JPH07147439A - Assembly device of magnetroelectric transducer - Google Patents

Abstract

PURPOSE:To provide an assembly device of a magnetroelectric transducer wherein characteristic irregularity after element processing is small and a target magnetroelectric characteristic range can be selectively acquired. CONSTITUTION:The title device is provided with a means 7 for measuring electromagnetic characteristic of each of a plurality of pellets made of a magnetic substance and a semiconductor and die-bonded on a lead frame, a means 13 for arranging a detection mark corresponding to the characteristic, a means 16 for detecting the mark and a means 17 for holding a plurality of magnetism converging magnetic substance chips to select freely, choosing a chip which can acquire desired electromagnetic characteristic of a magnetroelectric transducer among the chips and laminating it on a corresponding pellet.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for assembling a magnetoelectric conversion element, and more particularly, to an apparatus for assembling a magnetoelectric conversion element which is formed in a laminated form using semiconductors having a high Hall coefficient such as a Hall element.

[0002]

2. Description of the Related Art In a magnetoelectric conversion element such as a Hall element or a magnetoresistive element, in order to improve its electromagnetic characteristics, particularly to obtain a high output voltage, for example, Japanese Patent Publication No.
As in the example disclosed in Japanese Patent No. 234, a laminated structure including a magnetic body, a semiconductor, and a magnetic body for magnetic focusing is used. By the way, in the magnetic conversion element by such lamination, even if the electromagnetic characteristics of the semiconductor itself are the same, the output voltage is inversely proportional to the area of the magnetic focusing magnetic body that is a constituent element of the element, and is almost proportional to its thickness. is there. Therefore, in the conventional case, when manufacturing such a magnetoelectric conversion element, the electromagnetic characteristics are measured at several points for each wafer having a laminated structure composed of a magnetic body and a semiconductor, and based on the measured electromagnetic characteristics, An assembly method has been adopted in which magnetic focusing magnetic bodies having the same shape are stacked on each wafer so as to obtain a target output voltage.

[0003]

However, in the magnetoelectric conversion element obtained by the above-described conventional assembling method, the electromagnetic characteristics of the semiconductor itself have variations in the wafer-to-wafer distribution, and generally two or more types. The electromagnetic characteristics are mixed over the range. Therefore, in a magnetoelectric conversion element constructed by laminating magnetic focusing magnetic materials of the same shape on individual wafers made of such semiconductors and magnetic materials, it is natural that the electromagnetic field over at least two types of ranges including the output voltage. Have characteristics. Therefore, in the magnetoelectric conversion element obtained as described above, many that do not meet the purpose are found in the process of electromagnetic inspection.

Up to now, the final inspection step is to select such characteristics so that the lead frame is cut into individual elements, and then a box corresponding to the characteristics is prepared. It was transferred in pieces. It should be noted that it is preferable to pack the product immediately after this, but it is customary to temporarily collect elements with the same characteristics, rearrange them, and mark according to the characteristics, form, or tap to obtain the product form. As described above, there are many steps after the final inspection, and every time the above work is completed in order to ensure reliability, all of them are inspected. Therefore, much labor is required, and in particular, it has been strongly desired to rationalize these processes more and more in order to reduce the cost and the size of the device.

The present invention has been made in view of the above problems, and provides a magnetoelectric conversion element assembling apparatus in which variations in characteristics after element formation are small and an intended electromagnetic characteristic range can be selectively obtained in advance. The purpose is to do.

[0006]

DISCLOSURE OF THE INVENTION As a result of repeated studies for achieving the above object, the inventors of the present invention have individually measured the electromagnetic characteristics of pellets die-bonded on a lead frame, and have a magnetic focusing corresponding thereto. It was confirmed that the intended characteristic range can be obtained in the electromagnetic characteristics after device formation by individually laminating the magnetic material for use. That is, the present invention is an apparatus for assembling a magnetoelectric conversion element having a laminated structure composed of a magnetic body, a semiconductor, and a magnetic body for magnetic focusing.
For a plurality of pellets which are basically die-bonded on a lead frame and which consist of a stack of magnetic materials and semiconductors, a means for measuring the individual electromagnetic characteristics of the pellets and a characteristic detection mark corresponding to the measured electromagnetic characteristics are individually provided. Means for arranging in relation to the pellet, means for detecting the characteristic detection mark, and a plurality of magnetic focusing magnetic chips having different characteristics are selectively held, and the magnetic conversion element is selected from the chips. The present invention is characterized by comprising a magnetic focusing magnetic material loading means for selecting a chip for obtaining a desired electromagnetic characteristic range and stacking it on a corresponding pellet.

