromechanical coupling coefficient, and a small temperature change rate of characteristics is desired because it is used in a relatively high frequency range. Therefore, the composition in the vicinity of the composition phase boundary (MPB) of the conventional PbZrO 3 —PbTiO 3 composition system is not used, but the material in the composition region in which rhombohedral crystals are the main crystal phase is used.
【０００６】また、ＳＡＷフィルタ用圧電部品において
も基板等の表面に実装可能なように種々の条件に対応で
きることが要求されており、このような圧電部品におい
ては、部品を基板にリフロー半田付けする際、基板に実
装された部品が３００℃程度の高温に曝されるために部
品が組み込まれる圧電素子にも耐熱性が要求されてい
る。In addition, piezoelectric components for SAW filters are also required to be able to meet various conditions so that they can be mounted on the surface of a substrate or the like. In such piezoelectric components, the components are reflow soldered to the substrate. At this time, since the component mounted on the substrate is exposed to a high temperature of about 300 ° C., the piezoelectric element in which the component is incorporated is also required to have heat resistance.
【０００７】[0007]
【発明が解決しようとする問題点】しかしながら、従来
の例えば上記したＰｂ（Ｎｂ2/3 Ｍｎ1/3 ）Ｏ3 −Ｐｂ
ＺｒＯ3 −ＰｂＴｉＯ3 系の磁器組成物は、耐熱性が低
くリフロー半田付け前後の圧電特性や共振周波数の変化
が大きく、実用上の問題となっていた。However, the conventional Pb (Nb 2/3 Mn 1/3 ) O 3 -Pb described above, for example, is used.
The ZrO 3 —PbTiO 3 based porcelain composition has low heat resistance and has large changes in piezoelectric characteristics and resonance frequency before and after reflow soldering, which has been a practical problem.
【０００８】本発明の圧電磁器組成物は、電気機械結合
係数Ｋｐならびに機械的品質係数Ｑｍが大きく、高周波
用途に適した比誘電率の小さい材料であり、かつ耐熱性
に優れた圧電磁器組成物を提供することを目的とする。The piezoelectric ceramic composition of the present invention is a material having a large electromechanical coupling coefficient Kp and a mechanical quality coefficient Qm, a small relative dielectric constant suitable for high frequency applications, and excellent heat resistance. The purpose is to provide.
【０００９】[0009]
【問題点を解決するための手段】本発明者等は、Ｐｂ、
Ｚｒ、Ｔｉ、Ｎｂ、Ｍｎ、Ｆｅを含む複合ペロブスカイ
ト型化合物であって、一定の組成を有するものは、高い
電気機械結合係数と高い機械的品質係数であり、比誘電
率が小さく、かつ、耐熱性に優れた圧電磁器組成物を得
ることができることを知見し、本発明に至った。The inventors of the present invention have proposed that Pb,
A complex perovskite type compound containing Zr, Ti, Nb, Mn, and Fe, which has a constant composition, has a high electromechanical coupling coefficient and a high mechanical quality coefficient, a small relative dielectric constant, and a high heat resistance. The inventors have found that a piezoelectric ceramic composition having excellent properties can be obtained, and completed the present invention.
【００１０】即ち、本発明の圧電磁器組成物は、金属成
分として少なくともＰｂ、Ｚｒ、Ｔｉ、Ｎｂ、Ｍｎ、Ｆ
ｅを含む複合ペロブスカイト型化合物であって、これら
の金属元素のモル比による組成式をＰｂa 〔（Ｎｂb Ｍ
ｎc Ｆｅd ）e Ｔｉf Ｚｒ1- e-f 〕Ｏ3 と表わした時、
ａ，ｂ，ｃ，ｄ，ｅ，ｆが、０．９５≦ａ≦１．０５、
０．５０≦ｂ≦０．６７、０．１０≦ｃ≦０．３５、
０．０５≦ｄ≦０．３５、０．０４≦ｅ≦０．１２、
０．２０≦ｆ≦０．３５、ｂ＋ｃ＋ｄ＝１．００を満足
するものである。That is, the piezoelectric ceramic composition of the present invention contains at least Pb, Zr, Ti, Nb, Mn and F as metal components.
