JPH07187342A - Abrasion resistant rotary member - Google Patents

Abrasion resistant rotary member

Info

Publication number
JPH07187342A
JPH07187342A JP32089394A JP32089394A JPH07187342A JP H07187342 A JPH07187342 A JP H07187342A JP 32089394 A JP32089394 A JP 32089394A JP 32089394 A JP32089394 A JP 32089394A JP H07187342 A JPH07187342 A JP H07187342A
Authority
JP
Japan
Prior art keywords
lagging material
lagging
embedded
conveyor belt
lining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32089394A
Other languages
Japanese (ja)
Other versions
JP2583748B2 (en
Inventor
Masaichi Kawamoto
政市 川本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAWAMOTO BRISTLE REFINING
KAWAMOTO KOGYO KK
Original Assignee
KAWAMOTO BRISTLE REFINING
KAWAMOTO KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAWAMOTO BRISTLE REFINING, KAWAMOTO KOGYO KK filed Critical KAWAMOTO BRISTLE REFINING
Priority to JP6320893A priority Critical patent/JP2583748B2/en
Publication of JPH07187342A publication Critical patent/JPH07187342A/en
Application granted granted Critical
Publication of JP2583748B2 publication Critical patent/JP2583748B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Belt Conveyors (AREA)

Abstract

PURPOSE:To improve a function of a rotary member such as a conveyor belt, and lengthen the service life. CONSTITUTION:An upper part L-3 is formed in a narrow plate shape having constant breadth, and a vertical plate-shaped embedding part L-1 is integrally suspended from the under part, and an engaging piece L-4 is integrally formed in an overhang shape on a side surface of the embedding part L-1, and an abrasion resistant lagging material L where a recessed part L-2 is formed in the rotational direction is embedded in a lining material 7 covering a rotary base material 6 to rotate in the fixed direction, and the lengthwise direction of the lagging material L becomes almost perpendicular to the rotational direction of the rotary base material 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、耐摩耗性の回動部材に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wear-resistant rotating member.

【0002】[0002]

【従来の技術】従来、回動部材としてのコンベアベルト
及び駆動プーリの表面等には、セラミック等の超硬質耐
摩耗性素材からなるラギング材が貼設あるいは埋設され
ている。
2. Description of the Related Art Conventionally, a lagging material made of an ultra-hard wear-resistant material such as ceramic is attached or embedded on the surfaces of a conveyor belt and a driving pulley as rotating members.

【0003】そして、ラギング材によってその表面の摩
耗を防止すべく構成している。
The lagging material is used to prevent the surface from being worn.

【0004】かかるラギング材は、略方形板状に形成さ
れており、その表面がコンベアベルトの表面に露出する
状態にしながらその裏面を同ベルト内に埋設している。
The lagging material is formed in a substantially rectangular plate shape, and the back surface of the lagging material is embedded in the belt while the surface thereof is exposed on the surface of the conveyor belt.

【0005】[0005]

【発明が解決しようとする課題】ところが、上記のラギ
ング材は、方形板状にしている為に、コンベアベルトの
ライニング材との連結が強固になされず、鉱石等の搬送
時に、ラギング材が鉱石等の衝撃力を直接受けて、容易
に剥離してしまうという欠点を有していた。
However, since the above-mentioned lagging material is in the form of a rectangular plate, the connection between the conveyor belt and the lining material does not become strong, and the lagging material is ore when the ore is transported. It has a drawback that it is easily peeled off by directly receiving an impact force such as.

【0006】従って、ラギング材が剥離したライニング
材に鉱石等が接触すると、そのライニング材の摩耗が激
しくなり、コンベアベルトの寿命を短くしていた。
Therefore, when the ore or the like comes into contact with the lining material from which the lagging material has been peeled off, the lining material is abraded, which shortens the life of the conveyor belt.

