JPH07132368A - Method and device for automatically following ultrasonic oscillator - Google Patents
Method and device for automatically following ultrasonic oscillatorInfo
- Publication number
- JPH07132368A JPH07132368A JP30466393A JP30466393A JPH07132368A JP H07132368 A JPH07132368 A JP H07132368A JP 30466393 A JP30466393 A JP 30466393A JP 30466393 A JP30466393 A JP 30466393A JP H07132368 A JPH07132368 A JP H07132368A
- Authority
- JP
- Japan
- Prior art keywords
- oscillator
- temperature
- tracking
- frequency
- resonance frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は例えば超音波を利用し
てはんだ付を行う場合のように高温環境下で使用される
超音波振動子系における超音波発振器の共振周波数への
自動追尾方法とその装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for automatically tracking the resonance frequency of an ultrasonic oscillator in an ultrasonic oscillator system used in a high temperature environment such as soldering using ultrasonic waves. Regarding the device.
【0002】[0002]
【従来の技術】図1に示すように超音波振動子系は機械
的構成と温度条件に応じてその固有の振動周波数(共振
周波数)f0が定まる。そして振動子系は真の共振周波
数の他に高調波等の大小の寄生共振周波数a,b,c等
を含んでいる。また、この周波数f0は、温度の変化に
よる物質の長さの変化に応じて変化する。一般的に温度
が上昇すれば金属などの物質は長さが伸び且つ弾性率も
変化するので、図2に示すように超音波振動系の共振周
波数は常温時のf0からf01に低くなる。この様な振
動子系を超音波発振器で振動させる場合、常にその振動
子系の共振周波数f0を検知し、そのf0に対応した周
波数電力を供給し、効率良く振動を継続させるために、
自動追尾発振器を用いて振動子系の振動数をf0に自動
追尾させる方法が取られる。そしてこの自動追尾の開始
は、共振周波数f0に対し、予め決められたある特定の
周波数(追尾開始周波数)fSを検出した時点からf0
に向かって開始され、一定の限定範囲fe内での周波数
特性を捜索しながら共振周波数に順次追尾させるもので
ある。2. Description of the Related Art As shown in FIG. 1, an ultrasonic oscillator system has its own vibration frequency (resonance frequency) f 0 determined according to the mechanical structure and temperature conditions. In addition to the true resonance frequency, the oscillator system includes large and small parasitic resonance frequencies a, b, c, etc. such as harmonics. Further, this frequency f 0 changes according to the change in the length of the substance due to the change in temperature. Generally, when the temperature rises, the length of the substance such as metal increases and the elastic modulus also changes, so that the resonance frequency of the ultrasonic vibration system decreases from f 0 at room temperature to f 01 as shown in FIG. . When vibrating the such oscillators in the ultrasonic generator, constantly detects the resonance frequency f 0 of the oscillator system to supply frequency power corresponding to the f 0, in order to continue efficiently vibrations,
A method of automatically tracking the frequency of the oscillator system to f 0 using an automatic tracking oscillator is used. The start of the automatic tracking, the resonance for the frequency f 0, f 0 from the time of detecting the predetermined certain frequency (tracking start frequency) f S
The search is started for the frequency characteristics within a certain limited range fe , and the resonance frequencies are sequentially tracked.
【0003】[0003]
【発明が解決しようとする課題】しかし上述のように振
動子系の共振周波数が振動子系の温度上昇により変化
し、さらに自動追尾捜索範囲内に前述のa〜cに示され
るような寄生共振周波数を含んでいると実際の自動追尾
に際し、追尾作動が当該温度における真の共振周波数範
囲から逸脱し、自動追尾の機能が損なわれるという問題
がある。この発明はこれらの問題点を解決する超音波発
振器の自動追尾方法及び装置を提供せんとするものであ
る。However, as described above, the resonance frequency of the oscillator system changes due to the temperature rise of the oscillator system, and further, the parasitic resonance as shown in the above a to c within the automatic tracking search range. If the frequency is included, there is a problem that in actual automatic tracking, the tracking operation deviates from the true resonance frequency range at the temperature, and the automatic tracking function is impaired. The present invention aims to provide an automatic tracking method and apparatus for an ultrasonic oscillator that solves these problems.