It is a composite perovskite type compound containing e, and the composition formula based on the molar ratio of these metal elements is Pb a [(Nb b M
n c Fe d ) e Ti f Zr 1- ef ] O 3
a, b, c, d, e, f are 0.95 ≦ a ≦ 1.05,
0.50 ≦ b ≦ 0.67, 0.10 ≦ c ≦ 0.35,
0.05 ≦ d ≦ 0.35, 0.04 ≦ e ≦ 0.12,
It satisfies 0.20 ≦ f ≦ 0.35 and b + c + d = 1.00.
【００１１】ここで、ａ，ｂ，ｃ，ｄ，ｅ，ｆを上記の
範囲に設定した理由について説明する。Ｐｂ量のａを
０．９５≦ａ≦１．０５としたのは、ａが０．９５未満
の場合や１．０５よりも大きい場合には電気機械結合係
数Ｋｐが低下するからである。Here, the reason why a, b, c, d, e and f are set in the above range will be described. The Pb amount a was set to 0.95 ≦ a ≦ 1.05 because the electromechanical coupling coefficient Kp decreases when a is less than 0.95 or greater than 1.05.
【００１２】また、Ｎｂ量のｂを０．５０≦ｂ≦０．６
７としたのは、ｂが０．５０未満では電気機械結合係数
Ｋｐが低下し、ｂが０．６７よりも大きい場合には耐熱
性が低下するからである。Further, the Nb amount b is 0.50 ≦ b ≦ 0.6
The reason for setting 7 is that the electromechanical coupling coefficient Kp decreases when b is less than 0.50, and the heat resistance decreases when b is greater than 0.67.
【００１３】さらに、Ｍｎ量のｃを０．１０≦ｃ≦０．
３５としたのは、ｃが０．１０未満の場合には耐熱性が
低下し、０．３５よりも大きい場合には電気機械結合係
数Ｋｐが低下し、耐熱性が低下するからである。Further, the Mn content c is 0.10≤c≤0.
The reason for setting 35 is that when c is less than 0.10, the heat resistance is lowered, and when c is more than 0.35, the electromechanical coupling coefficient Kp is lowered and the heat resistance is lowered.
【００１４】Ｆｅ量のｄを０．０５≦ｄ≦０．３５とし
たのは、ｄが０．０５未満ではキュリー温度が低下する
ため耐熱性が低下し、０．３５よりも大きいと機械的品
質係数Ｑｍが低下するからである。（Ｎｂb Ｍｎc Ｆｅ
d ）のＺｒへの置換量ｅを０．０４≦ｅ≦０．１２とし
たのは、ｅが０．０４未満では耐熱性の効果が認められ
ず電気機械結合係数Ｋｐが低く、また０．１２よりも大
きいと電気機械結合係数Ｋｐが急激に低下するからであ
る。The d content of Fe is set to 0.05≤d≤0.35 because the Curie temperature is lowered when d is less than 0.05 and the heat resistance is lowered, and when d is greater than 0.35, the mechanical strength is reduced. This is because the quality factor Qm decreases. (Nb b Mn c Fe
The amount e of substitution of d ) with Zr is set to 0.04 ≦ e ≦ 0.12, when e is less than 0.04, the effect of heat resistance is not recognized and the electromechanical coupling coefficient Kp is low. This is because if it is larger than 12, the electromechanical coupling coefficient Kp drops sharply.
【００１５】ＴｉのＺｒへの置換量ｆを０．２０≦ｆ≦
０．３５としたのは、ｆが０．２０未満の場合は電気機
械結合定数Ｋｐが低下し耐熱性が低下し、０．３５より
も大きい場合には比誘電率が高くなり過ぎるためであ
る。また、本発明では、共振周波数の温度係数を改善す
るために、Ｐｂの一部をBa、Ca、Sr、Pr、Ndで置換して
もよい。The substitution amount f of Ti with Zr is 0.20 ≦ f ≦
The reason for setting 0.35 is that when f is less than 0.20, the electromechanical coupling constant Kp is lowered and heat resistance is lowered, and when f is greater than 0.35, the relative dielectric constant becomes too high. . In the present invention, part of Pb may be replaced with Ba, Ca, Sr, Pr and Nd in order to improve the temperature coefficient of the resonance frequency.
