JPH07147462A - Semiconductor laser device - Google Patents

Semiconductor laser device

Info

Publication number
JPH07147462A
JPH07147462A JP29651293A JP29651293A JPH07147462A JP H07147462 A JPH07147462 A JP H07147462A JP 29651293 A JP29651293 A JP 29651293A JP 29651293 A JP29651293 A JP 29651293A JP H07147462 A JPH07147462 A JP H07147462A
Authority
JP
Japan
Prior art keywords
semiconductor laser
package
temperature surface
peltier
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29651293A
Other languages
Japanese (ja)
Other versions
JP2536438B2 (en
Inventor
Koji Nakano
弘司 仲野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP5296512A priority Critical patent/JP2536438B2/en
Publication of JPH07147462A publication Critical patent/JPH07147462A/en
Application granted granted Critical
Publication of JP2536438B2 publication Critical patent/JP2536438B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To prevent the heat of the high temperature surface of a Peltier element from transferring to a low temperature surface in a semiconductor laser device having a semiconductor laser cooling structure. CONSTITUTION:The heat of the high temperature surface of a Peltier element is prevented from transferring to the low temperature surface of the Peltier element 2 by providing a heat insulating layer 9 between a package region, which comes in contact with the high temperature surface of the Peltier element 2, and a package region which is thermally connected to the low temperature surface of the Peltier element 2.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体レーザ装置に関
し、特に冷却する機構を有する半導体レーザ装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser device, and more particularly to a semiconductor laser device having a cooling mechanism.

【0002】[0002]

【従来の技術】半導体レーザは、その光出力及び発振波
長を安定に保つことなどを目的として、周囲温度が変化
した場合にも半導体レーザの温度を一定に保って使用す
ることが多い。このような半導体レーザの温度を一定に
保つ方法として、一般に図2に示すような方法がとられ
る。すなわち、半導体レーザ6及び光学系を保守する台
(光学系固定基板3)は、ペルチェ素子2に装着され
る。そしてこのペルチェ素子2は、高温面となる光学系
固定基板の装着面と反対側の面はパッケージ1に装着さ
れる。光学系固定基板3には、半導体レーザ6がレンズ
4によってファイバー5に光学的に結合された状態で固
定されている。また、光学系固定基板3上には、半導体
レーザ6の温度をモニタするためサーミスタ7が装着さ
れている。パッケージ1からのファイバー5の取り出し
部分は、半導体レーザ装置の気密のためにハンダ等のシ
ール材8によりシールされる。
2. Description of the Related Art A semiconductor laser is often used with its temperature kept constant even when the ambient temperature changes, for the purpose of keeping its optical output and oscillation wavelength stable. As a method for keeping the temperature of such a semiconductor laser constant, a method as shown in FIG. 2 is generally used. That is, the semiconductor laser 6 and the table for maintaining the optical system (optical system fixed substrate 3) are attached to the Peltier device 2. The surface of the Peltier device 2 opposite to the mounting surface of the optical system fixed substrate, which is the high temperature surface, is mounted on the package 1. A semiconductor laser 6 is fixed to the optical system fixing substrate 3 while being optically coupled to a fiber 5 by a lens 4. A thermistor 7 is mounted on the optical system fixing substrate 3 to monitor the temperature of the semiconductor laser 6. A portion of the fiber 5 taken out from the package 1 is sealed by a sealing material 8 such as solder for hermetically sealing the semiconductor laser device.

【0003】上述の半導体レーザ装置の構造において、
周囲温度が上昇したり、または半導体レーザ6自身が発
熱することにより、半導体レーザ6の温度が上昇した場
合、半導体レーザが固着されている光学系固定基板3の
熱は、ペルチェ素子2の低温面により吸収され、ペルチ
ェ素子の反対側の高温面及びパッケージ1を通じて半導
体レーザ装置外に排除される。このようにして半導体レ
ーザの温度は一定に保たれる。
In the above-mentioned structure of the semiconductor laser device,
When the temperature of the semiconductor laser 6 rises due to the ambient temperature rising or the semiconductor laser 6 itself generating heat, the heat of the optical system fixing substrate 3 to which the semiconductor laser is fixed is the low temperature surface of the Peltier device 2. Are absorbed by the Peltier device and are removed to the outside of the semiconductor laser device through the high temperature surface on the opposite side of the Peltier device and the package 1. In this way, the temperature of the semiconductor laser is kept constant.

【0004】[0004]

【発明が解決しようとする課題】この従来の半導体レー
ザ装置では、ペルチェ素子の高温面よりケースを通じて
半導体レーザ装置の外へ排除されるべき熱がケースシー
ル材,ファイバー,光学系固定基板を通じてペルチェ素
子の低温面に伝わるため、ペルチェ素子の冷却能力が低
下するという問題点があった。
In this conventional semiconductor laser device, the heat to be removed from the semiconductor laser device through the case from the high temperature surface of the Peltier device is passed through the case sealant, the fiber, and the optical system fixing substrate to the Peltier device. However, there is a problem in that the cooling capacity of the Peltier device is reduced because it is transmitted to the low temperature surface.

