JPH07163841A - Method for removing dimethyl sulfoxide in exhaust gas - Google Patents
Method for removing dimethyl sulfoxide in exhaust gasInfo
- Publication number
- JPH07163841A JPH07163841A JP5342595A JP34259593A JPH07163841A JP H07163841 A JPH07163841 A JP H07163841A JP 5342595 A JP5342595 A JP 5342595A JP 34259593 A JP34259593 A JP 34259593A JP H07163841 A JPH07163841 A JP H07163841A
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- dimethyl sulfoxide
- aqueous solution
- sodium hypochlorite
- dmso
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treating Waste Gases (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＩＣ処理に伴う排ガス
中のジメチルスルホキシドを次亜塩素酸ナトリウム水溶
液で分解除去するとともに、過剰の次亜塩素酸ナトリウ
ムを硫化ナトリウムをもって還元処理するジメチルスル
ホキシドの除去方法に関する。BACKGROUND OF THE INVENTION The present invention relates to a dimethylsulfoxide which decomposes and removes dimethylsulfoxide in exhaust gas associated with IC treatment with an aqueous solution of sodium hypochlorite and reduces excess sodium hypochlorite with sodium sulfide. Regarding removal method.
【０００２】[0002]
【従来の技術】ジメチルスルホキシド即ち（ＣＨ3 ）2
ＳＯ（以下ＤＭＳＯと略称する）は、水、低級アルコー
ル、アセトアルデヒド、アセトン等に溶解し、各種溶剤
又は各種洗浄剤等として使用され、特にＩＣ関係の洗浄
剤として有用である。しかし、ＤＭＳＯを含む排ガスを
そのまま放出することは環境保全上不適当であるため、
該ＤＭＳＯを可能な限り分解除去排出することが要求さ
れている。従来ＤＭＳＯを含有する排ガスの水洗浄が行
われていたが、除去率が低く、例えばＩＣ洗浄排ガスの
場合、入口１００ｐｐｍのものを出口では１０ｐｐｍ以
下にする要望されているにも拘らず、これが達成できな
い現状であった。2. Description of the Related Art Dimethyl sulfoxide or (CH 3 ) 2
SO (hereinafter abbreviated as DMSO) is dissolved in water, lower alcohol, acetaldehyde, acetone and the like and used as various solvents or various cleaning agents, and is particularly useful as an IC-related cleaning agent. However, it is unsuitable for environmental protection to release the exhaust gas containing DMSO as it is.
It is required to decompose, remove and discharge the DMSO as much as possible. Conventionally, the exhaust gas containing DMSO was washed with water, but the removal rate was low. For example, in the case of IC cleaning exhaust gas, this was achieved even though it was desired to reduce the exhaust gas from 100 ppm at the inlet to 10 ppm or less at the outlet. It was not possible.
【０００３】[0003]
【発明が解決しようとする課題】本発明は敍上の実状に
鑑みてなされたものをＤＭＳＯを含有する排ガスを過剰
の次亜塩素酸ソーダ即ちＮａＣｌＯ水溶液で殆んど完全
に酸化除去処理するとともに残ったＮａＣｌＯを還元処
理して所期の目的を達成しようとするものである。DISCLOSURE OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, in which exhaust gas containing DMSO is almost completely oxidized and removed with an excess of sodium hypochlorite solution, that is, NaClO aqueous solution. The remaining NaClO is reduced to achieve the intended purpose.
【０００４】[0004]
【課題を解決するための手段】本発明は、 ａ．排ガス中のＤＭＳＯを、 ｂ．当量以上に過剰のＮａＣｌＯ水溶液で洗浄して分解
する第１工程と、 ｃ．過剰のＮａＣｌＯを硫化ナトリウムＮａ2 Ｓ水溶液
で還元処理する第２工程とからなる ｄ．排ガス中のＤＭＳＯの除去方法 をその要旨として成立するものである。The present invention comprises: a. DMSO in the exhaust gas, b. A first step of decomposing by washing with an aqueous NaClO solution in excess of an equivalent amount or more; c. A second step of reducing excess NaClO with aqueous sodium sulfide Na 2 S solution d. The method of removing DMSO in exhaust gas is established as its gist.