【００１６】そして、本発明の圧電磁器は、例えば、原
料としてＰｂＯ、ＺｒＯ2 、ＴｉＯ2 、Ｎｂ2 Ｏ5 、Ｍ
ｎ2 Ｏ3 およびＦｅ2 Ｏ3 の各原料粉末を所定量秤量
し、ボールミル等で１０〜２４時間湿式混合し、次い
で、この混合物を脱水、乾燥した後、５００〜１０００
℃で１〜３時間仮焼し、当該仮焼物を再びボールミル等
で粉砕する。その後、この粉砕物に有機バインダーを混
合し、造粒後、所定圧力で成形して成形体を作製し、こ
れらを大気中において１２００〜１３５０℃で０．５〜
４時間焼成することにより得られる。In the piezoelectric ceramic of the present invention, for example, PbO, ZrO 2 , TiO 2 , Nb 2 O 5 and M are used as raw materials.
A predetermined amount of each raw material powder of n 2 O 3 and Fe 2 O 3 was weighed and wet-mixed with a ball mill or the like for 10 to 24 hours, and then the mixture was dehydrated and dried, and then 500-1000.
It is calcined at 1 ° C for 1 to 3 hours, and the calcined product is pulverized again by a ball mill or the like. Then, an organic binder is mixed with this pulverized product, and after granulation, it is molded at a predetermined pressure to prepare a molded body, and these are molded in the atmosphere at 1200 to 1350 ° C. for 0.5 to
It is obtained by firing for 4 hours.
【００１７】[0017]
【作用】本発明の圧電磁器組成物では、ＰｂＺｒＯ3 −
ＰｂＴｉＯ3 系の磁器組成物のＺｒおよびＴｉの一部を
Ｎｂ，Ｍｎ，Ｆｅで置換することにより、高い電気機械
結合係数、高い機械的品質係数Ｑｍ、低い誘電率を示す
とともに、耐熱性を向上することが可能となる。In the piezoelectric ceramic composition of the present invention, PbZrO 3
By substituting Nb, Mn, and Fe for part of Zr and Ti of the PbTiO 3 -based porcelain composition, a high electromechanical coupling coefficient, a high mechanical quality coefficient Qm, and a low dielectric constant are shown, and heat resistance is improved. It becomes possible to do.
【００１８】[0018]
【実施例】以下、本発明を次の実施例で説明する。原料
粉末としてＰｂＯ、ＺｒＯ2 、ＴｉＯ2 、Ｎｂ2 Ｏ5 、
ＭｎＯ3 およびＦｅ2 Ｏ3 の各原料粉末を表１に示すよ
うに所定量秤量し、ボールミルで１２時間湿式混合し、
次いで、この混合物を脱水、乾燥した後、９５０℃で３
時間仮焼し、当該仮焼物を再びボールミルで粉砕する。The present invention will be described in the following examples. As raw material powder, PbO, ZrO 2 , TiO 2 , Nb 2 O 5 ,
A predetermined amount of each raw material powder of MnO 3 and Fe 2 O 3 was weighed as shown in Table 1, and wet mixed in a ball mill for 12 hours,
Then, after dehydrating and drying the mixture, the mixture was dried at 950 ° C. for 3 hours.
It is calcined for a period of time, and the calcined product is pulverized again with a ball mill.
【００１９】その後、この粉砕物に有機バインダー（Ｐ
ＶＡ）を混合し、造粒した。得られた粉末を１．５ｔ／
ｃｍ2 の圧力で直径２３ｍｍ、厚さ２ｍｍの寸法からな
る円板にプレス成形した。更に、これらの成形体をＭｇ
Ｏ等からなる容器内に密閉し、大気中１３００℃で２時
間の条件で焼成した。Then, an organic binder (P
VA) was mixed and granulated. 1.5 t / of the obtained powder
A disk having a diameter of 23 mm and a thickness of 2 mm was press-molded with a pressure of cm 2 . Furthermore, these molded bodies are
The container was sealed in a container made of O or the like and baked in the atmosphere at 1300 ° C. for 2 hours.