【0005】[0005]

【課題を解決するための手段】本発明は、ペルチェ素子
により温調される光学系固定基板上に保持された半導体
レーザを有し、全体がパッケージ内に装着された半導体
レーザ装置において、ペルチェ素子の高温面に接するパ
ッケージの領域とペルチェ素子の低温面と熱的につなが
るパッケージの領域の間に断熱層を備えている。
SUMMARY OF THE INVENTION The present invention is a semiconductor laser device having a semiconductor laser held on an optical system fixed substrate whose temperature is controlled by a Peltier device, the whole being mounted in a package. A heat insulating layer is provided between a region of the package that is in contact with the hot surface of the Peltier device and a region of the package that is thermally connected to the cold face of the Peltier device.

【0006】[0006]

【実施例】次に本発明について図面を参照して詳細に説
明する。図1は本発明の一実施例の半導体レーザ装置の
断面図である。図に示すように半導体レーザ6は、レン
ズ4によってファイ5に光学的に結合された状態で光学
系固定基板3に固定されている。また、この光学系固定
基板3上には、半導体レーザ6の温度をモニタするため
サーミスタ7が装置されている。この光学系固定基板3
は、ペルチェ素子2の低温面に装置されペルチェ素子2
の反対側である高温面はパッケージ1に装置されてい
る。また、パッケージ1からのファイバー5の取り出し
部分は、半導体レーザ装置の気密のためにInハンダの
シール材8によりシールされている。
The present invention will be described in detail with reference to the drawings. FIG. 1 is a sectional view of a semiconductor laser device according to an embodiment of the present invention. As shown in the figure, the semiconductor laser 6 is fixed to the optical system fixing substrate 3 while being optically coupled to the phi 5 by the lens 4. Further, a thermistor 7 for monitoring the temperature of the semiconductor laser 6 is provided on the optical system fixed substrate 3. This optical system fixed substrate 3
Is installed on the low temperature surface of the Peltier device 2
The hot side, which is the opposite side of, is mounted on the package 1. A portion of the fiber 5 taken out from the package 1 is sealed by an In solder sealing material 8 for hermetically sealing the semiconductor laser device.

【0007】本実施例のパッケージ1においては、ペル
チェ素子2の高温面と接するパッケージ領域を厚さ約1
mmの断熱材9によって、ペルチェ素子2の低温面と熱
的につながっているパッケージ領域とを熱的に遮断して
いる構造としている。
In the package 1 of this embodiment, the package region in contact with the high temperature surface of the Peltier element 2 has a thickness of about 1
The mm heat insulating material 9 thermally isolates the low-temperature surface of the Peltier device 2 from the package region that is thermally connected.

【0008】このような構造の半導体レーザ装置におい
て周囲温度が上昇した場合、または半導体レーザ6自身
が発熱した場合、これらの半導体レーザの温度変動はサ
ーミスタ7によりモニタされ、サーミスタ7の抵抗値が
一定となるように光学系固定基板3をペルチェ素子2に
より冷却することにより、半導体レーザ6の温度を一定
に保っている。この時ペルチェ素子2により吸収された
熱は、ペルチェ素子2の高温面と接するパッケージ1を
通じて半導体レーザ装置の外に排除される。この実施例
では、このペルチェ素子2の高温面側のパッケージ1を
断熱層9により熱的に遮断しているため、ペルチェ素子
2により吸収された熱は従来の半導体レーザ装置のよう
にペルチェ素子の低温面に伝わることがなくなった。こ
のため、半導体レーザに100mAの電流を流した時
に、半導体レーザ温度を25℃に保つ場合の半導体レー
ザ装置の動作温度を70℃から80℃に改善することが
できた。
In the semiconductor laser device having such a structure, when the ambient temperature rises or when the semiconductor laser 6 itself generates heat, the temperature fluctuations of these semiconductor lasers are monitored by the thermistor 7, and the resistance value of the thermistor 7 is constant. The temperature of the semiconductor laser 6 is kept constant by cooling the optical system fixed substrate 3 by the Peltier device 2 so that At this time, the heat absorbed by the Peltier device 2 is removed to the outside of the semiconductor laser device through the package 1 in contact with the high temperature surface of the Peltier device 2. In this embodiment, the package 1 on the high temperature side of the Peltier element 2 is thermally insulated by the heat insulating layer 9, so that the heat absorbed by the Peltier element 2 is absorbed by the Peltier element as in the conventional semiconductor laser device. It is no longer transmitted to cold surfaces. Therefore, when a current of 100 mA was applied to the semiconductor laser, the operating temperature of the semiconductor laser device when maintaining the semiconductor laser temperature at 25 ° C. could be improved from 70 ° C. to 80 ° C.

