JPH07145455A - Ferrous soft magnetic alloy - Google Patents

Abstract

PURPOSE:To produce a soft magnetic alloy combining high saturation magnetic flux density and high permeability and furthermore combining high mechanical strength and high heat stability. CONSTITUTION:A ferrous soft magnetic alloy constituted of a compsn. shown by the following formula is obtd: formula: (Fe1-aQa)b BxTyT'z; where Q denotes either or both of Co and Ni, T denotes one or >= two kinds of elements selected from among Ti, Zr, Hf, V, Nb, Ta, Mo and W, T' denotes one or <= two kinds of elements selected from among Ge, Ga, Sn, Pb, Bi, Ru, Sb and Zn, and a <=0.05, b=75 to 92 atomic %, x=0.5 to 18 atomic %, y=4 to 10 atomic % and z <=4.5 atomic % are regulated. The ferrous soft magnetic alloy having soft magnetic properties equal to or more excellent than those of the conventional practical alloy can be provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a soft magnetic alloy used for magnetic heads, transformers, choke coils and the like, and more particularly to an Fe-based soft magnetic alloy having excellent soft magnetic characteristics.

[0002]

2. Description of the Related Art In soft magnetic alloys used for magnetic heads, transformers, choke coils, etc., various characteristics generally required are as follows. High saturation magnetic flux density. High magnetic permeability. Must have low coercive force. It is easy to obtain a thin shape. Further, the magnetic head is required to have the following characteristics from the viewpoint of wear resistance, in addition to the characteristics described above. High hardness.

Therefore, when manufacturing soft magnetic alloys or magnetic heads, various alloy systems have been studied from these viewpoints. Conventionally, crystalline alloys such as sendust (Fe-Si-Al alloy), permalloy (Fe-Ni alloy), and silicon steel have been used for the above-mentioned applications, and recently, Fe-based and Co-based amorphous alloys have been used. Quality alloys are also being used.

[0004]

In the case of a magnetic head, however, a more suitable magnetic material for a high-performance magnetic head is desired in order to cope with the increase in coercive force of the magnetic recording medium accompanying the increase in recording density. Further, in the case of transformers and choke coils, further miniaturization is required as electronic devices are miniaturized. Therefore, magnetic materials having higher performance are desired. However, although the aforementioned sendust has excellent soft magnetic characteristics, it has a drawback that the saturation magnetic flux density is as low as about 11 KG. Permalloy similarly has a saturation magnetic flux density of about 8 KG in an alloy composition having excellent soft magnetic characteristics. However, silicon steel has a high saturation magnetic flux density but is inferior in soft magnetic properties.

Further, among amorphous alloys, Co-based alloys have excellent soft magnetic characteristics, but have a saturation magnetic flux density of 10K.
G is insufficient. Further, the Fe-based alloy has a high saturation magnetic flux density and can have a saturation magnetic flux density of 15 KG or more, but the soft magnetic characteristics are insufficient. Further, the thermal stability of the amorphous alloy is not sufficient, and there are still unsolved aspects. As mentioned above, it is difficult to combine high saturation magnetic flux density with excellent soft magnetic characteristics.

On the other hand, conventionally, as a transformer alloy having a high saturation magnetic flux density and a low iron loss, as disclosed in JP-A-1-242757, a general formula (Fe _1-a M _{1 a} ) _100-xyzt Cu _x Si _y
B _z M _{2 t} (where M ₁ is Co and / or Ni, M ₂ is at least one element selected from the group consisting of Nb, W, Ta, Mo, Zr, Hf and Ti, a, x,
y, z, and t are each atomic%, 0 ≦ a ≦ 0.3, 0.1 ≦ x
≦ 3, 0 ≦ y ≦ 17, 4 ≦ z ≦ 17, 10 ≦ y + z ≦ 28,
It satisfies 0.1 ≦ t ≦ 5. ), A composition having at least 50% of the structure is composed of fine crystal grains, and the average grain size measured by the maximum dimension of the crystal grains is 1000 angstroms or less.

