JPH07135235A - Heating device - Google Patents

Abstract

PURPOSE:To realize a heating device which is provided with a heat block and enhanced in thermal efficiency and wherein a heater can be easily replaced with a new one. CONSTITUTION:A heating device is equipped with heat blocks 1 and 2, the heat blocks 1 and 2 are piled up to constitute a two-layered structure and made to pinch in a heat releasing body between them. The upper heat block 1 is formed of material high in thermal conductivity, the lower heat block 2 is formed of material low in thermal conductivity, and the heat releasing body is sandwiched in between the blocks 1 and 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an object heating apparatus using a heat block, and more particularly to a heating apparatus used in a semiconductor manufacturing apparatus such as a paste curing apparatus or a wire bonding apparatus.

[0002]

2. Description of the Related Art Japanese Patent Application No. 4-25 previously filed by the present applicant
The heating device used in the "wire bonding device" described in No. 2404 is cut along the line of FIG. 4 (a side view showing the heating device with a part omitted) and FIG. 5 (BB 'line of FIG. 4). As shown in the sectional view), the size of the hole is made larger than the diameter of the heater 3 to some extent so that the heater 3 can be easily put in and taken out from the integrally formed heat block 6. Then, the heater 3 inserted into the hole is pressed against the side surface of the hole by a plurality of setscrews 7 to be fixed. In addition, 5 is a sample placed on the heat block 6.

[0003]

However, as a result of examining the above heating device, the present inventor found the following problems.

In the above heating device, since the size of the hole into which the heater 3 is inserted is larger than the diameter of the heater to some extent, a gap 8 is formed between the heater 3 and the wall of the heat block 6, and heat is generated. There has been a problem that the transfer efficiency (loss) is generated and the thermal efficiency is reduced.

Further, since the entire heat block 6 is made of metal such as stainless steel, high heat is radiated from all surfaces of the heat block 6, so that the heat of the heater 3 is not used efficiently. There was a problem.

Further, there is a problem that it takes a time required to give a uniform temperature to the sample due to the above-mentioned heat transfer loss and release of high heat.

An object of the present invention is to provide a technique capable of improving the adhesion between a heat block and a heater (heating element) and enhancing the heat transfer efficiency.

Another object of the present invention is to provide a technique capable of reducing heat release as much as possible and improving thermal efficiency.

Another object of the present invention is to provide a technique capable of shortening the time required to give a uniform temperature to a sample.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[0011]

The outline of the representative one of the inventions disclosed in the present application will be briefly described as follows.

That is, the heating device according to the present invention is configured by dividing the heat block into two parts and sandwiching the heating element between the two divided heat blocks.

One of the two divided heat blocks is made of a material having a high thermal conductivity, and the other is made of a material having a low thermal conductivity, and the two blocks sandwich a heating element.

[0014]

According to the above-mentioned means, since the heat block is divided into two parts and the heat generating element is sandwiched by the divided heat blocks, the gap between the heat block and the heat generating element (heater) is reduced. The heat conduction efficiency can be increased.

Further, since the heat block is divided into two, and the heat generating element is sandwiched by the divided two heat blocks, it is possible to easily attach and detach the heat generating element (heater).

Further, one of the two divided heat blocks is made of a material having a high thermal conductivity, and the other is made of a material having a low thermal conductivity. Since the heat of the heater is concentrated on the block on which the sample is placed, the thermal efficiency can be improved.

Further, the heating device can shorten the time required to apply a uniform temperature to the sample.

[0018]

Embodiments of the present invention will now be described in detail with reference to the drawings.

In all the drawings for explaining the embodiments, parts having the same function are designated by the same reference numerals and their repeated description will be omitted.

FIG. 1 is a side view of the heating apparatus according to one embodiment of the present invention, in which the schematic construction is partially omitted, and AA 'in FIG.
A cross-sectional view taken along the line, FIG. 3 shows the heating device of the present embodiment.
It is a figure which corresponds to and expand | deploys and shows in a component.

1 to 3, 1 is stainless steel,
The upper heat block is made of a material having a high thermal conductivity such as iron, and the sample 5 is placed on the upper heat block. Reference numeral 2 is a lower heat block made of a material having low thermal conductivity such as ceramics, pottery, and stone. A heater (heating element) 3 is sandwiched between the upper heat block 1 and the lower heat block 2.

As shown in FIG. 2, the heater 3 is sandwiched between the upper heat block 1 and the lower heat block 2, and is fixed by a heat block fixing screw 4. As is apparent from FIGS. 2 and 3, the heater 3 is attached and detached by removing the heat block fixing screw 4 and separating the upper heat block 1 and the lower heat block 2. By doing so, the gap 9 between the heater 3 and the wall surfaces of the upper heat block 1 and the lower heat block 2 can be made extremely small.

As can be seen from the above description, according to this embodiment, the heat block is divided into the upper heat block 1 and the lower heat block 2, and the upper heat block 1 and the lower heat block 2 are provided with heaters (heating elements). By sandwiching 3), the gap between the upper and lower heat blocks 1 and 2 and the heater 3, which are divided into two, can be reduced, so that the heat conduction efficiency can be increased.

Further, the upper and lower heat blocks 1 are divided into two parts.
Since the heater 3 is sandwiched by 2, it is possible to easily attach and detach the heater 3.

The upper heat block 1 (or the lower heat block 2) is made of a substance having a high thermal conductivity, and the lower heat block 2 (or the upper heat block 1) is made of a substance having a low thermal conductivity, The upper heat block 1 (or the lower heat block 2) on which the sample 5 is placed by the heat of the heater 3 being sandwiched by the upper and lower heat blocks 1 and 2
Since it concentrates on, the thermal efficiency can be improved.

Further, according to the heating apparatus of this embodiment, the time required to give the sample 5 a uniform temperature can be shortened.

Although the present invention has been specifically described based on the embodiments, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention. There is no end.

[0028]

The effects obtained by the representative ones of the inventions made by the present inventor are as follows.

That is, since the gap between the two-divided heat block and the heating element (heater) is reduced, the heat conduction efficiency can be increased.

Further, since the heating element is sandwiched by the two divided heat blocks, the heating element (heater) can be easily attached and detached.

Further, one of the two divided heat blocks is made of a material having a high thermal conductivity, and the other is made of a material having a low thermal conductivity. Since the heat of the (heater) is concentrated on the block on which the sample is placed, the thermal efficiency can be improved.

Further, the heating means described above can shorten the time required to apply a uniform temperature to the sample.

[Brief description of drawings]

FIG. 1 is a side view showing a schematic configuration of an embodiment of a heating device according to the present invention with a part of the schematic configuration omitted;

2 is a cross-sectional view taken along the line A-A ′ of FIG.

FIG. 3 is a diagram showing a heating device of this embodiment corresponding to FIG.

FIG. 4 is a side view showing a schematic configuration of a heating device according to the prior art with a part thereof omitted;

5 is a cross-sectional view taken along line B-B ′ of FIG.

[Explanation of symbols]

1 ... Upper heat block, 2 ... Lower heat block, 3 ... Heater (heating element), 4 ... Heat block fixing screw, 5 ... Sample, 6 ... Heat block, 7 ... Set screw, 8, 9 ... Gap.

Claims (2)

[Claims] 1. A heating device having a heat block, wherein the heat block is divided into two, and a heating element is sandwiched between the divided heat blocks. 2. A heating device having a heat block, wherein the heat block is divided into two, one of the divided heat blocks is made of a substance having a high thermal conductivity, and the other is made of a substance having a low thermal conductivity. And a heating device sandwiched between the two blocks.