JPH07174802A - Method for detecting internal crack in electronic part - Google Patents

Method for detecting internal crack in electronic part

Info

Publication number
JPH07174802A
JPH07174802A JP34402893A JP34402893A JPH07174802A JP H07174802 A JPH07174802 A JP H07174802A JP 34402893 A JP34402893 A JP 34402893A JP 34402893 A JP34402893 A JP 34402893A JP H07174802 A JPH07174802 A JP H07174802A
Authority
JP
Japan
Prior art keywords
electronic part
resonance
internal
internal cracks
internal crack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP34402893A
Other languages
Japanese (ja)
Inventor
Yoshio Kawaguchi
慶雄 川口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP34402893A priority Critical patent/JPH07174802A/en
Publication of JPH07174802A publication Critical patent/JPH07174802A/en
Pending legal-status Critical Current

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Landscapes

  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

PURPOSE:To easily and certainly detect any evidence of internal cracks by applying a voltage to an electronic part for measuring its resonance characteristics and comparing them with the resonance characteristics of an electronic part free of its internal cracks. CONSTITUTION:When a voltage is applied to an electronic part composed of electrodes arranged at required positions of a material having an electric strain effect, an electric or mechanical resonance is produced at a particular frequency due to the electric strain. The magnitude of the frequency or resonance at this time is roughly determined by the dimension of an electronic part and/or electric strain constants specific to the material. If the internal cracks exist in the electronic part, some change appears in the resonance frequency or magnitude. Therefore, the resonance characteristics of the electronic part are measured by using an impedance-frequency characteristics device and so on and compared them with the resonance characteristics of the electronic part free of its internal cracks measured in the similar method. Thereby, the evidence of the internal cracks can be detected easily, certainly, and quickly without damaging the electronic part.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、高誘電率系のセラミ
ック材料を用いた積層セラミックコンデンサなどのよう
に、電歪効果を有する材料の所定の位置に電極を配設し
てなる電子部品の内部クラックの検出方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component such as a monolithic ceramic capacitor using a high dielectric constant ceramic material in which electrodes are arranged at predetermined positions of a material having an electrostrictive effect. The present invention relates to a method for detecting internal cracks.

【0002】[0002]

【従来の技術】例えば、高誘電率系のセラミック材料を
用いた積層セラミックコンデンサの内部クラックの検出
方法としては、従来、以下の2つの方法が一般的に用い
られている。
2. Description of the Related Art For example, as a method for detecting an internal crack in a multilayer ceramic capacitor using a high dielectric constant ceramic material, the following two methods have been generally used conventionally.

【0003】積層セラミックコンデンサを切断し、断
面を研磨して顕微鏡で観察することにより内部クラック
の有無を検出する方法。
A method of detecting the presence or absence of internal cracks by cutting a monolithic ceramic capacitor, polishing the cross section, and observing with a microscope.

【0004】超音波探傷装置を使用する方法であっ
て、試料に超音波をあて、内部クラックなどの欠陥部が
ある場合にその欠陥部で反射して戻ってくる音波の強度
及び戻ってくるまでの時間などにより内部クラックなど
の欠陥部の有無及びその位置を検出する方法。
A method using an ultrasonic flaw detector, in which ultrasonic waves are applied to a sample, and when there is a defective portion such as an internal crack, the intensity of the sound wave reflected and returned by the defective portion and until it returns. The method of detecting the presence or absence and the position of defects such as internal cracks according to the time.

【0005】[0005]

【発明が解決しようとする課題】しかし、上記の方法
は、切断と研磨の工程が必要で検出に時間がかかるばか
りでなく、積層セラミックコンデンサを破壊してしまう
ので、良品と不良品の選別方法としては使用することが
できないという問題点がある。
However, in the above method, not only the cutting and polishing steps are required and the detection takes time, but also the monolithic ceramic capacitor is destroyed. Therefore, a method for selecting a good product from a defective product. However, there is a problem that it cannot be used.

【0006】また、の方法は、積層セラミックコンデ
ンサを切断したりすることなく、非破壊の方法で内部ク
ラックなどの欠陥部の有無を検出することができるとい
う特徴を有しているが、内部クラックの面に音波が垂直
にあたらなかった場合のように、音波の方向と内部クラ
ックの面方向との関係などによっては内部クラックなど
の欠陥部を検出することができない場合があり、信頼性
が必ずしも十分ではないという問題点がある。さらに、
通常は、複数方向から超音波をあててその反射を測定す
る方法をとることが必要になるため、測定に時間がかか
り、効率が悪いという問題点がある。
The method (1) is characterized in that it is possible to detect the presence or absence of a defect such as an internal crack by a nondestructive method without cutting the monolithic ceramic capacitor. As in the case where the sound wave is not perpendicular to the surface of, the defect such as the internal crack may not be detected depending on the relationship between the direction of the sound wave and the surface direction of the internal crack. There is a problem that it is not enough. further,
Usually, it is necessary to apply a method of applying ultrasonic waves from a plurality of directions and measuring the reflection thereof, so that there is a problem that the measurement takes time and the efficiency is poor.

