JPH07107752A - Piezoelectric generating device - Google Patents

Piezoelectric generating device

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Publication number
JPH07107752A
JPH07107752A JP5268317A JP26831793A JPH07107752A JP H07107752 A JPH07107752 A JP H07107752A JP 5268317 A JP5268317 A JP 5268317A JP 26831793 A JP26831793 A JP 26831793A JP H07107752 A JPH07107752 A JP H07107752A
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JP
Japan
Prior art keywords
piezoelectric
plate
vibration
capacitor
formed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5268317A
Other languages
Japanese (ja)
Inventor
Mitsuteru Kimura
光照 木村
Original Assignee
Mitsuteru Kimura
Ricoh Seiki Co Ltd
リコー精器株式会社
光照 木村
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Application filed by Mitsuteru Kimura, Ricoh Seiki Co Ltd, リコー精器株式会社, 光照 木村 filed Critical Mitsuteru Kimura
Priority to JP5268317A priority Critical patent/JPH07107752A/en
Publication of JPH07107752A publication Critical patent/JPH07107752A/en
Priority claimed from US08/812,070 external-priority patent/US5801475A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To store the energy in a capacitor by converting the vibration energy of forced vibration into the electric energy, and to take out the electric power.
CONSTITUTION: Piezoelectric ceramic plates 11 are stuck to both surfaces of a slender phosphor bronze plate 10. The plate 10 is attached to an n-Si substrate 12. A groove 13 is formed in the n-Si substrate 12. The surface undergoes thermal oxidation for electric insulation, and an SiO2 thin film 14 is formed. A pair of electrodes 15 of metallic thin films are formed on both surfaces of each piezoelectric ceramic plate 11. Output terminals A and A' are guided on the substrate. When forced vibration is received, the phosphor bronze plate 10 is vertically vibrated. Two piezoelectric ceramic plates 11 are alternately expanding and contracting, and the AC voltage is generated in each ceramic plate 11, respectively. Interconnection is performed so that the AC voltages are overlapped and appear at the output terminals A and A'. A weight 16 is bonded to the vibrating end of the cantilever of the piezoelectric plate. In order to avoid the breakdown of the vibrating plate caused by the too large amplitude of the vibration, the depth of the groove is adequately set, and a stopper 17 for limiting the amplitude is provided.
COPYRIGHT: (C)1995,JPO

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】この発明は、振動などにより圧電板を伸び縮みさせ、この圧電板に形成してある電極に発生した交流電圧を整流してコンデンサに蓄える発電装置に関するもので、バッテリなどの電源なしに、振動さえあれば発電装置として作用し、必要に応じ電力を取り出せるようにしたものである。 BACKGROUND OF THE INVENTION This invention is to expand and contract the piezoelectric plate due to vibration, this is formed on the piezoelectric plate by rectifying an AC voltage generated in the electrode relates generating device that stores a capacitor, a battery, etc. of without power, it acts as a power generator if they have vibration, in which to release the power needed. 例えば、地震発生時にこの振動エネルギを電源として電波を発して警報を出す地震警報装置や、非常に小型にできることから家畜や鳥などの位置報告装置などに応用されるものである。 For example, those or earthquake warning device to alert emit radio waves as a power source of the vibration energy in the event of an earthquake, which is very applicable to such location reporting device, such as livestock and birds from being able to compact.

【0002】 [0002]

【従来の技術】外部から発射された電波を受信してこれを電気エネルギに変換し、このエネルギをバッテリに代わる携帯電子装置の電源として利用できるようにしたものが開発されている。 BACKGROUND ART receives radio waves emitted from the outside and converts it into electrical energy, that to be able to use this energy as a power source of a portable electronic device in place of the battery have been developed. 例えば、そのような発電装置を電源とする信号発生装置を放牧している牛の各々に取り付け、ゲートを通過するときに電波を当ててその信号発生装置を働かせ、牛の認識番号などを自動識別するというような使い方をする。 For example, attached to each of the cows that graze signal generator for such a power generator and power, exert the signal generator by applying a radio wave as it passes through the gate, automatic identification and recognition numbers of cattle to the use such as that. しかし、このような電波を用いた発電装置では、電波発信源から遠くなると充分なエネルギが確保できないので、電波発射源の近くの限られた範囲でしか利用きないという欠点があった。 However, in the power generation apparatus using such a radio wave, so far made and sufficient energy from the radio wave source can not be secured, there is a disadvantage that can use only in the vicinity of the limited range of the radio wave source.

