JPH07167328A - Magnetic driving valve - Google Patents

Abstract

PURPOSE:To provide a magnetic driving valve whose constitution is simple, assembly is easy, weight and size of an outer shape are small, prescribed driving force is obtained at all times to ensure sealing of a valve body, and in which there is no generation of noise for respectively exerting wrong effect to purity of fluid which flows in the inside thereof and to sealing function of a valve, so that there is no generation of large noise and shock at the time of operation. CONSTITUTION:Valve seats 22 are provided in gas passages 16a, 16b which are formed in a valve main body 12, and a valve seat for a metal made diaphragm 26 which is in freely separable contact with a valve seat and a first rare earth permanent magnet 32 which is fixed on the valve body are provided in the valve main body 12. A second rare earth permanent magnet 34 which is in freely separable contact with a magnet and a valve operating member 36 for selectively separating and being brought contact a second magnet with the first magnet 32 are provided on the valve body. The second magnet 34 is in selectively brought contact with the first magnet 32 by the valve operating member, and both magnet forces are acted each other between two magnets 32, 34. It is thus possible to arrange the valve body in either one of an opening position or a closing position.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic drive valve for selectively driving a valve body to a first position or a second position with respect to a valve seat by magnetic force.

[0002]

2. Description of the Related Art A diaphragm valve is known as a switching valve used in piping of a device that handles high-purity gas. Here, the diaphragm itself is used as a valve body, and the diaphragm is urged by a spring to an open position or a closed position, and the diaphragm resists the urging force of the spring via a manually operated handle or a pneumatically driven piston. Driven to the closed or open position.

Pneumatic pressure is used to drive the diaphragm when it is necessary to operate the diaphragm valve remotely, and by using the pneumatic pressure, a large force is required to ensure the sealing of the diaphragm against the valve seat in the closed position. In addition, the moving speed of the diaphragm between the closed position and the open position can be promptly changed to quickly switch between blocking and allowing the gas flow.

Both the diaphragm and the corresponding valve seat are preferably made of metal in order not to affect the purity of the above-mentioned gas, but if both are made of metal, the life of the diaphragm is shortened. In many cases, a part of the valve seat that directly contacts the diaphragm (seating part) is made of synthetic resin.

In a manually operated diaphragm valve, there is a large difference in the force applied to the diaphragm by an operator via a manually operated handle, which makes the sealing of the diaphragm against the valve seat uncertain, or If an excessive force is applied to the diaphragm to ensure the airtightness, not only the life of the diaphragm will be shortened but also the diaphragm and the valve seat will be worn. As a result, a minute amount of gas contained in the worn portion is exuded to the flow passage in the diaphragm valve or wear powder is diffused, which adversely affects the purity of the fluid flowing in the flow passage and the sealing function of the valve.
In a diaphragm valve that is operated by air pressure, the structure of the air pressure drive unit becomes large, and large noise and impact are generated during operation.

[0006]

SUMMARY OF THE INVENTION The present invention has been made under the above circumstances, and an object of the present invention is to have a simple structure, easy assembling, small weight and small external dimensions, and to ensure sealing of a valve body. The specified driving force can always be obtained, and the diaphragm and valve seat that cause foreign substances that adversely affect the purity of the fluid flowing inside and the sealing function of the valve are not worn. It is to provide a magnetically driven valve that does not generate a shock.

[0007]

To achieve the above object, a magnetically driven valve according to the present invention comprises: a fluid passage having a fluid inlet and a fluid outlet, and a fluid passage provided in the fluid passage. A valve body including a valve seat; a valve member provided on the valve body and movable between a predetermined first position with respect to the valve seat and a predetermined second position with respect to the valve seat; provided on the valve member A first rare earth permanent magnet that moves together with the valve member; a second rare earth permanent magnet that is provided on the valve body and that can approach and separate from the first rare earth permanent magnet;
And an operating means for selectively moving the second rare earth permanent magnet toward and away from the first rare earth permanent magnet.

[0008]

When the second rare earth permanent magnet is selectively brought closer to the first rare earth permanent magnet by the operating means, the magnetic forces of the second rare earth permanent magnet and the first rare earth permanent magnet are mutually changed. When the valve member is arranged at either the first position or the second position, and the second rare earth permanent magnet is selectively moved away from the first rare earth permanent magnet by the operating means. The respective magnetic forces do not interact between the second rare earth permanent magnet and the first rare earth permanent magnet, which causes the valve member to be located in either the first position or the second position.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A magnetically driven valve according to various embodiments of the present invention will be described in detail below with reference to the accompanying drawings. [First Embodiment] FIG. 1 shows a longitudinal cross section of a main portion of a magnetic force driven valve 10 according to a first embodiment of the present invention.