The above-mentioned fine crystal alloy is disclosed in Japanese Patent Publication No. 4-439.
It was developed using a Fe-Si-B type amorphous alloy as a starting material as disclosed in Japanese Patent Publication No. 3 (U.S.P. No. 5,160,379). In the Fe-Si-B system alloy, the elements that amorphize the structure are Si and B,
The Fe content of the alloy having practically sufficient thermal stability is 70
~ 80 atomic%. This amorphous alloy is a conventional Fe-
It had magnetic properties superior to those of Si-based alloys. The microcrystalline alloy according to the above patent application is Fe-S
Fe-M ₁ -Cu-S with Cu and element M added to i-B alloy
i-B-M ₃ system, in which the element M ₃ is Nb,
It is at least one element selected from W, Ta, Zr, Hf, Ti, and Mo. In this system alloy, Cu
It is said that the addition of Cu is an essential condition, and that the addition of Cu causes fluctuations in the amorphous material to generate fine crystal grains, thereby making the structure fine. Further, in the case of not containing Cu, it is difficult to reduce the size of crystal grains, a compound phase is easily generated, and the magnetic properties are deteriorated, which is described in the above-mentioned patent publication.

Further, in this type of alloy, Cu and Nb
The growth of crystal grains can be suppressed by the interaction with the. Therefore, since the growth of crystal grains cannot be suppressed only by adding Nb or Cu alone, it is said that the composite addition of Nb and Cu is essential. This is from p. 241 to p. 2 of the Japan Institute of Metals, Vol. 53, No. 2 (1989).
On page 48, it is described in the content published by the inventors of the above-mentioned patent application. From the composition diagram of FIG. 20 of Japanese Patent Publication No. 4-4393, it can be seen that low magnetostriction cannot be obtained when Si = 0 in the alloy of this system, and Si has an effect of reducing magnetostriction. So
The addition of Si is essential to reduce the magnetostriction.

The present inventors are developing a soft magnetic material by using materials having completely different components from the viewpoint of completely different from the above-mentioned conventional techniques, and among them, the above-mentioned sendust, permalloy, silica There is an Fe (Co, Ni) -Zr-based alloy found in Japanese Patent Publication No. 60-30734, which has been applied for a patent in view of conventional techniques such as raw steel. Since this Fe (Co, Ni) -Zr alloy is added with Zr, which has a large amorphous forming ability, even if the added amount of Zr is reduced, it can be made amorphous. Concentration 9
It can be 0% or more. Further, Hf can be used as an amorphous forming element similar to Zr. However, in this system, the Curie point of the alloy having a high Fe concentration is around room temperature, so that it was not a practical alloy as a magnetic core material.

Next, the inventors of the present invention can partially crystallize the Fe—Hf type amorphous alloy by a special method to obtain a fine crystal structure having an average crystal grain size of about 10 to 20 nm. In 1980, he discovered "CONFERENCE ON
21 of "METALLIC SCIENCE AND TECHNOLGY BUDAPEST"
It is presented on pages 7 to 221. In view of the technology at the time of this announcement, it is suggested that in the Fe—Hf alloy, the structure may be refined without adding an element such as Cu. Although this mechanism is not clear, there are already structural fluctuations in the quenched state when forming an amorphous alloy, and these fluctuations act as sites for heterogeneous nucleation, and many uniform and fine nuclei are generated. It is considered to be a thing.

As described above, the Fe-Hf type alloy does not show good magnetic characteristics in the amorphous state. However, considering that this alloy is refined without the need for non-magnetic additive elements, by using Fe-Hf type amorphous alloy as a starting material, a fine crystal alloy with a high Fe concentration which has never been obtained can be obtained. Therefore, it is expected that a new alloy having a higher saturation magnetic flux density than that of the Fe-Si-B-based fine crystal alloy will appear. Therefore, as a result of further research conducted by the present inventors, in order to suppress grain growth, it is necessary to enhance the thermal stability of the Fe-M-based microcrystalline alloy, and further, to prevent grain growth, the thermal stability that may become a barrier to grain growth is high. It is necessary to leave a stable amorphous phase at the grain boundaries, and from such a viewpoint, the research was advanced focusing on B, which is an element that enhances the thermal stability of the amorphous alloy.

As a result, the present inventors have previously proposed a high saturation magnetic flux density Fe-based soft magnetic alloy that solves the above-mentioned problems in Japanese Patent Application No. 2-108308, Apr. 2, 1990.
We applied for a patent on the 4th.

One of the alloys according to this patent application was a high saturation magnetic flux density characterized by having a composition represented by the following formula. (Fe _1-a Co _a ) _b B _x T _y T ' _z where T is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from the group consisting of W, and containing either or both of Zr and Hf,
T ′ is one or more elements selected from the group consisting of Cu, Ag, Au, Ni, Pd, and Pt, and a ≦
0.05, b ≦ 92 atomic%, x = 0.5 to 16 atomic%, y
= 4 to 10 atom%, and z = 0.2 to 4.5 atom%.

