JPH07140204A - Semiconductor tester - Google Patents

Abstract

PURPOSE:To prevent a setting error of an analyzing utility and enhance working efficiency by analyzing test results based on a test program with the analyzing utility selected and conducting a test to a semiconductor device. CONSTITUTION:Transmission of a test program is requested to a host computer 1 by an instruction inputted from an input/output device 6. The test program and a set file of an analyzing utility corresponding to the test program are automatically selected from a disc device 2 based on the name of the test program and transmitted to a test execution part 5. By the test program and the analyzing utility set by the set file, a test is executed. The setting of the analyzing utility through the input/output device 6 which is always requested when the kind of a semiconductor device is changed is made unnecessary, and working efficiency in testing of the semiconductor device is enhanced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor test apparatus for testing a semiconductor device for electrical characteristics and the like by a test program and analyzing the test result using an analysis utility.

[0002]

2. Description of the Related Art FIG. 5 is a block diagram showing the structure of a conventional semiconductor test apparatus. In the figure, 1 is a host computer that transfers a test program in response to a test program transfer request, 2 is a disk device that stores a test program file in which test items and test sequences corresponding to the semiconductor device to be tested are stored, 4 Is a transmission line for transmitting and receiving the test program transfer request and test program data. Reference numeral 5 is a test execution unit that inputs an electric signal to a semiconductor device to be tested according to a test program, executes the test, and uses the analysis utility to obtain the analysis result for the test result. An input / output device for displaying test results and analysis results of tests executed by the execution unit 5, and 7 is a semiconductor device to be tested.

Next, the operation will be described. In this semiconductor test apparatus, when testing the semiconductor device 7, the input / output device 6
A transfer request for a test program for testing the semiconductor device 7 is sent to the host computer 1 in response to a command input from the. As a result, the test program stored in the disk device 2 is read and the test is performed by this test program. Then, the test results of this test program are analyzed by the analysis utility.

FIG. 6 is a flow chart showing the operation of the conventional semiconductor test apparatus. According to this flow chart
First, by inputting a command from the input / output device 6, a test program transfer request is issued to the host computer (step ST1). As a result, the host computer 1
Sends a test program according to the transfer request to the disk device 2
Read out and transferred to the test execution unit 5 via the transmission path 4 (step ST2). Next, by inputting an instruction from the input / output device 6, the test execution unit 5 sets an analysis utility for analyzing the test result of the semiconductor device 7 to be tested (step ST3). The setting of this analysis utility is performed by the operator performing an input operation using the input / output device 6.

Further, the test execution section 5 inputs an electric signal to the semiconductor device 7 in accordance with the test program, tests all test items, and determines whether or not the output data at that time has an appropriate value. Is tested (step ST4). Next, the test result of the test executed in step ST4 is displayed, and the test result is analyzed by the analysis utility (step ST
5).

In the subsequent step ST6, it is judged whether or not the tests have been executed for all the test items, and if the tests have not been executed for all the test items, step ST6.
Returning to step 4, the test for the test item that has not been executed is continued. On the other hand, when it is determined that the tests for all the test items are completed, the test result and the analysis result are displayed (step ST7), and the presence or absence of the semiconductor device to be tested next is determined to be the test target. If there is no semiconductor device, the process ends (step ST8). Further, when there is a semiconductor device to be tested next, it is determined whether or not the semiconductor device is the same type as the semiconductor device to be tested until then (step ST9). The process of is repeated. If the semiconductor device is of a different type, the process returns to step ST1, a new test program is set, and the analysis utility is set again to perform the test.

[0007]

Since the conventional semiconductor test apparatus is configured as described above, it is necessary to change not only the test program but also the setting of the analysis utility every time the semiconductor apparatus to be tested changes. Moreover, it is necessary to reconfigure many settings of this analysis utility over multiple items.Moreover, the setting of the analysis utility is performed by the operator's operation every time the semiconductor device to be tested changes. However, there were problems such as setting mistakes.

The present invention has been made in order to solve the above-mentioned problems, and prevents the setting error and the like by preventing the analysis utility corresponding to the test program from being automatically set. It is an object of the present invention to obtain a semiconductor test apparatus with improved work efficiency by eliminating the need for input setting work of the analysis utility at the start.

[0009]

SUMMARY OF THE INVENTION A semiconductor test apparatus according to the present invention comprises an analysis utility storage means for storing an analysis utility corresponding to each test program corresponding to the type of semiconductor device to be tested, and the analysis utility storage means. And an analysis utility selecting means for selecting the analysis utility stored in the means according to the type of the semiconductor device to be tested or a test program for testing the semiconductor device.

[0010]

In the semiconductor testing apparatus according to the present invention, an analysis utility corresponding to the type of semiconductor device or a test program is automatically selected from among the analysis utilities stored in advance, and the above-mentioned test is performed by the selected analysis utility. Since the test results by the program are analyzed, it is not necessary for the operator to set the analysis utility, and the analysis utility can be omitted by re-setting the analysis utility each time the type of semiconductor device under test changes. It prevents the setting error of the utility and improves the work efficiency when testing the semiconductor device.

[0011]

【Example】

Example 1. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing the configuration of the semiconductor test apparatus of this embodiment, which is a conventional technique in FIG. Figure 5
The same or corresponding parts are designated by the same reference numerals and the description thereof will be omitted. In the figure, 2 is a disk device,
In the present embodiment, there are a test program file that describes the test items and test order of the semiconductor device 7 to be tested, and a setting file that describes the setting contents of the analysis utility when the test result of the test program is analyzed. It is stored. Reference numeral 3 denotes a correspondence table storage device, which stores a correspondence table 13 (analysis utility selection means) for associating a test program file with an analysis utility setting file. This correspondence table 13 is
As shown in FIG. 2, a test program name 11 indicating a test program name and a setting file name 12 of an analysis utility corresponding to the test program name are paired with each other.