【0007】この発明は、上記問題点を解決するもので
あり、電歪効果を有する材料を用いた高誘電率系の積層
セラミックコンデンサなどの電子部品の内部クラック
を、電子部品を破壊することなく、速やかに検出するこ
とが可能で、良品と不良品の選別方法として用いること
が可能な電子部品の内部クラック検出方法を提供するこ
とを目的とする。
The present invention solves the above-mentioned problems and prevents internal cracks in electronic parts such as high dielectric constant type multilayer ceramic capacitors using a material having an electrostrictive effect without destroying the electronic parts. An object of the present invention is to provide an internal crack detection method for electronic components, which can be quickly detected and can be used as a method for selecting a good product and a defective product.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、発明者は、種々の実験、検討を行い、電歪効果を有
する材料に電極を配設してなる電子部品に電圧を印加し
た場合、内部クラックがある電子部品には共振特性に確
実に変化が現れることを知り、さらに実験、検討を重ね
てこの発明を完成した。
In order to achieve the above object, the inventor has conducted various experiments and studies and applied a voltage to an electronic component in which an electrode is provided on a material having an electrostrictive effect. In this case, it was found that the resonance characteristics of the electronic component having an internal crack definitely changed, and further experiments and studies were conducted to complete the present invention.

【0009】すなわち、この発明の電子部品の内部クラ
ック検出方法は、電歪効果を有する材料の所定の位置に
電極を配設してなる電子部品の内部クラックを検出する
方法において、電子部品に電圧を印加して共振特性を測
定し、同様の方法で測定した内部クラックのない電子部
品の共振特性と比較することにより内部クラックの有無
を検出することを特徴としている。
That is, the internal crack detecting method for an electronic component according to the present invention is a method for detecting an internal crack in an electronic component in which an electrode is provided at a predetermined position of a material having an electrostrictive effect. Is applied to measure the resonance characteristic, and the presence or absence of the internal crack is detected by comparing with the resonance characteristic of the electronic component having no internal crack measured by the same method.

【0010】[0010]

【作用】電歪効果を有する材料の所定の位置に電極を配
設してなる電子部品に電圧を印加すると、電歪効果によ
り、特定の周波数で電気・機械的共振が引き起こされ
る。そして、このときの周波数や共振の大きさは、概ね
電子部品の寸法や、材料固有の電歪定数により決定され
る。ところが、電子部品に内部クラックがある場合に
は、その影響により、共振の周波数や大きさに変化が現
れる。
When a voltage is applied to an electronic component in which an electrode is arranged at a predetermined position of a material having an electrostrictive effect, the electrostrictive effect causes electromechanical resonance at a specific frequency. The frequency and the magnitude of resonance at this time are generally determined by the dimensions of the electronic component and the electrostriction constant peculiar to the material. However, when an electronic component has an internal crack, the resonance frequency or magnitude changes due to the influence of the internal crack.

【0011】したがって、電子部品の共振特性を、イン
ピーダンス−周波数特性測定装置などを用いて測定し、
同様の方法により測定した内部クラックのない電子部品
の共振特性と比較することにより、電子部品を切断(破
壊)したりすることなく内部クラックの有無を容易かつ
確実に、しかも速やかに検出することができるようにな
る。なお、この発明における電歪効果なる用語は、広義
の意味で用いられており、電歪効果のみならず逆圧電効
果をも含む広い概念である。
Therefore, the resonance characteristic of the electronic component is measured using an impedance-frequency characteristic measuring device,
By comparing with the resonance characteristics of electronic parts without internal cracks measured by the same method, the presence or absence of internal cracks can be detected easily, reliably, and quickly without cutting (destructing) the electronic parts. become able to. The term electrostrictive effect in the present invention is used in a broad sense, and is a broad concept that includes not only the electrostrictive effect but also the inverse piezoelectric effect.

【0012】[0012]

【実施例】以下、この発明の実施例を示して、その特徴
とするところをさらに詳しく説明する。
EXAMPLES The features of the present invention will be described in more detail below with reference to examples of the present invention.

