JPH07171782A - Vacuum suction device - Google Patents

Vacuum suction device

Info

Publication number
JPH07171782A
JPH07171782A JP26810791A JP26810791A JPH07171782A JP H07171782 A JPH07171782 A JP H07171782A JP 26810791 A JP26810791 A JP 26810791A JP 26810791 A JP26810791 A JP 26810791A JP H07171782 A JPH07171782 A JP H07171782A
Authority
JP
Japan
Prior art keywords
suction
valve
vacuum
hole
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26810791A
Other languages
Japanese (ja)
Inventor
Haruo Konagai
春雄 小長井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP26810791A priority Critical patent/JPH07171782A/en
Publication of JPH07171782A publication Critical patent/JPH07171782A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enable a vacuum suction device to have suction holes in need of vacuum suction and suction holes not in need of vacuum suction automatically at the time of placing the suction holes of the vacuum suction device on a workpiece. CONSTITUTION:The lower part in a body 1 is provided with suction holes 2, and valve chambers 3 are provided in line with these suction holes 2. The side face of each valve chambers 3 are provided with valve supporting parts 4, and the valve supporting parts 4 are provided with valves 5 with air holes. The valve 5 with air holes has plural circular air holes 6 on the inside of the valve outer periphery and on the outside of the outer periphery of the suction hole 9. The upper face of the valve chamber 3 is provided with a valve seat 7, and an air passage 8 is provided being connected to the upper part of the upper face center part of the valve chamber 3. The upper end part of the air passage 8 is provided with a suction port 9. A vacuum chamber 10 is provided to communicate each suction port 9, and the upper face of the vacuum chamber 10 is provided with a suction port 11.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は,物をはさむことなく圧
力差によって引き付けて持ち上げたり固定したりする真
空吸着装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction device for attracting and lifting or fixing an object without being pinched by a pressure difference.

【0002】[0002]

【従来の技術】一般に鉄板,硝子板,樹脂板,ALC
板,ウエハ,板材,シート材,壁パネル,屋根パネルな
どを真空吸着して品物を傷付けずに搬送させたりする真
空チャックなどを真空吸着により吸着固定することは広
く知られている。従来のこの種の真空吸着手段として
は,真空吸着すべき品物の形状および大きさなどをセン
サーとか画像処理装置などにより必要な大きさなどを識
別して電磁弁等を利用して各パットとバキューム系の間
の切り替えを行う。吸引孔と吸引ポンプが接続され、こ
の吸引ポンプによる吸引力によって,ワークに対して載
置する部分を真空吸着して固定するのが実情である。
2. Description of the Related Art Generally, iron plate, glass plate, resin plate, ALC
BACKGROUND ART It is widely known that a vacuum chuck or the like that vacuum-adsorbs a plate, a wafer, a plate material, a sheet material, a wall panel, a roof panel, or the like and conveys an item without damaging it by vacuum adsorption. As a conventional vacuum suction means of this type, the shape and size of the product to be vacuum-sucked is identified by a sensor or an image processing device to determine the required size, etc., and each pad and vacuum is used by using a solenoid valve or the like. Switch between systems. The actual situation is that the suction hole and the suction pump are connected, and the portion to be placed on the work is vacuum-sucked and fixed by the suction force of the suction pump.

【0003】[0003]

【発明の解決しようとする課題】例えば、特開平2−8
8193号に公報に開示された産業用ロボットは、平置
きされた紙等の可撓性薄板状のワークを吸着して搬送す
る場合吸着ワークの落下防止ために送風装置を取り付け
て可撓性薄板状のワークの下垂を防止する機構を持って
いたり、特開平2−292152号に公報に開示された
吸着パット装置では、吸着機構としてベースに摺動軸を
摺動自在に設置し、摺動軸のベースよりの突出部先端に
吸着パットを設け、該先端より吸気孔を摺動軸内に形成
するとともに、ベース内部に負圧及び圧力を発生する発
生源と連通した配管を形成し、摺動軸の先端に設けられ
た吸着パットが把持対象物に当接し、ベース方向に引き
込んだ場合に、摺動軸内に形成された吸気孔とベース内
に形成した負圧及び圧力を発生する発生源と連通した配
管が連絡する現状であり構造が複雑である。その他に特
開平2−300014号に公報に開示されたパイラー積
載装置において被積載物品の長さと積姿のデータを与え
ることで、制御手段はデータテーブルからこれらに応じ
た位置で被積載物品を停止させるとともに適当な吸着パ
ッドを選択して、積載部に積み込む機構とか特開平2−
305716号に公報に開示された板材持ち上げステー
ション装置において板材サイズ検出手段により、板材の
積載部に載置された板材のサイズ検出される。この板材
サイズ検出結果は、板材加工ラインのシステム制御部等
によって構成される吸着パッド選択手段に入れられる。
吸着パッド選択手段は、板材ローダに設けられた複数の
吸着パッドのうち、板材の搬送に用いる吸着パッドを選
択し、この吸着パッドを吸着源側に接続する。このよう
にして、板材の大きさに応じて使用するべき吸着パッド
が自動的に選択される。吸着パッドがバキューム機構に
接続されている場合、各パッドとバキューム系との間の
切り替え弁を、板材サイズの検出結果によって制御し、
板材サイズに応じて使用すべき吸着パッドを選択する機
構などあるがあまりにも構造が複雑となるという解決す
べき課題があった。
SUMMARY OF THE INVENTION For example, Japanese Patent Laid-Open No. 2-8
The industrial robot disclosed in Japanese Patent No. 8193 has a flexible thin plate attached with a blower to prevent the suctioned work from falling when the flat thin plate-like work such as paper is attracted and conveyed. In a suction pad device disclosed in Japanese Patent Laid-Open No. 2-292152, a sliding shaft is slidably installed on the base as a suction mechanism, and the sliding shaft is slidable. A suction pad is provided at the tip of the protruding part from the base, and an intake hole is formed from the tip in the sliding shaft, and a pipe communicating with a source that generates negative pressure and pressure is formed inside the base to slide. A generation source that generates negative pressure and pressure formed in the intake hole formed in the sliding shaft and the base when the suction pad provided at the tip of the shaft comes into contact with the object to be gripped and retracts in the base direction. The current situation where the pipes communicating with There structure is complicated. In addition, in the piler loading device disclosed in Japanese Unexamined Patent Publication No. 2-300014, the control means stops the loaded article from the data table at a position corresponding to these by giving the data of the length and stacked form of the loaded article. And a mechanism for selecting an appropriate suction pad and loading it on the loading section.
In the plate material lifting station device disclosed in Japanese Patent No. 305716, the plate material size detecting means detects the size of the plate material placed on the plate material stacking unit. The plate material size detection result is input to the suction pad selection means configured by the system control unit or the like of the plate material processing line.
The suction pad selection means selects a suction pad used for carrying the plate material from the plurality of suction pads provided in the plate material loader, and connects the suction pad to the suction source side. In this way, the suction pad to be used is automatically selected according to the size of the plate material. When the suction pad is connected to the vacuum mechanism, the switching valve between each pad and the vacuum system is controlled by the detection result of the plate size,
Although there is a mechanism for selecting the suction pad to be used according to the plate material size, there is a problem to be solved that the structure becomes too complicated.

