JPH0713214Y2 - エツチング装置 - Google Patents

エツチング装置

Info

Publication number
JPH0713214Y2
JPH0713214Y2 JP1413387U JP1413387U JPH0713214Y2 JP H0713214 Y2 JPH0713214 Y2 JP H0713214Y2 JP 1413387 U JP1413387 U JP 1413387U JP 1413387 U JP1413387 U JP 1413387U JP H0713214 Y2 JPH0713214 Y2 JP H0713214Y2
Authority
JP
Japan
Prior art keywords
sample
ion beam
ion source
rotary holder
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1413387U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63121439U (enrdf_load_stackoverflow
Inventor
義孝 笹村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1413387U priority Critical patent/JPH0713214Y2/ja
Publication of JPS63121439U publication Critical patent/JPS63121439U/ja
Application granted granted Critical
Publication of JPH0713214Y2 publication Critical patent/JPH0713214Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Drying Of Semiconductors (AREA)
JP1413387U 1987-02-02 1987-02-02 エツチング装置 Expired - Lifetime JPH0713214Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1413387U JPH0713214Y2 (ja) 1987-02-02 1987-02-02 エツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1413387U JPH0713214Y2 (ja) 1987-02-02 1987-02-02 エツチング装置

Publications (2)

Publication Number Publication Date
JPS63121439U JPS63121439U (enrdf_load_stackoverflow) 1988-08-05
JPH0713214Y2 true JPH0713214Y2 (ja) 1995-03-29

Family

ID=30803839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1413387U Expired - Lifetime JPH0713214Y2 (ja) 1987-02-02 1987-02-02 エツチング装置

Country Status (1)

Country Link
JP (1) JPH0713214Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63121439U (enrdf_load_stackoverflow) 1988-08-05

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