In the magnetically driven valve 10 of the first embodiment, the valve body is composed of a metal diaphragm, and the metal diaphragm is between a closed position where it contacts the valve seat and an open position where it separates from the valve seat. This is a magnetic diaphragm magnetically driven on-off valve that is moved by magnetic force.

The metal diaphragm opening / closing valve handles a high-purity gas such as a semiconductor manufacturing process in which the release of a very small amount of water or hydrocarbon from a polymer material poses a problem and the polymer material cannot be used. Used for piping. Therefore, the valve seat is preferably made of metal as described in "Prior Art" above, but if both are made of metal, the life of the diaphragm will be shortened, so in reality the valve seat that directly contacts the diaphragm. In many cases, a part (seating portion) of the above is formed of synthetic resin.

The metal valve body 12 of the magnetically driven valve 10 has a first gas passage portion 16a having a gas inlet 14a.
And a second gas passage portion 16b having a gas outlet 14b
And a valve chamber 18 communicating with the inner ends of the first and second gas passage portions 16a and 16b.

The valve chamber 18 is opened to the outer peripheral surface of the valve body 12, the inner end of the first gas passage portion 16a is opened at the center of the inner bottom surface, and the second gas is provided around the center of the inner bottom surface. The inner end of the passage portion 16b is open.

A metal valve seat member 20 is housed in the deepest portion of the valve chamber 18, and the inner bottom surface of the valve chamber 18 and the valve seat member 2 are accommodated.
The inner surfaces of 0 are in intimate contact. The valve seat member 20 has a central hole 20a communicating with the inner end of the first gas passage portion 16a.
And a peripheral hole 2 communicating with the inner end of the second gas passage portion 16b.
0b and a central hole 2 facing the opening of the valve chamber 18
The peripheral edge of the outer end of 0a constitutes an annular valve seat 22 that rises toward the opening.

A peripheral portion of the outer surface of the valve seat member 20 facing the opening of the valve chamber 18 constitutes an annular diaphragm support surface 24 which is raised toward the opening. Valve chamber 18
Inside, a metal diaphragm 26 is arranged on the outer surface of the valve seat member 20, and the metal diaphragm 26 is pressed against the diaphragm support surface 24 of the valve seat member 20 by an annular metal diaphragm retainer 28. .

The metal diaphragm 26 is made of, for example, a Ni--Co alloy having high elasticity and high corrosion resistance in order to maintain a long life under severe operating conditions. The metal diaphragm 26 has a ring-shaped diaphragm retainer 28 and a valve seat member 20. It is airtightly fixed to the diaphragm support surface 24 by, for example, pressure contact. It should be noted that in FIG. 1, the metal diaphragm 26 is expressed with a larger thickness than the actual one for the sake of clarity in the drawing.

A diaphragm drive member 30 is arranged in the center hole of the diaphragm retainer 28. The diaphragm driving member 30 is configured as a diaphragm pressing surface that extends along the center line of the center hole and has an inner end surface having a large curvature, and a first rare earth magnet 32 is fixed to the outer end surface of the first rare earth magnet 32, for example, with an adhesive. There is.

In this embodiment, the first rare earth magnet 32
Has a disk shape, and is guided movably in the direction along the center line by an annular guide sleeve 28a formed in the peripheral portion of the outer surface of the diaphragm retainer 28.

Guide sleeve 2 for diaphragm retainer 28
In the inner space surrounded by 8a, a second rare earth magnet 34 similar to the first rare earth magnet 32 is provided on the first rare earth magnet 32.
Is stored further. First rare earth magnet 32 and second
The rare earth magnet 34 is housed in the internal space with the same magnetic poles facing each other.

The opening of the valve chamber 18 on the outer peripheral surface of the valve body 12 is covered with an opening cover 38 that concentrically and rotatably supports a screw handle type valve operating member 36. A second rare earth magnet 34 is fixed to the inner end of the center axis of rotation of the valve operating member 36 by, for example, an adhesive, and the valve operating member 36 rotates in one direction or the other direction so that Move along one direction or the other,
As a result, the second rare earth magnet 34 is connected to the first rare earth magnet 3
It is moved toward or away from 2.

