JPH07146887A - Process control method - Google Patents

Abstract

PURPOSE:To exactly transmit instruction matters and to obtain a process control system which is free from a working mistake by reading the data corresponding to the present processing from a storage medium by using a portable terminal, setting processing conditions to a processor, looking at this data, and transmitting a processing result to a host computer when the processing of a processing object in a processor is terminated. CONSTITUTION:An IC card 109 storing the instruction contents in each processing process is attached to all the lots flowing in a manufacturing line. An operator 107 inserts the IC card 109 in a portable terminal 110 arranged on plural device groups and reads the card information of the present process. When the portable terminal 110 recognizes the contents, the contents is transmitted to a host computer 115 by a radio LAN 119. The host computer 115 confirms instruction matters information from the inside of an instruction matters storage disk 116 and transmits this information to the portable terminal 110. When the processing is executed, the operator 107 transmits processing result data again to the host computer 115 via the radio LAN 119.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention provides accurate instructions to an operator such as a manufacturing apparatus or an inspection apparatus in a manufacturing line for semiconductor devices, etc., for accurate execution of process processing, progress management, and yield improvement. The present invention relates to a process control method for collecting process result data for the purpose of It is applied in the fields of factory automation, CIM, and production management.

[0002]

2. Description of the Related Art In response to diversifying user needs, high-mix low-volume production using the same production line has become important in the production of semiconductor devices.
In high-mix low-volume production, the number of products flowing through the manufacturing line is large, and in some cases the processing steps may differ depending on the product. In the first place, the number of semiconductor device manufacturing steps is several hundreds. Therefore, the process processing work by the operator becomes complicated, errors in the process processing inevitably occur, and it is an important issue to eliminate them.

One solution to this problem is full automation of the production line. However, this is not perfect from the viewpoint of reliability because the capital investment cost to realize it is enormous, so in reality, the operation is performed by a mixture of human-assisted processing by an operator and automated processing. ing. In addition, in the R & D line and the like, there is a case where the automation is rarely performed and the operation is performed only by manual processing.

In any case, in a manufacturing line including manual processing, the progress of each lot in the process control is grasped and the process processing error is reduced by issuing an accurate instruction, and the processing result data of the off-line equipment in the quality control is processed. It is important how to realize the collection policy at low cost at the same time. In such a line including manual processing, there is no report on a method of simultaneously solving them all at once.

[0005]

As a simple method for preventing the above mistakes in the process, the information terminal connected to the host computer is provided for each manufacturing apparatus, and the information terminal is connected to the host computer side. There is a method of displaying instructions, on the other hand, starting or terminating processing in a manufacturing process, or inputting processing result data from an information terminal, and managing the information by a host computer. However, with this method, it is necessary to prepare an information terminal for each manufacturing apparatus, resulting in a large capital investment cost.

Therefore, if one information terminal is provided for every several device groups, it is advantageous in terms of equipment cost. However, depending on the manufacturing equipment, the information terminal that displays the instruction items and inputs the processing result data is located away from the controller that sets the operating conditions of the equipment, and the processing condition setting error or the processing Input errors in the result data are likely to occur, and the effect cannot be expected as expected. In addition, the method of transferring and displaying the instruction items and the like to the terminal by communication every time has a problem that the load of the network is large and it takes time to display the instruction items.

The present invention has been made in order to solve the above problems, and an object thereof is to realize a process control system in which instructions are accurately transmitted and no work error occurs.

[0008]

According to the process control method of the present invention, when a processing device performs a process to be processed, data corresponding to this process is read from a storage medium using a portable terminal, and the process is performed while watching the data. When the processing condition is set in the device and the processing of the processing target in the processing device is completed, by inputting the processing status obtained from the processing device to the mobile terminal,
It is characterized in that the processing result is transmitted to the host computer, and at the same time, the fact that the processing step in this processing device is completed is stored in the storage medium.

Further, the storage medium stores the data of the instruction content in each processing step to be processed together with the version number, and when the data of the instruction content is read from the storage medium using the mobile terminal, the mobile terminal stores the data. Only the version information is sent to the host computer, and the version information managed on the host computer is compared and collated with the version information sent, so that the latest processing conditions of the host computer, etc. It is characterized in that data of instruction contents is stored in a storage medium.