【0004】[0004]

【課題を解決するための手段】前期問題点を解決するた
めのこの発明における手段は、図1に示すように本体内
の下部に吸引孔を設け,この吸引孔に連設して弁室を設
け、この弁室の側面に弁支持部を設け、この弁支持部に
通気孔付き弁を設け,この通気孔付き弁の通気孔は通気
孔付き弁外周より内側で吸引口の外周より外側に複数の
円形の通気孔を設け、弁室の上面に弁座を設け、弁室の
上面中央部上方に連設し通気路を設け、この通気路上端
部に吸引口を設け、この吸引口を連通させる真空室を設
け、この真空室の上面に吸引ポートを設けることから構
成されている。次に図3に示すように上記解決手段の本
体1の吸引孔2外周に対し、弾性体を設けたことから構
成されている。次に図4に示すように図1の解決手段の
本体の吸引孔2の下端に連設し吸着パットを設けたこと
から構成されている。
As shown in FIG. 1, a means for solving the problems in the first aspect of the present invention is to provide a suction hole in the lower part of the main body, and to connect the suction hole to the valve chamber. Provided on the side surface of the valve chamber is a valve support part, and the valve support part is provided with a valve with a vent hole. The vent hole of the valve with a vent hole is inside the outer circumference of the valve with a vent hole and outside the outer circumference of the suction port. A plurality of circular ventilation holes are provided, a valve seat is provided on the upper surface of the valve chamber, a ventilation passage is provided continuously above the central portion of the upper surface of the valve chamber, and a suction port is provided at the upper end of this ventilation passage. A vacuum chamber for communication is provided, and a suction port is provided on the upper surface of this vacuum chamber. Next, as shown in FIG. 3, an elastic body is provided on the outer circumference of the suction hole 2 of the body 1 of the solving means. Next, as shown in FIG. 4, the solution means of FIG. 1 is constructed by providing a suction pad continuously connected to the lower end of the suction hole 2 of the main body.

【0005】[0005]

【作用】次に、上記構成よりなるこの実施例の真空吸着
装置の作用について説明する。図1の左側半分の図は、
吸引孔がワークWにより塞がれているために吸引ポート
からの吸引力により真空室と弁室と通気孔と吸引孔とが
同じ負圧状態となるため通気孔付き弁は弁座と接するこ
となく負圧によりワークを真空吸着固定する。図1の右
側半分の図は、吸引孔にワークWがないため吸引ポート
からの吸引力により通気路と真空室とが同じ負圧状態な
り、吸引孔側が大気圧状態のため通気孔付き弁が吸引ポ
ート側と吸引孔側の圧力差により吸引孔側から空気が流
入し通気孔付き弁が吸い上げられ、通気孔付き弁と弁座
と接し通気孔付き弁の通気孔が弁座に塞がれ吸引孔から
の空気の流入は遮断される。図4の場合には、ワークW
がないため吸着パット側からの大気圧と吸引ポートから
の吸引力により真空室と通気路とが同じ負圧状態とな
り、この吸引ポートと吸引孔の両方の圧力差により通気
孔付き弁が吸い上げられて通気孔付き弁が弁座と接し通
気孔付き弁の通気孔が弁座に塞がれ吸着パット側からの
空気の流入は遮断される。図5の場合は、ワークWと吸
着パット側が載置し、吸着パット側がワークWにより塞
がれるため吸引ポートからの吸引力により通気路と真空
室と弁室が吸引孔が同じ負圧状態となり、圧力差がなく
なり、通気孔付き弁が弁座と接しないため吸着パットに
負圧ができてワークWを真空吸着固定する。図6の場合
は、ワークWを真空吸着固定する場合には、上記作用と
同じである。
Next, the operation of the vacuum suction device of this embodiment having the above construction will be described. The left half of Figure 1 is
Since the suction hole is blocked by the work W, the vacuum chamber, the valve chamber, the vent hole and the suction hole are in the same negative pressure state due to the suction force from the suction port, so the valve with the vent hole should be in contact with the valve seat. Instead, the work is vacuum-adsorbed and fixed by negative pressure. In the right half of FIG. 1, since the work W is not in the suction hole, the suction force from the suction port causes the same negative pressure state in the ventilation passage and the vacuum chamber. Due to the pressure difference between the suction port side and the suction hole side, air flows in from the suction hole side and sucks up the valve with a vent hole, contacts the valve with a vent hole and the valve seat, and the vent hole of the valve with a vent hole is blocked by the valve seat. The inflow of air from the suction holes is blocked. In the case of FIG. 4, the work W
Since there is no pressure, the vacuum chamber and the ventilation path are in the same negative pressure state due to the atmospheric pressure from the suction pad side and the suction force from the suction port, and the valve with the ventilation hole is sucked up due to the pressure difference between this suction port and the suction hole. The valve with the vent hole contacts the valve seat, and the vent hole of the valve with the vent hole is blocked by the valve seat, so that the inflow of air from the adsorption pad side is blocked. In the case of FIG. 5, since the work W and the suction pad side are placed and the suction pad side is closed by the work W, the suction force from the suction port causes the suction path in the ventilation passage, the vacuum chamber, and the valve chamber to have the same negative pressure state. Since there is no pressure difference and the valve with the vent hole does not contact the valve seat, a negative pressure is created in the suction pad and the work W is vacuum suction fixed. In the case of FIG. 6, when the work W is vacuum-adsorbed and fixed, the operation is the same as the above.