【０００５】[0005]
【作用】排ガス中のＤＭＳＯは、ＮａＣｌＯの酸化力に
より、ジメチルスルホン（ＣＨ3 ）2 ＳＯ2 を経てジメ
チルスルホン酸（ＣＨ3 ）2 ＳＯ4 に変化しアルカリの
存在下に、モノメチル硫酸ナトリウム塩Ｎａ・ＣＨ3 Ｓ
Ｏ4 となる。即ち、 （ＣＨ3 ）2 ＳＯ＋ＮａＣｌＯ→（ＣＨ3 ）2 ＳＯ2 ＋
ＮａＣｌ （ＣＨ3 ）2 ＳＯ2 ＋２ＮａＣｌＯ→（ＣＨ3 ）2 ＳＯ
4 ＋２ＮａＣｌ （ＣＨ3 ）2 ＳＯ4 ＋ＮａＯＨ→Ｎａ・ＣＨ3 ＳＯ4 ＋
ＣＨ3 ＯＨ また、酸性で、ジメチルスルホン酸（ＣＨ3 ）2 ＳＯ4
は、水と反応し、アルコールと硫酸とになる。 （ＣＨ3 ）2 ＳＯ4 ＋２Ｈ2 Ｏ→２ＣＨ3 ＯＨ＋Ｈ2 Ｓ
Ｏ4 The DMSO in the exhaust gas is converted to dimethylsulfonic acid (CH 3 ) 2 SO 4 via dimethyl sulfone (CH 3 ) 2 SO 2 by the oxidizing power of NaClO, and sodium monomethylsulfate Na is added in the presence of alkali.・ CH 3 S
It becomes O 4 . That is, (CH 3 ) 2 SO + NaClO → (CH 3 ) 2 SO 2 +
NaCl (CH 3 ) 2 SO 2 +2 NaClO → (CH 3 ) 2 SO
4 + 2NaCl (CH 3 ) 2 SO 4 + NaOH → Na.CH 3 SO 4 +
CH 3 OH Acidic, dimethyl sulfonic acid (CH 3 ) 2 SO 4
Reacts with water to form alcohol and sulfuric acid. (CH 3 ) 2 SO 4 + 2H 2 O → 2CH 3 OH + H 2 S
O 4
【０００６】[0006]
【実施例】図１は、本発明方法が適用される洗浄塔を示
す説明図である。FIG. 1 is an explanatory view showing a washing tower to which the method of the present invention is applied.
【０００７】ＤＭＳＯを含有する排ガスは、ファンＦに
より風量Ｑ１０ｍ3 ／分で、入口１から塔内に送られ
る。また塔底に貯められているＮａＣｌＯ５００〜４，
０００ｐｐｍの水溶液は、ポンプＰにより充填物２に散
布３される。ＤＭＳＯは、殆んど完全に分解除去され、
極めて微量例えば１ｐｐｍ以下のＤＭＳＯを含む排ガス
が出口４から排出される。The exhaust gas containing DMSO is sent from the inlet 1 into the tower by the fan F at an air flow rate of 10 m 3 / min. In addition, NaClO 500-4 stored in the bottom of the tower
The 000 ppm aqueous solution is sprayed 3 on the packing 2 by the pump P. DMSO is almost completely decomposed and removed,
Exhaust gas containing an extremely small amount, for example, 1 ppm or less of DMSO is discharged from the outlet 4.
【０００８】上述のとおりＮａＣｌＯ５００〜４，００
０ｐｐｍの水溶液が使用されるが、就中、１，０００〜
２，０００ｐｐｍの水溶液が好ましい。即ち、１０００
ｐｐｍでは除去率は９４．５％、２０００ｐｐｍ８７．
０％、３０００ｐｐｍ７９．１％であった。但し５００
ｐｐｍ以下では、分解率が５０％程度であって効果が大
幅に、また、４，０００ｐｐｍ以上では分解率は頭うち
となる。また、対照例としてＮａＣｌＯ水溶液のかわり
に、従来使用されていたＮａＯＨ水溶液（０．１％）を
使用して行った洗浄では分解率は３５〜４０％で更に低
いことがわかった。As mentioned above, NaClO 500 to 4,000
A 0 ppm aqueous solution is used, but above all, 1,000-
A 2000 ppm aqueous solution is preferred. That is, 1000
In ppm, the removal rate is 94.5% and 2000 ppm is 87.
It was 0%, 3000 ppm and 79.1%. However, 500
When it is less than ppm, the decomposition rate is about 50%, and the effect is significant, and when it is more than 4,000 ppm, the decomposition rate is at its peak. Further, as a control example, it was found that the decomposition rate was 35 to 40%, which was lower in the washing performed by using the conventionally used NaOH aqueous solution (0.1%) instead of the NaClO aqueous solution.