The magnetoelectric conversion element according to the present invention is composed of a magnetic sensitive section and two input terminals and two output terminals, and the measurement items of the electromagnetic characteristics include the resistance between the input and output terminals and a constant value between the input terminals. The output voltages are obtained when a constant magnetic field is applied to the magnetic sensitive section with a DC voltage supplied and when a constant magnetic field is not applied.

[0008]

According to the present invention, by the magnetic body for magnetic focusing,
In order to know how much the output voltage becomes particularly high as the electromagnetic characteristics, the electromagnetic characteristics of each of the pellets mainly composed of the semiconductor die-bonded on the lead frame in advance were measured and prepared. It determines which magnetic focusing magnetic body should be stacked in order to obtain desired electromagnetic characteristics with respect to the electromagnetic characteristics of individual pellets from a plurality of magnetic focusing magnetic chips. By preparing magnetic materials having a constant area and varying thickness, the output voltage can be increased as the thickness increases.

[0009]

Embodiments of the present invention will be described in detail and specifically below with reference to the drawings.

FIGS. 1 and 2 show an example of the configuration of the present invention. First, the configuration of a measuring section for measuring electromagnetic characteristics and a marking section for marking according to characteristics will be described with reference to FIG. Reference numeral 1 is a pellet mainly composed of a semiconductor die-bonded on the lead frame 2. In the case of the Hall element structure as described above, the pellet 1 is obtained from a wafer having a laminated structure of a magnetic body and a semiconductor. In this example, the pellet 1 has a thickness of 0.3 mm and a thickness of 0.8 mm. A pellet for a Hall element of a square rectangular ferrite substrate was prepared. The pellet 1 is stored in an upper magazine die-bonded to 20 islands each having a thickness of 1 mm and a size of 1 mm × 1.2 mm square formed on a lead frame of 15 mm × 92 mm at a pitch of 4.6 mm, Hardened.

Such a magazine is arranged on the left side in FIG. Here, it is set so that it can be sent to a loader (not shown). 3 is a rail for carrying the lead frame,
4, 5 and 6 are provided along the rail 3 along with the lead frame 2
Is a conveyance device for feeding the pitch of the rail, and the loader described above is provided on the left end side of the rail 3 in this figure. A transport positioning hole (not shown) is formed in the lead frame 2, and the claws 4A, 5A, 6A of the transport devices 4, 5, 6 are inserted into the lead frame 2 and positioned for pitch feeding.

Reference numeral 7 is a measuring unit for measuring the electromagnetic characteristics of the pellet 1, and a prober 8 that can be moved up and down for the purpose of measuring the electromagnetic characteristics of the pellet 1 in a magnetic field and a non-magnetic field, respectively. A magnetic field switching means 9 is provided. A space is formed below the rail 3 of the measuring unit 7, and a magnet 10 for forming a magnetic field is arranged in this space. Further, 11 is a shield member formed in a cylindrical shape in the present example, and the shield member 1
By moving 1 in the direction of the arrow, the circumference of the magnet 10 can be covered and the measuring unit 7 can be kept in a magnetic field-free state. However, here, instead of moving the shield member 11, the magnet 1
It is also possible to move 0 toward the inside of the shield member 11 from the space. The shaded area around the space is preferably made of a non-magnetic material in order to improve the accuracy during measurement.

