JP3220716B2 - Control system for manufacturing processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control system for a production processing apparatus in which a production processing apparatus such as a vapor deposition apparatus and a main controller are connected online.

[0002]

2. Description of the Related Art A conventional control system for a manufacturing processing apparatus will be described with reference to a schematic diagram shown in FIG. In the figure, as an example of a manufacturing processing apparatus, a vapor deposition apparatus 41 having a plurality of processing chambers
Is shown. The vapor deposition device 41 includes a transfer chamber 42 and the transfer chamber 4
2 to a first processing chamber 43 to a fourth processing chamber 46. The vapor deposition device 41 is provided with a control terminal 47.
Then, a plurality of sets each including the vapor deposition device 41 and the control terminal 47 are provided. Further, each control terminal 47 is connected to a main controller 48.

Next, a lot processing method in the vapor deposition apparatus 41 will be described with reference to a flowchart of FIG. First, an operator inputs a lot number to be processed into a control terminal of a vapor deposition apparatus to be processed. Subsequently, the control terminal notifies the main controller of the input lot number and the recognition data of the vapor deposition apparatus,
The lot number, process name, number of wafers,
Inquire about lot processing information such as a process program.

The main controller determines whether the lot having the lot number input to the control terminal can be processed by the corresponding vapor deposition apparatus. As a result of this determination, if the lot of the lot number input to the control terminal can be processed by the corresponding vapor deposition apparatus, the lot processing information corresponding to the input lot number and the recognition data of the vapor deposition apparatus is used. The lot processing information is loaded on the control terminal, and the loaded lot processing information is displayed on the screen of the control terminal. As a result of the above determination, when it is impossible to process the lot of the lot number input to the control terminal by the corresponding vapor deposition apparatus, the lot processing information is not called, and only the absence of the corresponding lot processing information is determined. Display on the control terminal screen.

Next, the operator checks the display on the screen of the control terminal. If the corresponding lot processing information is not displayed, the process ends. Next, the entered lot number is canceled, the lot number to be processed is again input to the control terminal, and the above process is performed again. If the corresponding lot processing information is displayed, the operator checks whether the displayed lot processing information is correct or not. If there is an error in the lot information, the process ends. Next, the entered lot number is canceled, the lot number to be processed is again input to the control terminal, and the above process is performed again. If there is no error in the lot processing information, the processing conditions, processing atmosphere, and the like of the vapor deposition apparatus are set according to the process program loaded in the control terminal, so that the processing can be performed. At this time, the operator sets the lot in which the lot number has been input on the corresponding vapor deposition apparatus.

After that, after the lot can be processed in the vapor deposition apparatus, the operator instructs the vapor deposition apparatus to start processing from the control terminal. The vapor deposition device that has received the processing start command starts the process processing based on the process program.

At the same time as the start of the above process, the control terminal notifies the main controller of the start of the process.
The main control unit stores the progress of the lot based on the notified lot number and the processing content, and also checks the progress of the lot and the status of the equipment so that another lot is not in process in the vapor deposition equipment that is processing the lot. The management information (hereinafter, referred to as status) such as operation status is changed.

Thereafter, when the process in the vapor deposition apparatus is completed, the fact that the process is completed is displayed on the screen of the control terminal. After confirming the display of the end of the process on the screen, the operator notifies the main control device of the process data and the end of the process. The main control device collects the notified process processing data. At the same time, the status of the main control device is changed so that the vapor deposition apparatus is in a lot waiting state so that the vapor deposition apparatus that has been performing the process processing can process the next lot.

[0009]

However, in a program for processing a lot having the above configuration, the process program is determined in a unified manner depending on the progress of the lot.
That is, the vapor deposition apparatus described in the above conventional technique has four processing chambers. For this reason, even when the same process is performed, a plurality of process programs can be set in the main controller by a combination of the first to fourth process chambers.