【0006】[0006]

【実施例】以下に本発明の実施例を図面に基づいて説明
する。図1は真空吸着装置の動作断面図である。図2は
同平面図である。図3は電子部品などを実装する工程に
おいてプリント基板を搬送する真空吸着装置の底面に弾
性体を付けた動作断面図である。図4〜図6はロボット
のアームに取り付けて使用する真空吸着装置に吸着パッ
トを付けた動作断面図である。図7は板材の積み上げ装
置の動作断面図である。図8は同平面図である。図1に
おいて、図1の左側半分の図は、吸引孔がワークWによ
り塞がれているために吸引ポートからの吸引力により真
空室と弁室と吸引孔が負圧状態となるため通気孔付き弁
と弁座が接することなく負圧によりワークWを真空吸着
固定する。図1の右側半分の図は、吸引孔にワークWが
ないため吸引ポートからの吸引力により通気路と真空室
が負圧状態となり、吸引孔側が大気圧状態となり通気孔
付き弁が吸引ポート側と吸引孔側の圧力差により通気孔
付き弁が吸い上げられ弁座と接し通気孔付き弁の通気孔
が弁座により塞がれるため吸引孔からの空気の流入は遮
断される。図3は、動作は図1と同じであるが、本体1
の底面に弾性体11を取り付けて傷をつけることができ
ないワークとか表面密着性の向上に対して使用すること
を目的としている。図4の場合には、ワークWがないた
め吸着パット側からの大気圧と吸引ポートからの吸引力
により通気路と真空室が負圧状態となり、この吸引ポー
ト側と吸引孔側の両方の圧力差により通気孔付き弁と弁
座が接し通気孔付き弁の通気孔が弁座により塞がれるた
め吸着パット側からの空気の流入は遮断される。図5の
場合には、ワークWと吸着パット側が載置し、吸着パッ
ト側が塞がれるため吸引ポートからの吸引力により通気
路と真空室と弁室と吸引孔が負圧状態となり、圧力差が
なくなるため、通気孔付き弁と弁座が接することがなく
吸着パットがワークWを真空吸着固定する。図6の場合
には、ワークWを真空吸着固定する動作は、上記説明と
同じである。この後、真空吸着固定して目的場所まで搬
送する。図7の動作は、パレット支持体の上側には吸引
ポンプと稼働装置につながれており、下側には図4の本
体13が配列して取り付けられており、ワークWに載置
した吸着パットの面で本体13の図6の動作により真空
吸着固定され、そしてワークWに載置していない吸着パ
ットは、図4の動作説明により吸着パット側からの空気
の流入は遮断されるため真空吸着固定されない。図8の
平面図において規則的にパレット支持体に取り付けられ
ている本体の中で、ワークWにわずかでも載置していな
い本体の吸着パットは、吸着パット側からの空気の流入
は遮断される。ワークW1からW3のようなサイズの違
うワークに対して自動的に真空吸着固定を行う。なおこ
の発明は前記実施例だけでなく現在産業用に使用されて
いる真空吸着装置に使用することが可能である。また前
記実施例での構成に限定されるものでなく、弁室、通気
孔付き弁、弁支持部、弁座の形状並び図9〜図12のよ
うに通気孔付き弁の通気孔の大きさと取り付け位置を任
意に変更しても同じ効果があるなど、この発明の趣旨を
逸脱しない範囲内で各部の構成を任意に変更して具体化
することも可能である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an operation sectional view of the vacuum suction device. FIG. 2 is a plan view of the same. FIG. 3 is an operation cross-sectional view in which an elastic body is attached to the bottom surface of a vacuum suction device that conveys a printed circuit board in the process of mounting electronic components and the like. 4 to 6 are operation cross-sectional views in which a suction pad is attached to a vacuum suction device used by being attached to an arm of a robot. FIG. 7 is an operation cross-sectional view of a plate material stacking device. FIG. 8 is a plan view of the same. In FIG. 1, the drawing on the left half of FIG. 1 shows that the suction hole is blocked by the work W, and therefore the vacuum chamber, the valve chamber, and the suction hole are in a negative pressure state due to the suction force from the suction port. The work W is vacuum-adsorbed and fixed by negative pressure without the attached valve and the valve seat contacting each other. In the right half of FIG. 1, since there is no work W in the suction hole, the suction force from the suction port causes the ventilation passage and the vacuum chamber to be in a negative pressure state, the suction hole side is in the atmospheric pressure state, and the valve with the ventilation hole is in the suction port side. The pressure difference between the suction hole side and the suction hole side sucks up the valve with the ventilation hole and contacts the valve seat, and the ventilation hole of the valve with the ventilation hole is closed by the valve seat, so that the inflow of air from the suction hole is blocked. The operation of FIG. 3 is the same as that of FIG.
Its purpose is to attach an elastic body 11 to the bottom surface of the work and to use it for improving the surface adhesion or a work that cannot be scratched. In the case of FIG. 4, since there is no work W, the ventilation passage and the vacuum chamber are in a negative pressure state due to the atmospheric pressure from the suction pad side and the suction force from the suction port, and the pressure on both the suction port side and the suction hole side is reduced. Due to the difference, the valve with a vent hole and the valve seat come into contact with each other, and the vent hole of the valve with a vent hole is blocked by the valve seat, so that the inflow of air from the adsorption pad side is blocked. In the case of FIG. 5, since the work W and the suction pad side are placed and the suction pad side is blocked, the suction force from the suction port causes the ventilation passage, the vacuum chamber, the valve chamber, and the suction hole to be in a negative pressure state, resulting in a pressure difference. Therefore, the suction pad fixes the workpiece W by vacuum suction without contact between the valve with a vent and the valve seat. In the case of FIG. 6, the operation for vacuum suction fixing the work W is the same as that described above. After that, it is vacuum-adsorbed and fixed, and then conveyed to a target location. In the operation shown in FIG. 7, the suction pump and the operating device are connected to the upper side of the pallet support, and the main body 13 of FIG. 4 is arranged and attached to the lower side of the pallet support. 6, the suction pad is fixed by vacuum suction by the operation of the main body 13 and the suction pad not placed on the work W is vacuum suction fixed because the inflow of air from the suction pad side is blocked by the operation description of FIG. Not done. In the main body regularly attached to the pallet support in the plan view of FIG. 8, the suction pad of the main body, which is not mounted on the work W even slightly, blocks the inflow of air from the suction pad side. . Vacuum suction fixation is automatically performed for works of different sizes such as works W1 to W3. The present invention can be applied not only to the above-mentioned embodiment but also to the vacuum suction device currently used for industrial use. Further, the configuration of the valve chamber, the valve with a vent hole, the valve support portion, and the shape of the valve seat are not limited to the configurations in the above-described embodiments, and the size of the vent hole of the valve with a vent hole as shown in FIGS. It is also possible to embody by arbitrarily changing the configurations of the respective parts within a range not departing from the spirit of the present invention, such as the same effect even if the mounting position is arbitrarily changed.