Therefore, as in the present embodiment, when the prober 8 itself is moved up and down to bring the probe close to the pellet 1 on the lead frame 2 and the probe is brought into contact with the input / output terminals, the electromagnetic characteristics are measured. A non-magnetic shield plate 12 is attached to the upper and lower side surfaces of 8. Thirteen
Is a marking part, 14 is a marking part 13,
This is a marking device for marking the pellets 1 whose electromagnetic characteristics have been measured according to their characteristics. A printer using an inkjet or a laser can be used as the marking device 14, for example.
In order not to damage the pellet 1 itself, a mark for pattern recognition is marked on the outer edge of the lead frame on which the pellet 1 is mounted.

Next, referring to FIG. 2, the processing operation after the marking for pattern recognition is performed by the marking unit 13 and the mechanism involved in the processing will be described. Reference numeral 15 denotes an adhesive application section for applying an adhesive in order to stack the magnetic body for magnetic focusing on the pellet 1 according to the measured electromagnetic characteristics. As the adhesive application section 15, a dispenser (administrator) having a nozzle capable of dropping an adhesive at the tip of a syringe or a stamp type is used, and such an instrument is guided onto the pellets 1 that have been pitch-fed. To do so.

Reference numeral 16 is a marking detection unit, and 17 is a loading mechanism of a magnetic focusing magnetic material, which will be described with reference to FIG.

In FIG. 3, 18 is a marking detection unit 1.
A reading device, for example, a camera, which is arranged immediately above the rail 3 of FIG. 6 and recognizes a mark relating to the electromagnetic characteristics of the pellet 1 from the lead frame 2 conveyed to the marking detection unit 16 along the rail 3. Reference numeral 19 is a turntable that constitutes the magnetic focusing magnetic material loading mechanism 17 , and the turntable 19 is movably provided on the XY table 30. A ring 20 is provided on the turntable 19 and holds a chip 22 of a magnetic body for magnetic focusing on the upper surface of the turntable 19 via an adhesive sheet 21. Ring 2
Zeros are placed at four locations along the circumference of the turntable 19 at equal intervals of 90 °. In the case of this example, the chip 22
Is made of manganese (MnZn), which is suitable as a magnetic body for magnetic focusing, and has the same area of 45 mm square and thicknesses of 0.2 mm, 0.25 mm, 0.3 mm and 0.4 m.
4 kinds of substrates different from m are attached to the adhesive sheet 21 each having a thickness of 150 μm, and each substrate is cut into 0.4 mm square and expanded by a work such as dicing.
It is held at 0.

The thickness of the chip is selected according to the information of the mark read by the reading device 18, the turntable 19 is rotated, and the ring holding the chip 22 having a certain thickness is located under the camera 23. The camera 23 confirms the chip, recognizes the position and inclination, and the position is corrected by the XY table 30, and the push-up pin 24 pushes up the chip 22 almost in the center thereof from below, and the bonding arm 25 moves in the arrow direction. Then, the tilt of the chip 22 is corrected by the rotatable vacuum suction collet 26 provided at the tip of the bonding arm 25 to suck the selected chip 22, and the adhesive agent of the pellet 1 is applied. The chips 22 are placed on the upper surface so that they can be stacked.

Thus, the pellets 1 on the lead frame 2 are successively and individually attached to the magnetic focusing chips 22 for magnetic focusing.
After being loaded, the lead frame 2 is stored in a magazine (not shown) by the unloader 27 shown in FIG. 2, and the entire magazine is heated and cured in an oven (not shown).
Then, the cured lead frame 2 is sealed with a resin material and further divided into elements. In FIG. 2, 28 is the loader described above.

The operation procedure of the magnetoelectric conversion element assembling apparatus described above will be described again with reference to FIG. 2. First, the pellets 1 die-bonded onto the leadframe 2 together with the leadframe 2 from the magazine housed in the loader 28. Are successively guided to the electromagnetic characteristic measuring section 7 by the carrier device 4. Then, here, the electromagnetic characteristics of the individual pellets 1 are measured under a magnetic field environment and a non-magnetic field environment, and in the case of this example, the characteristics are classified into four types based on the measurement results, and the following marking parts Marking device 1 at 13
The marking according to the characteristics is given by 4. In this example, the magnetic field measurement and the non-magnetic field measurement are performed by the same measuring unit 7, but it is also possible to separate the measuring unit along the rail 3 into two steps. Next, the marking detection unit 1
6, the marking of the pellet 1 introduced here is detected, and the magnetic focusing magnetic material loading mechanism 17 is applied.
A chip 22 having a characteristic corresponding to the marking detected in is selected, and this chip 22 is loaded on the pellet 1 by the bonding arm 25. In addition,
In the case of this example, the adhesive is applied to the pellets 1 in the applying section 15 in the step before the loading.

