JPH0713964Y2 - 平面研磨装置用キャリヤ - Google Patents
平面研磨装置用キャリヤInfo
- Publication number
- JPH0713964Y2 JPH0713964Y2 JP1987088872U JP8887287U JPH0713964Y2 JP H0713964 Y2 JPH0713964 Y2 JP H0713964Y2 JP 1987088872 U JP1987088872 U JP 1987088872U JP 8887287 U JP8887287 U JP 8887287U JP H0713964 Y2 JPH0713964 Y2 JP H0713964Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- work
- pores
- polishing
- work holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987088872U JPH0713964Y2 (ja) | 1987-06-09 | 1987-06-09 | 平面研磨装置用キャリヤ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987088872U JPH0713964Y2 (ja) | 1987-06-09 | 1987-06-09 | 平面研磨装置用キャリヤ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63197049U JPS63197049U (US07902200-20110308-C00004.png) | 1988-12-19 |
JPH0713964Y2 true JPH0713964Y2 (ja) | 1995-04-05 |
Family
ID=30947352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987088872U Expired - Lifetime JPH0713964Y2 (ja) | 1987-06-09 | 1987-06-09 | 平面研磨装置用キャリヤ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0713964Y2 (US07902200-20110308-C00004.png) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007015105A (ja) * | 2006-09-25 | 2007-01-25 | Hoya Corp | 研磨用キャリア及び研磨方法並びに情報記録媒体用基板の製造方法 |
JP5678724B2 (ja) * | 2011-03-02 | 2015-03-04 | 旭硝子株式会社 | ガラス基板の製造方法及びその方法に用いられるキャリアの反り方向検出装置 |
MY179417A (en) * | 2011-12-27 | 2020-11-05 | Kobe Precision Tech Sdn Bhd | Apparatus and method for providing improved grinding lines on an aluminium substrate disc |
JP6462348B2 (ja) * | 2014-12-16 | 2019-01-30 | 大研工業株式会社 | 薄板ワークの研削方法 |
JP6513174B2 (ja) * | 2017-12-25 | 2019-05-15 | 信越半導体株式会社 | ウェーハ保持用キャリアの設計方法 |
-
1987
- 1987-06-09 JP JP1987088872U patent/JPH0713964Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63197049U (US07902200-20110308-C00004.png) | 1988-12-19 |
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