Further, another one of the alloys according to the above patent application was a high saturation magnetic flux density alloy characterized by having a composition represented by the following formula. Fe _b B _x T _y T ′ _z where T is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from the group consisting of W, and containing either or both of Zr and Hf,
T ′ is one or more elements selected from the group consisting of Cu, Ag, Au, Ni, Pd, and Pt, and b ≦ 9
It is 2 atomic%, x = 0.5 to 16 atomic%, y = 4 to 10 atomic%, and z = 0.2 to 4.5 atomic%.

Furthermore, the inventors of the present invention filed Japanese Patent Application No. 2-230 on Aug. 31, 1990 as an advanced alloy of the above alloy.
No. 135 has filed a patent application for an alloy having the following composition. One of the alloys according to this patent application was a high saturation magnetic flux density alloy characterized by having a composition represented by the following formula. (Fe _1-a Q _a ) _b B _x T _y However, Q is either or both of Co and Ni, and T
Is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and contains either or both of Zr and Hf, and a ≤
0.05, b ≦ 93 at%, x = 0.5-8 at%, y =
It is 4 to 9 atom%.

Another alloy according to the above patent application is characterized by having a composition represented by the following formula. Fe _b B _x T _y However, T is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from the group consisting of W, and containing either or both of Zr and Hf, b
≦ 93 at%, x = 0.5 to 8 at%, y = 4 to 9 at%.

Therefore, as a result of further intensive studies, the inventors of the present invention have found that the A'of T'of the alloys described in Japanese Patent Application No. 2-108308 and Japanese Patent Application No. 2-230135 previously applied.
g, Au, Ni, Pd, Pt instead of Ge, G
1 selected from a, Al, Sn, Pd, Bi and Ru
It was found that a soft magnetic alloy having more excellent magnetic permeability can be obtained by using one kind or two or more kinds of elements.

The object of the present invention is to develop the soft magnetic alloy of the above-mentioned patent application to make it easier to manufacture, and to have a high saturation magnetic flux density and a high magnetic permeability, and to have high mechanical strength and high thermal stability. It is to provide an Fe-based soft magnetic alloy.

[0019]

In order to solve the above-mentioned problems, the Fe-based soft magnetic alloy according to the present invention is characterized by having a composition represented by the following formula. (Fe _1-a Q _a ) _b B _x T _y T ′ _z However, Q is either or both of Co and Ni, and T
Is one or more elements selected from Ti, Zr, Hf, V, Nb, Ta, Mo and W, and T ′ is
Ge, Ga, Al, Sn, Pb, Bi, Ru, Sb, Z
one or more elements selected from n, a
≦ 0.05, b = 75 to 92 atomic%, x = 0.5 to 18 atomic%, y = 4 to 10 atomic%, and z ≦ 4.5 atomic%.

In order to solve the above-mentioned problems, the Fe-based soft magnetic alloy according to the present invention is characterized by having a composition represented by the following formula. Fe _b B _x T _y T ′ _z where T is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from W,
T'is Ge, Ga, Al, Sn, Pb, Bi, Ru,
One or more elements selected from Sb and Zn, b ≦ 92 at%, x = 0.5-18 at%, y =
It is 4 to 10 atomic%, and z ≦ 4.5 atomic%.

In order to solve the above-mentioned problems, the Fe-based soft magnetic alloy according to claim 3 is characterized by having a composition represented by the following formula. (Fe _1-a Q _a ) _b B _x T _{y T'z} X _t However, Q is either or both of Co and Ni, and T
Is one or more elements selected from Ti, Zr, Hf, V, Nb, Ta, Mo and W, and T ′ is
One element or two or more elements selected from Ge, Ga, Al, Sn, Pb, Bi, Sb and Zn, and X is C
1 or 2 or more elements selected from r, Mo, W, Ru, Rh, and Ir, and a ≦ 0.05, b = 75 to
92 at%, x = 0.5 to 18 at%, y = 4 to 10 at%, z ≦ 4.5 at%, t ≦ 5 at%.

In order to solve the above problems, the Fe-based soft magnetic alloy according to claim 4 is characterized by having a composition represented by the following formula. Fe _b B _x T _{y T'z} X _t However, T is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from W,
T'is Ge, Ga, Al, Sn, Pb, Bi, Sb,
One or more elements selected from Zn,
X is one or more elements selected from Cr, Mo, W, Ru, Rh and Ir, b = 75 to 92 atom%, x = 0.5 to 18 atom%, y = 4 to 10 atom%,
z ≦ 4.5 at%, and t ≦ 5 at%.