【０００９】本発明の第２工程では、過剰の次亜塩ナト
リウムが硫化ナトリウム溶液で還元処理される。使用さ
れるＮａ2 Ｓ溶液は、ｐＨ１０〜１３、酸化還元電圧−
５００〜−１，５００ｍＶのもので次式の如く反応す
る。 ４ＮａＣｌＯ＋Ｎａ2 Ｓ→Ｎａ2 ＳＯ4 ＋４ＮａＣｌIn the second step of the present invention, excess sodium hyposulfite is reduced with sodium sulfide solution. The Na 2 S solution used has a pH of 10 to 13, a redox voltage of −
It reacts according to the following equation at a voltage of 500 to -1,500 mV. 4NaClO + Na 2 S → Na 2 SO 4 + 4NaCl
【００１０】[0010]
【発明の効果】本発明は以上の構成に基づくもので、Ｎ
ａＣｌＯ水溶液によるＤＭＳＯ分解が従来のいずれの方
式に較べても、格段の効果を有し、しかも、在来の洗浄
塔を使用して除去されるものであるから極めて有用であ
る。The present invention is based on the above-mentioned structure.
The DMSO decomposition with an aClO aqueous solution is extremely useful as compared with any of the conventional methods, and it is extremely useful because it is removed using a conventional washing tower.
【図１】本発明方法が適用される洗浄塔を示す説明図で
ある。FIG. 1 is an explanatory view showing a washing tower to which the method of the present invention is applied.
Ｆ ファン Ｐ ポンプ １ 入口 ２ 充填物 ３ 散布 ４ 出口 F Fan P Pump 1 Inlet 2 Filling 3 Sprinkling 4 Outlet
───────────────────────────────────────────────────── フロントページの続き (72)発明者 味沢 利行 埼玉県鴻巣市生出塚１−１−７ 協和化工 株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Toshiyuki Amizawa 1-1-7 Ikuzuka, Konosu City, Saitama Kyowa Kako Co., Ltd.
Claims (4)
量以上に過剰の次亜塩素酸ナトリウム水溶液で洗浄して
分解する第１工程と、過剰の次亜塩素酸ナトリウムを硫
化ナトリウム水溶液で還元処理する第２工程とからなる
排ガス中のジメチルスルホキシドの除去方法。1. A first step of decomposing dimethyl sulfoxide in exhaust gas by washing with an equivalent amount or more of an excess sodium hypochlorite aqueous solution, and a reduction process of excess sodium hypochlorite with an aqueous sodium sulfide solution. A method for removing dimethyl sulfoxide in exhaust gas comprising two steps.
リウム水溶液による分解が洗浄塔内で行われ、また、過
剰の次亜塩素酸ナトリウムの硫化ナトリウム溶液による
還元処理が排水処理槽内で行われる請求項１に記載の排
ガス中のジメチルスルホキシドの除去方法。2. The decomposition of dimethylsulfoxide with an aqueous solution of sodium hypochlorite is carried out in a washing tower, and the reduction of excess sodium hypochlorite with a solution of sodium sulfide is carried out in a waste water treatment tank. 1. The method for removing dimethyl sulfoxide in exhaust gas according to 1.
量が５００〜５０００ｐｐｍ好ましくは１０００〜２０
００ｐｐｍであり、また、該水溶液のｐＨが７．０〜１
１．０である請求項１に記載の排ガス中のジメチルスル
ホキシドの除去方法。3. The effective chlorine content of the sodium hypochlorite aqueous solution is 500 to 5000 ppm, preferably 1000 to 20.
00 ppm, and the pH of the aqueous solution is 7.0-1.
The method for removing dimethyl sulfoxide in exhaust gas according to claim 1, wherein the method is 1.0.
０〜−１，０００ｍＶで、また、ｐＨが９．０〜１２．
０である請求項１に記載の排ガス中のジメチルスルホキ
シドの除去方法。4. The redox voltage of sodium sulfide is -30.
0-1,000 mV and pH 9.0-12.
The method for removing dimethyl sulfoxide in exhaust gas according to claim 1, wherein the method is 0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5342595A JPH07163841A (en) | 1993-12-14 | 1993-12-14 | Method for removing dimethyl sulfoxide in exhaust gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5342595A JPH07163841A (en) | 1993-12-14 | 1993-12-14 | Method for removing dimethyl sulfoxide in exhaust gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07163841A true JPH07163841A (en) | 1995-06-27 |
Family
ID=18354990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5342595A Pending JPH07163841A (en) | 1993-12-14 | 1993-12-14 | Method for removing dimethyl sulfoxide in exhaust gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07163841A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000140865A (en) * | 1998-11-10 | 2000-05-23 | Nec Corp | Treatment of sulfoxides-containing exhaust gas and treating device for sulfoxides-containing exhaust gas |
-
1993
- 1993-12-14 JP JP5342595A patent/JPH07163841A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000140865A (en) * | 1998-11-10 | 2000-05-23 | Nec Corp | Treatment of sulfoxides-containing exhaust gas and treating device for sulfoxides-containing exhaust gas |
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