JPH07171528A - Washing apparatus - Google Patents

Abstract

PURPOSE:To peel and remove the washing water attached to a work substitutionally with high efficiency by water substituting oil in water washing not generating an environmental pollution problem and an environmental disruption problem. CONSTITUTION:A washing tank 3' is formed in a first separation tank 7' and a stagnation weir 14 is formed to the second separation tank 7'' adjacent to the separation tank 7' and a flooding weir 15 is formed to the water substituting oil recovery tank 8' further adjacent to the tank 7'' to be faced to the weir 14. Shaking is applied to a work 1 and drain 6' is stored in the lower part of the second separation tank 7'' and water substituting oil 6'' is stored in the water substituting oil recovery tank 8' through a sufficient stagnation time to be refluxed to the nozzle 13 disposed in the upper part of the washing tank 3' by a reflux passage 17. By this constitution, the washing water attached to the work is substitutionally and certainly removed and discharged in a full- automatic manner by the water substituting oil and the reutilization of the water substituting oil due to recovery is certainly performed and precise washing and cost reduction are certainly performed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The disclosed technology belongs to the field of technology for precisely cleaning an electronic component such as a semiconductor wafer or a precision component such as an optical mechanical product that has been processed in the preceding step.

[0002]

2. Description of the Related Art As is well known, the development of modern civilization largely depends on the rise of science and technology, and in particular, it is extremely important that it is supported by the recent development of precision machinery, electric and electronic devices. is there.

Therefore, the precision of the kind of precision machine parts is required to be extremely high.

Therefore, since the components of the various types of mechanical electronic devices and optical mechanical devices have complicated functions,
Not only the individual parts themselves, but also the assembling mechanism of these sub-micron units have been required to exceed the so-called micron unit, and the sophistication is simply required at the time of manufacturing. Not only the sophistication in the process but also the cleanliness in the finishing process requires submicron-level cleanliness beyond the micron level.
Unless such cleanliness in submicron units can be obtained, the essential functions of the devices cannot be achieved as designed.

Therefore, not only the precision in the working process but also the precision cleaning in the finishing process is indispensable for the device parts.

Therefore, in the manufacturing process of such a precision industrial product, there are various processes such as cutting and polishing in the manufacturing process in the first stage, so that the work inevitably has chips, oils, and dust from the surroundings of the working environment. There are many fine and undesirable deposits such as deposits.Therefore, since these fine deposits significantly impair the original functioning of the device parts, etc., cleaning work is performed before the final product in the finishing process. It is indispensable to peel off and remove these deposits by using the cleaning agent, and in the cleaning operation, the cleaning agent is used to go through a plurality of cleaning steps and finally dry, etc. It is supposed to be transported to the finishing process.

In order to deal with this, in the precision cleaning in the finishing process, various organic and inorganic cleaning liquids such as CFC and trichloroethane have been used so far to meet the demand. Not only causes pollution problems such as air pollution, but also environmental problems such as ozone layer depletion have come to the point of not being ignored on a global scale.
Not only problems by specific manufacturers but also international social problems, for example, by 1995, it became impossible to use and manufacture, and even the intervention of laws and regulations became unavoidable. Therefore, the non-use condition of the cleaning agent, which has an important influence on pollution problems and environmental problems such as Freon and trichloroethane, is gradually replaced by water cleaning, and in many manufacturing sites,
For example, cleaning with pure water is being introduced.

Although various cleaning techniques such as ultrasonic cleaning have been added to a level where pure water cleaning can be performed as desired, a new problem is emerging as a neck.

[0009]

That is, although cleaning with pure water is said to be a technique for clearing the problems such as freon and trichloroethane, the water adhering to the work is removed through a drying process in the cleaning process. However, the complicated mechanism may not always be sufficiently dried and removed, and if it remains in the adhered state, it may lead to rust on the work. There is the inconvenience of not having it.

Therefore, in order to deal with this, in order to prevent water from adhering after washing with water to prevent rust from occurring,
So-called water displacement oils (MNS) have been developed and used for cleaning.

Since such water-displacing oil (MNS) is treated in a cleaning process so as to remove water adhering to the work in a two-phase manner, the work has the following problems. Is occurring.

That is, it is possible to uniformly treat the wastewater separated from the work when the cleaning water adhering to the work is replaced with the water replacement oil, supply new water replacement oil, or maintain a uniform concentration. There is a difficulty that there is not, and to deal with this,
A system like that shown in FIG. 2 is conceivable.