【0009】この実施例では、ペルチェ素子2の高温面
から低温面への熱の伝導経路をパッケージ1,シール材
8,ファイバー5,光学系固定基板3を通るものとして
説明したが、半導体レーザ素子等のボンディングワイヤ
ーが熱の伝導経路となっている場合にも、ボンディング
ワイヤーが接続されているリード領域とペルチェ素子の
高温面と接するパッケージ領域を断熱材により熱的に遮
断することによって同様の効果を得ることができる。
In this embodiment, the heat conduction path from the high temperature surface to the low temperature surface of the Peltier device 2 is described as passing through the package 1, the sealing material 8, the fiber 5, and the optical system fixing substrate 3. Even if the bonding wire such as is a heat conduction path, the same effect can be obtained by thermally blocking the lead area to which the bonding wire is connected and the package area in contact with the hot surface of the Peltier element with a heat insulating material. Can be obtained.

【0010】[0010]

【発明の効果】以上説明したように本発明は、ペルチェ
素子の高温面に接するパッケージ領域とペルチェ素子の
低温面と熱的につながるパッケージ領域の間に断熱層を
備えたことにより、ペルチェ素子の高温面の熱が低温面
に伝わることがなくなり、ペルチェ素子の冷却能力を向
上するという効果を有する。
As described above, according to the present invention, the heat insulating layer is provided between the package region in contact with the high temperature surface of the Peltier device and the package region thermally connected to the low temperature surface of the Peltier device. The heat of the high temperature surface is not transferred to the low temperature surface, and the cooling capacity of the Peltier device is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の半導体レーザ装置の断面図
である。
FIG. 1 is a sectional view of a semiconductor laser device according to an embodiment of the present invention.

【図2】従来の半導体レーザ装置の断面図である。FIG. 2 is a sectional view of a conventional semiconductor laser device.

【符号の説明】[Explanation of symbols]

1 パッケージ 2 ペルチェ素子 3 光学系固定基板 4 レンズ 5 ファイバー 6 半導体レーザ 7 サーミスタ 8 シール材 9 断熱層 1 Package 2 Peltier Element 3 Optical System Fixed Substrate 4 Lens 5 Fiber 6 Semiconductor Laser 7 Thermistor 8 Sealant 9 Heat Insulation Layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ペルチェ素子により温調される光学系固
定基板上に保持された半導体レーザを有し、全体がパッ
ケージ内に装着されている半導体レーザ装置において、
ペルチェ素子の高温面に接するパッケージの領域とペル
チェ素子の低温面と熱的につながるパッケージの領域の
間に断熱層を備えることを特徴とする半導体レーザ装
置。
1. A semiconductor laser device having a semiconductor laser held on an optical system fixed substrate whose temperature is controlled by a Peltier element, the whole being mounted in a package,
A semiconductor laser device comprising a heat insulating layer between a region of a package in contact with a high temperature surface of a Peltier device and a region of a package thermally connected to a low temperature surface of a Peltier device.
JP5296512A 1993-11-26 1993-11-26 Semiconductor laser equipment Expired - Fee Related JP2536438B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5296512A JP2536438B2 (en) 1993-11-26 1993-11-26 Semiconductor laser equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5296512A JP2536438B2 (en) 1993-11-26 1993-11-26 Semiconductor laser equipment

Publications (2)

Publication Number Publication Date
JPH07147462A true JPH07147462A (en) 1995-06-06
JP2536438B2 JP2536438B2 (en) 1996-09-18

Family

ID=17834506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5296512A Expired - Fee Related JP2536438B2 (en) 1993-11-26 1993-11-26 Semiconductor laser equipment

Country Status (1)

Country Link
JP (1) JP2536438B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1104053A2 (en) * 1999-11-29 2001-05-30 Nec Corporation Semiconductor laser module
KR100856182B1 (en) * 2002-03-09 2008-09-03 엘지전자 주식회사 Device of cooler for laser diode system
JP2012204762A (en) * 2011-03-28 2012-10-22 Miyachi Technos Corp Laser diode unit for laser processing

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1104053A2 (en) * 1999-11-29 2001-05-30 Nec Corporation Semiconductor laser module
EP1104053A3 (en) * 1999-11-29 2002-10-30 Nec Corporation Semiconductor laser module
KR100856182B1 (en) * 2002-03-09 2008-09-03 엘지전자 주식회사 Device of cooler for laser diode system
JP2012204762A (en) * 2011-03-28 2012-10-22 Miyachi Technos Corp Laser diode unit for laser processing

Also Published As

Publication number Publication date
JP2536438B2 (en) 1996-09-18

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