[0010]

In the first place, the instruction such as the processing condition of the processing target in processing each step is displayed accurately and at high speed to the person in charge of the manufacturing line (operator). Next, in the processing device that is off-line with the host computer, the operation is performed at the place where the controller is operated while viewing the instruction items such as the processing conditions. In addition, the process result data of the device is input at the place where the display screen of the controller of the device is located, the process start and end, and the process result data are input and transmitted to the host computer. Then, whether or not the content recorded in the storage medium attached to the processing target is the latest can be confirmed by introducing the version number between the mobile terminal and the host computer.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a process control system using a process control method according to an embodiment of the present invention. In the figure, 101 is a processing device that performs an etching process in a semiconductor device manufacturing line, 102 is a controller that displays the operating state of the processing device 101, and sets processing conditions, and 103 is the processing result data of the processing device 101. CRT screen of the controller 102, 104 is a processing device that performs thin film forming processing in the manufacturing line, 105 is a controller that displays the operating state of the processing device 104 and sets processing conditions, and 106 is processing result data of the processing device 104 Is displayed on the CRT screen of the controller 105,
107 is an operator in this manufacturing line, and 108 is a lot made up of a plurality of wafers to be processed which flow in this manufacturing line.

Further, 109 is an IC card which is an information recording carrier attached to the lot 108, and 110 is the IC card 1.
Mobile terminals for recording and reading information to and from 09,
Reference numeral 11 is a display screen on which various data of the mobile terminal 110 is displayed, 112 is an IC card insertion port of the mobile terminal 110, 11
3 is a key input operation unit of the mobile terminal 110, 114 is a screen character reading device which is connected to the mobile terminal 110 and captures characters displayed on the CRT screen 103 or the CRT screen 106, and 115 is processing of the processing devices 101, 104, etc. It is a host computer that manages and aggregates conditions and processing result data.

Further, 116 is connected to a host computer, an instruction item storage disk in which instructions to each processing device of the manufacturing line are stored, 117 is connected to the host computer,
A processing result data storage disk that stores processing results of the processing device obtained from the mobile terminal 110 or the like, and 118 is a network that connects the host computer 115 and the controller 105 online. The mobile terminal 110 is connected to the processing device 104 online, is not connected to the processing device 101, and is wirelessly connected to the host computer 115 by wireless LA.
N119 has been built.

FIGS. 2A to 2C are configuration diagrams showing the data contents of the file group stored in the instruction item storage disk 116. First, in FIG. 1A, 201 is correspondence information indicating the correspondence between the input lot name and the instruction symbol, and 20
2 is an input lot name column in which the names of lots to be put into the production line of the correspondence table 201 are stored, and 203 is the correspondence table 20.
It is an instruction matter symbol column in which an instruction matter symbol, which is the name of data indicating instructions for the corresponding input lot of No. 1, is stored.

Further, in FIG. 2B, reference numeral 211 is instruction item file symbol information corresponding to the instruction item symbols stored in the instruction item symbol column 203, and reference numeral 212 is an instruction indicating the instruction item file symbol. An item file symbol column, 213 is a version number column corresponding to the instruction item file symbol, 214 is a creation date and time column in which the instruction content corresponding to the instruction item file symbol is created, and 215 is whether the corresponding instruction item is currently operated. Is an in-operation flag column indicating.

In FIG. 3C, reference numeral 221 is instruction item information indicating the instruction items in each process corresponding to the process name, and 222 is a process name column in which the process name is indicated, 22
3 is an instruction item column in which the instruction items are shown. The table shown in FIG. 2 shows the file contents stored in the instruction item storage disk 116.
The file "(c)" is given a name "instruction symbol-version number" as a file name.

FIG. 3 is a block diagram showing the contents of data recorded in the IC card 109, and shows information relating to the process chart corresponding to the lot 108 to which the IC card 109 is attached. 9A shows the information before the content update, and FIG. 9B shows the information after the content update. In FIG. 3, reference numeral 301 denotes card information indicating a process name, instructions, its file name, and a processed flag.