【0013】この実施例では、内部クラックの検出対象
となる電子部品として、BaTiO 3系の高誘電率セラ
ミック中の所定の位置に内部電極を配設するとともに、
両端側に該内部電極と導通する外部電極を配設すること
により形成された積層セラミックコンデンサを用いた。
In this embodiment, the internal crack detection target
As an electronic component that becomes 3 series high permittivity ceramics
While arranging the internal electrode at a predetermined position in the mick,
Providing external electrodes on both ends that are electrically connected to the internal electrodes
The monolithic ceramic capacitor formed by

【0014】そして、この実施例では、内部クラックの
ない積層セラミックコンデンサと内部クラックのある積
層セラミックコンデンサをそれぞれ複数個用意し、各積
層セラミックコンデンサに直流電圧を印加して、インピ
ーダンス−周波数特性測定装置によりその共振特性を調
べた。
In this embodiment, a plurality of monolithic ceramic capacitors without internal cracks and monolithic ceramic capacitors with internal cracks are prepared, and a DC voltage is applied to each monolithic ceramic capacitor to measure impedance-frequency characteristics. The resonance characteristic was investigated by.

【0015】図1(a),(b),(c)、及び図2(a),
(b),(c)に、周波数とインピーダンス中の等価直列抵
抗成分の関係を示す。なお、図1は、内部クラックのな
い積層セラミックコンデンサの共振特性を示しており、
図2は、内部クラックのある積層セラミックコンデンサ
の共振特性を示している。
1 (a), 1 (b), 1 (c), and 2 (a),
(b) and (c) show the relationship between the frequency and the equivalent series resistance component in the impedance. Note that FIG. 1 shows the resonance characteristics of a monolithic ceramic capacitor without internal cracks,
FIG. 2 shows the resonance characteristics of a monolithic ceramic capacitor having internal cracks.

【0016】図1及び図2より、内部クラックのない積
層セラミックコンデンサと内部クラックのある積層セラ
ミックコンデンサの間には、共振のピーク周波数に明ら
かな差が生じており、このピーク周波数から、内部クラ
ックの有無を確実に検出することができた。したがっ
て、共振のピーク周波数を調べることにより、内部クラ
ックのない積層セラミックコンデンサと内部クラックの
ある積層セラミックコンデンサとを容易かつ確実に、し
かも速やかに選別することができる。
From FIGS. 1 and 2, there is a clear difference in the peak frequency of resonance between the monolithic ceramic capacitor without internal cracks and the monolithic ceramic capacitor with internal cracks. It was possible to reliably detect the presence or absence of. Therefore, by examining the peak frequency of resonance, it is possible to easily, reliably, and promptly select a monolithic ceramic capacitor without internal cracks and a monolithic ceramic capacitor with internal cracks.

【0017】なお、上記実施例では、ピーク周波数に着
目して内部クラックの有無を検出した場合について説明
したが、図1及び図2に示すように、内部クラックのな
い積層セラミックコンデンサと内部クラックのある積層
セラミックコンデンサでは、共振のピークの大きさにも
明らかな差が生じている。したがって、共振のピークの
大きさを調べることによっても、内部クラックのない積
層セラミックコンデンサと内部クラックのある積層セラ
ミックコンデンサとを容易に選別することができる。
In the above-mentioned embodiment, the case where the presence / absence of an internal crack is detected by focusing on the peak frequency has been described. However, as shown in FIGS. 1 and 2, a laminated ceramic capacitor without an internal crack and an internal crack are detected. In some monolithic ceramic capacitors, there is a clear difference in the size of the resonance peak. Therefore, it is possible to easily select a monolithic ceramic capacitor having no internal crack and a monolithic ceramic capacitor having an internal crack by examining the magnitude of the resonance peak.

【0018】また、ピーク周波数の測定結果と共振のピ
ークの大きさの測定結果を組み合わせて、検出の信頼性
をさらに向上させることも可能である。
It is also possible to further improve the detection reliability by combining the measurement result of the peak frequency and the measurement result of the peak size of the resonance.

【0019】なお、上記実施例では、直流電圧を印加し
ながら共振特性を測定した場合について説明したが、分
極処理により同様の電気・機械的共振を発生させること
も可能である。
In the above embodiment, the case where the resonance characteristic is measured while applying the DC voltage has been described, but it is also possible to generate the same electromechanical resonance by the polarization process.

【0020】さらに、上記実施例では、高誘電率系のセ
ラミック材料を用いた積層セラミックコンデンサの内部
クラックの検出方法について説明したが、この発明の方
法は、これに限られるものではなく、電歪効果を有する
セラミック材料を用いたインダクタやLC複合部品にも
適用することが可能であり、その場合にも上記実施例と
同様の効果を得ることができる。
Further, in the above embodiment, the method of detecting the internal crack of the monolithic ceramic capacitor using the high dielectric constant ceramic material has been described, but the method of the present invention is not limited to this, and the electrostriction is not limited. The present invention can be applied to an inductor and an LC composite component using a ceramic material having an effect, and in that case, the same effect as that of the above embodiment can be obtained.

【0021】この発明は、さらにその他の点においても
上記実施例に限定されるものではなく、発明の要旨の範
囲内において、種々の応用、変形を加えることが可能で
ある。
The present invention is not limited to the above embodiments in other points as well, and various applications and modifications can be made within the scope of the gist of the invention.