Next, a plurality of example programs will be described. First, an example of a normally used process program will be described with reference to a flowchart shown in FIG. In the first step, a cassette loading step of transporting the cassette from the loader to the transport chamber is performed. Next, in the second step, a wafer is taken out of the cassette transferred to the transfer chamber, and the wafer is transferred to the first processing chamber and subjected to a heat treatment step of performing a heat treatment. Subsequently, in a third step, the wafer is transferred from the first processing chamber to the second processing chamber to perform a first vapor deposition step. Next, in a fourth step, the wafer is transferred from the second processing chamber to the third processing chamber to perform a second vapor deposition step. Then the fifth
In the process, a heat radiation process is performed in which the wafer is transferred from the third processing chamber to the fourth processing chamber, and the wafer heated by vapor deposition is cooled. In the sixth step, a cassette unloading step of taking out the wafer from the fourth processing chamber, storing it in a cassette in the transfer chamber, and unloading the cassette to the unloader is performed.

Next, when, for example, the second processing chamber 44 of the processing chamber of the vapor deposition apparatus 41 shown in FIG. Create another process program to perform other processing in another processing room. An example of this other process program will be described with reference to the flowchart shown in FIG. In the first step, a cassette loading step similar to the above is performed. Next, in the second step, a heat treatment step is performed in the first treatment chamber in the same manner as described above. Subsequently, in a third step, a first vapor deposition step of carrying a wafer from the first processing chamber to the fourth processing chamber to perform first vapor deposition is performed. Then the fourth
In the step, a second vapor deposition step of carrying the wafer from the fourth processing chamber to the third processing chamber and performing the second vapor deposition is performed. Thereafter, in a fifth step, the wafer is transferred from the fourth processing chamber to the second processing chamber,
A heat radiation process for cooling the wafer heated by the vapor deposition is performed. In the sixth step, a cassette unloading step of taking out the wafer from the second processing chamber, storing the wafer in a cassette in the transfer chamber, and unloading the cassette to the unloader is performed.

For example, when the second processing chamber can perform only the heat radiation process in a certain vapor deposition apparatus, another process program described in FIG. 7 is used in place of the normally used process program described in FIG. Must. In this case, since another process program is loaded from the main controller to all the vapor deposition devices, other vapor deposition devices other than the vapor deposition device replaced with another process program must also use the above another process program. No.
At this time, there is no problem when the above another process program can be used in another vapor deposition apparatus, but when the above another process program cannot be used in another vapor deposition apparatus, it is usually used. You cannot change the running process program. When the process program cannot be changed in this way, a specialized operator switches only the vapor deposition apparatus that needs to change the process program to offline, and changes only the process program loaded into the corresponding vapor deposition apparatus by the operator. . For this reason, since the process program cannot be changed in the online state, it takes time and effort to change the process program, thereby reducing workability. In addition, when changing the process program, a program error such as incorrect input of data occurs.

An object of the present invention is to provide a control system of a manufacturing processing apparatus which is excellent in online operation.

[0014]

SUMMARY OF THE INVENTION The present invention is a control system for a manufacturing processing apparatus which has been made to achieve the above-mentioned object, and comprises a plurality of manufacturing processing apparatuses and a processing system common to the plurality of manufacturing processing apparatuses. A main control device for supplying information; and a plurality of main control devices provided for each of the plurality of manufacturing processing devices to determine whether the processing information supplied from the main control device can be executed by the corresponding manufacturing processing device. And the information determining device is provided for each of the plurality of manufacturing processing devices, and when the information determining device determines that the processing information supplied from the main control device cannot be executed by the corresponding manufacturing processing device. And a plurality of information conversion devices for converting the processing information into another processing information executable by the manufacturing processing apparatus.