【0007】[0007]

【課題を解決するための手段】そこで、本発明では、上
部を一定幅員の細幅の平板状とし、その下部に縦板状の
埋設部を一体的に垂設し、同埋設部の側面に張出し状に
係合片を一体的に形成して、回動方向に凹部を形成した
耐摩耗用のラギング材を、一定方向に回動する回動基材
に被覆したライニング材中に埋設すると共に、同ラギン
グ材の長手方向が回動基材の回動方向に対して略直角と
なるようにしたことを特徴とする耐摩耗性の回動部材を
提供せんとするものである。
Therefore, in the present invention, the upper portion is formed into a flat plate having a constant width and a narrow width, and a vertical plate-shaped embedded portion is integrally hung on the lower portion thereof, and the embedded portion is provided on the side surface of the embedded portion. A wear-resistant lagging material, which is integrally formed in an overhanging shape and has a recess in the rotation direction, is embedded in a lining material coated on a rotation base material that rotates in a fixed direction. The present invention provides a wear-resistant rotating member, characterized in that the longitudinal direction of the lagging member is substantially perpendicular to the rotating direction of the rotating base material.

【0008】[0008]

【実施例】本発明の実施例を図面にもとづき詳説すれ
ば、図1の側面図において、Aは発明に係る耐摩耗性の
回動部材としてのベルトコンベアを示し、左端部に軸支
した駆動プーリ1と、右端部に軸支した遊動プーリ2と
の間にコンベアベルト3を回動自在に懸架している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to the drawings, an embodiment of the present invention will be described. In the side view of FIG. 1, reference character A denotes a belt conveyor as a wear-resistant rotating member according to the present invention, which is rotatably supported at its left end. A conveyor belt 3 is rotatably suspended between a pulley 1 and a floating pulley 2 pivotally supported at the right end.

【0009】また、かかるベルトコンベアAの一側部に
は、ホッパー4を配設し、同ホッパー4からコンベアベ
ルト3の上面3-1 に土砂、鉱石等の被搬送物5を載置
し、駆動プーリ1によってコンベアベルト3を回動させ
ることにより、被搬送物5を他側部に搬送するようにし
ている。
A hopper 4 is disposed on one side of the belt conveyor A, and an object 5 to be conveyed such as earth and sand or ore is placed on the upper surface 3-1 of the conveyor belt 3 from the hopper 4. By rotating the conveyor belt 3 by the drive pulley 1, the transported object 5 is transported to the other side portion.

【0010】かかる構造において、コンベアベルト3の
上面3-1 及びホッパー4の内側面4-1 は、被搬送物5に
より、また、駆動プーリ1の外周面は、コンベアベルト
3の内周面より耐摩耗作用を受けており、コンベアベル
ト3の上面3-1 、ホッパー4の内側面4-1 及び駆動プー
リ1の外周面1-1 の基材6の表面を接着性を有するライ
ニング材7にて被覆すると共に、同ライニング材7中
に、ラギング材Lの上部L-3 を露出状態で埋設してい
る。
In such a structure, the upper surface 3-1 of the conveyor belt 3 and the inner side surface 4-1 of the hopper 4 are the objects to be conveyed 5, and the outer peripheral surface of the drive pulley 1 is the inner peripheral surface of the conveyor belt 3. Being subjected to abrasion resistance, the surface of the base material 6 such as the upper surface 3-1 of the conveyor belt 3, the inner side surface 4-1 of the hopper 4 and the outer peripheral surface 1-1 of the drive pulley 1 is made into an adhesive lining material 7. And the upper part L-3 of the lagging material L is embedded in the lining material 7 in an exposed state.

【0011】すなわち、かかるラギング材Lは、セラミ
ック等の超硬質耐摩耗性素材により長尺の棒状に形成さ
れており、その断面形状を、矩形の左右側面中途部に凹
部L-2 を設けた形状に形成している。
That is, the lagging material L is made of an ultra-hard wear-resistant material such as ceramics and is formed into a long rod shape. Its cross-sectional shape is a recess L-2 formed in the middle of the right and left sides of the rectangle. It is formed in a shape.

【0012】そして、ラギング材Lの上部L-3 がライニ
ング材7の表面Sに露出して、同表面Sを摩耗から保護
しており、同ライニング材Lの下部に設けた埋設部L-1
をライニング材7中に溶着している。
The upper portion L-3 of the lagging material L is exposed on the surface S of the lining material 7 to protect the surface S from abrasion, and the buried portion L-1 provided at the lower portion of the lining material L.
Are welded to the lining material 7.