【0004】[0004]
【課題を解決するための手段】上記問題点を解決するた
めの本発明の自動追尾方法は、超音波振動子系2におけ
る振動子1の振動に対し、予め決められた追尾開始周波
数の時に、当該振動子系2の周波数特性への追尾を自動
追尾発振器6によって開始することにより、上記振動子
系2の振動を共振周波数に自動的に追尾させる方法にお
いて、上記振動子系2の温度を検出し、当該温度時点に
対応する振動子系2の共振周波数と前記追尾開始周波数
を決定することを特徴としている。また同じく本発明の
装置は、超音波振動子系2の振動子1を振動させ、予め
決められた追尾開始周波数時点より上記振動子系2の周
波数特性への追尾を開始して該振動子系2の振動をその
共振周波数に自動的に追尾させる自動追尾発振器6を前
記超音波振動子系2に接続したものにおいて、該超音波
振動子系2の温度を検出する温度センサ8と、該温度セ
ンサ8の検出値と検出時の温度に対応した振動子系2の
共振周波数とにより、上記自動追尾発振器6の追尾開始
周波数を演算して設定する演算機9とを設けことを特徴
としている。The automatic tracking method of the present invention for solving the above-mentioned problems is such that when the tracking start frequency is a predetermined frequency with respect to the vibration of the vibrator 1 in the ultrasonic vibrator system 2, In the method of automatically tracking the vibration of the oscillator system 2 to the resonance frequency by starting the tracking to the frequency characteristic of the oscillator system 2 by the automatic tracking oscillator 6, the temperature of the oscillator system 2 is detected. The resonance frequency of the oscillator system 2 and the tracking start frequency corresponding to the temperature point are determined. The apparatus of the present invention also vibrates the transducer 1 of the ultrasonic transducer system 2 to start tracking to the frequency characteristic of the transducer system 2 at a predetermined tracking start frequency time point to start the transducer system. A temperature sensor 8 for detecting the temperature of the ultrasonic oscillator system 2 and an automatic tracking oscillator 6 for automatically tracking the vibration of the ultrasonic oscillator 2 at the resonance frequency are connected to the ultrasonic oscillator system 2. It is characterized in that a calculator 9 is provided for calculating and setting the tracking start frequency of the automatic tracking oscillator 6 based on the detected value of the sensor 8 and the resonance frequency of the oscillator system 2 corresponding to the temperature at the time of detection.
【0005】[0005]
【作用】本発明方法においては、標準的な温度(常温)
の下で備えている超音波振動子系2の振動周波数特性
(共振周波数)が、振動子系2の温度変化によって変化
した場合、その温度変化に応じた周波数特性の変化に対
応して、自動追尾の追尾開始周波数を決定し、当該変化
温度に最も適した超音波振動を与える。その結果エネル
ギー損失がなく、共振周波数以外の寄生周波数の影響も
受けない。また本発明装置においては、振動子系2の振
動子1に与える振動特性を、温度センサ8により検出し
た振動子系2の変化温度とその変化に応じた共振周波数
とを演算機9とで演算した値で、自動追尾の開始周波数
を決定し、自動追尾発振器6により、温度変化に対応し
た自動追尾を行う。In the method of the present invention, standard temperature (normal temperature)
When the vibration frequency characteristic (resonance frequency) of the ultrasonic transducer system 2 provided under the section changes with the temperature change of the transducer system 2, the automatic change is made in response to the change of the frequency characteristic according to the temperature change. The tracking start frequency of tracking is determined, and the ultrasonic vibration most suitable for the changing temperature is given. As a result, there is no energy loss and there is no influence of parasitic frequencies other than the resonance frequency. Further, in the device of the present invention, the vibration characteristics given to the vibrator 1 of the vibrator system 2 are calculated by the calculator 9 using the change temperature of the vibrator system 2 detected by the temperature sensor 8 and the resonance frequency corresponding to the change temperature. The starting frequency of the automatic tracking is determined by the value obtained by the above, and the automatic tracking oscillator 6 performs the automatic tracking corresponding to the temperature change.
【0006】[0006]
【実施例】以下図示する実施例につき詳述すると、図3
は本発明装置の構成図を示し、内部に圧電素子(電歪素
子)等の振動子1を有する超音波振動子系2の先端には
ホーン3を介して振動子チップ4が付設され、振動子1
には自動追尾発振器6が接続され、振動子1に対し増幅
された超音波振動電力を供給して超音波振動を生ぜしめ
ている。上記発振器6には例えば振動子1からの振動電
流のフィードバックを受けてこれを増幅し、発振器6を
振動させる自動追尾式電圧制御フィルタ(VCF・・・
図示しない)が内蔵され、さらに発振器6は振動子1の
振動数が図1の例に対応させるとその共振周波数f0に
対する自動追尾開始周波数fSに達するとその共振周波
数特性への追尾を開始して自動追尾する自動追尾機能を
備え、これらにより在来の超音波振動装置を構成してい
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiment shown in FIG.
Shows a configuration diagram of the device of the present invention, in which a vibrator chip 4 is attached via a horn 3 to the tip of an ultrasonic vibrator system 2 having a vibrator 1 such as a piezoelectric element (electrostrictive element). Child 1
An automatic tracking oscillator 6 is connected to the oscillator 1 and supplies amplified ultrasonic vibration power to the vibrator 1 to generate ultrasonic vibration. The oscillator 6 receives, for example, feedback of an oscillating current from the oscillator 1 and amplifies the feedback to oscillate the oscillator 6 to automatically oscillate the oscillator 6.