[0015]

According to the control system of the manufacturing processing apparatus having the above configuration,
An information determination device and an information conversion device are provided corresponding to each of the plurality of manufacturing processing devices, and the information determination device
It is determined whether or not the common processing information supplied from the main control device can be executed by the corresponding manufacturing processing device, and the processing information supplied from the main control device is executed by the corresponding manufacturing processing device by the information determination device. When it is determined that the processing is impossible, the information conversion device converts the processing information into another processing information executable by the manufacturing processing device. For this reason,
Even when processing based on the processing information from the main control device cannot be executed in a specific manufacturing processing apparatus, the processing information is converted into an executable state for each manufacturing processing apparatus.
That is, the manufacturing processing apparatus that has converted the processing information performs the processing based on the changed processing information, and the other manufacturing processing apparatus that does not convert the processing information performs the processing based on the common processing information from the main control device. Therefore, the process is continuously executed in any manufacturing processing apparatus.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to a schematic configuration diagram of a control system shown in FIG. In the drawing, a vapor deposition apparatus 11 is shown as an example of a manufacturing processing apparatus. First, as shown in the figure,
The vapor deposition apparatus 11 includes a transfer chamber 12 and first to fourth processing chambers 13 to 16 connected to the transfer chamber 12.
Each of the vapor deposition devices 11 is provided with a control terminal 17. The control terminal 17 inquires a main controller 18 described later of the input lot information such as a lot number and the recognition data of the vapor deposition apparatus 11 connected to the control terminal 17 as information of the vapor deposition apparatus 11.
And one set of one vapor deposition device 11 and one control terminal 17 is provided.

Each control terminal 17 is connected to a main control device 18 for grasping the progress of the lot, the recognition data of the vapor deposition device 11, and the like. The main control device 18 is connected to a number of information determination devices 19 corresponding to each control terminal 17. Each information judging device 19 judges whether or not the process program in the lot processing information loaded from the main controller 18 can be used by the vapor deposition device 11 that inquires the main controller 18 first. Is the control terminal 1
7, the lot processing information is sent to the information conversion device 20 described later.
Send to An information conversion device 20 is connected to each information determination device 19. Each information conversion device 20 converts a process program when it is necessary to convert the process program. Further, each information conversion device 20 is connected to a corresponding control terminal 17. And the information conversion device 20
The lot processing information including the processing information changed in the step is sent to the control terminal 17.

In the control system 1, a certain vapor deposition apparatus 1
Even when normal lot processing information cannot be used in a certain processing room, the lot processing information sent to the control terminal 17 is converted by the information conversion device 20 into another lot processing information that can be used in the vapor deposition device 11. For this reason, the vapor deposition apparatus 11 that has converted the lot processing information performs processing using the changed lot processing information, and the other vapor deposition apparatuses 11 that do not convert the lot processing information perform processing using normal lot processing information.
As a result, the lot processing information is converted in each of the vapor deposition apparatuses 11 and the main controller 18 in an online state.

Next, an example of a lot processing method by the control system 1 will be described in detail with reference to FIG. In the following description, the numbers assigned to the vapor deposition device, the control terminal, the main control device, the information determination device, and the information conversion device are the main control device in the control system 1 shown in FIG. , The control terminal, the information determination device, and the information conversion device. First, the operator inputs the lot number to be processed as the lot information to the control terminal 17 of the vapor deposition apparatus 11 for performing the processing. The control terminal 17 notifies the main controller 18 of the input lot number and the recognition data of the vapor deposition apparatus 11, and inquires about lot processing information such as a lot number, a process name, the number of wafers, and a process program.

Main controller 18 determines whether or not the lot having the lot number input to control terminal 17 can be processed by vapor deposition apparatus 11. As a result of this determination, if the lot with the input lot number cannot be processed by the corresponding vapor deposition apparatus 11, the lot control information is not called from the main controller 18. Then, only that there is no corresponding lot processing information is displayed on the screen of the control terminal 17. On the other hand, as a result of the determination, if the lot with the input lot number can be processed by the vapor deposition device 11,
For example, a lot number, a process name, the number of wafers to be processed, a process program, and the like are loaded into the information judging device 19 as lot processing information corresponding to the recognition data.

The information judging device 19 judges whether or not the process program in the loaded lot processing information matches the process program usable in the corresponding vapor deposition device 11. If they match, the lot processing information is loaded as it is from the information determination device 19 to the control terminal 17, and
The lot processing information is displayed on the screen of the control terminal 17. If they do not match, the lot processing information is
Send to In the information conversion device 20, a program for automatically converting the loaded process program into a process program usable in the vapor deposition device 11 (hereinafter, this program is referred to as a conversion program) is registered. Therefore, the loaded process program is automatically converted into a process program that can be used in the vapor deposition apparatus 11 by the registered conversion program. Then, the lot conversion information including the changed process program is loaded from the information conversion device 20 to the control terminal 17. Then, the loaded lot processing information is displayed on the screen of the control terminal 17. At this time, the fact that the process program has been changed is also displayed.

The operator checks the display on the screen of the control terminal 17. When it is displayed on the screen of the control terminal 17 that there is no corresponding lot processing information, the process ends. If the lot is to be processed again, the process returns to the beginning. When the corresponding lot processing information is displayed, the operator checks whether the displayed lot processing information is correct or not. If there is an error in the lot processing information, the process is terminated and the process returns to the beginning in the same manner as described above. If the lot processing information is correct,
The process program loaded into the control terminal 17 (including the changed process program) is applied to the deposition apparatus 1
Set to 1 and store. Then, the vapor deposition apparatus 11 is brought into a state in which processing can be performed. Further, the completion of the setting of the process program is displayed on the screen of the control terminal 17. At this time, the operator sets a lot in which the lot number is input to the corresponding vapor deposition apparatus 11.

Thereafter, after the lot can be processed by the vapor deposition device 11, the operator issues a command to start the process processing to the vapor deposition device 11 from the control terminal 17. The vapor deposition device 11 that has received the instruction to start the process performs the process based on the process program.

At the same time as the start of the process, the control terminal 17 notifies the main controller 18 of the start of the process. The main controller 18 stores the progress of the lot based on the notified lot number and the content of the process processing, and changes the status so that another lot is not in process in the vapor deposition apparatus 11 that is processing the lot. I do.

After the end of the process, the control terminal 17 displays the end of the process on the screen. After confirming the display of the end of the process processing displayed on the screen, the operator removes the processed lot from the vapor deposition apparatus 11. The control terminal 17 notifies the main controller 18 of the data of the process performed by the vapor deposition apparatus 11, the process program used in the process, and the end of the process. The main controller 18 collects process processing data and collects and stores a process program used in accordance with the data. At the same time, the status of the main controller 18 is changed so that the vapor deposition apparatus 11 that has performed the process processing is in a lot waiting state.

Thus, the processing of one lot is completed. If you want to process lots continuously,
The lot processing may be repeated according to the flowchart shown in FIG.

Next, an example of a method of changing a process program by the information conversion device 20 will be described with reference to FIG. The process program loaded into the information conversion device 20 is converted into a process program usable in the vapor deposition device 11 according to the conversion program. The conversion program has, for example, a function of adding a program as a function F1, a function of exchanging a program as a function F2, a function of deleting a program as a function F3, and a function of ending the conversion program as a function F4. To convert the process program by the conversion program, first, a function specified by the conversion program is selected from the functions F1 to F3. Then, the process program is converted by the functions F1 to F3 according to the instruction of the conversion program.

Next, each of the functions F1 to F4 will be described in detail. In the function F1, a program for supplementing the missing part of the process program is added according to the conversion program. In order to add a program, first, the ID (identification number) of the process program is input to the conversion program. Next, the necessary program is added to the missing part of the input process program, and converted to another process program. Then, the ID of the converted process program is input and registered as a process program used in the vapor deposition apparatus.

In the function F2, different parts of the process program are exchanged for another program in accordance with the conversion program. In order to perform the exchange, the exchange type No. corresponding to the conversion program is used. , Followed by the process program ID. Then, different parts of the process program are converted into another program based on the selected interchangeable formula. Thereafter, the ID of the exchanged process program is input and registered as a process program used in the vapor deposition apparatus.

In the function F3, an extra part of the process program is deleted according to the conversion program. To delete the conversion program, the conversion program No. Then, after confirming the conversion formula, an unnecessary portion of the process program is deleted. Thereafter, the ID of the deleted process program is input and registered as a process program used in the vapor deposition apparatus.

When it is not necessary to add the above-mentioned program, exchange the program, delete the program, etc. to the process program, the function F4 is terminated, and the conversion of the process program is terminated.

Addition of a program to a process program, exchange of a program, deletion of a program, and the like are performed in an order determined by a conversion program. The order is set so that the loaded process program is converted into a process program used in the vapor deposition apparatus 11.

For example, the loaded process program N
o. 1 is a process program no. An example of conversion to 11 will be described. The loaded process program No. 1 program content of 1A-1B
-1C. In addition, the process programs No. 11A-11 contents of 11 programs
B-11C. Functions F1 to F3 of various contents are set in the conversion program in advance.

For example, the function F1 includes a process program No. A program for adding a 1D program at the end of 1 is set. Also function F
2 is a process program having a program content of 1A-1B-1C-1D and a program content of 11A-11B-1.
A program to be converted into a 1C-11D process program is set. Further, in the function F3, a program for deleting the 11D program from the process program having the program contents of 11A-11B-11C-11D is set.

Process program No. 1 is the process program No. Conversion to 11 is performed by executing a function set in the conversion program in advance. For example, by the function F1, the process program No. 1D program is added after 1C. Next, the process program having the program contents 1A-1B-1C-1D is converted into the process program having the program contents 11A-11B-11C-11D by the function F2. Then, the program content is changed to 11A-11B-11C-1 by the function F3.
11D programs are deleted from the 1D process programs. Then, the function F4 is executed.
As described above, the process program No. whose program content is 1A-1B-1C. 1 for program content 11A
-11B-11C process program No. 11 automatically.

The contents of addition, exchange, and deletion of programs executed by the conversion program are displayed on the screen of the control terminal 17 each time each of the functions F1 to F4 is executed.

[0037]

As described above, according to the present invention,
Since an information determination device and an information conversion device are provided for each of the manufacturing processing devices, even if a specific manufacturing processing device cannot perform processing based on the common processing information from the main control device, the information conversion device does not. The processing information can be automatically converted into usable processing information. As a result, the manufacturing processing apparatus that has converted the processing information can perform processing based on the converted processing information, and other manufacturing processing apparatuses that do not convert the processing information can perform processing with common processing information. That is, it is not necessary to change the processing information itself from the main control device, and it is possible to cope with each manufacturing processing device. Therefore, work efficiency can be improved. In addition, the common processing information can be changed without mistake.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a control system.

FIG. 2 is a flowchart illustrating a lot processing method.

FIG. 3 is a flowchart illustrating a method of converting a process program.

FIG. 4 is a schematic configuration diagram of a conventional control system.

FIG. 5 is a flowchart illustrating a conventional lot processing method.

FIG. 6 is a flowchart of a normal process program.

FIG. 7 is a flowchart of another process program.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Evaporation apparatus 17 Control terminal 18 Main control apparatus 19 Information judgment apparatus 20 Information conversion apparatus

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G05B 15/02 B23Q 41/08 C23C 14/54 G06F 17/60

Claims (1)

(57) [Claims] A plurality of manufacturing processing apparatuses; a main control unit for supplying common processing information to the plurality of manufacturing processing apparatuses; a main control apparatus provided for each of the plurality of manufacturing processing apparatuses;
A plurality of information determination devices that determine whether the processing information supplied from the main control device can be executed by each corresponding manufacturing processing device; and a plurality of information determining devices provided for each of the plurality of manufacturing processing devices;
When the processing information supplied from the main control device is determined to be unexecutable by the corresponding manufacturing processing device by the information determination device, the processing information is converted into another processing information executable by the manufacturing processing device. A control system for a manufacturing processing device, comprising: a plurality of information conversion devices for converting.