【0022】[0022]

【発明の効果】上述のように、この発明の電子部品の内
部クラック検出方法は、電子部品に電圧を印加して共振
特性を測定し、同様の方法で測定した内部クラックのな
い電子部品の共振特性と比較することにより内部クラッ
クの有無を検出するようにしているので、電子部品を切
断したりすることなく内部クラックの有無を容易かつ確
実に検出することができる。
As described above, according to the method of detecting an internal crack of an electronic component of the present invention, a resonance characteristic of an electronic component having no internal crack measured by a similar method is measured by applying a voltage to the electronic component. Since the presence / absence of an internal crack is detected by comparing with the characteristic, the presence / absence of an internal crack can be easily and reliably detected without cutting the electronic component.

【0023】したがって、この発明の電子部品の内部ク
ラック検出方法は、内部クラックのない電子部品と内部
クラックのある電子部品とを選別するためのスクリーニ
ング方法として極めて有意義である。
Therefore, the method for detecting internal cracks of electronic parts according to the present invention is extremely significant as a screening method for selecting electronic parts without internal cracks and electronic parts with internal cracks.

【0024】また、超音波探傷装置を用いた検出方法の
ように音波の方向と内部クラックの面方向などにより誤
検出が生じるようなことがなく、高い検出信頼性を実現
することができる。
Further, unlike the detection method using the ultrasonic flaw detector, erroneous detection does not occur due to the direction of the sound wave and the surface direction of the internal crack, and high detection reliability can be realized.

【0025】さらに、超音波探傷装置を用いた検出方法
のように検出時間が長くかからず、短時間で効率よく内
部クラックの検出を行うことができる。
Further, unlike the detection method using the ultrasonic flaw detector, the detection time is not long, and the internal crack can be detected efficiently in a short time.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a),(b),(c)はいずれも内部クラックのな
い積層セラミックコンデンサについて測定した周波数と
インピーダンス中の等価直列抵抗成分の関係を示す線図
である。
FIG. 1 (a), (b), (c) is a diagram showing the relationship between the frequency and the equivalent series resistance component in impedance measured for a multilayer ceramic capacitor without internal cracks.

【図2】(a),(b),(c)はいずれも内部クラックのあ
る積層セラミックコンデンサについて測定した周波数と
インピーダンス中の等価直列抵抗成分の関係を示す線図
である。
2 (a), (b), and (c) are diagrams showing the relationship between the frequency and the equivalent series resistance component in impedance measured with respect to a multilayer ceramic capacitor having internal cracks.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 電歪効果を有する材料の所定の位置に電
極を配設してなる電子部品の内部クラックを検出する方
法において、 電子部品に電圧を印加して共振特性を測定し、同様の方
法で測定した内部クラックのない電子部品の共振特性と
比較することにより内部クラックの有無を検出すること
を特徴とする電子部品の内部クラック検出方法。
1. A method for detecting an internal crack of an electronic component, which comprises electrodes arranged at predetermined positions of a material having an electrostrictive effect, wherein a voltage is applied to the electronic component to measure resonance characteristics, A method for detecting an internal crack in an electronic component, characterized by detecting the presence or absence of an internal crack by comparing the resonance characteristic of the electronic component without the internal crack measured by the method.
JP34402893A 1993-12-16 1993-12-16 Method for detecting internal crack in electronic part Pending JPH07174802A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34402893A JPH07174802A (en) 1993-12-16 1993-12-16 Method for detecting internal crack in electronic part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34402893A JPH07174802A (en) 1993-12-16 1993-12-16 Method for detecting internal crack in electronic part

Publications (1)

Publication Number Publication Date
JPH07174802A true JPH07174802A (en) 1995-07-14

Family

ID=18366101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34402893A Pending JPH07174802A (en) 1993-12-16 1993-12-16 Method for detecting internal crack in electronic part

Country Status (1)

Country Link
JP (1) JPH07174802A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002208829A (en) * 2001-01-09 2002-07-26 Murata Mfg Co Ltd Failure detection method for piezoelectric resonant element
JP2008171949A (en) * 2007-01-10 2008-07-24 Tdk Corp Method of manufacturing electronic component
KR20230027599A (en) 2021-08-19 2023-02-28 삼성전기주식회사 Defect detection device of electronic components and defect detection method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002208829A (en) * 2001-01-09 2002-07-26 Murata Mfg Co Ltd Failure detection method for piezoelectric resonant element
JP2008171949A (en) * 2007-01-10 2008-07-24 Tdk Corp Method of manufacturing electronic component
KR20230027599A (en) 2021-08-19 2023-02-28 삼성전기주식회사 Defect detection device of electronic components and defect detection method thereof

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