JPH0711433B2 - 光電位置測定装置 - Google Patents

光電位置測定装置

Info

Publication number
JPH0711433B2
JPH0711433B2 JP1248244A JP24824489A JPH0711433B2 JP H0711433 B2 JPH0711433 B2 JP H0711433B2 JP 1248244 A JP1248244 A JP 1248244A JP 24824489 A JP24824489 A JP 24824489A JP H0711433 B2 JPH0711433 B2 JP H0711433B2
Authority
JP
Japan
Prior art keywords
rii
scale
measuring
marks
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1248244A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02129518A (ja
Inventor
ディーテル・ミヒェル
Original Assignee
ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング filed Critical ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング
Publication of JPH02129518A publication Critical patent/JPH02129518A/ja
Publication of JPH0711433B2 publication Critical patent/JPH0711433B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP1248244A 1988-10-12 1989-09-26 光電位置測定装置 Expired - Fee Related JPH0711433B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3834676.1 1988-10-12
DE3834676A DE3834676A1 (de) 1988-10-12 1988-10-12 Photoelektrische positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
JPH02129518A JPH02129518A (ja) 1990-05-17
JPH0711433B2 true JPH0711433B2 (ja) 1995-02-08

Family

ID=6364918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1248244A Expired - Fee Related JPH0711433B2 (ja) 1988-10-12 1989-09-26 光電位置測定装置

Country Status (4)

Country Link
US (1) US5061073A (enExample)
EP (1) EP0363620B1 (enExample)
JP (1) JPH0711433B2 (enExample)
DE (2) DE3834676A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4105433C2 (de) * 1991-02-21 1994-05-19 Heidenhain Gmbh Dr Johannes Einrichtung zur Konturformprüfung an einer Bearbeitungs- oder Meßmaschine
US5519492A (en) * 1992-06-27 1996-05-21 Dr. Johannes Heidenhain Gmbh Optical arrangement for detecting the intensity modulation of partial ray beams
DE4221165C1 (de) * 1992-06-27 1994-01-20 Heidenhain Gmbh Dr Johannes Lichtelektrische Längen- oder Winkelmeßeinrichtung
DE4316250C2 (de) * 1993-05-14 1997-06-12 Heidenhain Gmbh Dr Johannes Lichtelektrische Längen- oder Winkelmeßeinrichtung
JP2818800B2 (ja) * 1994-02-23 1998-10-30 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 位置に依存する信号を発生する装置
DE19521295C2 (de) * 1995-06-10 2000-07-13 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
DE19525874A1 (de) * 1995-07-15 1997-01-16 Heidenhain Gmbh Dr Johannes Positionsmeßvorrichtung
US6175109B1 (en) 1998-12-16 2001-01-16 Renco Encoders, Inc. Encoder for providing incremental and absolute position data
DE19908328A1 (de) 1999-02-26 2000-08-31 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
ATE448466T1 (de) 1999-09-16 2009-11-15 Heidenhain Gmbh Dr Johannes Vorrichtung zur positionsbestimmung und ermittlung von führungsfehlern
US6543149B1 (en) * 1999-12-02 2003-04-08 The Regents Of The University Of California Coordinate measuring system
DE10313038B4 (de) * 2003-03-24 2005-02-17 Klingelnberg Gmbh Vorrichtung zur Erfassung der Lage eines Tastelements in einem Mehrkoordinatenmessgerät
DE10313036B3 (de) * 2003-03-24 2004-08-19 Klingelnberg Gmbh Vorrichtung zum Erfassen der räumlichen Lage eines in einer Koordinatenachse verfahrbaren Schlittens
DE102010045355A1 (de) * 2010-09-14 2012-03-15 Festo Ag & Co. Kg Positionsmesssystem und Verfahren zur Ermittlung einer Absolutposition
CN103459991A (zh) * 2011-01-31 2013-12-18 维泰克实验室技术股份有限公司 具有数字的体积显示的瓶式分配器
US20140002642A1 (en) 2012-06-15 2014-01-02 Elmar SWIEGOT Absolute position detection

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2886718A (en) * 1955-05-31 1959-05-12 Ferranti Ltd Measuring apparatus
DE2527223C2 (de) * 1975-06-19 1985-06-20 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Abtastgitter für einen Schärfedetektor
DE3037810C2 (de) * 1980-10-07 1982-11-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale Längen- oder Winkelmeßeinrichtung
DE3204012C1 (de) * 1982-02-05 1983-02-03 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale Messeinrichtung
DE3416864C2 (de) * 1984-05-08 1986-04-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Photoelektrische Meßeinrichtung
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
JPS61182523A (ja) * 1985-02-08 1986-08-15 Mitsutoyo Mfg Co Ltd 光電式変位検出装置
DE3509102C2 (de) * 1985-03-14 1987-01-15 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Meßeinrichtung
DE3541199C1 (de) * 1985-11-21 1987-06-25 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung

Also Published As

Publication number Publication date
EP0363620B1 (de) 1992-11-04
US5061073A (en) 1991-10-29
EP0363620A1 (de) 1990-04-18
DE3834676A1 (de) 1990-04-19
DE3834676C2 (enExample) 1992-08-20
JPH02129518A (ja) 1990-05-17
DE58902613D1 (de) 1992-12-10

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