【0003】 [0003]

【発明が解決しようとする課題】この発明では、強制振動などの振動エネルギを電気エネルギに変換して、これをコンデンサに蓄え、ここから電力を取り出せるようにする無電源の小型の発電装置を提供することを目的とする。 BRIEF Problem to be Solved] In this invention, by converting the vibration energy, such as forced vibration into electric energy, which stored in the capacitor, providing a power generation system for a small-free power supply that to release the power from here an object of the present invention is to. さらに、必要に応じ電波、音、光などの信号を放射できるような電子回路をも組み込んだ発電装置を提供しようとするものである。 Furthermore, it is intended to provide Telecommunications optionally sound, a power generating device also incorporates an electronic circuit such as can emit a signal, such as light.

【0004】 [0004]

【課題を解決するための手段】本発明では、圧電板に電極対を設け、この圧電板を片端支持、両端支持または周辺支持の状態で振動させ、この振動により圧電板が伸び縮みするようにしておき、このとき圧電板に形成してある電極対に発生した交流電圧を整流してコンデンサに蓄え、必要に応じてコンデンサから電力を取り出すように圧電発電装置を構成してある。 In the present invention, there is provided a means for solving], an electrode pair provided on the piezoelectric plate, the piezoelectric plate one end support, is vibrated in a state of both-ends-supported or near the support, so as to expand or contract the piezoelectric plate by the vibration and leave, stored in the capacitor for rectifying the time AC voltage generated in the electrode pair is formed on the piezoelectric plate, are composed of the piezoelectric power generating device to draw power from the capacitor as needed.

【0005】圧電板が振動しやすく、かつ伸び縮みしやすいように、最も振動振幅が大きくなる箇所に重りを取り付けるようにするのが好ましい。 [0005] easily piezoelectric plate vibrates, and as easy to expand and contract, preferably to attach a weight to the point where most vibration amplitude increases. また、2次元または3次元的に振動を分割できるよう、振動板を組み合わせ、それぞれが圧電発電できるようにすることもできる。 Also, as can be divided in two or three dimensions to vibration, combining the diaphragm, each capable also allow the piezoelectric generator.

【0006】さらに、コンデンサの電圧が設定値以上になったとき、コンデンサに蓄えられた電力を利用して、 Furthermore, when the voltage of the capacitor becomes equal to or greater than the set value, by using the power stored in the capacitor,
電波、音波、光などの信号を発する電子回路を組み込むこともできる。 Telecommunications can also be incorporated waves, an electronic circuit that emits a signal, such as light.

【0007】 [0007]

【実施例】この発明の実施例を図面に基づいて説明すると、この圧電発電装置は図1のブロック図で示すように、基本構成部1と付属回路2からなり、基本構成部は圧電発電部3と整流器4とコンデンサ5からなり、付属回路部2は、必要に応じ、電圧設定回路部6、時間設定回路部7および信号発生回路部8からなる。 EXAMPLES To describe with reference to embodiments of the invention with reference to the drawings, the piezoelectric power generating device as shown in the block diagram of FIG. 1, consists of the basic components 1 and the attached circuit 2, the basic component is a piezoelectric power generating unit 3 and consists of the rectifier 4 and the capacitor 5, attached circuit portion 2, if necessary, consist of the voltage setting circuit 6, the time setting circuit 7 and the signal generating circuit 8.