Guide sleeve 2 for diaphragm holder 28
In the internal space surrounded by 8a, the first rare earth magnet 32
A biasing means 39 is arranged between the above and the bottom surface of the internal space, and the biasing means 39 biases the first rare earth magnet 32 together with the diaphragm drive member 30 toward the opening of the valve chamber 18. .

In this embodiment, the biasing means 39 is constituted by a conical spring, but a compression coil spring may be used instead, or between the first rare earth magnet 32 and the second rare earth magnet 34 is weaker. A magnet for generating a repulsive force can be installed on the bottom surface of the internal space.

In FIG. 1, the second rare earth magnet 34 is closest to the first rare earth magnet 32, in which case the magnetic forces of the first rare earth magnet 32 and the second rare earth magnet 34 are mutually different. The metal diaphragm 26 is brought into contact with the valve seat 22 of the valve seat member 20 via the diaphragm drive member 30 coupled to the first rare earth magnet 32 against the urging force of the urging means 39 to repel the valve seat 22. At, the inner end of the first gas passage portion 16a is closed.

The force input through the valve operating member 36 acts on the metal diaphragm 26 via magnetic force and does not directly act on the metal diaphragm 26. The force exerted by the magnetic force on the metal diaphragm 26 is a predetermined value, and is sufficient to ensure that the metal diaphragm 26 contacts the valve seat 22 and closes the inner end of the first gas passage portion 16a at the valve seat 22. Size, but metal diaphragm 26
Will not be damaged.

When the metal diaphragm 26 is directly operated by the valve operating member 36 as in the prior art, there is a large difference in the force applied to the metal diaphragm 26 by the operator via the valve operating member 36. The sealing of the metal diaphragm 26 with respect to the seat 22 may become uncertain, or an excessive force may be applied to the metal diaphragm 26 to ensure the above-mentioned sealing and the life of the metal diaphragm 26 may be shortened. However, in the above-described embodiment of the present application, the conventional drawbacks as described above do not occur.

Further, since the surface in contact with the valve seat 22 does not slide with respect to the valve seat 22, the metal diaphragm 26 and the valve seat 22 are not abraded due to the sliding. Therefore, the sealing performance of the metal diaphragm 26 is not deteriorated, and the metal diaphragm 26 is not worn due to the above wear.
Also, a small amount of gas contained in the worn portion of the valve seat 22 exudes into the central hole 20a and the peripheral hole 20b in the valve chamber 18 and flows through the first gas passage portion 16a and the second gas passage portion 16b. Neither does it affect the purity of the flowing gas, nor does the abrasion powder diffuse and intervene between the metal diaphragm 26 and the valve seat 22 to prevent the close contact between them.

In the embodiment of FIG. 1, when the valve operating member 36 is rotated in a predetermined direction to move the second rare earth magnet 34 away from the first rare earth magnet 32 from the position shown in FIG.
The repulsive force generated between the rare earth magnet 32 and the second rare earth magnet 34 is weakened, and the first rare earth magnet 32 moves toward the opening of the valve chamber 18 together with the diaphragm drive member 30 by the urging force of the urging means 39. . As a result, the metal diaphragm 26 is separated from the valve seat 22 by its own elastic force, and the gas can flow to the gas outlet 14b through the second gas passage portion 16b.

[Second Embodiment] FIG. 2 shows a second embodiment of the present invention.
A top view of a magnetically driven valve 40 according to the embodiment of is shown.

The magnetically driven valve 40 according to the second embodiment is used for the same purpose as the magnetically driven valve 10 of the first embodiment described above, and the first and second gas passage portions in the valve body 12 are used. 16a and 16b extend in directions substantially orthogonal to each other in the same plane, and the second rare earth magnet 34 is
The structure for approaching and separating the rare earth magnet 32 (see FIG. 1) is different from the structure of the magnetic force driven valve 10 of the first embodiment described above.

In this embodiment, the second rare earth magnet 34 is the first
Between the approaching position approaching above the rare earth magnet 32 (as shown in FIG. 1) and the separating position moving away from the first rare earth magnet 32 by moving horizontally from above the first rare earth magnet 32. It is free to move.