The Fe-based soft magnetic alloy according to claim 5,
In order to solve the above problems, in the Fe-based soft magnetic alloy according to any one of claims 1, 2, 3, and 4, z = 0.2.
~ 2 atomic%.

The Fe-based soft magnetic alloy according to claim 6 is the Fe-based soft magnetic alloy according to any one of claims 1, 2, 3, 4, and 5 in order to solve the above problems.
Is 1 or 2 or more selected from Ti, V, Nb, Ta, Mo and W, x = 6.5 to 18 atom%.

The present invention will be described in detail below. The soft magnetic alloy of the present invention comprises the steps of obtaining an amorphous alloy of the above composition or a crystalline alloy containing an amorphous phase by quenching from a molten metal, or a step of obtaining by a vapor phase quenching method such as a sputtering method or a vapor deposition method. It can usually be obtained by carrying out a heat treatment step of heating the material obtained in these steps to precipitate fine crystal grains.

B is inevitably added to the soft magnetic alloy of the present invention. It is considered that B has the effect of enhancing the amorphous form performance of the soft magnetic alloy and the effect of controlling the formation of the compound phase that adversely affects the magnetic properties in the heat treatment step, and therefore addition of B is essential. . Al, S as in B
i, C, P and the like are also commonly used as amorphous forming elements, and the addition of these elements can be regarded as the same as in the present invention.

Further, in the soft magnetic alloy, in order to easily obtain the amorphous phase, it is necessary to contain either Zr or Hf having a high amorphous forming ability. Therefore, when these elements are contained, the addition amount of B can be reduced, so that
It can be 5 to 18 atomic%. However, Z
When an element other than r and Hf is added as one kind of the element T, the amount of addition of B may be 6.5 to 18 atomic% because the amorphous forming ability of the element other than Zr and Hf is low. More preferable.

Zr and Hf are part of other 4A.
~ Of 6A group elements, Ti, V, Nb, Ta, Mo, W
One or two or more of the above can be substituted, and an equivalent effect can be obtained. Among these elements, Nb and Ta are metallic materials having a high melting point, are thermally stable, and are hard to oxidize during manufacturing. Therefore, when these elements are added in place of Zr and Hf, or when Zr and Hf are reduced and the above elements are increased,
In the material for which the present inventors have applied for a patent, Hf
The manufacturing conditions are easier and the manufacturing cost is lower than that mainly composed of Zr and Zr, and it is also advantageous in terms of cost. That is, in the alloy for which a patent application was previously filed by the inventor of the present application, it was necessary to manufacture while paying attention to oxidation by supplying an inert gas in a vacuum atmosphere. Can be loose. Specifically, it can be manufactured in the atmosphere or in the atmosphere while partially supplying the inert gas to the tip of the nozzle.

Further, in the present invention, Ge, Ga, A
It is preferable that at least one element or two or more elements selected from 1, Sn, Pb, Bi, Ru, Sb, and Zn are contained in an amount of 4.5 atomic% or less. If the amount added exceeds 4.5 atomic%, the magnetic permeability deteriorates and the effect of addition cannot be obtained. If the added amount is less than 0.2 atomic%, it is difficult to obtain excellent soft magnetic characteristics by the heat treatment process.
Since the saturation magnetic flux density is slightly improved, the content of these elements may be 0.2 atomic% or less. However, 0.2-
The added amount in the range of 2 atomic% is more preferable, and the magnetic permeability of 10,000 or more is obtained in the added amount in this range.

Although the mechanism by which the soft magnetic properties are improved by the addition of the elements such as Ge and Ga is not clear, the crystallization temperature was measured by a differential thermal analysis method.
It was recognized that the crystallization temperature at which the elements such as Ge and Ga were added was slightly lower than that of the alloy without addition.
It is considered that this is because the addition of the above elements made the amorphous material non-uniform, and as a result, the stability of the amorphous material decreased. When the heterogeneous amorphous phase is crystallized, a large number of regions are likely to be partially crystallized, and heterogeneous nucleation occurs. Therefore, the obtained composition is considered to have a fine grain structure. From the above viewpoints, the same effect can be expected for elements other than the above elements that lower the crystallization temperature.