Further, 302 is a process name column showing the process name, 303 is an instruction item column showing the instructions corresponding to the process name column 302, 304 is a file name corresponding to the instruction item column 303. A designated instruction file name column is shown, 305 is a processed flag indicating whether or not the contents instructed in the instruction item column 303 are performed, 306 is already-executed process information regarding the executed process, and 307 is not yet executed. It is the unexecuted process information regarding the executed process. In the processed flag column 305, a process whose information is “0” indicates that the process has not been completed.

FIG. 4 shows the processing result data storage disk 11
7 is a configuration diagram showing the configuration of processing result data stored in FIG. 7 in a state of a processing result data table. FIG. In the figure, 401
Indicates a lot name column indicating a processed lot name, 402 indicates a process name indicating a processing step, 403 indicates an instruction item file name column indicating a file name of an instruction item used when performing the process, 40
Reference numeral 4 is a start date / time column showing the time when the process is started, 405 is an end date / time column showing the time when the process is finished, and 406 is a process result data column showing the data obtained as a result of the process.

The process control method will be described below. An IC card 109 is attached to all lots flowing through the manufacturing line. When the operator 107 selects the next lot 108 to be processed, the lot 108 is selected.
The IC card 109 attached to the IC card 109 is removed from the lot 108, and the IC card 109 is inserted into the IC card insertion ports 112 of the mobile terminals 110 arranged one by one in a plurality of device groups. As a result, the mobile terminal 110 reads the card information 301 recorded in the IC card 109.

When the mobile terminal 110 reads the card information 301, it first refers to the processed flag column 305 to know the next process to be executed. In the card information 301, FIG.
As shown in (a), since the process flag up to the process name "Z25" is 1 in the process name column 302, the process name to be processed next is "Z26", and the instruction file Instruction item file name in the name column 304 "Z001
By referring to "-1", it is indicated that the instruction symbol indicating the content is "Z001" and the version number is "1".

When the portable terminal 110 recognizes the above contents, it communicates with the host computer 115 via the wireless LAN 119 and transmits that the instruction symbol is "Z001" and its version number is "1". Upon receiving this, the host computer 115 refers to the instruction item file symbol information 211 of the instruction item storage disk 116 and refers to the current version number “2” of the instruction item symbol “Z001” and the transmitted version number “1”. Compare with. In this case, the transmitted version number is different from the currently registered version number, so the IC card 109 of the lot 108 is
The instruction items of the process after the process name “Z26” recorded in are old and may be changed.

The host computer 115 is thus able to
The instruction item information 221 of the instruction item file name “Z001-2” is referred to from the disc 116 of the instruction item nucleus and is transmitted to the mobile terminal 110. In response to this, the portable terminal 110 replaces the contents of the process portion 307 with the process name “Z26” and the subsequent processes in the instruction table 301 recorded in the IC card 109 with new information. . The contents of the portion 306 of the process which has already been processed are left as they are. In the instruction item file name column 304 of the instruction item 301, it is also recorded that the contents are replaced from the process in the middle. In this example, the instructions regarding the process name “Z27” are changed.

When the information processing relating to the above process processing is completed, the portable terminal 110 displays on its own information display screen 111,
Next, the operator 107 displays instructions regarding the process "Z26" to be executed. Of course, the key input operation unit 1
It is also possible to refer to the items to be executed relating to the steps other than the displayed steps by using 13. Next, the operator 107 brings the portable terminal 110 to the vicinity of the processing device 101, sets these predetermined conditions from the controller 102 according to the content displayed on the information display screen 111, and sets the lot 108 to the offline processing device. Processing at 101.

When the processing is executed, the controller 102
Displays the intermediate result and the final result of the processing on the CRT screen 103. The operator 107 brings the portable terminal 110 to the vicinity of the apparatus 101 again, and in accordance with the instruction of the display screen 111 on the portable terminal 110, sequentially designates the designated data and causes the screen character reading device 114 to display the characters on the CRT screen 103. The processing result data is read by moving the top.

There are many processing result data, and the CRT screen 103
If all the necessary information is read by the screen character reading device 114, the operator 107 sequentially scrolls the display of the processing result data on the CRT screen 103. At this time, the key input operation unit 113 is used without using the screen character reading device 114.
From here, you may key in.