(Not shown), and the oscillator 6 starts tracking to the resonance frequency characteristic when the frequency of the vibrator 1 reaches the automatic tracking start frequency f S for the resonance frequency f 0 when the frequency corresponds to the example of FIG. 1. The conventional ultrasonic vibrating device is configured by the automatic tracking function that automatically tracks the information.
【0007】これに対し本実施例では、上記振動子系2
には熱電対からなる温度センサ8が付設され、該温度セ
ンサ8により振動子系2の温度変化が検出される機構と
なっている。そして上記温度センサ8は演算機(回路)
9に接続され、さらに演算機9は前記自動追尾発振器6
に接続されている。On the other hand, in this embodiment, the oscillator system 2 is used.
A temperature sensor 8 composed of a thermocouple is attached to the temperature sensor 8, and the temperature sensor 8 serves as a mechanism for detecting a temperature change of the vibrator system 2. The temperature sensor 8 is an arithmetic unit (circuit)
9 and the arithmetic unit 9 is connected to the automatic tracking oscillator 6
It is connected to the.
【0008】次に上記装置による自動追尾方法につき説
明すると、演算機9は温度センサ8からの温度検出信号
に基づいて、その超音波振動子系2の標準温度(常温)
T0から上昇時の温度T1迄の温度差(T1−T0)
と、当該温度差に対応する共振周波数の変化(f0−f
01)を求め、さらに常温T0時の追尾開始点ft0か
ら温度上昇時Tsにおける自動追尾開始点ftsを演算
する。これらの演算は例えば次の式によって行われる。 fts=ft0{(f00−f01)/(T1−
T0)}(Ts−T0) 例えばいま実験的に常温T0が20℃の時の共振周波数
f00が19.5KHZであったものが、上昇時の温度
T1が220℃で共振周波数f01が18.5KHZに
変化したとすれば、常温下の追尾開始点をft0として
温度上昇時の追尾開始点ftsは上式により fts=ft0−900 で求められ、上記ftsの値を自動追尾発振器6に設定
させれば、上昇した追尾開始の温度Tsにおける振動子
系2の真の共振周波数f0sに対して自動追尾できるこ
とになる。Next, the automatic tracking method by the above-mentioned device will be described. The arithmetic unit 9 uses the temperature detection signal from the temperature sensor 8 to determine the standard temperature (normal temperature) of the ultrasonic transducer system 2.
Temperature difference from T 0 to rising temperature T 1 (T 1 −T 0 ).
And the change in resonance frequency corresponding to the temperature difference (f 0 −f
01 ) is calculated, and the automatic tracking start point f ts at the temperature rise time T s is calculated from the tracking start point f t0 at the room temperature T 0 . These calculations are performed by the following equations, for example. f ts = f t0 {(f 00 −f 01 ) / (T 1 −
T 0 )} (T s −T 0 ) For example, the resonance frequency f 00 when the room temperature T 0 was 20 ° C. was experimentally 19.5 KHZ, but the resonance temperature f 1 resonated at 220 ° C. Assuming that the frequency f 01 changes to 18.5 KHZ, the tracking start point at normal temperature f ts is set as f t0 at room temperature, and the tracking start point f ts at the time of temperature increase is obtained by the above equation as f ts = f t0 −900. When the value of ts is set in the automatic tracking oscillator 6, automatic tracking can be performed with respect to the true resonance frequency f 0s of the oscillator system 2 at the increased tracking start temperature T s .
【0009】[0009]
【発明の効果】以上のように構成される本発明の方法及
び装置によれば、超音波振動子系の作動時の温度変化に
対し、当該変化温度に対応した振動子系の真の共振周波
数に対して常に適切な追尾開始点から自動追尾するの
で、仮に共振周波数特性中に寄生周波数を含んでいて
も、共振周波数への正確な自動追尾が行われ、その振動
子系のもつ振動エネルギーを最も有効に利用できる利点
がある。According to the method and apparatus of the present invention configured as described above, when the temperature of the ultrasonic oscillator system changes during operation, the true resonance frequency of the oscillator system corresponding to the temperature change. However, since automatic tracking is always performed from an appropriate tracking start point, even if a parasitic frequency is included in the resonance frequency characteristic, accurate automatic tracking to the resonance frequency is performed, and the vibration energy of the oscillator system is There are advantages that can be used most effectively.
【図1】超音波振動子系の共振周波数を示す線図であ
る。FIG. 1 is a diagram showing a resonance frequency of an ultrasonic transducer system.
【図2】同じく振動子系の温度変化に伴う共振周波数の
変化状態を示す線図である。FIG. 2 is a diagram similarly showing a change state of the resonance frequency according to a temperature change of the oscillator system.