After that, all the lead frames 2 are conveyed to the unloader 27, where they are housed in a magazine where they are cured and made into elements. In the case of the Hall element obtained in this way, it has been heretofore. If there is a product that falls within the target output voltage range, it was about 50% as a result of electromagnetic inspection of the product, but it fell to 90% or more.

In the above-mentioned embodiments, the magnetoelectric conversion element is a Hall element, but the application of the present invention is not limited to such a Hall element.
It can be widely applied to a magnetoelectric conversion element having a laminated structure of at least a semiconductor element and a magnetic focusing magnetic material.

[0022]

As described above, according to the present invention, a plurality of pellets basically formed by stacking a magnetic material and a semiconductor, which are die-bonded on a lead frame, are provided.
A means for measuring individual electromagnetic characteristics of the pellet, a means for disposing a characteristic detection mark corresponding to the measured electromagnetic characteristics in association with each pellet, a means for detecting the characteristic detection mark, and a plurality of means. Magnetic focusing that holds magnetic focusing magnetic chips having different characteristics selectively, and selects a chip for causing the magnetoelectric conversion element to obtain a desired electromagnetic characteristic range from the chips, and stacks it on the corresponding pellet Since it is equipped with a magnetic material loading means for use, it becomes possible to efficiently assemble the magnetoelectric conversion element so that the electromagnetic characteristics fall within the target characteristic range, and the magnetoelectric conversion elements having the characteristics according to the customer's request can be produced at a high yield and rational. Can be manufactured.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of a configuration of an electromagnetic measurement unit and a marking unit according to the present invention.

FIG. 2 is a block diagram showing components according to the present invention step by step.

FIG. 3 is an explanatory view schematically showing a configuration example of a marking detection unit and a magnetic focusing magnetic body loading mechanism according to the present invention and its operation.

[Explanation of symbols]

1 Pellet 2 Lead frame 3 Rails 4, 5, 6 Conveying device 4A, 5A, 6A Claw 7 (Electromagnetic property) measuring part 8 Prober 9 Magnetic field switching means 10 Magnet 11 Shield member 12 Shield plate 13 Marking part 14 Marking device 15 Adhesive Application section 16 Marking detection section 17 Magnetic focusing magnetic material loading mechanism 18 Reader (camera) 19 Turntable 20 Ring 21 Adhesive sheet 22 Chip 23 Chip identification means (camera) 24 Push-up pin 25 Bonding arm 26 Vacuum suction collet 27 Unloader 28 loader 30 XY table

Front page continuation (72) Inventor Toshiaki Fukunaka 6-4100 Asahi-cho, Nobeoka, Miyazaki Prefecture Asahi Kasei Electronics Co., Ltd. (72) Inventor Yuuki Matsui 6-4100, Asahi-cho, Nobeoka City, Miyazaki Prefecture Asahi Kasei Denshi Co., Ltd.

Claims (1)

[Claims] 1. An apparatus for assembling a magnetoelectric conversion element having a laminated structure composed of a magnetic body, a semiconductor, and a magnetic body for magnetic focusing, which comprises a plurality of laminated bodies of the magnetic body and the semiconductor, which are die-bonded on a lead frame. Means for measuring individual electromagnetic characteristics of the pellet, means for disposing a characteristic detection mark corresponding to the measured electromagnetic characteristics in association with each pellet, and means for detecting the characteristic detection mark And a plurality of magnetic focusing magnetic chips having different characteristics are selectively held, and a chip for obtaining a desired electromagnetic characteristic range in the magnetoelectric conversion element is selected from among the chips and is mounted on a corresponding pellet. An apparatus for assembling a magnetoelectric conversion element, comprising: a stacking magnetic body for magnetic focusing.