That is, the object to be cleaned 1 as a workpiece which has been processed in a predetermined manner in the previous step is carried into a cleaning tank 3 having a liquid level gauge 2 together with a cage 4 by a predetermined loading / unloading mechanism 5, and the cleaning tank 3 The water replacement oil 6 stored in a predetermined amount replaces the cleaning water adhering in the cleaning process with water in the preceding stage and the water replacement oil 6 to undergo a cleaning action, and is transferred to the next drying process. Thus, the water displacement oil 6 that has been used for the cleaning operation in the cleaning tank 3 and the waste water that has been peeled off and removed are discharged to the separation tank 7 connected to the water replacement oil 6 and the difference in specific gravity is caused. The settling wastewater 6'is appropriately discharged, and the upper water replacement oil 6 '' is supplied to the recovery tank 8 and circulated to the cleaning tank 3 through the pump 9 and the filter 10 so that it can be recovered and reused. To be
Liquid level control and storage amount control in each tank are electrically controlled by a limit switch 11, solenoid valves 12, 12, ... Through a control device 13.

However, in such a system, as shown in FIG. 2, a plurality of tanks are indirectly connected by a passage, the structure is complicated, and the control management of each liquid level and storage amount is complicated. Further, there is also a disadvantage that the plant operation causes high cost due to flow resistance and pressure loss in each passage.

There is also the disadvantage that it is difficult to guarantee the cleanliness of the expensive water-displaced oil 6 ″ in the circulating recovery.

There is also a problem that the automatic operation of the system may not be performed smoothly due to the above-mentioned restrictions.

[0017]

OBJECT OF THE INVENTION The object of the invention of this application is to remove the cleaning water adhering to the work by water cleaning instead of the cleaning liquid such as CFC or trichloroethane, which has a serious influence on the pollution problem and environmental harmony problem based on the above-mentioned prior art. Then, when cleaning with a water replacement oil capable of preventing rust generation, etc., it is a technical subject to solve various problems of the water replacement oil and drainage of water adhering to the work, and precision cleaning can be performed on the work, and ,
We can fully deal with pollution problems and environmental harmony problems,
We aim to provide an excellent cleaning device that will benefit the field of finishing technology application in the precision machinery manufacturing industry by ensuring effective circulation recovery and reuse of expensive water-displacing oil and ensuring that the entire system is managed and controlled. It is a thing.

[0018]

In order to solve the above-mentioned problems, an electronic component such as a semiconductor wafer or an optical mechanical device has It is suitable to replace the water adhering to the work with the water replacement oil by performing water cleaning after the predetermined processing in the preceding process of precision machinery products such as parts etc. When peeled and removed and transferred to the finishing process such as the next drying process, the work carried in the cleaning tank is subjected to a swinging action such as a predetermined swiveling motion in the cleaning tank, and mechanical, Physically adhered water is removed and removed by substitution with water displacement oil and settles due to the difference in specific gravity,
From the lower end of the cleaning tank, the water is drained into the first separation tank provided through the cleaning tank and settles in the lower part, and the water replacement oil overflows from the upper part of the cleaning tank and the first separation tank and It flows into the second separation tank integrally attached to the first separation tank through the retention weir for a sufficient retention time, and drains from the lower end of the first separation tank to the lower part of the second separation tank. Of the second separation tank, the drainage is stored in the lower portion of the second separation tank, and the water displacement oil is accumulated in the upper portion of the second separation tank in a laminated manner. Thus, the water displacement oil is accumulated from the upper portion of the second separation tank through the overflow weir. Spills over a sufficient residence time and overflows into the water displacement oil recovery tank, the drainage in the lower part of the second separation tank is appropriately discharged, and the water displacement oil in the water replacement oil recovery tank is returned to the reflux passage. After passing through the filter through the filter, it is cleaned to a predetermined degree and is returned to the upper part of the washing tank for effective reuse, and each tank is integrated. The provided limit switch float switched via the control unit fully automatically manage the control solenoid valve is operated, in which cleaning of reliable work took technical means to be performed.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The following will describe one embodiment of the invention of this application with reference to FIG.

The same parts as in FIG. 2 will be described using the same reference numerals.

The illustrated embodiment is an embodiment in which the final cleaning of semiconductor wafers is carried out by water displacement oil, and 16 is a cleaning device which is the subject matter of the invention of this application, and the whole system is operated in a plant manner. The cleaning tank 3'is the first
Is provided in the upper part of the separation tank 7'of a type of double tank, and the second separation tank 7 "is integrally attached to the first separation tank 7 '. Furthermore, the water replacement oil recovery tank 8
'Is integrally attached to the second separation tank 7''through the partition wall 8'', and therefore these cleaning tanks 3'and the first separation tank 7'
Separation tank 7 ', second separation tank 7 ", water replacement oil recovery tank 8'
Are all linked together.