Also, in the case of an element whose solid solubility in Fe is extremely low, there is a tendency for phase separation, so that microscopic composition fluctuations occur due to heating, and the tendency that the amorphous phase becomes nonuniform becomes remarkable. It is considered that this is considered to contribute to the refinement of the structure.

The reasons for limiting the alloying elements contained in the soft magnetic alloy of the present invention have been described above. In addition to these elements, C
Addition of 5 atom% or less of platinum element such as r, Mo or W, Ru, Rh, Ir can improve corrosion resistance and adjust magnetostriction. Others, H, N,
Even if the unavoidable impurities such as O and S are contained to the extent that the desired characteristics are not deteriorated, the high saturation magnetic flux density F of the present invention is obtained.
It can be regarded as the same as the composition of the e-based soft magnetic alloy. However, if the total amount of these elements added is 5 atomic% or more, the soft magnetic properties deteriorate, which is not preferable.

Further, b in the amounts of Fe and Co in the alloy of the present invention is 75 to 92 atomic%. This is because a high magnetic permeability cannot be obtained when b exceeds 92 atom%, but in order to obtain a saturation magnetic flux density of 10 kG or more, it is preferable that b is 75 atom% or more. And

[0034]

EXAMPLES The reasons for limiting the composition of the soft magnetic alloy of the present invention will be described in detail below with reference to examples. (Example 1) The alloys shown in the following examples were prepared by a single roll liquid quenching method. That is, molten metal is jetted onto the roll by the pressure of argon gas from a nozzle placed on one rotating steel roll, and rapidly cooled to obtain a ribbon. The width of the ribbon produced as described above was about 15 mm and the thickness was about 20 to 40 μm. The magnetic permeability was measured by the inductance method using a thin ribbon processed into a ring shape having an outer diameter of 10 mm and an inner diameter of 6 mm, or a strip sample having a width of 1 mm and a length of 60 mm. The measurement conditions of the effective magnetic permeability (μe) were 10 mOe and 1 kHz.
Unless otherwise specified, in the examples shown below, 60
The magnetic characteristics after annealing for 1 hour at a temperature of 0 ° C to 700 ° C are shown.

For the alloys having the compositions shown below, the relationship of magnetic permeability of the soft magnetic alloys obtained by heat treatment was investigated. The heat treatment uses an infrared image furnace, and the heating rate is 1
Heat at 00 ° C / min and in vacuum at 600 ° C to 700 ° C for 1
It was held for a time. Cooling rate after heat treatment is 40 ℃
It was made constant at / min. The measurement results are shown in Table 1.

[0036]

[Table 1]

From Table 1, Ga, Ge, Sn, Pb, B
It was found that the materials to which i, Ru, Sb, and Zn were added exhibited remarkably excellent magnetic permeability as compared with Comparative Examples 1 and 2 in which these elements were not added. Therefore, in the present invention, Ga, Ge, Al, Sn, Pb, Bi, Ru,
The inclusion of Sb and Zn was limited. The above composition was obtained by replacing T ′ of the Fe ₈₂ Nb ₇ B ₁₀ T ₁ ′ alloy with various elements as shown in Table 1. The above test was conducted with an alloy in which Nb was replaced with Hf or Zr. In each case, each alloy also showed high magnetic permeability. Further, although the temperature rising rate in the above test was 100 ° C./min, the present inventors previously filed a patent application Japanese Patent Application No. 5-190674.
In the method for producing the Fe-based soft magnetic alloy in No. 6, it has been found that the magnetic permeability of the alloy during heat treatment largely depends on the heating rate. Therefore, also in the alloy of the present invention, it is desirable that the rate of temperature rise during the heat treatment is 1.0 ° C./minute or more. Therefore, the magnetic properties of the alloy of the present invention can be adjusted by appropriately selecting the optimum heat treatment conditions, and the magnetic properties can be improved by annealing in a magnetic field.

Next, the reason for limiting the content of the element T'in the alloy of the present invention will be described below by taking Ge as an example. As an example, FIG. 1 shows the relationship between the Ge content (z) and the magnetic permeability of the Fe ₈₂ Nb ₇ B _11-z Ge _z alloy.

From FIG. 1, z = 0.2 to 4.5 atomic% of Ge amount
It is clear that excellent effective magnetic permeability is easily obtained in the range of. When the Ge content is 0.2 atomic% or less, it is difficult to effectively obtain the effect of Ge addition, and when the Ge content exceeds 4.5 atomic%, magnetic permeability is deteriorated, which is not preferable in practice. However, since the permeability of the alloy of this system can be improved by increasing the cooling rate, z may be substantially 0.2 atomic% or less. It should be noted that results other than Ge are almost the same as the above. Therefore, the content range of the element T'in the alloy of the present invention is set to 4.5 atom% or less. Also, the magnetic permeability is 1
It has also been clarified that it is preferable to set z = 0.2 to 2 atomic% in order to obtain a value exceeding 0000.