【0007】[0007]

【発明の効果】以上のように、この発明によれば、本体
内の下部に吸引孔を設け、この吸引孔に連設して弁室を
設け、この弁室の側面に弁支持部を設け、この弁支持部
に通気孔付き弁を設け,この通気孔付き弁の通気孔は通
気孔付き弁外周より内側で吸引口の外周より外側に複数
の円形の通気孔を設け、弁室の上面に弁座を設け、弁室
の上面中央部上方に連設し通気路を設け、この通気路上
端部に吸引口を設け、この吸引口を連通させる真空室を
設け、この真空室の上面に吸引ポートからの構成と真空
吸着装置のの吸引孔外周に対し,弾性体を設けたことか
らの構成と吸着パットの上部に連設し本体を設け、本体
内の下部に吸引孔を設け,この吸引孔に連設して弁室を
設け、この弁室の側面に弁支持部を設け、この弁支持部
に通気孔付き弁を設け,この通気孔付き弁の通気孔は弁
外周より内側に複数の円形の通気孔を設け、弁室の上面
に弁座を設け、弁室の上面中央部上方に連設し通気路を
設け、この通気路上端部に吸引口を設け、この吸引口に
連設し真空室を設け、この真空室の上面に吸引ポートを
設けることからの構成したため次の効果が生ずる。 (1)真空吸着装置の本体の吸引孔に対して、ワークを
載置した場合に同時に吸引部分と非吸引部分を設けるこ
とができる。そのため従来吸引面積がワークサイズの変
更により変わるたびに非吸引部分へのマスキングの作業
が不用となった。そのためマスキング材なども不用とな
り労力面だけでなくコストダウンもはかれるようになっ
た。 (2)弁室並び通気孔付き弁の軽量で薄い形状が可能と
なり吸引部分と非吸引部分の吸引孔を素早く確実に動作
するとともに吸引部分と非吸引部分の判別が自動的にで
きるため従来のようなセンサーなどによる複雑な機構を
必要としなくなりメンテナンスも簡単となり装置全体の
コストダウンも図れるようになった。 (3)本体が軽量小型にできるため真空吸着装置が簡単
に取り付けが可能となった。そのためロボットなどのア
ームの慣性質量の軽減が可能となり駆動制御が安全確実
となった。 (4)ワークにわずかでも載置していない吸引孔に対し
ても確実に空気の流入を遮断するため真空吸着力が下が
らないため従来のように大型の吸引ポンプを必要とせず
電力の節電と騒音軽減の効果がある。 (5)図4の本体の真空吸着装置を複数配置して上下方
向に対して本体が独立して稼働できるような構造も可能
であるこの構造により凹凸のワークWに対しても吸着固
定が可能となる。 (6)従来のボールバルブでは、規格があるため任意の
大きさにすることが困難であったが、この薄い板を使用
することで加工が簡単であるばかりか、量産化が可能な
上稼働部分が最小限となるためメンテナンスが簡単とな
る。
As described above, according to the present invention, the suction hole is provided in the lower portion of the main body, the valve chamber is provided continuously with the suction hole, and the valve support portion is provided on the side surface of the valve chamber. , A valve with a vent hole is provided in this valve support part, and the vent hole of the valve with a vent hole is provided with a plurality of circular vent holes inside the outer circumference of the valve with the vent hole and outside the outer circumference of the suction port, and the upper surface of the valve chamber A valve seat is provided in the upper part of the upper surface of the valve chamber to provide a ventilation path, a suction port is provided at the upper end of the ventilation path, and a vacuum chamber is provided to connect the suction port to the upper surface of the vacuum chamber. The structure from the suction port and the outer circumference of the suction hole of the vacuum suction device are provided with an elastic body and the main body is provided continuously to the upper part of the suction pad, and the suction hole is provided in the lower part of the main body. A valve chamber is provided in series with the suction hole, a valve support portion is provided on the side surface of this valve chamber, and a valve with a vent hole is provided in this valve support portion. The vent hole of this valve with a vent hole is provided with a plurality of circular vent holes inside the outer circumference of the valve, a valve seat is provided on the upper surface of the valve chamber, and a vent passage is provided continuously above the center of the upper surface of the valve chamber. Since the suction port is provided at the upper end of the air passage, the vacuum chamber is provided continuously to the suction port, and the suction port is provided on the upper surface of the vacuum chamber, the following effects are obtained. (1) A suction portion and a non-suction portion can be provided at the same time when a work is placed in the suction hole of the main body of the vacuum suction device. As a result, the masking work on the non-suction area becomes unnecessary every time the suction area changes due to the change of the work size. As a result, masking materials have become unnecessary, and not only labor but also cost reduction has come to be achieved. (2) A lightweight and thin shape of a valve chamber and a valve with a ventilation hole is possible, the suction holes of the suction portion and the non-suction portion can be quickly and reliably operated, and the suction portion and the non-suction portion can be automatically discriminated from each other. The need for a complicated mechanism such as a sensor is eliminated, maintenance is simplified, and the cost of the entire device can be reduced. (3) Since the main body can be made light and small, the vacuum suction device can be easily attached. Therefore, it is possible to reduce the inertial mass of the arm of robots, etc., and drive control is safe and reliable. (4) The vacuum suction force does not decrease because the inflow of air is surely blocked even for suction holes that are not mounted even on the workpiece even slightly, so that a large suction pump is not required as in the past and power is saved. Effective in reducing noise. (5) It is also possible to arrange a plurality of vacuum suction devices for the main body of FIG. 4 so that the main body can operate independently in the vertical direction. Becomes (6) With the conventional ball valve, it was difficult to make it any size due to the standard. However, by using this thin plate, not only the processing is easy, but also mass production is possible and the operation is performed. Maintenance is easy because the parts are minimized.