At the approaching position, the second rare earth magnet 34 is moved downward as shown in FIG. 1 against the urging force of the urging means 39 (see FIG. 1) by the repulsive force of the respective magnetic forces. The metal diaphragm 26 is biased to be placed in the closed position where it abuts on the valve seat 22 of the valve seat member 20 via the diaphragm drive member 30, and the first rare earth magnet 32 shown in FIG. On the other hand, the first rare earth magnet 32 is moved together with the diaphragm drive member 30 by the urging force of the urging means 39 without applying the repulsive force due to the magnetic force.
Move toward the opening of 8. Thereby, the metal diaphragm 26 can be separated from the valve seat 22 by its own elastic force, and the gas can flow to the gas outlet 14b through the second gas passage portion 16b.

The mechanism for moving the second rare earth magnet 34 in the horizontal direction between the approaching position and the separating position is constructed as follows. In this embodiment, the area of the outer peripheral surface where the valve chamber 18 is open in the valve body 12 is formed wider than in the case of FIG. 1 as shown in FIG. A second arc-shaped second rare earth magnet guide groove 41 is formed.

The above-mentioned region is covered with the opening cover 42, and the second
A rotation center shaft 44a of the knob 44 is rotatably supported at the center of the rare earth magnet guide groove 41. The second rare earth magnet 34 is slidably housed in the second rare earth magnet guide groove 41, and the center of rotation of the rotary knob type valve operating member 44 in the space between the area and the opening cover 42. Axis 44
It is fixed to a.

Therefore, when the valve operating member 44 is rotated 180 degrees, the second rare earth magnet 34 has the second rare earth magnet guide groove 4 formed therein.
In FIG. 1, an approach position (shown by a dotted line in FIG. 2) located above the first rare earth magnet 32 and approaching the first rare earth magnet 32 (as shown in FIG. 1) and a first rare earth magnet 32. Three
The rotation center axis 4 of the valve operating member 44 from the approaching position above 2
It is movable between the separated position (indicated by a chain double-dashed line in FIG. 2) rotated by 180 degrees around 4a.

The second rare earth magnet / approach / separation structure of the second embodiment is the second rare earth magnet / approach / separation structure of the first embodiment using the valve handle 36 of the screw handle type. Compared with, the planar shape is larger, but the dimension in the height direction can be smaller, and the operation of moving the second rare earth magnet 34 between the approaching position and the separating position becomes easier.

In addition, the magnetic force driven valve 40 according to the second embodiment can obtain the same effect as the magnetic force driven valve 10 according to the first embodiment described above. [Third Embodiment] FIG. 3A shows a longitudinal sectional view of a magnetic force driven valve 50 according to a third embodiment of the present invention, and FIG. The cross section along line BB of (A) is shown.

The valve body 5 of the magnetic force driven valve 50 of the third embodiment.
2 has a pair of valve chambers 18 formed therein as shown in FIG. 3A, and each valve chamber 18 has a gas inlet 14a as shown in the first embodiment of FIG. Passage part 16a
Is connected to the inner end of the second gas passage portion 16b having the gas outlet 14b. In each valve chamber 18, as shown in the first embodiment of FIG. 1, a valve seat member 20, a metal diaphragm 26, a diaphragm retainer 28, a diaphragm driving member 30, a first rare earth magnet 32, and a biasing means 39. Is housed.

In this embodiment, the second rare earth magnet 34 is a sliding knob type valve operating member 54 slidably provided in the surface area of the valve body 52 where the pair of valve chambers 18 are opened. The first position, which is held inside and is located immediately above the first rare earth magnet 32 in one valve chamber 18 as shown by the solid line in FIG. As shown by the chain double-dashed line, it is selectively moved between the second valve chamber 18 and the second position located immediately above the first rare earth magnet 32.

By disposing the second rare earth magnet 34 together with the valve operating member 54 at the first position or the second position, the first rare earth magnet 32 facing each other at each position.
Against the urging force of the urging means 39, thereby closing the corresponding metal diaphragm 26 (located on the right side in FIG. 3A) against the valve seat 22 of the valve seat member 20. Move to position. Further, the metal diaphragm 26 (located on the left side in FIG. 3A) corresponding to the first rare earth magnet 32 not facing the second rare earth magnet 34 is moved to the first position by the urging force of the urging means 39. Since the rare earth magnet 32 is moved toward the opening of the valve chamber 18 together with the diaphragm drive member 30, it is moved to the open position separated from the valve seat 22 by its own elastic force.