Next, the result of observing the structure of the Fe ₈₂ Nb ₇ B ₁₀ Ge ₁ alloy after heat treatment with a transmission electron microscope is shown in FIG.
Shown in. From FIG. 3, the structure after heat treatment has a grain size of about 100 μm.
It can be seen that it is composed of fine crystals of about m. In addition, Fe ₈₂ Nb
The change in hardness before and after the heat treatment of the ₇ B ₁₀ Ge ₁ alloy was examined. As a result, the Vickers hardness showed a remarkably high value of 900 DPN in the rapidly cooled state to 1400 DPN after the heat treatment at 650 ° C., which is suitable for magnetic head materials. It was also found to have.

The prepared (Example _{2) Fe 84-z Nb 7} B 9 T ' single roller quenching method alloy ribbon having a composition represented by _z,
Of saturation magnetic flux density, coercive force, electric resistance, permeability, core loss
The z amount dependence was investigated. The produced ribbon had a width of about 15 mm and a thickness of about 15 to 25 μm. The saturation magnetic flux density is a magnetic field of 10 kOe using an oscillating magnetometer, and the coercive force is 10 Oe using a DC BH tracer.
The magnetic field was reversed and measured. The electric resistance was measured by the four-terminal method, and the magnetic permeability at 1 kHz and 100 kHz was measured by an impedance analyzer in a magnetic field of 5 mOe. The core loss was measured using an AC magnetization characteristic measuring device under the condition of Bm-2kGauss and f = 100kHz. The magnetic permeability and core loss measurement samples were ring-shaped with an outer diameter of 10 mm and an inner diameter of 6 mm. In addition, all the measurement results shown below are results of heat treatment in vacuum at a temperature rising rate of 40 ° C./min, a holding temperature of 650 ° C., and a holding time of 1 hour.

FIG. 3 shows the relationship between the saturation magnetic flux density and the amount of z. z
Even if the amount was increased, the rate of decrease in the saturation magnetic flux density was small, and it was found that the alloy of the present invention can maintain a high saturation magnetic flux density even after the addition of the element represented by T ′.
Fig. 4 shows the relationship between the coercive force and the amount of z. Even if the amount of z is increased, the coercive force is slightly increased.
It was found that a small coercive force can be maintained even after adding the element represented by.

FIG. 5 shows the relationship between the electric resistance and the z amount. The electrical resistance also increased with the increase of z amount. Generally, when a magnetic material is used in a high frequency region, a magnetic material having a large electric resistance is desired from the viewpoint of reducing eddy current loss. From FIG.
It was found that the electrical resistance can be increased by adding the element represented by the element T ′ as compared with the case of not adding.
Therefore, it was found that the alloy of the system according to the present invention can reduce the eddy current loss in the high frequency region.

FIG. 6 shows the relationship between the magnetic permeability and the z amount. From this result, in order to improve the magnetic permeability near 1 kHz,
It can be seen that the addition of 0.2 to 2 atomic%, more preferably about 1 atomic% is most effective. Further, it can be seen that the addition of 2 atomic% or more is effective for improving the high frequency characteristics of the magnetic permeability and obtaining the flat characteristics of frequency dependence. However, if it is added in an amount of more than 4.5 atomic%, the magnetic permeability is deteriorated as in the case of Example 1, which is not preferable in practice. Fig. 7 shows the relationship between core loss and z amount. It was found that the core loss can be reduced by adding the element represented by the element T ′ as compared with the case of not adding.

[0045] (Example 3) was prepared by Fe ₈₃ Nb ₇ B ₉ T 'single roller quenching method alloy ribbon having a composition represented by _1, was examined the thermal treatment temperature dependence of the magnetic permeability and core loss. The produced ribbon had a width of about 15 mm and a thickness of about 15 to 25 μm. The magnetic permeability was measured using an impedance analyzer in a magnetic field of 5 mOe. For the core loss, Bm = 2 kGau using an AC magnetization characteristic measuring device.
The measurement was performed under the conditions of ss and f = 100 kHz. The magnetic permeability and core loss measurement samples were ring-shaped with an outer diameter of 10 mm and an inner diameter of 6 mm. The heat treatment was performed at a temperature rising rate of 40 ° C./minute and a holding time of 1 hour, and the holding temperature was changed from 400 to 650 ° C.