【図3】本発明の装置の構成説明図である。FIG. 3 is an explanatory diagram of a configuration of an apparatus of the present invention.
【図4】本発明の装置を用いた振動子系の温度変化時の
自動追尾の状態を示す線図である。FIG. 4 is a diagram showing a state of automatic tracking when the temperature of a vibrator system using the apparatus of the present invention changes.
1 超音波振動子 2 超音波振動子系 3 ホーン 4 振動子チップ 6 自動追尾発振器 8 温度センサ 9 演算機(回路) f0 振動子系の共振周波数 f00 常温時の振動子系の共振周波数 f01 昇温時の振動子系の共振周波数 f0s 追尾開始時の振動子系の共振周波数 ft0 常温時の追尾開始周波数 fts 追尾開始周波数 T0 常温(標準温度) T1 昇温時温度 Ts 追尾開始時温度1 Ultrasonic Transducer 2 Ultrasonic Transducer System 3 Horn 4 Transducer Chip 6 Automatic Tracking Oscillator 8 Temperature Sensor 9 Computing Machine (Circuit) f 0 Resonant Frequency of Oscillator System f 00 Resonant Frequency of Oscillator System at Room Temperature f 01 Resonant frequency of oscillator system at temperature rise f 0s Resonant frequency of oscillator system at start of track f t0 Tracking start frequency at normal temperature f ts Tracking start frequency T 0 Room temperature (standard temperature) T 1 Temperature at temperature increase T s Tracking start temperature
Claims (2)
(1)の振動に対し、予め決められた追尾開始周波数の
時に、当該振動子系(2)の周波数特性への追尾を自動
追尾発振器(6)によって開始することにより、上記振
動子系(2)の振動を共振周波数に自動的に追尾させる
方法において、上記振動子系(2)の温度を検出し、当
該温度時点に対応する振動子系(2)の共振周波数と前
記追尾開始周波数を決定する超音波発振器の自動追尾方
法。1. When the vibration of the transducer (1) in the ultrasonic transducer system (2) is at a predetermined tracking start frequency, the frequency characteristic of the transducer system (2) is automatically tracked. In the method of automatically tracking the vibration of the oscillator system (2) to the resonance frequency by starting with the oscillator (6), the temperature of the oscillator system (2) is detected and the time point corresponding to the temperature is detected. An automatic tracking method for an ultrasonic oscillator for determining a resonance frequency of a vibrator system (2) and the tracking start frequency.
振動させ、予め決められた追尾開始周波数時点より上記
振動子系(2)の周波数特性への追尾を開始して該振動
子系(2)の振動をその共振周波数に自動的に追尾させ
る自動追尾発振器(6)を前記超音波振動子系(2)に
接続したものにおいて、該超音波振動子系(2)の温度
を検出する温度センサ(8)と、該温度センサ(8)の
検出値と検出時の温度に対応した振動子系(2)の共振
周波数とにより、上記自動追尾発振器(6)の追尾開始
周波数を演算して設定する演算機(9)とを設けてなる
超音波発振器の自動追尾装置。2. An oscillator (1) of an ultrasonic oscillator system (2) is vibrated to start tracking to a frequency characteristic of the oscillator system (2) at a predetermined tracking start frequency point. An automatic tracking oscillator (6) for automatically tracking the vibration of the oscillator system (2) to its resonance frequency is connected to the ultrasonic oscillator system (2). The tracking start of the automatic tracking oscillator (6) is started by the temperature sensor (8) for detecting the temperature, the detected value of the temperature sensor (8) and the resonance frequency of the oscillator system (2) corresponding to the temperature at the time of detection. An automatic tracking device for an ultrasonic oscillator, comprising: a calculator (9) for calculating and setting a frequency.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30466393A JP2681603B2 (en) | 1993-11-09 | 1993-11-09 | Ultrasonic oscillator automatic tracking method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30466393A JP2681603B2 (en) | 1993-11-09 | 1993-11-09 | Ultrasonic oscillator automatic tracking method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07132368A true JPH07132368A (en) | 1995-05-23 |
JP2681603B2 JP2681603B2 (en) | 1997-11-26 |
Family
ID=17935736
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Application Number | Title | Priority Date | Filing Date |
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JP30466393A Expired - Lifetime JP2681603B2 (en) | 1993-11-09 | 1993-11-09 | Ultrasonic oscillator automatic tracking method and apparatus |
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JP (1) | JP2681603B2 (en) |
Families Citing this family (1)
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JP6588240B2 (en) | 2015-06-04 | 2019-10-09 | 昭和電工株式会社 | Forging method |
-
1993
- 1993-11-09 JP JP30466393A patent/JP2681603B2/en not_active Expired - Lifetime
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JP2681603B2 (en) | 1997-11-26 |
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