The magnetic force driven valve 50 according to this embodiment can also obtain the same effect as the magnetic force driven valve 10 of the first embodiment described above. [Fourth Embodiment] FIG. 4 is a longitudinal sectional view showing the main part of a magnetic force driven valve 70 according to a fourth embodiment of the present invention.
5A and 5B, the magnetically driven valve 7 of the embodiment of FIG. 4 is shown.
The upper and lower surfaces of the 0 main part are shown with some components removed.

In the magnetic force driven valve 70 of this embodiment, the
Four pairs of paired diaphragm valve units are arranged in the valve body 72 on a common circle at approximately equal intervals. The pair of upper and lower diaphragm valve units has a vertically symmetrical structure.
The structure of the valve seat member and the valve body is different from that of the diaphragm valve unit as described above in the first embodiment with reference to FIG. 1, but the other constituent members are the diaphragm valve as described in the first embodiment with reference to FIG. Since they are the same as the constituent members of the unit, the same reference numerals are given and detailed description thereof is omitted. Therefore, in FIGS. 5A and 5B, the upper surface and the lower surface of the valve body 72 are shown in a state in which the constituent members other than the valve seat member 20 ′ are removed from the four valve chambers 18.

The annular valve seat 22 'of the valve seat member 20' of this embodiment projects into the inner end portion of the first gas passage portion 16a rather than the metal diaphragm 26 side, and the valve is located at the inner end portion. A valve element 74 is arranged which cooperates with the seat 22 '. First gas passage portion 1 of a pair of upper and lower diaphragm valve units
6a are arranged concentrically and are connected to respective gas inlets 14a, in which a pair of valve bodies 74 of a pair of upper and lower diaphragm valve units are concentrically connected to each other by a connecting rod 76. . Each of the pair of valve elements 74 is also formed with a valve element drive rod 78 extending to the inner surface of the corresponding metal diaphragm 26 through the central hole 20'a of the corresponding valve seat 22 '. .

With such a structure, when only the upper metal diaphragm 26 is pressed downward in the pair of upper and lower diaphragm valve units, as shown in FIG. 4, the upper valve body 74 corresponds to the upper valve seat 22. ′, And at the same time, the lower valve element 74 is pressed downward via the connecting rod 76 to be seated on the corresponding lower valve seat 22 ′, and the lower metallic diaphragm 26 is attached via the valve element drive rod 78. Press down. On the contrary, the lower metal diaphragm 26
When only one of them is pushed upward, the lower valve body 74, contrary to FIG.
Are separated from the corresponding lower valve seat 22 ', and at the same time, the upper valve body 74 is pressed upward via the connecting rod 76 to be seated on the corresponding upper valve seat 22' and the valve body drive rod 78.
The upper metal diaphragm 26 is pressed upward via the.

In this embodiment, two pairs of upper and lower diaphragm valve units located diametrically in the valve body 72 are connected to the pair of upper and lower mutually connected gas inlets 14a, respectively, from two mutually different gas supply sources. One gas supply pipe 80a,
80b is connected.

Further, the remaining upper and lower two pairs of diaphragm valve units are connected to each other by a pair of upper and lower gas inlets 14a.
Two gas delivery pipes 82a and 82b are connected to. The gas outlet 14b of the second gas passage portion 16b of the upper and lower diaphragm valve units in each of the upper and lower two pairs of diaphragm valve units to which the gas supply pipes 80a and 80b are connected is shown in FIG. As shown, in the clockwise (clockwise) direction with respect to the diaphragm valve units located above in each of the remaining upper and lower two pairs of diaphragm valve units and above in each of the above two pairs of upper and lower diaphragm valve units. ) The second of the diaphragm valve units adjacent to these
Is communicated with the gas outlet 14b of the gas passage portion 16b.

Further, the gas outlet 14b of the second gas passage portion 16b of the diaphragm valve unit located below in each of the upper and lower two pairs of diaphragm valve units to which the gas supply pipes 80a and 80b are connected is shown in FIG. (B)
As shown in FIG. 5, the remaining two pairs of upper and lower diaphragm valve units are respectively located below the upper and lower two diaphragm valve units.
The pair of diaphragm valve units are connected to the gas outlet 14b of the second gas passage portion 16b of the diaphragm valve unit adjacent thereto in the counterclockwise direction (counterclockwise direction) with respect to the diaphragm valve unit located below. ing.