【0013】本実施例では、ラギング材Lは、図2に示
すように、上部L-3 を一定幅員の細幅の平板状とし、そ
の下部に縦板状の埋設部L-1 を一体的に垂設し、同埋設
部L-1 の前後側面の下端部にそれぞれ前後方向に張出し
状に係合片L-4,L-4 を一体的に形成することによって、
回動方向に凹部L-2,L-2 が設けられるように構成してい
る。
In the present embodiment, as shown in FIG. 2, the lagging member L has an upper portion L-3 in the form of a flat plate having a narrow width and a vertical plate-like embedded portion L-1 integrally formed in the lower portion thereof. And the engaging pieces L-4 and L-4 are integrally formed at the lower ends of the front and rear side surfaces of the embedded portion L-1 in the front-rear direction.
The recesses L-2 and L-2 are provided in the rotating direction.

【0014】そして、ラギング材Lをライニング材7に
埋設した際に、埋設部L-1 の凹部L-2 に介在するライニ
ング材7がラギング材Lに係合して、ラギング材Lとラ
イニング材7との連結を強力に行うことができる。
When the lagging material L is embedded in the lining material 7, the lining material 7 interposed in the recess L-2 of the embedding portion L-1 engages with the lagging material L and the lagging material L and the lining material L are engaged. The connection with 7 can be performed strongly.

【0015】また、図3は、ラギング材Lをコンベアベ
ルト3に実施したものを示し、棒状のラギング材Lを同
ベルト3の回動方向に対して略直角となるように並設状
態に取付けており、同ラギング材Lの上部L-3 が同ベル
ト3の上面3-1 に露出して、同上面3-1 の耐摩耗性を向
上させるようにしている。
FIG. 3 shows the lagging material L applied to the conveyor belt 3, and the rod-shaped lagging material L is attached in parallel so as to be substantially perpendicular to the rotating direction of the belt 3. Therefore, the upper portion L-3 of the lagging material L is exposed on the upper surface 3-1 of the belt 3 to improve the abrasion resistance of the upper surface 3-1.

【0016】また、図4、図5及び図6は、コンベアベ
ルト3の左右側を上方に湾曲させて、被搬送物5の溢出
を防止するためのものに実施したものであり、ラギング
材の中途部に下方からスリット8を切込み、同スリット
8でラギング材Lが折れて、同ベルト3の湾曲になじむ
ようにしている。
Further, FIGS. 4, 5 and 6 are carried out for curving the left and right sides of the conveyor belt 3 upward to prevent the conveyed object 5 from overflowing. The slit 8 is cut in the middle part from below, and the lagging material L is broken at the slit 8 so as to conform to the curve of the belt 3.

【0017】また、図7は、駆動プーリ1の外周面1-1
に実施したものを示し、また、図8は、ホッパー4の内
周面4-1 に実施したものを示している。
FIG. 7 shows the outer peripheral surface 1-1 of the drive pulley 1.
FIG. 8 shows the inner peripheral surface 4-1 of the hopper 4.

【0018】なお、上記の他に、例えば、ミキサー、バ
レル研摩用ドラム、サンドポンプ排泥管、空気粉耐輸送
管等の内貼り等の摩耗防止を要する表面全体に実施する
ことも可能にしている。
In addition to the above, for example, it is also possible to implement it on the entire surface requiring wear prevention, such as inner sticking of a mixer, a barrel polishing drum, a sand pump drainage pipe, an air powder transport pipe, etc. There is.

【0019】さらに、用途によっては、かかるラギング
材Lによって耐衝撃性をも向上させることができるもの
である。
Furthermore, the impact resistance can be improved by the lagging material L depending on the application.

【0020】また、図9〜図12は、他の実施例として
のラギング材Lを示しており、以下に図面を参照しなが
ら説明する。
9 to 12 show a lagging material L as another embodiment, which will be described below with reference to the drawings.

【0021】すなわち、図9に示すラギング材Lは、埋
設部L-1 の後面の下端部に後方へ張出し状の係合片L-4
を一体的に形成することによって、回動方向に凹部L-2
が設けられるように構成している。
That is, the lagging material L shown in FIG. 9 has an engaging piece L-4 protruding rearward at the lower end of the rear surface of the buried portion L-1.
By integrally forming the
Is provided.