【００２０】得られた焼結体を研磨して厚み０．５ｍｍ
の円板を形成した。この円板の両面にＡｇペーストを焼
付けることにより電極を形成し、８０℃のシリコンオイ
ル中で３ｋＶ／ｍｍの直流電圧を３０分間印加して分極
処理した後、電気機械結合係数，耐熱性を評価した。ま
た、比誘電率εｒをインピーダンスメータで求められた
容量から計算して求めた。電気機械結合係数Ｋｐはイン
ピーダンスメータで測定した共振周波数と反共振周波数
の値から計算により求めた。耐熱性は、２６０℃をピー
クとするリフロー炉に３回連続して通過させる試験を行
なった際の試験前の電気機械結合係数Ｋｐ1 と試験後の
Ｋｐ2 の値から、△Ｋｐ= （Ｋｐ2-Ｋｐ1 ）／Ｋｐ1 ×
１００の式を用いて算出した変化率△Ｋｐで評価した。
また、機械的品質係数Ｑｍをインピーダンスメータで測
定した共振周波数，反共振周波数，共振抵抗，容量から
計算により求めた。結果を表１に示す。The obtained sintered body is polished to have a thickness of 0.5 mm.
Disk was formed. Electrodes were formed by baking Ag paste on both sides of this disk, and after applying a DC voltage of 3 kV / mm for 30 minutes in silicon oil at 80 ° C for polarization treatment, the electromechanical coupling coefficient and heat resistance were improved. evaluated. Further, the relative permittivity εr was calculated and calculated from the capacitance obtained by the impedance meter. The electromechanical coupling coefficient Kp was calculated from the values of the resonance frequency and the antiresonance frequency measured with an impedance meter. The heat resistance was calculated from the values of the electromechanical coupling coefficient Kp 1 before the test and the value of Kp 2 after the test when the test was conducted through a reflow furnace having a peak of 260 ° C. three times in succession. 2- Kp 1 ) / Kp 1 ×
The rate of change ΔKp calculated using the formula of 100 was evaluated.
The mechanical quality factor Qm was calculated from the resonance frequency, anti-resonance frequency, resonance resistance, and capacitance measured with an impedance meter. The results are shown in Table 1.
【００２１】[0021]
【表１】 [Table 1]
【００２２】この表１から、本発明の磁器組成物は電気
機械結合係数Ｋｐが１５％以上と大きく、機械的品質係
数Ｑｍが１３００以上と高く、また、比誘電率は３５０
以下と低く、また、耐熱試験によるΔＫｐの変化が±１
％以下と小さく、耐熱性に優れていることが判る。From Table 1, the porcelain composition of the present invention has a large electromechanical coupling coefficient Kp of 15% or more, a high mechanical quality factor Qm of 1300 or more, and a relative dielectric constant of 350.
Low as below, and the change of ΔKp by heat resistance test is ± 1
It can be seen that the heat resistance is excellent because it is as small as 0.1% or less.
【００２３】[0023]
【発明の効果】本発明によれば、ＰｂＺｒＯ3 −ＰｂＴ
ｉＯ3 系の磁器組成物のＺｒとＴｉの一部をＮｂ，Ｍ
ｎ，Ｆｅで置換することにより、高い電気機械結合係数
と機械的品質係数及び低い誘電率を示し、耐熱性を向上
し、特に表面実装用ＳＡＷフィルター素子として最適な
圧電磁器組成物を得ることができる。According to the present invention, PbZrO 3 -PbT
Part of Zr and Ti of the io 3 -based porcelain composition is Nb, M
By substituting with n and Fe, a high electromechanical coupling coefficient, a mechanical quality coefficient, and a low dielectric constant are exhibited, heat resistance is improved, and a piezoelectric ceramic composition most suitable as a SAW filter element for surface mounting can be obtained. it can.