That is, in this embodiment, the valve body 74 of the upper diaphragm valve unit of each of the above four pairs of upper and lower diaphragm valve units is arranged at the lower separation position (valve opening position) as shown in FIG. Simultaneously with this, when the valve element 74 of the diaphragm valve unit positioned below correspondingly is arranged at the lower seated position (valve closed position) as shown in FIG. 4, the gas flowing from one gas supply pipe 80a A is sent out from one gas delivery pipe 82a, and gas B that has flowed in from the other gas supply pipe 80b is sent out from the other gas delivery pipe 82b.

On the contrary, in each of the above four pairs of upper and lower diaphragm valve units, the valve element 74 of the upper diaphragm valve unit is arranged at the upper seating position (valve closing position) contrary to FIG. At the same time, when the valve body 74 of the diaphragm valve unit located below correspondingly is arranged at the upper separated position (valve open position) contrary to FIG. 4, it flows in from one gas supply pipe 80a. The gas A is sent out from the other gas delivery pipe 82b, and the gas B flowing in from the other gas supply pipe 80b is sent out from the one gas delivery pipe 82a.

In the above-described fourth embodiment, upper and lower 4
In order to selectively move the pair of upper and lower valve bodies 74 of each pair of the pair of diaphragm valve units between the open position and the closed position, as shown in FIG. Two valve operating members 86a, 8
6b is arranged.

Each of the two valve operating members 86a and 86b is fixed to a common rotation center shaft 88 which is rotatably supported by the valve body 72, and rotates integrally. Valve body 72
Valve operating members 86a, 86 facing the upper and lower surfaces of the
Four second rare earth magnets 34 are provided on each inner surface of b.
They are arranged at substantially equal intervals on a common circle connecting the pair of diaphragm valve units.

However, the upper valve operating member 86a 4
The two second rare earth magnets 34 and the four second rare earth magnets 34 of the valve operating member 86b below are arranged 90 degrees apart.

As a result, the four second rare earth magnets 34 of the upper valve operating member 86a are arranged in the first rare earth magnets 32 of the upper four diaphragm valve units in the four pairs of metal diaphragm valves as shown in FIG. When arranged in opposite positions as shown, the four second rare earth magnets 34 of the lower valve actuating member 86b are coupled to the first rare earth magnets of the lower four diaphragm valve units of the four pairs of diaphragm valve units. Magnet 3
It is arranged at a position horizontally deviated by 90 degrees from the position facing 2 with respect to the horizontal direction as shown by the chain double-dashed line in FIG.

Therefore, in this case, the upper valve operating member 8
The four second rare earth magnets 34 of 6a generate a repulsive force between the first rare earth magnets 32 of the upper four diaphragm valve units in the four pairs of diaphragm valve units, and at the same time, the lower valve operation is performed. The four second rare earth magnets 34 of the member 86b are the first four rare earth magnets 3 of the lower four diaphragm valve units of the four pairs of diaphragm valve units.
Does not generate repulsive force between 2 and. Therefore, the four valve bodies 74 of the four diaphragm valve units located above in the upper and lower four pairs of diaphragm valve units are arranged in the open position as shown in FIG. The four valve bodies 74 of the four diaphragm valve units located are arranged in the closed position as shown in FIG.

The four second rare earth magnets 34 of the upper valve operating member 86a oppose the first rare earth magnets 32 of the upper four diaphragm valve units of the four pairs of diaphragm valve units as shown in FIG. When arranged horizontally at a position offset by 90 degrees in the circumferential direction, the four second rare earth magnets 34 of the lower valve operating member 86b are connected to the lower four diaphragms of the four pairs of diaphragm valve units. The valve unit is arranged at a position facing the first rare earth magnet 32.

Therefore, in this case, the upper valve operating member 8
The four second rare earth magnets 34 of 6a do not generate a repulsive force between the four first rare earth magnets 32 of the upper four diaphragm valve units in the four pairs of diaphragm valve units, and at the same time, the second downward movement is performed. The four second rare earth magnets 34 of the valve operating member 86b generate repulsive force with the first rare earth magnets 32 of the lower four metal diaphragm valves in the four pairs of diaphragm valve units. Therefore, the upper and lower 4 pairs of diaphragm valve units
The four valve bodies 74 of one diaphragm valve unit are arranged in the closed position opposite to the one shown in FIG.
The four valve bodies 74 of the four diaphragm valve units located below in the pair of diaphragm valve units are arranged in the open position, contrary to the one shown in FIG.

