JPH071810Y2 - ガスレ−ザ装置 - Google Patents
ガスレ−ザ装置Info
- Publication number
- JPH071810Y2 JPH071810Y2 JP12350787U JP12350787U JPH071810Y2 JP H071810 Y2 JPH071810 Y2 JP H071810Y2 JP 12350787 U JP12350787 U JP 12350787U JP 12350787 U JP12350787 U JP 12350787U JP H071810 Y2 JPH071810 Y2 JP H071810Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- vacuum pump
- laser oscillation
- oscillation tube
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010355 oscillation Effects 0.000 claims description 34
- 230000004913 activation Effects 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 12
- 239000011521 glass Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12350787U JPH071810Y2 (ja) | 1987-08-12 | 1987-08-12 | ガスレ−ザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12350787U JPH071810Y2 (ja) | 1987-08-12 | 1987-08-12 | ガスレ−ザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6429863U JPS6429863U (enrdf_load_stackoverflow) | 1989-02-22 |
| JPH071810Y2 true JPH071810Y2 (ja) | 1995-01-18 |
Family
ID=31372427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12350787U Expired - Lifetime JPH071810Y2 (ja) | 1987-08-12 | 1987-08-12 | ガスレ−ザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071810Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-08-12 JP JP12350787U patent/JPH071810Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6429863U (enrdf_load_stackoverflow) | 1989-02-22 |
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