FIG. 8 shows the heat treatment temperature dependence of the magnetic permeability. The alloy added with the element represented by T'is 500 to 6
In the optimum heat treatment temperature range of 50 ° C., the magnetic permeability was higher than that of the alloy without addition. Further, in the case of an alloy containing Ga and Ge, a magnetic permeability of 10,000 or more was obtained in a lower temperature range, and it was found that there is an industrial advantage that the heat treatment temperature can be lowered.

FIG. 9 shows the heat treatment temperature dependence of the core loss. The alloy to which the element represented by T'is added is 600 to 6
It is clear that in the optimum heat treatment temperature range of 50 ° C., the core loss is reduced as compared with the alloy without addition.
Further, it has been found that when Ga and Ge are added, low core loss can be obtained by heat treatment at a lower temperature.

Example 4 Alloy ribbons of various compositions according to the present invention were produced by the single roll method, and the saturation magnetic flux density, coercive force, magnetic permeability and core loss were investigated. The produced ribbon has a width of about 15 mm and a thickness of about 15 to 25.
was μm. The saturation magnetic flux density was measured with a vibrating magnetometer at a magnetic field of 10 kOe, and the coercive force was measured with a DC BH tracer at 10 Oe by reversing the magnetic field. 1 kHz
And the magnetic permeability at 100 kHz were measured with an impedance analyzer in a magnetic field of 5 mOe. In addition, the core loss is Bm-2kGau using an AC magnetization characteristic measuring device.
The measurement was performed under the conditions of ss and f = 100 kHz. The measurement sample was a ring with an outer diameter of 10 mm and an inner diameter of 6 mm. In addition, the measurement results shown below are results of heat treatment in vacuum at a temperature rising rate of 40 ° C./min, a holding temperature of 600 ° C. or 650 ° C., and a holding time of 1 hour.

Next, Tables 2 to 4 show samples of each composition produced by the above-mentioned examples. Table 2 shows the thickness (t) of the ribbon, the saturation magnetic flux density (Bs), the coercive force (Hc), and the core loss when T = Nb, respectively, and Table 3
Is the measured value of heat treatment temperature, saturation magnetic flux density, coercive force, magnetic permeability, and core loss when T = Nb, and Table 4 shows T = Z.
It shows the same measured values for r.

[0050]

[Table 2]

[0051]

[Table 3]

[0052]

[Table 4]

As can be seen from Tables 2 to 4, by adding T'as an additional element, both the magnetic permeability and the core loss exhibited excellent values as compared with the comparative example in which T'was not added. I understand.

As described above, the alloy of the present invention is excellent in soft magnetic characteristics and has a high hardness by crystallizing the amorphous alloy having the above-mentioned composition by heat treatment to obtain a structure mainly composed of ultrafine crystal grains. And excellent properties having high thermal stability can be obtained. Further, when Nb, Ta, etc. are contained in the composition of the soft magnetic alloy in the alloy of the present invention, the N
Since b and Ta are refractory metals, they are resistant to heat and are hard to oxidize during manufacturing, so that they are characterized by mild manufacturing conditions and easy manufacturing. Therefore, the soft magnetic alloy of the present invention is for a magnetic head,
It is suitable for transformers and choke coils, and when it is used for these purposes, it has the effects of improving the performance and reducing the size and weight.

[0055]

As described above, according to the present invention, while exhibiting a saturation magnetic flux density superior to conventional practical alloys,
It exhibits a low coercive force that is sufficient for practical use. Moreover, the magnetic permeability is higher than that of the conventional practical alloys, and the magnetic permeability of more than 10000 can be easily obtained depending on the composition, and the magnetic permeability is sufficiently high even in the high frequency range. Further, it is possible to realize low core loss not only in the low frequency region but also in the high frequency region. Furthermore, it is possible to easily control the magnetostriction according to the composition. Moreover, the soft magnetic alloy of the present invention has high mechanical strength and high thermal stability.

In addition, the alloys of the present invention to which Nb or Ta is added are all thermally stable, so that they are less likely to be deteriorated by an oxidation reaction or a reduction reaction during the production, and the conditions during the production are advantageous. There are advantages.