【0022】図10に示すラギング材Lは、埋設部L-1
の前後側面にそれぞれ上下方向に一定の間隔を開けて複
数個の係合片L-4,L-4 を一体的に、かつ、波形状に形成
することによって、回動方向に凹部L-2,L-2 が設けらる
ように構成している。
The lagging material L shown in FIG. 10 has a buried portion L-1.
By forming a plurality of engaging pieces L-4, L-4 integrally and in a corrugated shape on the front and rear side surfaces of the concave-convex portion L-2 in the turning direction, a plurality of engaging pieces L-4, L-4 are integrally formed in a corrugated shape. , L-2 is provided.

【0023】図11に示すラギング材Lは、埋設部L-1
の前後側面にそれぞれ上下方向に一定の間隔を開けて複
数個の係合片L-4,L-4 を一体的に、かつ、鋸歯状に形成
することによって、回動方向に凹部L-2,L-2 が設けられ
るように構成している。
The lagging material L shown in FIG. 11 is a buried portion L-1.
By forming a plurality of engaging pieces L-4, L-4 integrally and sawtooth-shaped on the front and rear side surfaces at regular intervals in the vertical direction, a concave portion L-2 in the rotating direction is formed. , L-2 are provided.

【0024】図12に示すラギング材Lは、平板状の上
部L-3 の下面に、前後一対の縦板状の埋設部L-1,L-1 を
前後方向に一定の間隔を開けて垂設し、前側の埋設部L-
1 の下端より前下方の斜め方向に係合片L-4 を伸延させ
て形成すると共に、後側の埋設部L-1 の下端より後下方
の斜め方向に係合片L-4 を伸延させて形成することによ
って、回動方向に凹部L-2,L-2 が設けられるように構成
している。
The lagging material L shown in FIG. 12 has a pair of front and rear vertical plate-shaped embedded portions L-1 and L-1 which are suspended from the lower surface of a flat plate-shaped upper portion L-3 at regular intervals in the front-rear direction. Installed, front buried part L-
The engaging piece L-4 is formed by extending the engaging piece L-4 obliquely forward and downward from the lower end of 1, and the engaging piece L-4 is extended obliquely rearward and downward from the lower end of the embedded portion L-1 on the rear side. The concave portions L-2 and L-2 are provided in the rotation direction by forming the concave portions L-2 and L-2.

【0025】上記のように構成したラギング材Lは、そ
れぞれ用途によって適宜使い分けることができるもので
あり、いずれのラギング材Lも、ライニング材7中に埋
設した際には、同ラギング材Lの回動方向側に設けられ
た凹部L-2 にライニング材7の一部が入り込み、同ライ
ニング材7が係合片L-4 と係合してラギング材Lとの連
結を強固にすることができる。
The lagging material L configured as described above can be appropriately used depending on the intended use, and when any lagging material L is embedded in the lining material 7, the lagging material L is wound around the lagging material L. A part of the lining material 7 enters into the recess L-2 provided on the moving direction side, and the lining material 7 engages with the engaging piece L-4 to strengthen the connection with the lagging material L. .

【0026】本発明によれば、コンベアベルトAの基材
6を被覆したライニング材7に耐摩耗用のラギング材L
を埋設しており、コンベアベルトAを利用して土砂等を
搬送する際に、同ラギング材Lによってライニング材7
の摩耗を防止するものである。
According to the present invention, the wear-resistant lagging material L is applied to the lining material 7 covering the base material 6 of the conveyor belt A.
The lining material 7 is embedded by the lagging material L when the earth and sand are conveyed using the conveyor belt A.
To prevent abrasion of the.

【0027】しかも、ラギング材Lの回動方向側には、
凹部L-2 を設けているために、ライニング材7中に耐摩
耗用のラギング材Lを埋設した際に、同凹部L-2 にライ
ニング材7の一部が入り込み、同凹部L-2 に入り込んだ
ライニング材7がラギング材Lに係合することにより、
その連結を強固に行い、ライニング材7からの抜けを防
止することができる。
Moreover, on the rotational direction side of the lagging material L,
Since the recessed portion L-2 is provided, when the wear-resistant lagging material L is embedded in the lining material 7, a part of the lining material 7 enters the recessed portion L-2 and the recessed portion L-2 is inserted into the recessed portion L-2. By engaging the lining material 7 that has entered into the lagging material L,
The connection can be firmly performed and the lining material 7 can be prevented from coming off.