Then, the bottom of the cleaning tank 3'is made to have an inclined shape to form a drainage port 3 "near the second separation tank 7", and the lower portion of the first separation tank 7'is tapered. The bottom of the second separation tank 7 ″ is connected to the bottom of the second separation tank 7 ″ via a solenoid valve 12.

The cleaning tank 3'and the first separation tank 7 '
Bottom, second separation tank 7 ″, water replacement oil recovery tank 8 ′
In this case, limit switches 11, 11, 11 of the float switch type are respectively provided and electrically connected to the control device 13 '.

Further, the bottom of the second separation tank 7 '' is connected to an appropriate waste water treatment section via an electromagnetic valve 12 and has an appropriate purifying function via the electromagnetic valves 12 and 12 and a pump 9 '. It is connected to the drainage tank 7 '''.

Further, the drain tank 7 '' is provided with a float switch type limit switch 11 as described above, and is electrically connected to the control device 13 'so that it can be drained to an appropriate drainage treatment device. Has been done.

Further, in the water displacement oil recovery tank 8 ', the bottom portion of the water displacement oil recovery tank 8'is made to be able to return the water displacement oil to the water displacement oil tank 8 "' via the solenoid valve 12 and another solenoid valve. The water from the water replacement oil recovery tank 8'is connected to the nozzles 13 and 13 provided on the upper portion of the cleaning tank 3'via the pump 9 and the filter 10 via the reflux passage 17 and the solenoid valves 12 and 12. The replacement oil 6 ″ can be collected and recycled for effective reuse.

A cage 4'for swinging and swinging the work 1 immersed in the water displacement oil 6 ", which is stored in a predetermined amount in the cleaning tank 3 ', at a predetermined angle is provided in the swinging device 5'. It is linked.

The rocking device 5 ', each solenoid valve 12, the limit switch 11, and the pumps 9, 9', 9 ",
The filter 10 is electrically connected to the control device 13 'so that it can be operated by a predetermined program.

Reference numeral 2 is a liquid level gauge, which is installed in the water displacement oil recovery tank 8'in this embodiment, but by design, the first and second separation tanks 7 ', 7 ", and It is also possible to attach it to the cleaning tank 3 '.

Reference numerals 18 and 18 'are lids.

In the above-mentioned structure, the work 1 which has been subjected to the predetermined processing is washed in a predetermined stage with pure water or the like, and the cage 4
It is immersed in water replacement oil (MNS) 6 ″ stored in the cleaning tank 3 ′ and stored in the cleaning tank 3 ′, and is swung by the rocking device 5 ′ through the control device 13 ′ for a predetermined time at a predetermined tilt angle. , The water that is physically and mechanically affected by the water replacement oil 6 ″ removes the water adhering to the work 1 in the previous water washing step, and the replaced water 6 ′ settles due to the difference in specific gravity. Through the drainage port 3 ″ at the lower end opening of the cleaning tank 3 ′ into the first separation tank 7 ′ and stored in the lower portion thereof by gravity settling.

When a predetermined amount of waste water 6'is stored in the first separation tank 7 ', the limit switch 11 detects it and the control device 13' opens the solenoid valve 12 and is installed side by side. It is discharged to the lower part of the second separation tank 7 ″.

In this case, depending on the design, the solenoid valve 1
A drainage passage of No. 2 may be provided with a pump so as to drain the water in a controlled manner.

On the other hand, when the amount of the water-displaced oil 6 ″, which has been water-displaced in the cleaning tank 3 ′, exceeds the set amount in accordance with the supply amount from the nozzle 13 described below, it is overflowed from the upper part. The drainage 6'of the lower part which is supplied to the upper part of the separation tank 7 '' that is also installed can be stored also in the upper part, but in the second separation tank 7 '', the retention weir 14 is provided. The water replacement oil 6 ″ in the second separation tank 7 ″ is separated and stored in the second separation tank 7 ″ without causing a disturbance on the liquid surface, and the separation and storage is reliably performed over a sufficient retention time. From the overflow weir 15 provided on the other side, the purity of the water replacement oil 6 ″ in the water replacement oil recovery tank 8 ′ is sufficiently ensured.

Further, when the water replacement oil 6 ″ accumulated and stored in the upper portion of the second separation tank 7 ″ exceeds a predetermined amount by the overflow weir 15, it overflows and the adjacent water replacement oil recovery is performed. Stored in tank 8 '.