Claims (1)
ｉ、Ｎｂ、Ｍｎ、Ｆｅを含む複合ペロブスカイト型化合
物であって、これらの金属元素のモル比による組成式を
Ｐｂa 〔（Ｎｂb Ｍｎc Ｆｅd ）e Ｔｉf Ｚｒ1-e-f 〕
Ｏ3 と表わした時、ａ，ｂ，ｃ，ｄ，ｅ，ｆが ０．９５≦ａ≦１．０５ ０．５０≦ｂ≦０．６７ ０．１０≦ｃ≦０．３５ ０．０５≦ｄ≦０．３５ ０．０４≦ｅ≦０．１２ ０．２０≦ｆ≦０．３５ ｂ＋ｃ＋ｄ＝１．００ を満足することを特徴とする圧電磁器組成物。1. A metal component containing at least Pb, Zr, and T.
i, Nb, Mn, a composite perovskite compound including Fe, the composition formula by molar ratio of the metal elements Pb a [(Nb b Mn c Fe d) e Ti f Zr 1-ef ]
When expressed as O 3 , a, b, c, d, e, f are 0.95 ≦ a ≦ 1.05 0.50 ≦ b ≦ 0.67 0.10 ≦ c ≦ 0.35 0.05 ≦ A piezoelectric ceramic composition characterized by satisfying d ≦ 0.35 0.04 ≦ e ≦ 0.12 0.20 ≦ f ≦ 0.35 b + c + d = 1.00.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5330791A JPH07187775A (en) | 1993-12-27 | 1993-12-27 | Piezoelectric porcelain composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5330791A JPH07187775A (en) | 1993-12-27 | 1993-12-27 | Piezoelectric porcelain composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07187775A true JPH07187775A (en) | 1995-07-25 |
Family
ID=18236590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5330791A Pending JPH07187775A (en) | 1993-12-27 | 1993-12-27 | Piezoelectric porcelain composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07187775A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2813075A1 (en) * | 2000-08-18 | 2002-02-22 | Murata Manufacturing Co | Piezoelectric ceramic material for forming a sintered compact used in the manufacture of piezoelectric devices, such as wave filters and oscillators, comprises a solid solution of a specified crystalline tetragonal system |
-
1993
- 1993-12-27 JP JP5330791A patent/JPH07187775A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2813075A1 (en) * | 2000-08-18 | 2002-02-22 | Murata Manufacturing Co | Piezoelectric ceramic material for forming a sintered compact used in the manufacture of piezoelectric devices, such as wave filters and oscillators, comprises a solid solution of a specified crystalline tetragonal system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100282598B1 (en) | Piezoelectric Ceramic Composition | |
| JP3654408B2 (en) | Piezoelectric ceramic composition | |
| KR20010050207A (en) | Piezoelectric Ceramic Composition and Ceramic Piezoelectric Device Employing the Composition | |
| JP4020454B2 (en) | Method for manufacturing piezoelectric ceramics | |
| JPH07187775A (en) | Piezoelectric porcelain composition | |
| JP3228648B2 (en) | Piezoelectric ceramic composition | |
| JP3164721B2 (en) | Piezoelectric ceramic composition | |
| JPH0891927A (en) | Piezoelectric ceramic composition | |
| JP3215013B2 (en) | Piezoelectric ceramic composition | |
| JPS6358782B2 (en) | ||
| JP3981221B2 (en) | Piezoelectric ceramic | |
| JP3266483B2 (en) | Piezoelectric ceramic composition | |
| JP3404212B2 (en) | Piezoelectric ceramic composition | |
| JP3761970B2 (en) | Piezoelectric ceramic composition | |
| JPH09124367A (en) | Piezoelectric ceramic composition | |
| JPH07172913A (en) | Piezoelectric ceramic composition | |
| JP2737451B2 (en) | Piezoelectric material | |
| JP3318480B2 (en) | Piezoelectric ceramic composition | |
| JPH10338572A (en) | Piezoelectric porcelain composition | |
| JP2892268B2 (en) | Piezoelectric ceramic composition | |
| JPH09142931A (en) | Piezoelectric ceramic composition | |
| JPH08231270A (en) | Piezoelectric porcelain composition | |
| JP3618040B2 (en) | Piezoelectric ceramic composition | |
| JP2910339B2 (en) | Piezoelectric ceramic composition | |
| JPH1017364A (en) | Piezoelectric ceramic composition |