From the above, the soft magnetic alloy of the present invention is suitable for a magnetic head which is required to cope with a high coercive force of a magnetic recording medium, a transformer and a choke coil which are required to be further downsized. When used for these purposes, there is an effect that the performance can be improved and the size and weight can be reduced.

[Brief description of drawings]

FIG. 1G in an example of an alloy of an example of the present invention
It is a semi-logarithmic graph which shows the relationship between the amount of a and magnetic permeability.

FIG. 2 is a schematic diagram of a micrograph showing the composition of one example of the alloy of the present invention after heat treatment.

FIG. 3 is a diagram showing a relationship between a saturation magnetic flux density and an addition amount of an element T ′.

FIG. 4 is a diagram showing the relationship between coercive force and the amount of element T ′ added.

FIG. 5 is a diagram showing the relationship between electric resistance and the amount of addition of the element T ′.

FIG. 6 is a diagram showing the relationship between magnetic permeability and the amount of addition of the element T ′.

FIG. 7 is a diagram showing the relationship between core loss and the amount of element T ′ added.

FIG. 8 is a diagram showing a relationship between magnetic permeability and heat treatment temperature in samples having compositions of Fe ₈₄ Nb ₇ B ₉ and Fe 8 ₃ Nb ₇ B ₉ T ′ ₁ .

FIG. 9 is a diagram showing a relationship between core loss and heat treatment temperature in samples having compositions of Fe ₈₄ Nb ₇ B ₉ and Fe 8 ₃ Nb ₇ B ₉ T ′ ₁ .

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akihiro Makino 1-7 Yukiya Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Ken Masumoto 3-8-22 Uesugi, Aoba-ku, Sendai-shi, Miyagi (72) Inventor Akihisa Inoue Kawauchi Mubanchi, Aoba-ku, Sendai City, Miyagi Prefecture Kawauchi Housing 11-806

Claims (6)

[Claims] 1. An Fe-based soft magnetic alloy having a composition represented by the following formula. (Fe _1-a Q _a ) _b B _x T _y T ′ _z However, Q is either or both of Co and Ni, and T
Is one or more elements selected from Ti, Zr, Hf, V, Nb, Ta, Mo and W, and T ′ is
Ge, Ga, Al, Sn, Pb, Bi, Ru, Sb, Z
One or two or more elements selected from n, a ≦ 0.05, b = 75 to 92 atom%, x =
0.5 to 18 atomic%, y = 4 to 10 atomic%, z ≦
It is 4.5 atomic%. 2. An Fe-based soft magnetic alloy having a composition represented by the following formula. Fe _b B _x T _y T ′ _z where T is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from W,
T'is Ge, Ga, Al, Sn, Pb, Bi, Ru,
One or more elements selected from Sb and Zn, b ≦ 92 atom%, x ≦ 0.5-18 atom%, y =
4 to 10 atomic%, and z ≦ 4.5 atomic%. 3. An Fe-based soft magnetic alloy having a composition represented by the following formula. (Fe _1-a Q _a ) _b B _x T _{y T'z} X _t However, Q is either or both of Co and Ni, and T
Is one or more elements selected from Ti, Zr, Hf, V, Nb, Ta, Mo and W, and T ′ is
One element or two or more elements selected from Ge, Ga, Sn, Pb, Bi, Sb and Zn, and X is Cr, M
1 or 2 selected from o, W, Ru, Rh and Ir
It is an element of at least one species, a ≦ 0.05, b = 75 to 92 atom%, x =
0.5-18 atomic%, y = 4-10 atomic%, z ≦ 4.5
Atomic% and t ≦ 5 atomic%. 4. An Fe-based soft magnetic alloy having a composition represented by the following formula. Fe _b B _x T _{y T'z} X _t However, T is Ti, Zr, Hf, V, Nb, Ta, Mo,
One or more elements selected from W,
T'is Ge, Ga, Al, Sn, Pb, Bi, Sb,
One or more elements selected from Zn,
X is one or more elements selected from Cr, Mo, W, Ru, Rh, and Ir, b = 75 to 92 atom%, x = 0.5 to 18 atom%,
y = 4 to 10 atomic%, z ≦ 4.5 atomic% t ≦ 5
It is atomic%. 5. The Fe-based soft magnetic alloy according to claim 1, wherein z = 0.2 to 2 atomic%. 6. The Fe-based soft magnetic alloy according to any one of claims 1, 2, 3, 4, and 5, wherein the element T is Ti,
Fe-based soft magnetic alloy, wherein x = 6.5 to 18 atomic% when one or more selected from V, Nb, Ta, Mo and W.