【図面の簡単な説明】[Brief description of drawings]

【図1】真空吸着装置の動作断面図である。FIG. 1 is an operation cross-sectional view of a vacuum suction device.

【図2】真空吸着装置の平面図である。FIG. 2 is a plan view of a vacuum suction device.

【図3】プリント基板を搬送する真空吸着装置動作断面
図である。
FIG. 3 is an operation cross-sectional view of a vacuum suction device that conveys a printed circuit board.

【図4】〜[Figure 4]

【図6】ロボットのアームに取り付けて使用する真空吸
着装置吸着パットを取り付けた動作断面図である。
FIG. 6 is an operation sectional view in which a suction pad of a vacuum suction device used by being attached to an arm of a robot is attached.

【図7】板材の積み上げ装置の動作断面図である。FIG. 7 is an operational cross-sectional view of a plate material stacking device.

【図8】板材の積み上げ装置の平面図である。FIG. 8 is a plan view of a plate material stacking device.

【図9】通気孔付き弁の平面図である。FIG. 9 is a plan view of a valve with a vent.

【図10】通気孔付き弁の断面図である。FIG. 10 is a sectional view of a valve with a vent.

【図11】通気孔付き弁の平面図である。FIG. 11 is a plan view of a valve with a vent.

【図12】通気孔付き弁の断面図である。FIG. 12 is a cross-sectional view of a valve with a vent.

【符号の説明】[Explanation of symbols]

1 本体 2 吸引孔 3 弁室 4 弁支持部 5 通気孔付き弁 6 通気孔 7 弁座 8 通気路 9 吸引口 10 真空室 11 吸引ポート 12 弾性体 13 本体 14 吸着パット 15 パレット支持部 W ワーク 1 Main Body 2 Suction Hole 3 Valve Chamber 4 Valve Support 5 Valve with Ventilation Hole 6 Vent Hole 7 Valve Seat 8 Ventilation Path 9 Suction Port 10 Vacuum Chamber 11 Suction Port 12 Elastic Body 13 Main Body 14 Suction Pad 15 Pallet Support W Work

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成3年8月30日[Submission date] August 30, 1991

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】特許請求の範囲[Name of item to be amended] Claims

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【特許請求の範囲】[Claims]

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0001[Correction target item name] 0001

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0001】 本発明は物をはさむことなく圧力差に
よって引き付けて持ち上げたり固定したりする真空吸着
装置に関するものである。
The present invention relates to a vacuum suction device that attracts and lifts or fixes an object without being pinched by a pressure difference.

【手続補正3】[Procedure 3]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0002[Name of item to be corrected] 0002

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0002】 一般に鉄板硝子板樹脂板ALC
ウエハ板材シート材壁パネル屋根パネルな
どを真空吸着し品物を傷付けずに搬送することができ
る真空チャックなどによる真空吸着装置が広く知られて
いる。従来のこの種の真空吸着手段としては真空吸着
すべき品物の形状および大きさなどをセンサーとか画像
処理装置などにより必要な大きさなどを識別して電磁弁
等を利用して各パットとバキューム系の間の切り替えを
行う。吸引孔と吸引ポンプが接続され、この吸引ポンプ
による吸引力によってワークに対して載置する部分を
真空吸着して固定するのが実情である。
Generally, iron plate , glass plate , resin plate , ALC
Plate, wafer, plate, sheet, wall panels, roofs panel by vacuum suction, can be conveyed without damaging the goods
A vacuum suction device such as a vacuum chuck is widely known. The conventional vacuum suction means of this kind, and each pad by using electromagnetic valves, etc. to identify like required size due to such shape and size of the article to be vacuum suction sensor Toka image processing apparatus Vacuum Switch between systems. The actual situation is that the suction hole and the suction pump are connected, and the portion to be mounted on the work is vacuum-sucked and fixed by the suction force of the suction pump.

【手続補正4】[Procedure amendment 4]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0004[Correction target item name] 0004

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0004】 前記問題点を解決するためのこの発明に
おける手段は、図1に示すように本体の下部に吸引孔を
設けこの吸引孔に連設して弁室を設け、この弁室の側
面に弁支持部を設け、この弁支持部に通気孔付き弁を設
この通気孔付き弁の通気孔は通気孔付き弁外周より
内側で吸引口の外周より外側に複数の通気孔を設け、弁
室の上面に弁座を設け、弁室の上面中央部上方に連設し
通気路を設け、この通気路上端部に吸引口を設け、この
吸引口を連通させる真空室を設け、この真空室の上面に
吸引ポートを設けることから構成されている。次に図3
に示すように上記解決手段の本休の吸引孔2外周に対し
連通するように弾性体12を設けたことから構成されて
いる。次に図4に示すように図1の解決手段を個別にし
本体の吸引孔の下端に連設し吸着パットを設けたこと
から構成されている。
[0004] means in the present invention for solving the above problems is provided with a suction hole in the lower portion of the main body 1, a valve chamber provided continuously to the suction hole, the side surface of the valve chamber in the valve support portion is provided, the vented valve to the valve support portion is provided, a plurality of vent holes on the outside of an outer periphery of the suction port from inside the vent vented valve outer periphery of the vented valve, A valve seat is provided on the upper surface of the valve chamber, a ventilation passage is provided continuously above the center of the upper surface of the valve chamber, a suction port is provided at the upper end of the ventilation passage, and a vacuum chamber is provided to connect the suction port. It consists of providing a suction port on the upper surface of the chamber. Next in FIG.
To suction holes 2 the outer periphery of the rest of the solutions as shown in
The elastic body 12 is provided so as to communicate with each other. Next, as shown in FIG. 4 to separate solutions of 1
The suction pad of the main body is continuously provided at the lower end of the suction hole.