In the above-described fourth embodiment, in the upper and lower two pairs of diaphragm valve units in which the two gas supply pipes 80a and 80b are connected to the upper and lower pair of mutually connected gas inlets 14a, from the open position. In addition to the repulsive force between the first rare earth magnet 32 and the second rare earth magnet 34, the pressure of the gas flowing into the gas inlet 14a is also applied to the valve element 74 moving to the seated position, so that a pair of It is possible to quickly move the valve element 74 between the alternating open and seated positions.

A pair of upper and lower gas inlets 1 connected to each other
In the region of 4a facing the inner ends of the gas supply pipes 80a and 80b, as shown in FIG. 4, a recess 90 is formed which causes the gases A and B supplied from the gas supply pipes 80a and 80b to collide with each other to generate a turbulent flow. Has been done. This is because the valve element 74 that is located in the closed position (in the case of FIG.
This is to prevent the gases A and B supplied from the gas supply pipes 80a and 80b from staying on the upstream side of 4) as much as possible.

Needless to say, a projection may be used instead of the depression 90 for the purpose of generating the turbulent flow as described above. In each of the upper and lower four pairs of diaphragm valve units of the fourth embodiment, the same effect as that of the diaphragm valve unit of the magnetic drive valve 10 of the first embodiment described above can be obtained.

In the fourth embodiment, the urging means 39 installed in each diaphragm valve unit for urging the corresponding first rare earth magnet 32 together with the diaphragm driving member 30 toward the opening of the valve chamber 18 is not always necessary. Not a thing.

The magnetically driven valve 10 of the various embodiments described above,
Each of 40, 50, 60, 70 handled gas,
The present invention can also be applied to a magnetic force driven valve that controls the flow of a fluid including a liquid in a broad sense by turning the valve element on and off from a valve seat without using a diaphragm. . The magnetically driven valve of the present invention can be applied to various kinds of magnetically driven on-off valves such as a pressure regulating valve, a mass flow controller, a check valve, and a gate valve in addition to a stop valve, a switching valve, and a flow regulating valve. is there.

The magnetic force driven valve 1 of the various embodiments described above is used.
The respective diaphragm valve units of 0, 40, 50, 60, 70 are suitable for handling high-purity gas with a small area where the gas stays inside when the valve body is open and the gas is passing. There is.

Further, the magnetic force driven valve 1 of the various embodiments described above.
In each of 0, 40, 50, 60 and 70, when the first rare earth magnet 32 and the second rare earth magnet 34 are opposed to each other as an urging force for urging the valve body to the closed position or the open position, Although the repulsive force generated by the magnetism between the first rare earth magnet 32 and the second rare earth magnet 34 is used as the biasing force, the attraction force generated by the magnetism between them is used. It is also possible to configure the magnetically actuated valve to utilize

Furthermore, in order to sufficiently obtain the above-mentioned biasing force in each of the magnetic force driven valves 10, 40, 50, 60, 70 of the various embodiments described above, the first rare earth magnet 32 is used.
And the second rare earth magnet 34 have the maximum energy product (M
It preferably has 10 kJ / M ³ as GOe).

In the various embodiments described above, each of the first rare earth magnet 32 and the second rare earth magnet 34 can be constructed by laminating and bonding a plurality of magnetic pieces. With this configuration, the magnitude of the magnetic force generated by each of the first rare earth magnet 32 and the second rare earth magnet 34 can be finely adjusted.

The urging force generated by the interaction of the magnetic forces between the first rare earth magnet 32 and the second rare earth magnet 34 is used to open and close the valve body with respect to the valve seat, and the urging force is Since it is always constant, an excessive force does not act on them when the valve body is opened and closed with respect to the valve seat, and they are not damaged, and the relative positions of the first rare earth magnet 32 and the second rare earth magnet 34. The force required to change is also constant.

Further, in each of the magnetically driven valves 10, 40, 50, 60, 70 of the various embodiments described above, the valve operating members 36, 44, 54, 86 of the respective diaphragm valve units.
Although a and 86b are designed to be manually operated, they can be driven by pneumatic pressure or an electric mechanism for remote operation. In these embodiments, the main driving force required for the valve opening / closing operation in the diaphragm valve unit is the force acting between the first rare earth magnet 32 and the second rare earth magnet 34 by these magnetic forces, and the second rare earth magnet. No large force is required to move 34 into or out of the first rare earth magnet 32. Therefore, even when air pressure is used, the outer dimensions of the air pressure drive mechanism are not increased, and the noise generated during operation is reduced.
It can also be used in an electric mechanism that generates a small driving force.

