JPH07108553A - Connection structure of vacuum chamber with flow passage piping - Google Patents

Connection structure of vacuum chamber with flow passage piping

Info

Publication number
JPH07108553A
JPH07108553A JP28189493A JP28189493A JPH07108553A JP H07108553 A JPH07108553 A JP H07108553A JP 28189493 A JP28189493 A JP 28189493A JP 28189493 A JP28189493 A JP 28189493A JP H07108553 A JPH07108553 A JP H07108553A
Authority
JP
Japan
Prior art keywords
vacuum chamber
heating medium
pipe
flow path
connection structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28189493A
Other languages
Japanese (ja)
Other versions
JP3375695B2 (en
Inventor
Shizuaki Okazaki
静明 岡崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kitagawa Seiki KK
Original Assignee
Kitagawa Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kitagawa Seiki KK filed Critical Kitagawa Seiki KK
Priority to JP28189493A priority Critical patent/JP3375695B2/en
Publication of JPH07108553A publication Critical patent/JPH07108553A/en
Application granted granted Critical
Publication of JP3375695B2 publication Critical patent/JP3375695B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To provide a connection structure of a vacuum chamber which the thermal calory of a heat medium passing through heat medium flow passage piping hardly reaches, with a flow passage piping. CONSTITUTION:A connection structure consists of a vacuum chamber wall and heat medium flow passage piping 14 running through the former airtightly and connecting with a surface plate, allowing a passage of the heat medium internally through the piping for heating the press surface plate of a thermal press which thermally molds a material in a vacuum chamber 10. In this connection structure, a periphery in the feed direction of the heat medium running through the heat medium flow passage piping is covered with a specified distance left intact and is formed with a specified length extending in the feed direction. In addition, the one end of the length has a specified curve bending inward and connects to the heat medium flow passage piping. On the other hand, the other end is attached airtightly to the pipe installation flange of the vacuum chamber by a pipe-side flange 18. Thus the piping which minimizes the transmission of a thermal calory to the vacuum chamber, can be connected to the vacuum chamber.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、真空チャンバとこの
真空チャンバ内に設置される熱プレス装置のプレス定盤
に加熱媒体を供給する流路配管とを接続する構造に関
し、特に、これらを接続する接合部材には、流路配管内
に流れる加熱媒体の熱がほとんど加わることのない真空
チャンバと流路配管との接続構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure for connecting a vacuum chamber and a flow path pipe for supplying a heating medium to a press platen of a hot press machine installed in the vacuum chamber, and particularly to connecting them. The joining member relates to a connection structure between the vacuum chamber and the flow path pipe in which the heat of the heating medium flowing in the flow path pipe is hardly applied.

【0002】[0002]

【従来の技術】一般に、積層体、例えば、多層構造のプ
リント配線板は、ガラス繊維布に耐熱エポキシ樹脂、ポ
リイミド、テフロン(登録商標)等を含浸し、Bステー
ジとしたプレプレグと銅箔、あるいは、外層用銅張板、
内層用銅張板等を重ねた後、熱と圧力とを加え、プリプ
レグのエポキシ樹脂等を溶融軟化させた後に樹脂を完全
硬化させて一体化することにより製造される。しかし、
一般の熱圧プレス装置を使用した場合は、ガラス繊維布
に残っている空気や、エポキシ樹脂等の溶剤が気化した
際に発生する溶剤ガスが内部に残留し、所謂ボイドとな
り、後行程において”ふくれ”や、”はく離”等の不良
を生じやすい。
2. Description of the Related Art Generally, a laminated body, for example, a printed wiring board having a multi-layer structure, is prepared by impregnating a glass fiber cloth with heat-resistant epoxy resin, polyimide, Teflon (registered trademark) or the like to prepare a B stage prepreg and copper foil, or , Copper clad board for outer layer,
It is manufactured by stacking copper clad boards for inner layers and the like, applying heat and pressure to melt and soften the epoxy resin or the like of the prepreg and then completely cure the resin to integrate it. But,
When a general hot press machine is used, the air remaining in the glass fiber cloth and the solvent gas generated when the solvent such as the epoxy resin is vaporized remain inside and become a so-called void. Defects such as blister and peeling are likely to occur.

【0003】この様な不良を防ぐために用いられる真空
プレス装置は、内部をプレスに適する所定の低圧値(真
空状態)に維持可能な真空チャンバ内部に設置される加
熱成形を行う多段プレス装置等のプレス定盤に、真空チ
ャンバ室外部より挿通され、管内に加熱媒体が供給され
る加熱媒体流路配管を接続する様に構成される。そし
て、プレス定盤を所定の温度に維持し、プレス定盤を駆
動する事により真空プレスが行われる。このプレスの
際、真空ポンプ等により真空チャンバ内は所定の低圧値
(真空状態)とされている。この様に、プレスを真空で
行う事により、多層構造のプリント配線板は、その内部
に生ずる所謂ボイドをなくし、従って、積層体全域に渡
って均一な強度を有して製造することができ、また、プ
レス定盤周囲からの放熱が少なく、プレス定盤の温度が
均一となり、更に、真空チャンバ内では、空流による対
流がほとんど発生しないため、通常空気等に奪われる熱
量がそのまま積層体に加えられ、積層体をその全域に渡
って均一な強度で製造することができることになる。
A vacuum press apparatus used to prevent such a defect is a multi-stage press apparatus for performing heat forming installed inside a vacuum chamber whose inside can be maintained at a predetermined low pressure value (vacuum state) suitable for pressing. The press platen is configured to be inserted from the outside of the vacuum chamber and to be connected to a heating medium passage pipe for supplying the heating medium into the pipe. Then, the press platen is maintained at a predetermined temperature, and the press platen is driven to perform vacuum pressing. At the time of this pressing, the inside of the vacuum chamber is set to a predetermined low pressure value (vacuum state) by a vacuum pump or the like. As described above, by performing the pressing in a vacuum, the printed wiring board having a multi-layer structure eliminates so-called voids generated inside the multilayer printed wiring board, and thus can be manufactured with uniform strength over the entire laminate, In addition, there is little heat radiation from around the press surface plate, the temperature of the press surface plate is uniform, and in the vacuum chamber, almost no convection due to air flow occurs. In addition, the laminate can be manufactured with uniform strength over the entire area.

【0004】真空プレスを行うに際して、この真空チャ
ンバ内は、常に所定の低圧値(真空状態)に保たれなけ
ればならないので、真空チャンバとその内部に設置され
る多段プレス装置に加熱媒体を供給する加熱媒体流路配
管との隙間を塞ぎ、真空チャンバを完全に密封してこの
真空チャンバ内に空気等が侵入して内部の真空状態を破
壊することがないようにする必要がある。このため、図
2に示す様に、従来の真空チャンバと加熱媒体流路配管
との接続構造は、真空チャンバ110とこの内部に挿通
される加熱媒体流路配管112とが、この加熱媒体流路
配管112に溶接で接合される円形の配管側フランジ1
12aが、真空チャンバ取付フランジ110aとガスケ
ット114とを介して真空チャンバ110にボルトBに
より接合されることにより接続される構成のものがあ
る。
When performing vacuum pressing, the inside of the vacuum chamber must be kept at a predetermined low pressure value (vacuum state) at all times. Therefore, a heating medium is supplied to the vacuum chamber and the multi-stage press device installed therein. It is necessary to close the gap with the heating medium passage pipe and completely seal the vacuum chamber so that air or the like does not enter the vacuum chamber and destroy the internal vacuum state. For this reason, as shown in FIG. 2, in the conventional connection structure of the vacuum chamber and the heating medium flow path pipe, the vacuum chamber 110 and the heating medium flow path pipe 112 inserted into the vacuum chamber 110 are connected to the heating medium flow path pipe. Circular pipe side flange 1 that is welded to the pipe 112
There is a configuration in which 12a is connected to the vacuum chamber 110 by being joined by a bolt B via the vacuum chamber mounting flange 110a and the gasket 114.

【0005】[0005]

【従来技術の課題】ところで、従来構成において、真空
チャンバ内を真空プレスに適する所定の低圧値(真空状
態)にし、配管側フランジ112aに作用する圧力を計
測したところ、約1Kgf/cm2 の圧力が作用してい
ることが判明した。このため、配管側フランジ112a
を、この圧力に耐え得ることのできる比較的厚めに形成
する必要があるが、この配管側フランジ112aを厚く
形成すると、加熱媒体流路配管112から配管側フラン
ジ112aへの伝熱面積が大きくなるため、また、この
配管側フランジ112aと真空チャンバ110とを固定
するボルトBと、加熱媒体流路配管112との距離が短
いため、配管側フランジ112aの温度は、加熱媒体流
路配管112の内部を通る熱媒体の温度近くまで加熱さ
れる。上述した様に、多層構造のプリント配線板を成形
する際のプレス定盤は、180度〜350度の温度が必
要とされ、加熱媒体流路配管112内に約350度の熱
媒体を通して、配管側フランジ112aの温度を計測し
たところ、約330度にも達することが判明した。(こ
れと共に、真空チャンバ110もこの配管側フランジ1
12aの温度に近づけられる。)この様に、加熱媒体流
路配管112内部を通る熱媒体の熱量が、配管側フラン
ジ112aへ、また、この配管側フランジ112aを介
して配管取付フランジ110aへ、また、この配管取付
フランジ110aを介して真空チャンバ110へと、熱
量が伝達、即ち、放熱されることにより、加熱媒体流路
配管112内を通る熱媒体の温度も下げられることとな
り、大きなエネルギーのロスとなる。また、この様に、
加熱媒体流路配管112内を通る熱媒体の熱量が真空チ
ャンバ110へ伝達されることにより、真空チャンバ1
10の側壁も加熱され、作業者がこれに触れて火傷等を
することもある。
By the way, in the conventional structure, when the pressure in the vacuum chamber is set to a predetermined low pressure value (vacuum state) suitable for a vacuum press and the pressure acting on the pipe side flange 112a is measured, the pressure is about 1 Kgf / cm 2 . Was found to be working. Therefore, the pipe side flange 112a
Needs to be formed to be relatively thick so as to withstand this pressure. However, if this piping side flange 112a is formed thick, the heat transfer area from the heating medium passage piping 112 to the piping side flange 112a becomes large. Therefore, since the distance between the bolt B fixing the piping side flange 112a and the vacuum chamber 110 and the heating medium flow path pipe 112 is short, the temperature of the piping side flange 112a is equal to the temperature inside the heating medium flow path pipe 112. Is heated to near the temperature of the heat medium passing through. As described above, the press surface plate for molding the multilayer printed wiring board requires a temperature of 180 to 350 degrees, and the heat medium of about 350 degrees is passed through the heating medium passage pipe 112 to form a pipe. When the temperature of the side flange 112a was measured, it was found that the temperature reached about 330 degrees. (Along with this, the vacuum chamber 110 is also connected to the pipe side flange 1
It is brought close to the temperature of 12a. In this way, the heat quantity of the heat medium passing through the inside of the heating medium passage pipe 112 is transferred to the pipe side flange 112a, to the pipe mounting flange 110a via the pipe side flange 112a, and to the pipe mounting flange 110a. By transmitting the amount of heat to the vacuum chamber 110, that is, by radiating the heat, the temperature of the heat medium passing through the heating medium passage pipe 112 is also lowered, resulting in a large energy loss. Also, like this,
The heat quantity of the heat medium passing through the heating medium passage pipe 112 is transferred to the vacuum chamber 110, whereby the vacuum chamber 1
The side wall of 10 is also heated, and an operator may touch it and get burned.

【0006】[0006]

【発明の目的】この発明は、この様な事情に鑑みてなさ
れたもので、この発明の目的は、加熱媒体流路配管内を
通る熱媒体の熱量が真空チャンバにほとんど伝達される
ことがない、また、加熱媒体流路配管内の熱媒体の熱量
のエネルギーロスがほとんどない、したがって、作業者
が真空チャンバに触れても火傷等をすることのない真空
チャンバと流路配管との接続構造を提供することであ
る。
SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and an object of the present invention is that the heat quantity of the heat medium passing through the heating medium passage pipe is hardly transmitted to the vacuum chamber. In addition, there is almost no energy loss of the amount of heat of the heat medium in the heating medium flow passage pipe, and therefore a connection structure between the vacuum chamber and the flow passage pipe that does not cause burns or the like even if an operator touches the vacuum chamber is provided. Is to provide.

【課題を解決する為の手段】[Means for solving the problem]

【0007】上述した課題を解決し、目的を達成する
為、この発明に係る真空チャンバと流路配管との接続構
造は、被成形物を加熱成形するためのプレス定盤を有す
る熱圧プレス手段と、前記プレス定盤に接続され、前記
プレス定盤を所定の温度とすべく内部に加熱媒体を通す
加熱媒体流路配管と、この加熱媒体流路配管内に加熱媒
体を供給する加熱媒体供給装置と、前記熱圧プレス手段
が内部に設置されると共に、前記加熱媒体流路配管を内
部に挿通するための開口を有して形成される真空チャン
バと、前記加熱媒体流路配管の加熱媒体の供給方向周り
を所定距離を開けて覆い、この加熱媒体の供給方向に対
し所定長さを有して形成されると共に、その加熱媒体の
供給方向の一端は、所定曲面を有して内側に曲げられ前
記加熱媒体流路配管に接合され、他端は、真空チャンバ
の開口に接合されて真空チャンバ内を密封することがで
きる接合部材と、前記真空チャンバに接続され、前記真
空チャンバ内部を真空にするべく動作する真空ポンプと
を具備することを特徴としている。
In order to solve the above-mentioned problems and achieve the object, the connection structure between the vacuum chamber and the flow path pipe according to the present invention has a hot press machine having a press platen for heat-molding an object to be molded. A heating medium flow pipe connected to the press surface plate and passing a heating medium through the inside so as to bring the press surface plate to a predetermined temperature, and a heating medium supply for supplying the heating medium into the heating medium flow path pipe. An apparatus, a vacuum chamber formed with the hot press means installed therein, and having an opening for inserting the heating medium passage pipe therein, and a heating medium for the heating medium passage pipe. Is formed to have a predetermined length with respect to the supply direction of the heating medium, and one end in the supply direction of the heating medium has a predetermined curved surface and is formed inward. Bending the heating medium flow path pipe A joining member joined to the opening of the vacuum chamber so as to seal the inside of the vacuum chamber; and a vacuum pump connected to the vacuum chamber and operating to create a vacuum inside the vacuum chamber. It is characterized by having.

【0008】また、この発明に係る真空チャンバと流路
配管との接続構造において、前記真空チャンバには、前
記熱圧プレス手段に被成形物を載置し、プレス後この被
成形物を取り出すための開口と、この開口を開閉可能な
様に取りつけられ、閉成時には前記真空チャンバを密封
することができる扉とを具備することを特徴としてい
る。また、この発明に係る真空チャンバと流路配管との
接続構造において、前記接合部材は、前記加熱媒体流路
配管の加熱媒体の供給方向周りを覆う円筒形の部材であ
ることを特徴としている。また、この発明に係る真空チ
ャンバと流路配管との接続構造において、前記接合部材
は、この所定の曲面を有して内側に曲げられている端
が、溶接により前記加熱媒体流路配管に接合されること
を特徴としている。また、この発明に係る真空チャンバ
と流路配管との接続構造において、前記接合部材の所定
の曲面を有して曲げられている端の他端の先端周囲に
は、円形の配管側フランジが設けられており、この配管
側フランジと真空チャンバの開口とが溶接により接合さ
れることを特徴としている。また、この発明に係る真空
チャンバと流路配管との接続構造において、前記接合部
材の所定の曲面を有して曲げられている端の他端の先端
周囲には、円形の配管側フランジが設けられると共に、
真空チャンバの開口外側に沿って円形の配管取付フラン
ジが設けられており、この配管側フランジと配管取付フ
ランジとの接合を、ガスケットを介してボルトにより行
うことを特徴としている。また、前記加熱媒体流路配管
内を通される加熱媒体は、サーモオイルであることを特
徴としている。また、前記加熱媒体流路配管内を通され
る加熱媒体は、飽和蒸気であることを特徴としている。
Further, in the connection structure of the vacuum chamber and the flow path pipe according to the present invention, the object to be molded is placed on the hot press means in the vacuum chamber, and the object to be molded is taken out after pressing. And an opening that can be opened and closed and that can close the vacuum chamber when closed. Further, in the connection structure of the vacuum chamber and the flow path pipe according to the present invention, the joining member is a cylindrical member that covers the heating medium flow path pipe around the heating medium supply direction. Further, in the connection structure of the vacuum chamber and the flow passage pipe according to the present invention, the joining member has an end bent inward with the predetermined curved surface joined to the heating medium flow passage pipe by welding. It is characterized by being done. Further, in the connection structure between the vacuum chamber and the flow path pipe according to the present invention, a circular pipe-side flange is provided around the tip of the other end of the end of the joining member that has a predetermined curved surface and is bent. The pipe side flange and the opening of the vacuum chamber are joined by welding. Further, in the connection structure between the vacuum chamber and the flow path pipe according to the present invention, a circular pipe-side flange is provided around the tip of the other end of the end of the joining member that has a predetermined curved surface and is bent. As well as being
A circular pipe mounting flange is provided along the outside of the opening of the vacuum chamber, and the pipe side flange and the pipe mounting flange are joined by a bolt through a gasket. The heating medium passed through the heating medium passage pipe is thermo oil. The heating medium passed through the heating medium passage pipe is saturated steam.

【0009】[0009]

【発明の実施例】以下に、この発明に係る真空チャンバ
と流路配管との接続構造の一実施例の構成を添付図面を
参照して説明する。
BEST MODE FOR CARRYING OUT THE INVENTION The structure of an embodiment of the connection structure between a vacuum chamber and flow path piping according to the present invention will be described below with reference to the accompanying drawings.

【0010】図1に示す真空チャンバ10は、その内部
を図示しない真空ポンプを用いてプレスに適切な所定低
圧値まで耐え得る様に比較的厚めに形成されており、そ
の内部には、図示しない加熱加圧方式の多段プレス装置
が設置されている。この多段プレス装置には、真空チャ
ンバ10外部から開口部10aを介して、内部に所定温
度のサーモオイル、または、飽和蒸気等の熱媒体を通す
加熱媒体流路配管14が接続されており、この多段プレ
ス装置のプレス定盤をプレスに適する温度に維持できよ
うになっている。
The vacuum chamber 10 shown in FIG. 1 is formed in a relatively thick inside so that it can withstand a predetermined low pressure value suitable for pressing using a vacuum pump (not shown), and the inside thereof is not shown. A heating and pressurizing multi-stage press machine is installed. To this multi-stage press device, a heating medium flow passage pipe 14 is connected from the outside of the vacuum chamber 10 through an opening 10a, through which a heating medium of a predetermined temperature such as thermo-oil or saturated steam is passed. The press surface plate of the multi-stage press device can be maintained at a temperature suitable for the press.

【0011】この加熱媒体流路配管14の外周には、こ
の加熱媒体流路配管14よりも大径である円筒部材16
の一端が、その円筒部材16の中心軸に向け所定の曲面
Rを有して形成され、溶接により接合されており、この
一端の他端外側には、溶接によりその円筒面に沿って円
形の配管側フランジ18が接合形成されている。この加
熱媒体流路配管14は、真空チャンバ10の外部から円
筒部材16の他端開口部が外側を向く様に(即ち、円筒
部材16と加熱媒体流路配管14との溶接部を真空チャ
ンバ10内側にして)して、配管側フランジ18を、溶
接によりチャンバ10の開口部10aの外側に接合され
る配管取付フランジ12にボルトBで固着することによ
り、真空チャンバ10に取り付けられている。なお、こ
の固着の際、配管側フランジ18と配管取付フランジ1
2との間にはガスケット20が取りつけられているの
で、真空チャンバ10内を所定の低圧状態とした場合で
も、この固着箇所より空気等が漏れ、この低圧状態が破
壊されることはない。また、配管側フランジ18と円筒
部材16、円筒部材16と加熱媒体流路配管14とは、
夫々、溶接により接合されているので、これら接合箇所
から真空チャンバ10内に空気等が漏れることにより、
真空チャンバ10内の低圧状態が破壊されることはな
い。
A cylindrical member 16 having a diameter larger than that of the heating medium passage pipe 14 is provided on the outer periphery of the heating medium passage pipe 14.
Is formed with a predetermined curved surface R toward the central axis of the cylindrical member 16 and is joined by welding. The outside of the other end of this one end is formed into a circular shape along the cylindrical surface by welding. The pipe side flange 18 is formed by joining. The heating medium passage pipe 14 is arranged so that the opening of the other end of the cylindrical member 16 faces outward from the outside of the vacuum chamber 10 (that is, the welding portion between the cylindrical member 16 and the heating medium passage pipe 14 is connected to the vacuum chamber 10). Then, the pipe side flange 18 is attached to the vacuum chamber 10 by fixing the pipe side flange 18 to the pipe attaching flange 12 joined to the outside of the opening 10a of the chamber 10 by welding with a bolt B. At the time of this fixing, the pipe side flange 18 and the pipe mounting flange 1
Since the gasket 20 is attached between the two, even if the inside of the vacuum chamber 10 is set to a predetermined low pressure state, air or the like leaks from this fixed portion and this low pressure state is not destroyed. In addition, the pipe side flange 18 and the cylindrical member 16, the cylindrical member 16 and the heating medium flow path pipe 14,
Since they are respectively joined by welding, air and the like leak into the vacuum chamber 10 from these joints,
The low pressure state in the vacuum chamber 10 is not destroyed.

【0012】円筒部材16は、加熱媒体流路配管14か
らの伝熱を少なくするため(伝熱面積を小さくするた
め)に、真空チャンバ10を形成する外壁の厚さに比
べ、極めて薄く形成されるが、真空チャンバ10側は、
所定の曲面Rを有して加熱媒体流路配管14に接合され
ているため、真空チャンバ10内をプレスに適する低圧
値(真空状態)としても、この円筒部材16は、変形等
の破壊を生ずることなく、充分な強度を有するものであ
る。なお、フランジ22は、加熱媒体流路配管14に加
熱媒体を供給する図示しない加熱媒体供給装置に接続さ
れるフランジであり、フランジ24は、加熱媒体流路配
管14を多段プレス装置に接続するためのフランジであ
る。
The cylindrical member 16 is formed to be extremely thinner than the thickness of the outer wall forming the vacuum chamber 10 in order to reduce the heat transfer from the heating medium passage pipe 14 (to reduce the heat transfer area). However, on the vacuum chamber 10 side,
Since it has a predetermined curved surface R and is joined to the heating medium passage pipe 14, even if the vacuum chamber 10 is set to a low pressure value (vacuum state) suitable for pressing, the cylindrical member 16 is destroyed such as deformed. It has a sufficient strength. The flange 22 is a flange that is connected to a heating medium supply device (not shown) that supplies the heating medium to the heating medium flow pipe 14, and the flange 24 is for connecting the heating medium flow pipe 14 to the multi-stage press device. It is a flange.

【0013】上述した様に、真空チャンバと流路配管と
の接続構造を構成することにより、円筒部材16を、従
来のフランジに比べて極めて薄く形成でき(即ち伝熱面
積を小くでき)、加熱媒体流路配管14内を通る加熱媒
体の熱のエネルギーのロスはほとんど起こらなくなっ
た。また、加熱媒体流路配管14と、配管側フランジ1
8と真空チャンバ10とを固着するボルトBとの距離
は、従来に比べて長く形成されるため、加熱媒体流路配
管14を通る加熱媒体の熱が、円筒部材16等を経由し
て真空チャンバ10に伝達されるまでに放熱され、ほと
んど真空チャンバ10に伝達されることがなくなった。
加熱媒体流路配管14内に350度の加熱媒体を通し
て、配管側フランジ18の温度の温度を測定したとこ
ろ、常温よりほぼ10度上昇しただけであった。
As described above, by constructing the connection structure of the vacuum chamber and the flow path pipe, the cylindrical member 16 can be formed extremely thin (that is, the heat transfer area can be reduced) as compared with the conventional flange. Almost no heat energy loss of the heating medium passing through the heating medium passage pipe 14 occurred. Further, the heating medium flow passage pipe 14 and the pipe side flange 1
Since the distance between the bolts 8 for fixing the vacuum chamber 8 and the vacuum chamber 10 is formed longer than in the conventional case, the heat of the heating medium passing through the heating medium passage pipe 14 passes through the cylindrical member 16 and the like to the vacuum chamber. The heat was dissipated by the time it was transferred to the vacuum chamber 10, and it was hardly transferred to the vacuum chamber 10.
When the temperature of the temperature of the pipe side flange 18 was measured by passing the heating medium of 350 degrees through the heating medium passage piping 14, it was only about 10 degrees higher than room temperature.

【0014】この発明は上述した第一の実施例の構成に
限定されることなく、この発明の要旨を逸脱しない範囲
で種々変形可能であることはいうまでもない。
Needless to say, the present invention is not limited to the configuration of the first embodiment described above, but can be variously modified without departing from the scope of the present invention.

【0015】例えば、接合部材としての円筒部材16
は、円筒形である様に説明したが、この発明はこの様な
構成に限定されることなく、例えば四角柱等の多角柱で
あってもよい。
For example, a cylindrical member 16 as a joining member
Has been described as having a cylindrical shape, but the present invention is not limited to such a configuration, and may be a polygonal pillar such as a square pillar.

【0016】また、夫々、配管側フランジと円筒形部材
16、円筒形部材16と加熱媒体流路配管14は、溶接
によって接合される様に説明したが、この発明はこの様
な構成に限定されることなく、接着剤により接合しても
良いし、また、一体として形成しても良い。
Further, although it has been described that the pipe side flange and the cylindrical member 16 and the cylindrical member 16 and the heating medium passage pipe 14 are joined by welding, respectively, the present invention is not limited to such a constitution. Instead, they may be joined by an adhesive or may be integrally formed.

【0017】また、円筒形部材16の真空チャンバ10
側の一端を加熱媒体流路配管14に接続し、この他端を
開口部10aに接合する様に説明したが、この発明はこ
の様な構成に限定されることなく、円筒形部材16の真
空チャンバ10側の一端を開口部10aに接合し、この
他端を加熱媒体流路配管14に接合する様にしてもよ
い。
Also, the vacuum chamber 10 of the cylindrical member 16
Although it has been described that one end on the side is connected to the heating medium passage pipe 14 and the other end is joined to the opening 10a, the present invention is not limited to such a configuration, and the vacuum of the cylindrical member 16 is not limited to this. One end on the chamber 10 side may be joined to the opening 10 a, and the other end may be joined to the heating medium passage pipe 14.

【0018】また、加熱媒体流路配管14内には、サー
モオイル、飽和蒸気を通す様に説明したが、この発明は
このような構成に限定されることなく、所定温度のその
他の流体または気体であってもよい。
Further, although it has been described that the thermo oil and the saturated steam are allowed to pass through the heating medium flow passage pipe 14, the present invention is not limited to such a constitution, and other fluid or gas having a predetermined temperature is used. May be

【0019】[0019]

【発明の効果】以上詳述したように、この発明に係る真
空チャンバと流路配管との接続構造は、請求項1の記載
によれば、被成形物を加熱成形するためのプレス定盤を
有する熱圧プレス手段と、前記プレス定盤に接続され、
前記プレス定盤を所定の温度とすべく内部に加熱媒体を
通す加熱媒体流路配管と、この加熱媒体流路配管内に加
熱媒体を供給する加熱媒体供給装置と、前記熱圧プレス
手段が内部に設置されると共に、前記加熱媒体流路配管
を内部に挿通するための開口を有して形成される真空チ
ャンバと、前記加熱媒体流路配管の加熱媒体の供給方向
周りを所定距離を開けて覆い、この加熱媒体の供給方向
に対し所定長さを有して形成されると共に、その加熱媒
体の供給方向の一端は、所定曲面を有して内側に曲げら
れ前記加熱媒体流路配管に接合され、他端は、真空チャ
ンバの開口に接合されて真空チャンバ内を密封すること
ができる接合部材と、前記真空チャンバに接続され、前
記真空チャンバ内部を真空にするべく動作する真空ポン
プとを具備することを特徴としている。
As described in detail above, according to the connection structure of the vacuum chamber and the flow path piping according to the present invention, according to the description of claim 1, a press surface plate for heat-molding an object is formed. A hot-pressing means having, and connected to the press surface plate,
A heating medium passage pipe through which a heating medium is passed so as to bring the press surface plate to a predetermined temperature, a heating medium supply device for supplying the heating medium into the heating medium passage pipe, and the hot press machine And a vacuum chamber formed with an opening for inserting the heating medium passage pipe inside, and a predetermined distance is provided around the heating medium supply direction of the heating medium passage pipe. The heating medium is formed so as to have a predetermined length with respect to the heating medium supply direction, and one end in the heating medium supply direction has a predetermined curved surface and is bent inward to be joined to the heating medium passage pipe. The other end includes a joining member that is joined to the opening of the vacuum chamber and can seal the inside of the vacuum chamber, and a vacuum pump that is connected to the vacuum chamber and operates to make the inside of the vacuum chamber a vacuum. To do It is characterized in.

【0020】また、この発明に係る真空チャンバと流路
配管との接続構造において、前記真空チャンバには、前
記熱圧プレス手段に被成形物を載置し、プレス後この被
成形物を取り出すための開口と、この開口を開閉可能な
様に取りつけられ、閉成時には前記真空チャンバを密封
することができる扉とを具備することを特徴としてい
る。また、この発明に係る真空チャンバと流路配管との
接続構造において、前記接合部材は、前記加熱媒体流路
配管の加熱媒体の供給方向周りを覆う円筒形の部材であ
ることを特徴としている。また、この発明に係る真空チ
ャンバと流路配管との接続構造において、前記接合部材
は、この所定の曲面を有して内側に曲げられている端
が、溶接により前記加熱媒体流路配管に接合されること
を特徴としている。また、この発明に係る真空チャンバ
と流路配管との接続構造において、記接合部材の所定の
曲面を有して曲げられている端の他端の先端周囲には、
円形の配管側フランジが設けられており、この配管側フ
ランジと真空チャンバの開口とが溶接により接合される
ことを特徴としている。また、この発明に係る真空チャ
ンバと流路配管との接続構造において、前記接合部材の
所定の曲面を有して曲げられている端の他端の先端周囲
には、円形の配管側フランジが設けられると共に、真空
チャンバの開口外側に沿って円形の配管取付フランジが
設けられており、この配管側フランジと配管取付フラン
ジとの接合を、ガスケットを介してボルトにより行うこ
とを特徴としている。また、この発明に係る真空チャン
バと流路配管との接続構造において、前記加熱媒体流路
配管内を通される加熱媒体は、サーモオイルであること
を特徴としている。また、この発明に係る真空チャンバ
と流路配管との接続構造において、前記加熱媒体流路配
管内を通される加熱媒体は、飽和蒸気であることを特徴
としている。
Further, in the connection structure of the vacuum chamber and the flow path pipe according to the present invention, in the vacuum chamber, an object to be molded is placed on the hot press means and the object to be molded is taken out after pressing. And an opening that can be opened and closed and that can close the vacuum chamber when closed. Further, in the connection structure of the vacuum chamber and the flow path pipe according to the present invention, the joining member is a cylindrical member that covers the heating medium flow path pipe around the heating medium supply direction. Further, in the connection structure of the vacuum chamber and the flow passage pipe according to the present invention, the joining member has an end bent inward with the predetermined curved surface joined to the heating medium flow passage pipe by welding. It is characterized by being done. Further, in the connection structure between the vacuum chamber and the flow path piping according to the present invention, around the tip of the other end of the end of the joining member which has a predetermined curved surface,
A circular pipe-side flange is provided, and the pipe-side flange and the opening of the vacuum chamber are joined by welding. Further, in the connection structure between the vacuum chamber and the flow path pipe according to the present invention, a circular pipe-side flange is provided around the tip of the other end of the end of the joining member that has a predetermined curved surface and is bent. In addition, a circular pipe mounting flange is provided along the outside of the opening of the vacuum chamber, and the pipe side flange and the pipe mounting flange are joined by a bolt via a gasket. Further, in the connection structure of the vacuum chamber and the flow path pipe according to the present invention, the heating medium passed through the inside of the heating medium flow path pipe is thermo oil. Further, in the connection structure of the vacuum chamber and the flow path pipe according to the present invention, the heating medium passed through the heating medium flow path pipe is saturated steam.

【0021】従って、この発明によれば、加熱媒体流路
配管内を通る熱媒体の熱量が真空チャンバにほとんど伝
達されることがなく、また、加熱媒体流路配管内の熱媒
体の熱量のエネルギーロスがほとんどなく、したがっ
て、作業者が真空チャンバに触れても火傷等をすること
のない真空チャンバと流路配管との接続構造が提供され
ることとなる。
Therefore, according to the present invention, the heat quantity of the heat medium passing through the heating medium passage pipe is hardly transmitted to the vacuum chamber, and the energy of the heat quantity of the heat medium inside the heating medium passage pipe is A connection structure between the vacuum chamber and the flow path pipe is provided, which causes almost no loss, and therefore does not cause burns or the like even if the worker touches the vacuum chamber.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明に係る真空チャンバと流路配管との接
続構造の一実施例の構成を示す平面図である。
FIG. 1 is a plan view showing a configuration of an embodiment of a connection structure between a vacuum chamber and a flow path pipe according to the present invention.

【図2】この発明に係る真空チャンバと流路配管との接
続構造の従来の構成を示す平面図である。
FIG. 2 is a plan view showing a conventional structure of a connection structure between a vacuum chamber and a flow path pipe according to the present invention.

【符号の説明】[Explanation of symbols]

10…真空チャンバ 12…配管取付フランジ 14…加熱媒体流路配管 16…円筒部材 18…配管側フランジ 20…ガスケット 10 ... Vacuum chamber 12 ... Pipe mounting flange 14 ... Heating medium flow passage pipe 16 ... Cylindrical member 18 ... Pipe side flange 20 ... Gasket

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】被成形物を加熱成形するためのプレス定盤
を有する熱圧プレス手段と、 前記プレス定盤を所定の温度とすべく内部に加熱媒体を
通し、前記プレス定盤に接続される加熱媒体流路配管
と、 この加熱媒体流路配管内に加熱媒体を供給する加熱媒体
供給装置と、 内部に前記熱圧プレス手段が設置されると共に、前記加
熱媒体流路配管を内部に挿通するための開口を有して形
成される真空チャンバと、 前記加熱媒体流路配管の加熱媒体の供給方向周りを所定
距離を開けて覆い、この加熱媒体の供給方向に対し所定
長さを有して形成されると共に、その加熱媒体の供給方
向の一端は、所定曲面を有して内側に曲げられ前記加熱
媒体流路配管に接合され、他端は、真空チャンバの開口
に接合されて真空チャンバ内を密封することができる接
合部材と、 前記真空チャンバに接続され、前記真空チャンバ内部を
真空にするべく動作する真空ポンプとを具備することを
特徴とする真空チャンバと流路配管との接続構造。
1. A hot-pressing means having a press platen for heat-molding an object to be molded, and a heating medium passing through the press platen so as to bring the press platen to a predetermined temperature, which is connected to the press platen. The heating medium flow path pipe, the heating medium supply device for supplying the heating medium into the heating medium flow path pipe, the hot-pressing means are installed inside, and the heating medium flow path pipe is inserted inside. A vacuum chamber formed with an opening for opening the heating medium flow path pipe around the heating medium supply direction with a predetermined distance between the vacuum chamber and a predetermined length with respect to the heating medium supply direction. One end of the heating medium in the supply direction of the heating chamber is bent inward with a predetermined curved surface and is joined to the heating medium passage pipe, and the other end is joined to the opening of the vacuum chamber. A connection that can seal the inside A connection structure between a vacuum chamber and a flow path pipe, comprising: a coupling member; and a vacuum pump that is connected to the vacuum chamber and that operates to create a vacuum inside the vacuum chamber.
【請求項2】前記真空チャンバには、前記熱圧プレス手
段に被成形物を載置し、プレス後この被成形物を取り出
すための開口と、この開口を開閉可能な様に取りつけら
れ、閉成時には前記真空チャンバを密封することができ
る扉とを具備することを特徴とする請求項1に記載の真
空チャンバと流路配管との接続構造。
2. An opening for placing an object to be molded on the hot-pressing means in the vacuum chamber and taking out the object to be molded after pressing, and the opening is attached so that the opening can be opened and closed. The connection structure between the vacuum chamber and the flow path pipe according to claim 1, further comprising a door capable of sealing the vacuum chamber when completed.
【請求項3】前記接合部材は、前記加熱媒体流路配管の
加熱媒体の供給方向周りを覆う円筒形の部材であること
を特徴とする請求項1に記載の真空チャンバと流路配管
との接続構造。
3. The vacuum chamber and the flow path pipe according to claim 1, wherein the joining member is a cylindrical member that covers the heating medium flow path pipe around the heating medium supply direction. Connection structure.
【請求項4】前記接合部材の所定の曲面を有して内側に
曲げられている端と前記加熱媒体流路配管、前記接合部
材の所定の曲面を有して内側に曲げられている端の他端
と真空チャンバの開口とが、夫々、溶接により接合され
ることを特徴とする請求項1に記載の真空チャンバと流
路配管との接続構造。
4. An end of the joining member that is bent inward with a predetermined curved surface and an end of the heating medium passage pipe that is bent inward with a predetermined curved surface of the joining member. The connection structure between the vacuum chamber and the flow path pipe according to claim 1, wherein the other end and the opening of the vacuum chamber are joined by welding.
【請求項5】前記接合部材の所定の曲面を有して曲げら
れている端の他端の先端周囲には、円形の配管側フラン
ジが設けられると共に、前記真空チャンバの開口外側に
沿って円形の配管取付フランジが設けられており、この
配管取付フランジと前記配管側フランジとの接合を、ガ
スケットを介してボルトにより行うことを特徴とする請
求項1に記載の真空チャンバと流路配管との接続構造。
5. A circular pipe-side flange is provided around the other end of the bent end of the joining member having a predetermined curved surface, and is circular along the outside of the opening of the vacuum chamber. 2. The vacuum chamber and the flow path pipe according to claim 1, wherein the pipe mounting flange is provided, and the pipe mounting flange and the pipe side flange are joined by a bolt through a gasket. Connection structure.
【請求項6】前記加熱媒体流路配管内を通される加熱媒
体は、サーモオイルであることを特徴とする請求項1に
記載の真空チャンバと流路配管との接続構造。
6. The connection structure between a vacuum chamber and a flow pipe according to claim 1, wherein the heating medium passed through the heating medium flow pipe is thermo oil.
【請求項7】前記加熱媒体流路配管内を通される加熱媒
体は、飽和蒸気であることを特徴とする請求項1に記載
の真空チャンバと流路配管との接続構造。
7. The connection structure between a vacuum chamber and a flow passage pipe according to claim 1, wherein the heating medium passed through the heating medium flow passage pipe is saturated vapor.
JP28189493A 1993-10-15 1993-10-15 Connection structure between vacuum chamber and flow path piping Expired - Lifetime JP3375695B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28189493A JP3375695B2 (en) 1993-10-15 1993-10-15 Connection structure between vacuum chamber and flow path piping

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28189493A JP3375695B2 (en) 1993-10-15 1993-10-15 Connection structure between vacuum chamber and flow path piping

Publications (2)

Publication Number Publication Date
JPH07108553A true JPH07108553A (en) 1995-04-25
JP3375695B2 JP3375695B2 (en) 2003-02-10

Family

ID=17645449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28189493A Expired - Lifetime JP3375695B2 (en) 1993-10-15 1993-10-15 Connection structure between vacuum chamber and flow path piping

Country Status (1)

Country Link
JP (1) JP3375695B2 (en)

Also Published As

Publication number Publication date
JP3375695B2 (en) 2003-02-10

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