【手続補正5】[Procedure Amendment 5]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0006[Correction target item name] 0006

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0006】以下に本発明の実施例を図面に基づいて説
明する。図1は真空吸着装置の動作断面図である。図2
は同平面図である。図3は電子部品などを実装する工程
においてプリント基板を搬送する真空吸着装置の底面に
弾性体を付けた動作断面図である。図4〜図6はロボッ
トのアームに取り付けて使用する真空吸着装置に吸着パ
ットを付けた動作断面図である。図7は板材の積み上げ
装置の動作断面図である。図8は同平面図である。図1
において、図1の左側半分の図は、吸引孔がワークWに
より塞がれているために吸引ポートからの吸引力により
真空室と弁室と吸引孔が負圧状態となるため通気孔付き
弁と弁座が接することなく負圧によりワークWを真空吸
着固定する。図1の右側半分の図は、吸引孔にワークW
がないため吸引ポートからの吸引力により通気路と真空
室が負圧状態となり、吸引孔側が大気圧状態となり通気
孔付き弁が吸引ポート側と吸引孔側の圧力差により通気
孔付き弁が吸い上げられ弁座と接し通気孔付き弁の通気
孔が弁座により塞がれるため吸引孔からの空気の流入は
遮断される。図3動作は図1と同じであるが、本体1
の底面に弾性体11を取り付けて傷をつけることができ
ないワークとか弾性体11とワークの間の密着性の向上
に対して使用することを目的としている。図4の場合に
は、ワークWがないため吸着パット側からの大気圧と吸
引ポートからの吸引力により通気路と真空室が負圧状態
となり、この吸引ポート側と吸引孔側の両方の圧力差に
より通気孔付き弁と弁座が接し通気孔付き弁の通気孔が
弁座により塞がれるため吸着パット側からの空気の流入
は遮断される。図5の場合には、ワークWと吸着パット
側が載置し、吸着パット側が塞がれるため吸引ポートか
らの吸引力により通気路と真空室と弁室と吸引孔が負圧
状態となり、圧力差がなくなるため、通気孔付き弁と弁
座が接することがなく吸着パットがワークWを真空吸着
固定する。図6の場合には、ワークWを真空吸着固定す
る動作は、上記説明と同じである。この後、真空吸着固
定して目的場所まで搬送する。図7の動作は、パレット
支持体の上側には吸引ポンプと稼働装置につながれてお
り、下側には図4の本体13が配列して取り付けられて
おり、ワークWに載置した吸着パットの面で本体13の
図6の動作により真空吸着固定され、そしてワークWに
載置していない吸着パットは、図4の動作説明により吸
着パット側からの空気の流入は遮断されるため真空吸着
固定されない。図8の平面図において規則的にパレット
支持体に取り付けられている本体の中で、ワークWにわ
ずかでも載置していない本体の吸着パットは、吸着パッ
ト側からの空気の流入は遮断される。ワークW1からW
3のようなサイズの違うワークに対して自動的に真空吸
着固定を行う。なおこの発明は前記実施例だけでなく現
在産業用に使用されている真空吸着装置に使用すること
が可能である。また前記実施例での構成に限定されるも
のでなく、弁室、通気孔付き弁、弁支持部、弁座の形状
並び図9〜図12のように通気孔付き弁の通気孔の大き
さと取り付け位置を任意に変更しても同じ効果があるな
ど、この発明の趣旨を逸脱しない範囲内で各部の構成を
任意に変更して具体化することも可能である。
An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an operation sectional view of the vacuum suction device. Figure 2
Is a plan view of the same. FIG. 3 is an operation cross-sectional view in which an elastic body is attached to the bottom surface of a vacuum suction device that conveys a printed circuit board in the process of mounting electronic components and the like. 4 to 6 are operation cross-sectional views in which a suction pad is attached to a vacuum suction device used by being attached to an arm of a robot. FIG. 7 is an operation cross-sectional view of a plate material stacking device. FIG. 8 is a plan view of the same. Figure 1
In the left half of FIG. 1, since the suction hole is blocked by the work W, the vacuum chamber, the valve chamber and the suction hole are in a negative pressure state due to the suction force from the suction port. The workpiece W is vacuum-adsorbed and fixed by negative pressure without the valve seat contacting. The right half of Fig. 1 shows the work W in the suction hole.
Since there is no pressure, the suction force from the suction port puts the ventilation path and vacuum chamber in a negative pressure state, the suction hole side becomes atmospheric pressure, and the valve with a vent hole sucks up the valve with a vent hole due to the pressure difference between the suction port side and the suction hole side. Since the vent hole of the valve with the vent hole is closed by the valve seat in contact with the valve seat, the inflow of air from the suction hole is blocked. The operation of FIG. 3 is the same as that of FIG.
The purpose is to attach the elastic body 11 to the bottom surface of the work and to use it for improving the adhesion between the work and the work that cannot be damaged. In the case of FIG. 4, since there is no work W, the ventilation passage and the vacuum chamber are in a negative pressure state due to the atmospheric pressure from the suction pad side and the suction force from the suction port, and the pressure on both the suction port side and the suction hole side is reduced. Due to the difference, the valve with a vent hole and the valve seat come into contact with each other, and the vent hole of the valve with a vent hole is blocked by the valve seat, so that the inflow of air from the adsorption pad side is blocked. In the case of FIG. 5, since the work W and the suction pad side are placed and the suction pad side is blocked, the suction force from the suction port causes the ventilation passage, the vacuum chamber, the valve chamber, and the suction hole to be in a negative pressure state, resulting in a pressure difference. Therefore, the suction pad fixes the workpiece W by vacuum suction without contact between the valve with a vent and the valve seat. In the case of FIG. 6, the operation for vacuum suction fixing the work W is the same as that described above. After that, it is vacuum-adsorbed and fixed, and then conveyed to a target location. In the operation of FIG. 7, the suction pump and the operating device are connected to the upper side of the pallet support, and the main body 13 of FIG. 6, the suction pad is fixed by vacuum suction by the operation of the main body 13 and the suction pad not placed on the work W is vacuum suction fixed because the inflow of air from the suction pad side is blocked by the operation description of FIG. Not done. In the main body regularly attached to the pallet support in the plan view of FIG. 8, the suction pad of the main body, which is not mounted on the work W even slightly, blocks the inflow of air from the suction pad side. . Work W1 to W
Vacuum suction fixation is automatically performed on workpieces of different sizes such as 3. The present invention can be applied not only to the above-mentioned embodiment but also to the vacuum suction device currently used for industrial use. Further, the configuration of the valve chamber, the valve with a vent hole, the valve support portion, and the shape of the valve seat are not limited to the configurations in the above-described embodiments, and the size of the vent hole of the valve with a vent hole as shown in FIGS. It is also possible to embody by arbitrarily changing the configurations of the respective parts within a range not departing from the spirit of the present invention, such as the same effect even if the mounting position is arbitrarily changed.