When the drainage 6'at the bottom of the second separation tank 7 "reaches a predetermined amount, the limit switch 11 sends data of the detected amount to the control device 13 'to open the solenoid valve 12, It is designed to be supplied to a predetermined wastewater treatment device or drainage tank 7 ''', so that the storage amount of the water replacement oil 6''at the upper part of the second separation tank 7''increases and the retention time Is more sufficiently taken, and the purity of the overflow water replacement oil 6 ″ in the water replacement oil recovery tank 8 ′ is more sufficiently guaranteed.

Then, the limit switch 11 of the water replacement oil recovery tank 8'or the limit switch 11 of the cleaning tank 3 '
The limit switch 11 of the water replacement oil recovery tank 8'operates by the mutually independent operations of the nozzles 1 provided above the cleaning tank 3'through the water replacement oil 6 '' via the pump 9 and the filter 10.
Water-displacing oil 6 ″ is appropriately circulated from 3, 13 into the cleaning tank 3 ′.

The nozzles 13 are designed for static supply so as not to disturb the liquid surface of the cleaning tank 3 ', that is, to change the water displacement action of the work 1. .

Therefore, the liquid level of the water displacement oil 6 ″ stored in the cleaning tank 3 ′ is static, and the overflow to the second separation tank 7 ″ is also statically performed. Of the water replacement oil 6 ″ stored in the water replacement oil recovery tank 8 ′ through the retention weir 14 in the separation tank 7 ″ of FIG. Therefore, the water replacement oil recovery tank 8 ′
The storage of drainage water 6'at the bottom of the tank is avoided, and the purity of the water replacement oil 6 '' that is collected and circulated is sufficiently clean and therefore adheres to the work 1 in the cleaning tank 3 '. Substitution of water Water is drained reliably, operation of each solenoid valve 12 and operation of pump 9 and filter 10 are also performed reliably, and reliable operation of the system as fully designed is guaranteed. become.

Of course, the embodiment of the invention of this application is not limited to the above-mentioned embodiment. For example, the swinging of the work is not limited to the swing swing in the tilt direction, but the vertical direction in the parallel posture. It is possible to adopt various modes such as the above.

[0041]

As described above, according to the invention of this application, when water cleaning is adopted in place of a cleaning agent that may cause environmental damage or pollution problems such as CFC or trichloroethane, the work in the water cleaning is basically adopted. Cleaning water that adheres to the work is cleaned together with the cleaning to prevent rust generation on the work after the finishing process, or in the subsequent process to remove the water that has adhered to the work via the water displacement oil. Therefore, the waste water of the cleaning water adhering to the work can be reliably separated from the water-displacing oil, and the water-displacing oil used can be effectively recovered and reused, saving resources and reducing costs. ,
In addition, the excellent effect that the adherent cleaning water of the work can be reliably removed is achieved.

Further, since the system operation of the entire plant is carried out fully automatically, there is an excellent effect that it is extremely efficient, requires almost no maintenance and inspection of the plant, and can be operated with high efficiency. It

Further, the entire plant can be made compact, and in this respect, not only the initial cost but also the running cost and the product cost can be reduced.

Further, since both the wastewater and the water-displacing oil are treated with high purity, there is also an advantage that there is no risk of pollution problems due to factory wastewater.

[Brief description of drawings]

FIG. 1 is an overall schematic diagram of one embodiment of the invention of this application.

FIG. 2 is a schematic diagram of a water displacement oil cleaning system based on the prior art.

[Explanation of symbols]

 6 '' Water displacement oil 3'Washing tank 6'Water 7 'Separation tank (first separation tank) 7' 'Second separation tank 16 Cleaning device 8'Water displacement oil recovery tank 5'Swing device 17 Reflux passage 14 Retaining weir 15 Overflow weir

Claims (5)

[Claims] 1. A cleaning apparatus in which a water replacement oil and a water separation tank are installed side by side in a cleaning tank for storing the water replacement oil, wherein the cleaning tank is provided in a first separation tank. A cleaning device, wherein a second separation tank having a weir is provided in the separation tank, and a water replacement oil recovery tank is also provided side by side through the second separation tank. 2. The cleaning device according to claim 1, wherein an object swinging device is arranged in the cleaning tank. 3. A reflux passage is provided from the water-replacing oil recovery tank to the cleaning tank.
The cleaning device according to the item. 4. The cleaning apparatus according to claim 1, wherein the weir is a retention weir for the first separation tank and an overflow weir for the water replacement oil recovery tank. 5. The cleaning apparatus according to claim 1, wherein all the tanks are integrally connected.