【0028】従って、ライニング材7とラギング材Lと
の連結を強固に行って、ラギング材Lの剥離を確実に防
止することにより、コンベアベルトの寿命を長くするこ
とができる。
Therefore, by firmly connecting the lining material 7 and the lagging material L to surely prevent the lagging material L from peeling off, the life of the conveyor belt can be extended.

【0029】[0029]

【効果】本発明では、一定方向に回動する回動部材に被
覆したライニング材中に、耐摩耗用ラギング材を埋設す
ると共に、同ラギング材の長手方向が回動基材の回動方
向に対して略直角とるようにしているために、例えば、
回動部材としてのコンベアベルトでは、土砂等を搬送す
る際に、耐摩耗用のラギング材によってライニング材を
充分にカバーすることができて、同ライニング材の摩耗
を確実に防止することができると共に、コンベアベルト
の回動基材が屈曲しながら回動する際にも、ラギング材
が回動基材の回動方向になじみ易く、横長手状のラギン
グ材の形状にも関わらず、同ライニング材を介して回動
基材の屈曲・回動作動に支障とならず、コンベアベルト
による搬送機能を良好に確保することができる。
According to the present invention, a wear-resistant lagging material is embedded in a lining material that covers a rotating member that rotates in a fixed direction, and the longitudinal direction of the lagging material is the rotating direction of the rotating base material. Since it is set to be at a substantially right angle to, for example,
With the conveyor belt as the rotating member, the lining material can be sufficiently covered by the wear-resistant lagging material when the earth and sand are conveyed, and the wear of the lining material can be reliably prevented. Even when the rotating base material of the conveyor belt rotates while bending, the lagging material easily fits in the rotating direction of the rotating base material, and the lining material is the same regardless of the shape of the laterally long lagging material. The bending / rotation operation of the rotating base material is not hindered via the, and the conveyer function by the conveyor belt can be favorably ensured.

【0030】しかも、耐摩耗用のラギング材は、上部を
一定幅員の細幅の平板状とし、その下部に縦板状の埋設
部を一体的に垂設し、同埋設部の側面に張出し状に係合
片を一体的に形成することによって、回動方向に凹部を
形成しているために、同ラギング材をライニング材中に
埋設した際には、凹部内にライニング材が入り込んで両
者が係合状態となり、同ライニング材が上記ラギング材
を強固に支持することができ、回動基材の回動方向と略
直交する方向に配置したラギング材の支持を良好に確保
することができて、被摩耗材であるコンベアベルトの寿
命を飛躍的に長くして、土砂等の搬送作業能率を向上さ
せることができる。
In addition, the wear-resistant lagging material is formed into a flat plate having a narrow width with a constant width at the upper part, and a vertically plate-like embedded part is integrally hung at the lower part thereof, and the side face of the embedded part is projected. Since the recess is formed in the rotating direction by integrally forming the engaging piece on the lining material, when the same lagging material is embedded in the lining material, the lining material enters the recess and both In the engaged state, the lining material can firmly support the lagging material, and the lagging material arranged in the direction substantially orthogonal to the rotating direction of the rotating base material can be well supported. The life of the conveyor belt, which is a material to be abraded, can be remarkably lengthened, and the efficiency of carrying work such as earth and sand can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明にかかるラギング材を具備したベルトコ
ンベアの側面図。
FIG. 1 is a side view of a belt conveyor provided with a lagging material according to the present invention.

【図2】ラギング材の断面図。FIG. 2 is a sectional view of a lagging material.

【図3】本発明のコンベアベルトの実施例を示す断面
図。
FIG. 3 is a cross-sectional view showing an example of a conveyor belt of the present invention.

【図4】コンベアベルトの他の実施例を示す側面図。FIG. 4 is a side view showing another embodiment of the conveyor belt.

【図5】図4のI−I線断面図。5 is a cross-sectional view taken along the line I-I of FIG.