【手続補正6】[Procedure correction 6]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0007[Correction target item name] 0007

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0007】以上のように、この発明によれば、本体の
下部に吸引孔を設け、この吸引孔に連設して弁室を設
け、この弁室の側面に弁支持部を設け、この弁支持部に
通気孔付き弁を設けこの通気孔付き弁の通気孔は通気
孔付き弁外周より内側で吸引口の外周より外側に複数の
通気孔を設け、弁室の上面に弁座を設け、弁室の上面中
央部上方に連設し通気路を設け、この通気路上端部に吸
引口を設け、この吸引口を連通させる真空室を設け、こ
の真空室の上面に吸引ポートからの構成と真空吸着装置
吸引孔外周に対し弾性体を設けたことからの構成と
吸着パットの上部に連設し本体を設け、本体内の下部に
吸引孔を設けこの吸引孔に連設して弁室を設け、この
弁室の側面に弁支持部を設け、この弁支持部に通気孔付
き弁を設けこの通気孔付き弁の通気孔は弁外周より内
側に複数の通気孔を設け、弁室の上面に弁座を設け、弁
室の上面中央部上方に連設し通気路を設け、この通気路
上端部に吸引口を設け、この吸引口に連設し真空室を設
け、この真空室の上面に吸引ポートを設けることからの
構成したため次の効果が生ずる。 (1)真空吸着装置の本体の吸引孔に対して、ワークを
載置した場合に同時に吸引部分と非吸引部分を設けるこ
とができる。そのため従来吸引面積がワークサイズの変
更によりかわるたびに非吸引部分へのマスキングの作業
が不用となった。そのためマスキング材なども不用とな
り労力面だけでなくコストダウンもはかれるようになっ
た。 (2)弁室並び通気孔付き弁の軽量で薄い形状が可能と
なり吸引部分と非吸引部分の吸引孔を素早く確実に開閉
動作するとともに吸引部分と非吸引部分の判別が自動的
にできるため従来のようなセンサーなどによる複雑な機
構を必要でなくメンテナンスも簡単となり装置全休のコ
ストダウンもはかれるようになった。 (3)本体が軽量小型にできるため真空吸着装置が簡単
に取り付けが可能となった。そのためロボットなどのア
ームの慣性質量の軽減が可能となり駆動制御が安全確実
となった。 (4)ワークわずかでも載置していない吸引孔に対し
ても確実に空気の流入を遮断するため真空吸着力が下が
らないため従来のように大型の吸引ポンプを必要とせず
電力の節電と騒音軽減の効果がある。 (5)図4の本体の真空吸着装置を複数配置して方向
に対して本体が独立して稼働できるような構造も可能で
あるこの構造により凹凸のワークWに対しても吸着固
定が可能となる。 (6)従来のボールバルブでは、規格があるため任意の
大きさにすることが困難であったが、この通気孔付き弁
の構造により薄い板を使用することで加工が簡単である
ばかりか、量産化が可能となりコストダウンが図れるば
かりか稼働部分が最小限となるためメンテナンスが簡単
となる。 ─────────────────────────────────────────────────────
As described above, according to the present invention, the suction hole is provided in the lower portion of the main body, the valve chamber is provided continuously with the suction hole, and the valve support portion is provided on the side surface of the valve chamber. provided, the valve support portion vented valve provided, in the vented valve vent of the plurality on the outside of an outer periphery of the suction port inside the outer peripheral vented valve
A vacuum chamber in which a ventilation hole is provided, a valve seat is provided on the upper surface of the valve chamber, a ventilation passage is provided continuously above the center of the upper surface of the valve chamber, a suction port is provided at the upper end of the ventilation passage, and the suction port is in communication. A vacuum suction device is provided on the upper surface of this vacuum chamber.
The relative suction holes periphery, the continuously provided to the main body provided above the arrangement and the suction pad from the provision of the elastic member, the lower the suction holes in the body is provided, a valve chamber and continuously to the suction hole provided, the valve support portion is provided on the side surface of the valve chamber, the vented valve provided in the valve support portion, the vent hole of the vented valve provided with a plurality of vent holes on the inner side of the Bengaishu, of the valve chamber A valve seat is provided on the upper surface, a ventilation path is provided continuously above the center of the upper surface of the valve chamber, a suction port is provided at the upper end of this ventilation path, and a vacuum chamber is provided continuously to this suction port. Since the construction is made by providing the suction port on the upper surface, the following effects are brought about. (1) A suction portion and a non-suction portion can be provided at the same time when a work is placed in the suction hole of the main body of the vacuum suction device. Therefore the conventional suction area working masking to non suction portion each time to replace the change of the work size is no longer needed. As a result, masking materials have become unnecessary, and not only labor but also cost reduction has come to be achieved. (2) Lightweight and thin shape of the valve chamber and the valve with vent hole is possible, and the suction holes of the suction part and the non-suction part can be opened and closed quickly and surely, and the suction part and the non-suction part are automatically discriminated. Since it does not require a complicated mechanism such as a sensor as in the past, maintenance is simple and the cost of the entire system can be reduced. (3) Since the main body can be made light and small, the vacuum suction device can be easily attached. Therefore, it is possible to reduce the inertial mass of the arm of robots, etc., and drive control is safe and reliable. (4) Even if there is a small amount of work, the suction of air is surely blocked even for suction holes that are not placed, and the vacuum suction force does not decrease, so there is no need for a large suction pump as in the past, and power is saved. Effective in reducing noise. (5) A structure is also possible in which a plurality of vacuum suction devices of the main body of FIG. 4 are arranged and the main body can operate independently in the vertical direction . With this structure, it is possible to attract and fix even the uneven work W. (6) With conventional ball valves, it was difficult to make them any size due to the standard, but this valve with a vent hole
By using a thin plate with this structure , not only is processing easier, but mass production is possible and cost reduction is possible.
Maintenance is easy because the number of moving parts is minimized. ─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成4年3月8日[Submission date] March 8, 1992