【0008】圧電発電部3は圧電板が振動して発電するところであり、カンチレバー形の一例を図2に示す。 [0008] The piezoelectric power generating unit 3 is where the piezoelectric plate to generate electricity by vibration, an example of the cantilever type in Figure 2. 細長い燐青銅板10(例えば、0.5mm厚、15mm長、2mm幅) Elongate phosphor bronze plate 10 (e.g., 0.5 mm thick, 15 mm length, 2 mm width)
の両面にそれぞれ圧電セラミック板11(例えば、0.5m Each on both surfaces piezoelectric ceramic plate 11 (e.g., 0.5 m
m厚、10mm長、2mm幅)をはり付け、これをn−Si基板1 m thick, 10 mm length, Paste a 2mm wide), which n-Si substrate 1
2に取り付ける。 Attached to 2. n−Si基板12には溝13を形成しておき、表面は電気絶縁のため熱酸化してSiO2薄膜14を形成しておく。 The n-Si substrate 12 previously formed with grooves 13, the surface is left to form a SiO2 film 14 is thermally oxidized for electrical insulation.

【0009】各圧電セラミック板11の両面には金属薄膜の一対の電極15を形成しておいて、これから基板上に出力端子A、A'を導く。 [0009] formed in advance a pair of electrodes 15 of the thin metal film on both surfaces of the piezoelectric ceramic plate 11, the output terminal A on the substrate now leads to A '. 強制振動を受けると、燐青銅板10が上下に振動し、2枚の圧電セラミック板11 Upon receiving the forced vibration, phosphor bronze plate 10 to vertically vibrate, the two piezoelectric ceramic plates 11
が交互に伸び縮みし、各セラミック板11に交流電圧がそれぞれ発生する。 There expand and contract alternately, an AC voltage is generated to the respective ceramic plate 11. それらの交流電圧が重畳して出力端子A、A'に表れるように結線する。 Output terminal A thereof of an AC voltage is superimposed, is connected as appears in A '. この系を動かしたとき、容易にバイモルフ振動ができるように、圧電板のカンチレバーの振動端に重り16を接着しておくとよい。 When you move the system, as can easily bimorph vibration, you may want to bond the weight 16 to the vibration end of the cantilever of the piezoelectric plate. また、振動振幅が大きすぎて振動板が破壊するのを避けるため、溝の深さを適当にすると共に、振幅制限のストッパ17を設けるとよい。 In order to avoid the diaphragm vibration amplitude is too large, to break, as well as to the proper depth of the groove may be provided with stopper 17 of the amplitude limitation.

【0010】図示していないが、圧電発電部3をモノリシックに形成することもできる。 [0010] Although not shown, it is also possible to form a piezoelectric power generating unit 3 monolithically. シリコン基板を用いた、シリコンの重りを先端に持った加速度センサが知られているが、これと同じように、シリコン基板の異方性エッチング技術と組み合わせ、窒化シリコン薄膜のカンチレバーの先端にシリコンの重りを設け、窒化シリコン薄膜のカンチレバーの表面に、例えば、圧電材料である The silicon substrate was used, but the acceleration sensor having the tip of the silicon of the weight are known, like this, anisotropic etching technology and the combination of the silicon substrate, the silicon at the tip of the cantilever of silicon nitride film the weight is provided on the surface of the cantilever of the silicon nitride film, for example, a piezoelectric material
ZnO薄膜をスパッタ形成し、ポーリングして、横方向圧電効果が得られるようにする。 The ZnO thin film formed by sputtering, polls, so that transverse piezoelectric effect. こうすれば、はり合わせ技術の不用なすべてモノリシックの圧電発電装置が形成でき、一層の小型化および量産化ができる。 This way, all the waste of lamination technique can form a monolithic piezoelectric power generator may further miniaturization and mass production.

【0011】ダイアフラム形の圧電発電部の例を図5に示す。 [0011] An example of a piezoelectric power generating unit of the type diaphragm in FIG. n−Si基板22に、例えば円形溝23を形成し、 The n-Si substrate 22, for example, to form a circular groove 23,
この溝を塞ぐように、表裏に一対の電極25の付いたポリフッ化ビニリデン(PVDF)の板ないし膜21を張り、 So as to close the groove, tensioning the plate or film 21 of polyvinylidene fluoride with a pair of electrodes 25 on the front and back (PVDF),
その中央に重り26を設け、振動によりPVDF膜21が伸び縮みし、一対の電極15、15間に交流の圧電起電力が発生するようにする。 The center of the weight 26 is provided on, and expand or contract PVDF film 21 by the vibration, the piezoelectric electromotive force of the alternating current between the pair of electrodes 15, 15 so as to generate. PVDF膜21の振動を妨げないように、n−Si基板12の裏面から円形溝23に達する孔24をあけておくとよい。 So as not to interfere with vibration of the PVDF film 21, may from the back surface of the n-Si substrate 12 previously drilled hole 24 reaching the circular groove 23.

【0012】両端支持形の圧電発電部の例は特に示さないが、断面で見ると、図5とほとんど同じ構造になる。 [0012] Examples of the piezoelectric power generating unit of the ends-supporting is not particularly shown, when viewed in cross-section, is almost the same structure as FIG.

【0013】図1の整流部4は、ダイオードを組み合わせた全波でも半波整流回路でもよいし、さらには倍電圧整流回路でもよい。 [0013] rectifying section 4 in Fig. 1, even a full-wave which is a combination of diodes may be a half-wave rectifier circuit, further may be a voltage doubler rectifier circuit. ダイオードとして、p−n接合ダイオードでもショットキダイオードでもよい。 As a diode, or a Schottky diode in p-n junction diode. 圧電発電部の起電力が小さいときは、立ち上がり電圧の低いショットキダイオードが好都合である。 When the electromotive force of the piezoelectric power generating unit is small, it is advantageous low Schottky diode with rising voltage.

【0014】図3は交流圧電起電力を倍電圧整流したときの整流部の回路図であり、図4はそれに対応する構成図である。 [0014] Figure 3 is a circuit diagram of a rectifier when the voltage doubler rectifying AC piezoelectric electromotive force, Fig. 4 is a block diagram corresponding thereto. n−Si基板33にp−n接合ダイオードD 1 、D 2 p-n junction diode D 1 to the n-Si substrate 33, D 2
を組み合わせた整流部とMOSキャパシタC 1 、C 2のコンデンサとをモノリシックに形成して構成する。 A capacitor of the rectification section and the MOS capacitor C 1, C 2 that combines constructed by monolithically. さらに、前述のように、圧電発電部をn−Si基板上にモノリシックの形に構成すれば、全体として、非常にコンパクトな圧電発電部の基本構成部ができ上がる Further, as mentioned above, it is configured in a monolithic form the piezoelectric generator unit into n-Si substrate, as a whole, a very basic configuration of the compact piezoelectric power generating unit is completed

【0015】例えばこの発明の圧電発電装置を地震警報機として用いる場合、ある程度の地震があると、圧電発電部には起電力が発生し、それがある程度の時間持続するので、コンデンサ5の両端電圧Vが徐々に上昇する。 [0015] For example, when using a piezoelectric power generating device of the present invention as an earthquake alarm, if there is some earthquakes, electromotive force generated in the piezoelectric power generating unit, because it lasts some time, the voltage across the capacitor 5 V is gradually increased.
図1に示す電圧設定回路部6は、この電圧Vがある設定値を越えたとき、信号発生回路部8を作動させる。 Voltage setting circuit 6 shown in FIG. 1, when it exceeds a set value with this voltage V, to operate the signal generating circuit 8.

【0016】信号発生回路部8が作動すると電波を発して、地震があったことを知らせる。 The signal generating circuit 8 emits radio waves when activated, indicating that there was an earthquake. 送り出す電波は信号化して、震度の大きさ、どの圧電発電装置からの信号であるか等が分かるようにすることもできる。 Radio waves and signaling, seismic intensity of magnitude, may be what is the signal or the like from the piezoelectric power generating device is to be seen to deliver. 電波の代わりに音や光を発生するようにしてもよい。 It may be generated sound or light instead of radio waves.

【0017】時間設定回路7は、コンデンサ5に蓄えられた電荷を一定周期毎に取り出すようにしたり、一気に大電力を消費させ、遠くまで電波を飛ばすようにするなどの目的で備えるものである。 The time setting circuit 7, or to take out the charge stored in the capacitor 5 in a predetermined cycle, is consumed at once high power, but with the purpose of to make skip Telecommunications far. これらの回路は、n形シリコンの基板の上にICとして形成できるので、前述の基本構成部と共にモノリシック化できる。 These circuits can be formed as an IC on a substrate of n-type silicon, monolithic with the basic components described above.

【0018】図6に示すものは、図2のバイモルフ振動形の圧電発電部を3つ組み合わせ、振動を互いに直交する3つの成分に分離するようにしたものである。 The one shown in Figure 6, combining three piezoelectric power generating portion of the bimorph vibration type 2, in which so as to separate into three orthogonal components of oscillations with respect to each other. 図6では重りがないが、取り付けてもよい。 Although there is no weight 6 may be attached. このようなカンチレバー形ではなく、ダイアフラム形や両端支持形の圧電発電部を3つ組み合わせてもよい。 Instead of such a cantilevered, it may be combined three piezoelectric generator of the diaphragm-type or both ends-supported.

【0019】 [0019]

【発明の効果】請求項1の圧電発電装置は、振動により圧電板を伸び縮みさせて、圧電板に形成してある電極間に電圧を発生させ、これをコンデンサに蓄えるようにしたものであり、バッテリなどの電源なしに、振動さえあれば発電装置として作用し、必要に応じて電力を取り出すことができ、例えば、地震発生時にこの振動エネルギを電源として電波を発して警報を出す地震警報装置等に使うことができる。 Effects of the Invention A piezoelectric power generation system according to claim 1, by expansion and contraction of the piezoelectric plate by the vibration, voltage is generated between the electrodes is formed on the piezoelectric plate, which is obtained by such store in the capacitor without power supply such as a battery, to act as a power generator if they have vibration, it is possible to draw power as needed, for example, an earthquake warning device to alert emit radio waves the vibration energy as a power source in the event of an earthquake it can be used to equal. さらに、基板としてシリコン等の半導体を用いると、半導体IC技術を利用できるので、他の電子回路と共にモノリシックに形成でき、量産性に富み、信頼性が高く安価なものが得られる。 Furthermore, the use of a semiconductor such as silicon as a substrate, it is possible to utilize a semiconductor IC technology, can be formed monolithically together with other electronic circuits, rich in mass production, that is reliable and inexpensive to obtain.

【0020】請求項2の圧電発電装置は、圧電板の振動部に重りを取り付けたものであり、こうすることにより、圧電板が振動しやすく、したがって、伸び縮みも大きくなって大きな電力を得ることができる。 The piezoelectric power generating device according to claim 2, which has attached a weight to the vibration portion of the piezoelectric plate, by doing so, the piezoelectric plate is easily vibrated, thus, obtain a large power becomes greater elasticity be able to. 請求項3の発電装置は、圧電板を組み合わせて3次元的振動を各振動成分に分解できるようにしたものであり、振動の方向を知るのに役立つ。 Power generating device according to claim 3, which has a three-dimensional vibration by combining a piezoelectric plate to be broken down into vibration component helps to know the direction of the vibration. 請求項4の装置は、コンデンサの電圧が設定値以上になったとき、該コンデンサの電力を利用して、電波、音、光などの信号を放出する付属回路を組み込んだものであり、地震警報装置として使う場合有用である。 Devices according to claim 4, when the voltage of the capacitor becomes equal to or greater than the set value, by utilizing the power of the capacitor, radio, sound, which incorporates the accessory circuit that emits a signal, such as light, an earthquake alarm If you want to use as a device that is useful.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】圧電発電装置のブロック図である。 1 is a block diagram of a piezoelectric power generating device.

【図2】カンチレバー形の圧電発電部の構成図である。 2 is a block diagram of a piezoelectric power generating unit of the cantilevered.

【図3】倍電圧整流形の整流部回路図である。 3 is a rectifier circuit diagram of the voltage doubler rectification type.

【図4】図4に対応するモノリシック基板の断面図である。 4 is a cross-sectional view of a monolithic substrate corresponding to FIG.

【図5】ダイアフラム形圧電発電部の構成図である。 5 is a configuration diagram of a diaphragm-type piezoelectric generator unit.

【図6】3次元構成の圧電発電部の斜視図である。 6 is a perspective view of a piezoelectric power generating unit of the three-dimensional structure.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 基本構成部 2 付属回路 3 圧電発電部 4 整流部 5 コンデンサ 11 圧電板としての圧電セラミック板 15 電極 16 重り 21 圧電板としてのPVDF膜 25 電極 26 重り 1 basic structure 2 attached circuits 3 piezoelectric power generating portion 4 PVDF film 25 electrode 26 weight of the piezoelectric ceramic plate 15 electrode 16 weight 21 piezoelectric plate as rectifier 5 capacitor 11 piezoelectric plate

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【手続補正書】 [Procedure amendment]

【提出日】平成6年3月11日 [Filing date] 1994 March 11, 2011

【手続補正1】 [Amendment 1]

【補正対象書類名】図面 [Correction target document name] drawings

【補正対象項目名】図1 [Correction target item name] FIG. 1

【補正方法】変更 [Correction method] change

【補正内容】 [Correction contents]

【図1】 [Figure 1]

Claims (4)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 圧電板(11、21)に電極対(15、 1. A piezoelectric plate (11, 21) to the electrode pair (15,
    25)を設け、該圧電板が振動して伸び縮みすることにより該電極対に交流電圧を発生させ、これを整流してコンデンサ(5)に蓄え、必要に応じ該コンデンサから電力を取り出すようにした圧電発電装置。 25) is provided to generate an AC voltage to the electrode pair by piezoelectric plates expand and contract to vibrate, by rectifying it stored in the capacitor (5), to extract power from the capacitor as needed piezoelectric power generation apparatus.
  2. 【請求項2】 該圧電板の振動部に重り(16、26) 2. A weight to the vibration portion of the piezoelectric plate (16, 26)
    を取り付けた請求項1に記載の圧電発電装置。 The piezoelectric power generator according to claim 1 fitted with a.
  3. 【請求項3】 該圧電板を組み合わせて3次元的振動を各振動成分に分解できるようにした請求項1または2に記載の圧電発電装置。 3. A piezoelectric power generator according to claim 1 or 2 a three-dimensional vibration by combining piezoelectric plate is to be decomposed into each vibration component.
  4. 【請求項4】 該コンデンサの電圧が設定値以上になったとき、該コンデンサの電力を利用して、電波、音、光などの信号を放出する付属回路(2)を組み込んだ請求項1、2または3に記載の圧電発電装置。 When the voltage wherein the capacitor is equal to or greater than the set value, by utilizing the power of the capacitor, radio, sound, claim 1 incorporating an accessory circuit that emits a signal, such as light (2), the piezoelectric power generator according to 2 or 3.
JP5268317A 1993-09-30 1993-09-30 Piezoelectric generating device Pending JPH07107752A (en)

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JP5268317A JPH07107752A (en) 1993-09-30 1993-09-30 Piezoelectric generating device
US08/812,070 US5801475A (en) 1993-09-30 1997-03-06 Piezo-electricity generation device

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