【図6】コンベアベルトの作動状態の説明図。FIG. 6 is an explanatory view of an operating state of a conveyor belt.

【図7】ラギング材を具備した駆動プーリの断面図。FIG. 7 is a cross-sectional view of a drive pulley including a lagging material.

【図8】ラギング材を具備したホッパーの断面図。FIG. 8 is a sectional view of a hopper provided with a lagging material.

【図9】ラギング材の他の実施例の構造を示す説明図。FIG. 9 is an explanatory view showing the structure of another embodiment of the lagging material.

【図10】ラギング材の他の実施例の構造を示す説明
図。
FIG. 10 is an explanatory view showing the structure of another embodiment of the lagging material.

【図11】ラギング材の他の実施例の構造を示す説明
図。
FIG. 11 is an explanatory view showing the structure of another embodiment of the lagging material.

【図12】ラギング材の他の実施例の構造を示す説明
図。
FIG. 12 is an explanatory view showing the structure of another embodiment of the lagging material.

【符号の説明】[Explanation of symbols]

1 ベルト 6 基材 7 ライニング材 L ラギング材 L-1 埋設部 L-2 凹部 L-3 上部 1 Belt 6 Base material 7 Lining material L Lagging material L-1 Embedded part L-2 Recessed part L-3 Upper part

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 上部(L-3) を一定幅員の細幅の平板状と
し、その下部に縦板状の埋設部(L-1) を一体的に垂設
し、同埋設部(L-1) の側面に張出し状に係合片(L-4) を
一体的に形成して、回動方向に凹部(L-2) を形成した耐
摩耗用のラギング材(L) を、 一定方向に回動する回動基材(6) に被覆したライニング
材(7) 中に埋設すると共に、同ラギング材(L) の長手方
向が回動基材(6) の回動方向に対して略直角となるよう
にしたことを特徴とする耐摩耗性の回動部材。
1. An upper part (L-3) is a flat plate having a constant width and a narrow width, and a vertical plate-like embedded part (L-1) is integrally hung below the upper part (L-3), and the embedded part (L- 1) The engaging piece (L-4) is integrally formed on the side surface of 1), and the wear-resistant lagging material (L) with the concave portion (L-2) is formed in the rotation direction. It is embedded in the lining material (7) that covers the rotating base material (6) that rotates, and the longitudinal direction of the lagging material (L) is approximately the same as the rotating direction of the rotating base material (6). A wear-resistant rotating member having a right angle.
JP6320893A 1994-12-22 1994-12-22 Wear-resistant conveyor belt Expired - Lifetime JP2583748B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6320893A JP2583748B2 (en) 1994-12-22 1994-12-22 Wear-resistant conveyor belt

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6320893A JP2583748B2 (en) 1994-12-22 1994-12-22 Wear-resistant conveyor belt

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP1048984A Division JPH0620931B2 (en) 1989-02-28 1989-02-28 Wear-resistant rotating member

Publications (2)

Publication Number Publication Date
JPH07187342A true JPH07187342A (en) 1995-07-25
JP2583748B2 JP2583748B2 (en) 1997-02-19

Family

ID=18126448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6320893A Expired - Lifetime JP2583748B2 (en) 1994-12-22 1994-12-22 Wear-resistant conveyor belt

Country Status (1)

Country Link
JP (1) JP2583748B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011500477A (en) * 2007-10-22 2011-01-06 アプライド マテリアルズ インコーポレイテッド Method and apparatus for transferring a substrate carrier
WO2012008000A1 (en) * 2010-07-16 2012-01-19 日鉄ハード株式会社 Transfer unit and distribution chute

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0620931A (en) * 1992-07-03 1994-01-28 Hitachi Ltd Method for electron beam exposure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0620931A (en) * 1992-07-03 1994-01-28 Hitachi Ltd Method for electron beam exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011500477A (en) * 2007-10-22 2011-01-06 アプライド マテリアルズ インコーポレイテッド Method and apparatus for transferring a substrate carrier
WO2012008000A1 (en) * 2010-07-16 2012-01-19 日鉄ハード株式会社 Transfer unit and distribution chute

Also Published As

Publication number Publication date
JP2583748B2 (en) 1997-02-19

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