The input processing result data is stored in the wireless LAN by pressing a specific key of the key input operation unit 113.
It is transmitted to the host computer 115 via 119. At this time, the processed lot name, the process name, the instruction item file name in the process, the process start date and time, and the process end date and time are also transmitted. These data sent are
As shown in FIG. 4, the processing result data storage disk 117
Is stored in the file as processing result data.

On the other hand, in the case of the online device 104,
After setting the lot 108 in the device 104, the operator 107 inserts the IC card 109 into the IC card insertion slot 112 of the mobile terminal 110, as described above.
The mobile terminal 110 executes inquiry processing of the instruction item file name recorded in the IC card 109, and if necessary,
The recorded contents in the IC card 109 are exchanged.
The host computer 115, via the network 118,
The processing of the lot 108 by the apparatus 104 is automatically started, and the processing result data and the like are also automatically stored in the processing result data storage disk 117.

In the above embodiment, the recording medium I
Although an example using a C card is shown, it goes without saying that the type of storage medium such as an IC memory card or a floppy disk does not matter. Further, although the wireless LAN is used for the communication between the portable terminal and the host computer here, it goes without saying that a method for preparing a dedicated communication device and bringing the portable terminal there may be adopted. Further, it goes without saying that the file configurations shown in FIGS. 2 to 4 are merely examples, and a database format such as a relational database may be used. Further, the data item to be managed is also an example, and any item may be added or deleted as long as it is an item capable of storing process progress management and process result data.

[0030]

As described above, according to the present invention, the following effects can be obtained. First, when displaying the instructions of each process to the person in charge of the production line,
Since the instruction items are read from the IC card, the instruction items can be displayed at high speed and quick work becomes possible. Further, since the processing result data of the offline device can be input to the vicinity of the display screen of the controller of the device and can be keyed directly or while looking at the display screen, the input error of the processing result data can be drastically reduced.

Further, with respect to the processing of each lot, since the processing result is reported to the host computer for each process, it is possible to accurately grasp the progress of all the lots. Further, since it is not necessary to install the mobile terminal in each of the processing devices, the capital investment cost can be significantly reduced. On the other hand, since the version number of the contents recorded in the IC card is inquired to the host computer, the instruction items whose accuracy is guaranteed can be displayed. Since this inquiry is made only with a small data size such as the version number, the load on the network can be reduced and the display time of the instruction items can be shortened.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a process control system using a process control method according to an embodiment of the present invention.

2 is a configuration diagram showing the data content of a file group stored in an instruction item storage disk 116 shown in FIG.

3 is a configuration diagram showing the contents of data recorded in the IC card 109 shown in FIG.

FIG. 4 is a processing result data storage disk 11 shown in FIG.
7 is a configuration diagram showing the configuration of processing result data stored in FIG. 7 in a state of a processing result data table. FIG.

[Explanation of symbols]

 101 processing device 102 controller 103 CRT screen 104 processing device 105 controller 106 CRT screen 107 operator 108 lot 109 IC card 110 mobile terminal 111 display screen 112 IC card insertion hole 113 key input operation unit 114 screen character reading device 115 host computer 116 instruction Item storage disk 117 Processing result data storage disk 118 Network 119 Wireless LAN

Claims (2)

[Claims] 1. A host computer that manages and aggregates processing conditions, processing result data, and the like, a processing device that processes and inspects a processing target, and an instruction content attached to the processing target and in each processing step of the processing target. A mobile terminal that communicates with a storage medium storing the data of the above item, the host computer, reads the stored data and writes new data to the storage medium, and displays the data. A process management method in a process management system having: wherein when the processing device performs a process to be processed, the portable terminal is used to read data corresponding to the process from the storage medium, thereby performing the process. When the processing condition is set in the device and the processing of the processing target in the processing device is completed, the process obtained from the processing device in the mobile terminal is performed. By inputting the status, and transmits the processing result to the host computer, at the same time, the process control method characterized by storing the processing step in the processing apparatus in the storage medium has been completed. 2. The process control method according to claim 1, wherein the storage medium stores data of instruction contents in each processing step of the processing target together with a version number, and is stored in the storage medium by using the portable terminal. When the data of the instruction content is read, the portable terminal transmits version information of this data to the host computer, and by comparing and collating the information of the host computer at that time with this version information, the portable terminal is operated. A process management method characterized in that data of instruction contents such as latest processing conditions of a host computer is stored in the storage medium.