JPH0712011B2 - Semiconductor manufacturing control method - Google Patents

Description

TECHNICAL FIELD The present invention relates to a semiconductor manufacturing control method.

[Conventional technology]

FIG. 3 is a perspective view of the cassette, FIG. 4 is a configuration diagram showing a control configuration of the semiconductor processing facility, and FIG. 5 is a configuration diagram of the semiconductor processing facility. In FIG. 3, (1) is a semiconductor wafer (hereinafter referred to as “wafer”), and (2) is a wafer cassette (hereinafter referred to as “cassette”) for storing a plurality of wafers.
(3) is an ID card, (4) is an ID card recognition device, and (4a) is an input means attached to the ID card recognition device. In FIG. 4, (5) is a wafer processing apparatus (hereinafter referred to as “processing apparatus”) for processing a wafer, and (6) is a host computer for controlling a plurality of processing apparatuses and ID card recognition devices. is there. In FIG. 5, (7) is the terminal of the host computer.

FIG. 6 is a flow chart of a control program for semiconductor processing equipment of a conventional host computer, showing the host computer (6), the processing equipment (5), and the ID card recognition device (4). FIG. 7 shows an automatic operation method of semiconductor processing equipment.

The operation will be described below. When the cassette (2) arrives at the processing device (5), the operator operates the input means (4a) of the ID card recognition device (4) and sends a cassette arrival signal to the host computer (6) (step 13). The host computer (6) receives the signal (step 9) and activates the device automatic program (step 16). The device automatic program performs the following processing. First, the host computer (6) sends a work start instruction to the processing unit (5) (step 18), and causes the processing unit (5) to start processing the wafer (1) in the cassette (2). Next, after waiting for the processing to be completed, upon receipt of the work completion report from the processing device (5) (step 19), the host computer (6) advances the step of the cassette (2) by one. With the above, the processing of the apparatus automatic program is completed, and the series of work is completed (step 17). Return to the beginning, high-end computer (6)
Waits for the next cassette arrival signal (step 8).

The processing device (5) is controlled by the automatic control program as described above, but if it becomes impossible to control by the automatic control program due to a failure of the processing device (5), the processing device is moved by a manual operation of the operator, The wafer (1) must be processed. When the processing is performed by the manual operation, the worker goes to the terminal (7) of the host computer to notify the host computer (6) that the processing of the cassette (2) has been completed by the processor (5), You must report that processing is complete. In response to this, the host computer
(6) advances one step of the above-mentioned cassette (2).

With the above, the processing of the cassette (2) in the processing device (5) by the manual operation is completed.

[Problems to be Solved by the Invention]

In the past, since the process progress was managed by the above method, if the processing device cannot be controlled by the automatic control program due to a failure of the processing device, the worker should report the completion of the process from the terminal. Only then can the cassette process be advanced to the host computer. This terminal operation has to be performed every time the processing of the cassette is completed, which is troublesome and has a drawback that an operation error is likely to occur.

The present invention has been made to solve the above problems, and even if the control device cannot be controlled by the automatic control program due to a breakdown, the host device can be operated without troublesome terminal operation. An object of the present invention is to obtain a semiconductor production management method that allows a computer to manage the process progress of a cassette.

[Means for Solving the Problems]

The management method according to the present invention allows a host computer to have an operation mode that can be changed from a terminal for each processor, and a processing program for the host computer that is started based on the ID card information provided from the ID card recognition device. Have more than one.

[Action]

The processing program of the host computer is changed in conjunction with changing the operation mode of the host computer using the terminal.

〔Example〕

FIG. 1 is a control program flow chart for semiconductor processing equipment according to the present invention, and FIG. 2 is a diagram showing a method for manually operating semiconductor processing equipment. Also, the structure of the cassette,
And the control configuration of the semiconductor processing equipment, the third, shown in the conventional example,
It is the same as Figure 4.

The operation will be described below. When the processor (5) can be moved by the instruction of the host computer (6), among the operation modes of each processor (5) that the host computer (6) has by the terminal,
Those that correspond to the above processing devices are automatic. Cassette
When (2) arrives at the processing device (5), the operator operates the input means (4a) of the ID card recognition device (4), and the host computer
The cassette arrival signal is sent to (6) (step 13), the host computer (6) receives the signal (step 9), and then determines the operation mode (step 10). As a result of the determination, the operation mode is automatic, so the device automatic program is started (step 16). The subsequent steps are the same as those shown in the conventional example.

On the other hand, a case where the processing device (5) cannot be controlled by the device automatic processing program due to a failure or the like will be described. The operation mode is switched to manual in advance by the terminal. When the cassette (2) arrives at the processor (5), the operator operates the input means (4a) attached to the ID card recognition device to send a cassette arrival signal to the host computer (6) (step 13), The host computer (6) receives the signal (step 9) and determines the operation mode (step 10). As a result of the judgment, since the operation mode is manual, the device manual program is started (step 11).
The device manual program performs the following processing. The operator processes the wafer (1) in the cassette (2) by operating the processing device (5) by a manual operation. After the processing is completed, the operator again operates the input means (4a) attached to the ID card recognition device (4) to notify the host computer (6) that the processing of the cassette (2) is completed (step 14). . The host computer (6) receives the signal and advances the step of the cassette (2) by one. With the above, the processing of the apparatus manual program is completed, and the series of work is completed (step 12). Returning to the beginning, the host computer (6) waits for the next cassette arrival signal (step 9).

〔The invention's effect〕

As described above, by changing the operation mode of each processing device that the host computer has as data by using the terminal,
By changing the processing program of the host computer that is started based on the ID card information sent from the ID card recognition device, the processor fails and the processor automatically operates under the instructions of the host computer. Even if the computer does not move, it is possible to let the host computer manage the progress of the cassette without having to perform troublesome terminal operations for each cassette.

[Brief description of drawings]

FIG. 1 is a control program flow chart for semiconductor processing equipment according to the present invention, and FIG. 2 is a diagram showing a method for manually operating semiconductor processing equipment. FIG. 3 is a perspective view of the cassette, FIG. 4 is a control block diagram of the semiconductor processing facility, and FIG. 5 is a block diagram of the semiconductor processing facility. FIG. 6 is a control program flow chart of a conventional semiconductor processing facility, and FIG. 7 is a diagram showing an automatic operation method of the semiconductor processing facility. In the figure, (1) is a wafer, (2) is a cassette, (3) is an ID card, (4) is an ID card recognition device, (4a) is an input means, and (5)
Is a processing device, (6) is a host computer, (9) is a cassette arrival signal processing step, (10) is an operation mode determination step, (11) is a device manual processing step, and (16) is a device automatic processing step. In the drawings, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] 1. A semiconductor wafer, a semiconductor wafer cassette for storing a plurality of the semiconductor wafers, a semiconductor wafer processing apparatus for processing the semiconductor wafers, an ID card attached to the semiconductor wafer cassette, and the ID card. In the semiconductor processing equipment comprising an ID card recognition device for exchanging information with the semiconductor wafer processing device, a host computer for controlling a plurality of the semiconductor wafer processing device and the ID card recognition device, and a terminal for communicating with the host computer. By changing the operation mode of each semiconductor wafer processing device that the computer has as data using the terminal, the processing program of the host computer that is started based on the ID card information given from the ID card recognition device is changed A semiconductor wafer manufacturing control method comprising: