JPH0711471Y2 - 半導体製造用無塵マスク収納ケース - Google Patents

半導体製造用無塵マスク収納ケース

Info

Publication number
JPH0711471Y2
JPH0711471Y2 JP3998789U JP3998789U JPH0711471Y2 JP H0711471 Y2 JPH0711471 Y2 JP H0711471Y2 JP 3998789 U JP3998789 U JP 3998789U JP 3998789 U JP3998789 U JP 3998789U JP H0711471 Y2 JPH0711471 Y2 JP H0711471Y2
Authority
JP
Japan
Prior art keywords
dust
storage case
bottom plate
semiconductor manufacturing
mask storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3998789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02131343U (cs
Inventor
中彦 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3998789U priority Critical patent/JPH0711471Y2/ja
Publication of JPH02131343U publication Critical patent/JPH02131343U/ja
Application granted granted Critical
Publication of JPH0711471Y2 publication Critical patent/JPH0711471Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP3998789U 1989-04-06 1989-04-06 半導体製造用無塵マスク収納ケース Expired - Lifetime JPH0711471Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3998789U JPH0711471Y2 (ja) 1989-04-06 1989-04-06 半導体製造用無塵マスク収納ケース

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3998789U JPH0711471Y2 (ja) 1989-04-06 1989-04-06 半導体製造用無塵マスク収納ケース

Publications (2)

Publication Number Publication Date
JPH02131343U JPH02131343U (cs) 1990-10-31
JPH0711471Y2 true JPH0711471Y2 (ja) 1995-03-15

Family

ID=31549381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3998789U Expired - Lifetime JPH0711471Y2 (ja) 1989-04-06 1989-04-06 半導体製造用無塵マスク収納ケース

Country Status (1)

Country Link
JP (1) JPH0711471Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020040275A1 (ja) * 2018-08-24 2020-02-27 ニプロ株式会社 塵埃持込防止機構及び入場準備室

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020040275A1 (ja) * 2018-08-24 2020-02-27 ニプロ株式会社 塵埃持込防止機構及び入場準備室

Also Published As

Publication number Publication date
JPH02131343U (cs) 1990-10-31

Similar Documents

Publication Publication Date Title
DE60027091D1 (de) Staubsauger
WO2003043717A1 (en) Dust collecting filter, dust collecting device, and intake device of gas turbine
US3552103A (en) Internal combustion engine air filter
ES2128377T3 (es) Dispositivo para limpiar una mezcla de granos que se encuentra esencialmente en forma de granulado y procedimiento para limpiar dicha mezcla de granos.
JPH0711471Y2 (ja) 半導体製造用無塵マスク収納ケース
US5843198A (en) Air filter
CN109953691B (zh) 用于真空吸尘器的过滤器
JPS60183053A (ja) エア−クリ−ナ用サイクロン装置
JPH0617246Y2 (ja) テープクリーニング装置
JPS6131084Y2 (cs)
JP3062076B2 (ja) エアフィルター装置
JPH0354506Y2 (cs)
JPH0337697Y2 (cs)
CA1267852A (en) Filter for air circulator
KR890009353Y1 (ko) 공기청정기의 전기 집진부 청소용 솔
JPS5820564Y2 (ja) 粉粒物積込み用シユ−トのスカ−ト装置
JPH0646349Y2 (ja) 除塵用ブラシ
JPH0120521Y2 (cs)
JPS5950919U (ja) コンベアベルトの清浄装置
JPS59146020U (ja) フイルタ−装置
JPS6234372Y2 (cs)
JP2582958Y2 (ja) エアクリーナーのシール構造
JPS62735Y2 (cs)
JPS6092763U (ja) エアクリ−ナの塵埃除去装置
JPH0121446Y2 (cs)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term