Further, in each of the magnetically driven valves 10, 40, 50, 60, 70 of the various embodiments described above, a valve opening / closing sensor for detecting the opening / closing state of each diaphragm valve unit may be installed in each diaphragm valve unit. I can. The valve opening / closing sensors are those magnetically driven valves 10, 40, 50, 6
It is possible to monitor the open / closed state of each diaphragm valve unit when remotely operating each of 0 and 70.

[0068]

As described above in detail, the magnetically driven valve according to the present invention has a simple structure, is easy to assemble, has a small weight and a small external dimension, and has a predetermined driving force for reliably sealing the valve body. Can be obtained at all times, and does not cause wear of the diaphragm and valve seat that generate foreign substances that adversely affect the purity of the fluid flowing inside and the sealing function of the valve, and generate a loud noise and shock during operation. I won't let you.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view of a main part of a magnetic force driven valve according to a first embodiment of the present invention.

FIG. 2 is a plan view of a magnetically driven valve according to a second embodiment of the present invention.

3A is a longitudinal sectional view of a magnetic force driven valve according to a third embodiment of the present invention, and FIG. 3B is a transverse sectional view taken along the line BB of FIG.

FIG. 4 is a longitudinal sectional view of a main part of a magnetic force driven valve according to a fourth embodiment of the present invention.

5A is a plan view showing the upper surface of the main part of the magnetic force driven valve of the embodiment of FIG. 4 with some constituent members removed, and FIG. 5B is the magnetic force of the embodiment of FIG. It is a bottom view shown in the state where the lower surface of the principal part of a drive valve removed some constituent members.

[Explanation of symbols]

10 ... Magnetically driven valve, 12 ... Valve body, 14a ... Gas inlet,
14b ... gas outlet, 16a ... first gas passage portion, 16
b ... 2nd gas passage part, 18 ... valve chamber, 20, 20 '...
Valve seat member, 20a, 20'a ... central hole, 20b ... peripheral hole, 22, 22 '... valve seat, 24 ... diaphragm supporting surface,
26 ... Metal diaphragm, 28 ... Diaphragm holder, 28a ... Guide sleeve, 30 ... Diaphragm drive member, 32 ... First rare earth magnet, 34 ... Second rare earth magnet, 36 ... Valve operating member, 38 ... Opening cover, 40 ... magnetic force driven valve, 41 ... second rare earth magnet guide groove, 42 ... opening cover, 44 ... valve operating member, 44a ... rotation center axis, 50 ... magnetic force driven valve, 52 ... valve main body, 54 ... valve operating member, 70 ... magnetic force driven valve, 72 ... valve body, 74 ... valve body, 76 ... connecting rod,
78 ... Valve body drive rods, 80a, 80b ... Gas supply pipe, 82
a, 82b ... Gas delivery pipe, 86a, 86b ... Valve operating member, 88 ... Rotation center axis, 90 ... Recess.

Claims (3)

[Claims] 1. A valve body including a fluid passage having a fluid inlet and a fluid outlet; and a valve seat provided in the fluid passage; And a predetermined second position relative to the valve seat; a valve member; a first rare earth permanent magnet that is provided on the valve member and moves together with the valve member; Second rare earth permanent magnet that can freely move toward and away from the rare earth permanent magnet; operation for selectively moving the second rare earth permanent magnet closer to and away from the first rare earth permanent magnet provided in the valve body A second rare earth permanent magnet is selectively brought close to the first rare earth permanent magnet by operating means, and the second rare earth permanent magnet is selectively brought closer to the first rare earth permanent magnet between the second rare earth permanent magnet and the first rare earth permanent magnet. The respective magnetic forces interact, which causes the valve member to Location or the second
The magnetically driven valve, wherein the magnetically driven valve is arranged at either one of the positions. 2. The magnetically driven valve according to claim 1, wherein each of the first and second rare earth permanent magnets has a maximum energy product of 10 kJ / m ³ or more. 3. The method according to claim 1, wherein at least one of the first and second rare earth permanent magnets is configured by combining a plurality of rare earth permanent magnet pieces with each other. Magnetically driven valve described in.