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図1[Name of item to be corrected] Figure 1

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図1】 [Figure 1]

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図3[Name of item to be corrected] Figure 3

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図3】 [Figure 3]

【手続補正3】[Procedure 3]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図4[Name of item to be corrected] Fig. 4

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図4】 [Figure 4]

【手続補正4】[Procedure amendment 4]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図5[Name of item to be corrected] Figure 5

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図5】 [Figure 5]

【手続補正5】[Procedure Amendment 5]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図6[Name of item to be corrected] Figure 6

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図6】 [Figure 6]

【手続補正6】[Procedure correction 6]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図7[Name of item to be corrected] Figure 7

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【図7】 [Figure 7]

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 本体1内の下部に吸引孔2を設け,この
吸引孔2に連設して弁室3を設け、この弁室3の側面に
弁支持部4を設け、この弁支持部4に通気孔付き弁5を
設け,この通気孔付き弁5の通気孔6は通気孔付き弁5
外周より内側で吸引口9の外周より外側に複数の円形の
通気孔6を設け、弁室3の上面に弁座7を設け、弁室3
の上面中央部上方に連設し通気路8を設け、この通気路
8上端部に吸引口9を設け、この吸引口9を連通させる
真空室10を設け、この真空室10の上面に吸引ポート
11を設けることを特徴とする真空吸着装置。
1. A suction hole 2 is provided in a lower portion of a main body 1, a valve chamber 3 is provided continuously to the suction hole 2, and a valve support portion 4 is provided on a side surface of the valve chamber 3. 4 is provided with a valve 5 with a vent hole, and the vent hole 6 of the valve 5 with a vent hole is the valve 5 with a vent hole.
A plurality of circular vent holes 6 are provided inside the outer periphery and outside the outer periphery of the suction port 9, and a valve seat 7 is provided on the upper surface of the valve chamber 3,
A ventilation passage 8 is provided continuously above the center of the upper surface of the air passage, a suction port 9 is provided at the upper end of the ventilation passage 8, and a vacuum chamber 10 for communicating the suction port 9 is provided. A suction port is provided on the upper surface of the vacuum chamber 10. 11. A vacuum suction device provided with 11.
【請求項2】 請求項1の真空吸着装置の吸引孔2外周
に対し,弾性体12を設けたことを特徴とする請求項1
の真空吸着装置。
2. An elastic body 12 is provided on the outer periphery of the suction hole 2 of the vacuum suction device according to claim 1.
Vacuum suction device.
【請求項3】 吸着パット14の上部に連設し本体13
を設け、本体13内の下部に吸引孔2を設け,この吸引
孔2に連設して弁室3を設け、この弁室3の側面に弁支
持部4を設け、この弁支持部4に通気孔付き弁5を設
け,この通気孔付き弁5の通気孔6は通気孔付き弁5外
周より内側で吸引口9の外周より外側に複数の円形の通
気孔6を設け、弁室3の上面に弁座7を設け、弁室3の
上面中央部上方に連設し通気路8を設け、この通気路8
上端部に吸引口9を設け、この吸引口9に連設し真空室
10を設け、この真空室10の上面に吸引ポート11を
設けることを特徴とする真空吸着装置。
3. A main body 13 which is continuously provided on an upper portion of the suction pad 14.
Is provided, a suction hole 2 is provided in the lower portion of the main body 13, a valve chamber 3 is provided in series with the suction hole 2, and a valve support portion 4 is provided on a side surface of the valve chamber 3, and the valve support portion 4 is provided. A valve 5 with a vent hole is provided, and the vent hole 6 of the valve 5 with a vent hole is provided with a plurality of circular vent holes 6 inside the outer periphery of the valve 5 with a vent hole and outside the outer periphery of the suction port 9, A valve seat 7 is provided on the upper surface, and a ventilation passage 8 is provided continuously above the central portion of the upper surface of the valve chamber 3.
A vacuum suction device characterized in that a suction port 9 is provided at an upper end portion, a vacuum chamber 10 is provided continuously to the suction port 9, and a suction port 11 is provided on an upper surface of the vacuum chamber 10.
JP26810791A 1991-07-16 1991-07-16 Vacuum suction device Pending JPH07171782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26810791A JPH07171782A (en) 1991-07-16 1991-07-16 Vacuum suction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26810791A JPH07171782A (en) 1991-07-16 1991-07-16 Vacuum suction device

Publications (1)

Publication Number Publication Date
JPH07171782A true JPH07171782A (en) 1995-07-11

Family

ID=17453997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26810791A Pending JPH07171782A (en) 1991-07-16 1991-07-16 Vacuum suction device

Country Status (1)

Country Link
JP (1) JPH07171782A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101591414B1 (en) * 2015-07-28 2016-02-03 주식회사 삼인이엔지 Vacuum adsorption apparatus
JP2019218165A (en) * 2018-06-18 2019-12-26 株式会社東芝 Cargo handling device and program

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137788A (en) * 1979-02-22 1980-10-27 Northern Telecom Ltd Digital signal receiver for receiving pcm voice
JPS61241088A (en) * 1985-04-19 1986-10-27 日立金属株式会社 Vacuum sucker
JPS62215116A (en) * 1986-03-17 1987-09-21 新技術事業団 Multi-cup type negative pressure sucker

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137788A (en) * 1979-02-22 1980-10-27 Northern Telecom Ltd Digital signal receiver for receiving pcm voice
JPS61241088A (en) * 1985-04-19 1986-10-27 日立金属株式会社 Vacuum sucker
JPS62215116A (en) * 1986-03-17 1987-09-21 新技術事業団 Multi-cup type negative pressure sucker

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101591414B1 (en) * 2015-07-28 2016-02-03 주식회사 삼인이엔지 Vacuum adsorption apparatus
JP2019218165A (en) * 2018-06-18 2019-12-26 株式会社東芝 Cargo handling device and program

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