Here, the correspondence table 13 with the host computer 1
Corresponds to the analysis utility selection means.

Next, the operation will be described. FIG. 3 is a flowchart showing the operation of the semiconductor test apparatus according to the embodiment of the present invention. In step ST11, the input / output device 6
When a command is input from, the test program name is specified to the host computer 1 to request the transfer of the test program. In the following step ST12, step ST
Based on the test program name designated by 11, the correspondence table 13 stored in the correspondence table storage device 3 is referred to, and the setting file name of the corresponding analysis utility is read. In this case, for example, if the test program name is “M110”, the setting file name of the analysis utility read corresponding to the test program is “ABC”.

In the next step ST13, a test program is read from the disk device 2 based on the test program name and transferred to the test execution section 5 via the transmission path 4. In the following step ST14, step ST1
2, the setting file is read from the disk device 2 based on the setting file name of the analysis utility read from the correspondence table 13, and the test execution unit 5 is transmitted via the transmission path 4.
And set the analysis utility. In the next step ST15, the test execution unit 5 tests the semiconductor device 7. This test is performed in accordance with the transferred test program, and is performed based on various signals input to the semiconductor device 7 as the test target and signal data output at this time. Then, in step ST16, whether or not the test result obtained based on the electric signal output from the semiconductor device 7 is proper is tested, and the test result is analyzed by the set analysis utility.

In the following step ST17, it is determined whether or not the test has been performed for all the test items of the test program. When the test items remain, the process returns to step ST15 and the processes from step ST15 to step ST17 are repeated. On the other hand, when it is determined that the tests have been performed for all the test items, the process proceeds to step ST18, and the test result and the analysis result for the test result are input / output device 6
Output to and display.

In the next step ST19, it is determined whether or not there is a semiconductor device to be tested next, and if there is no semiconductor device to be tested, the process ends. If there is a semiconductor device to be tested next, the process proceeds to step ST20 to determine whether or not the semiconductor device is the same as the semiconductor device to be tested until then.
Returning to step 5, the processing after step ST15 is repeated. If the semiconductor device is of a different type, step S
Returning to T11, a new test program is set by executing the processing after step ST11, and the analysis utility is also set again to perform the test.

As described above, according to this embodiment, when a test program transfer request is issued to the host computer 1 by the instruction input from the input / output device 6, the test program transfer request is made based on the test program name at that time. A test program and an analysis utility setting file corresponding to the test program are automatically selected and read from the disk device 2 and transferred to the test execution unit 5, and the analysis utility set by the test program and the setting file. Since the test is executed by, the operator does not need to set the analysis utility via the input / output device 6 every time the type of the semiconductor device to be tested changes like the conventional semiconductor test device, and the semiconductor device does not need to be set. The work efficiency when testing is improved.

Example 2. In the first embodiment described above, the correspondence table 13 is made up of the test program name 11 and the analysis utility setting file name 12 corresponding to the test program name. However, as shown in FIG. It may be a correspondence table composed of a test program name 11 corresponding to the type name 14 of the target semiconductor device and a setting file name 12 of the analysis utility. In this case, the search item corresponds as the type name. The test program name 11 and the analysis utility setting file name 12 are read out, and the test program and analysis utility setting files stored in the disk device 2 corresponding to the read test program name 11 and analysis utility setting file name 12 are read. Transfer to the test execution unit 5 and To run the test by analysis utility that was set by the setting file of the utility.

Also in this embodiment, the setting is made by the setting file of the test program and the analysis utility which are automatically selected and read based on the type name of the semiconductor device to be tested and transferred to the test execution unit 5. Since the test is executed by the analysis utility, it is not necessary for the operator to set the analysis utility via the input / output device 6 every time the type of the semiconductor device to be tested changes like the conventional semiconductor test device. Work efficiency when testing a semiconductor device is improved.

Example 3. Further, although the correspondence table 13 is stored in the correspondence table storage device 3 in the first embodiment, the correspondence table may be stored in the disk device 2 as a file. Has the same effect as.

[0021]

As described above, according to the present invention, the analysis utility according to the type of the semiconductor device or the test program is automatically selected from the analysis utilities stored in advance, and this selection utility is selected. Since the analysis utility analyzes the test results of the above test program and tests the semiconductor device, errors in setting the analysis utility can be prevented, and the work efficiency at the start of the test can be improved. is there.

[Brief description of drawings]

FIG. 1 is a block diagram showing the configuration of a semiconductor test apparatus according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a configuration of a correspondence table in the semiconductor test device according to the embodiment of the present invention.

FIG. 3 is a flowchart showing the operation of the semiconductor test apparatus according to the embodiment of the present invention.

FIG. 4 is an explanatory diagram showing a configuration of a correspondence table in a semiconductor test device according to another embodiment of the present invention.

FIG. 5 is a block diagram showing a configuration of a conventional semiconductor test apparatus.

FIG. 6 is a flowchart showing the operation of a conventional semiconductor test device.

[Explanation of symbols]

1 host computer, (analysis utility selection means) 2 disk device (analysis utility storage means) 7 semiconductor device 13 correspondence table (analysis utility selection means)

Claims (1)

[Claims] 1. A semiconductor test device for testing the electrical characteristics of a semiconductor device to be tested according to a test program, and analyzing the obtained test result by an analysis utility set in the test device. The analysis utility storage means that stores the analysis utility corresponding to each test program according to the type, and the analysis utility according to the test program for testing the semiconductor device as the test target are the type of the semiconductor device as the test target. Alternatively, the semiconductor test apparatus is provided with an analysis utility selection means for selecting from the analysis utilities stored in the analysis utility storage means according to the test program.