JPH07107752A - Piezoelectric generating device - Google Patents
Piezoelectric generating deviceInfo
- Publication number
- JPH07107752A JPH07107752A JP5268317A JP26831793A JPH07107752A JP H07107752 A JPH07107752 A JP H07107752A JP 5268317 A JP5268317 A JP 5268317A JP 26831793 A JP26831793 A JP 26831793A JP H07107752 A JPH07107752 A JP H07107752A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- plate
- vibration
- capacitor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、振動などにより圧電
板を伸び縮みさせ、この圧電板に形成してある電極に発
生した交流電圧を整流してコンデンサに蓄える発電装置
に関するもので、バッテリなどの電源なしに、振動さえ
あれば発電装置として作用し、必要に応じ電力を取り出
せるようにしたものである。例えば、地震発生時にこの
振動エネルギを電源として電波を発して警報を出す地震
警報装置や、非常に小型にできることから家畜や鳥など
の位置報告装置などに応用されるものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power generator which expands and contracts a piezoelectric plate by vibration or the like, rectifies an AC voltage generated in an electrode formed on the piezoelectric plate and stores it in a capacitor. Without a power source, it acts as a power generator if there is vibration, and can take out electric power as needed. For example, the present invention is applied to an earthquake alarm device that emits an electric wave by using this vibration energy as a power source to generate an alarm when an earthquake occurs, and a position reporting device for livestock and birds because it can be made extremely small.
【０００２】[0002]
【従来の技術】外部から発射された電波を受信してこれ
を電気エネルギに変換し、このエネルギをバッテリに代
わる携帯電子装置の電源として利用できるようにしたも
のが開発されている。例えば、そのような発電装置を電
源とする信号発生装置を放牧している牛の各々に取り付
け、ゲートを通過するときに電波を当ててその信号発生
装置を働かせ、牛の認識番号などを自動識別するという
ような使い方をする。しかし、このような電波を用いた
発電装置では、電波発信源から遠くなると充分なエネル
ギが確保できないので、電波発射源の近くの限られた範
囲でしか利用きないという欠点があった。2. Description of the Related Art There has been developed a device which receives a radio wave emitted from the outside, converts it into electric energy, and can use this energy as a power source for a portable electronic device in place of a battery. For example, attach a signal generator that uses such a power generator as a power source to each grazing cow, apply radio waves when passing through the gate to activate the signal generator, and automatically identify the identification number of the cow etc. Use it like doing. However, such a power generation device using radio waves has a drawback that it cannot be used in a limited range near the radio wave emission source because sufficient energy cannot be secured when it is far from the radio wave transmission source.
【０００３】[0003]
【発明が解決しようとする課題】この発明では、強制振
動などの振動エネルギを電気エネルギに変換して、これ
をコンデンサに蓄え、ここから電力を取り出せるように
する無電源の小型の発電装置を提供することを目的とす
る。さらに、必要に応じ電波、音、光などの信号を放射
できるような電子回路をも組み込んだ発電装置を提供し
ようとするものである。DISCLOSURE OF THE INVENTION The present invention provides a small power generator with no power source, which converts vibration energy such as forced vibration into electric energy, stores the electric energy in a capacitor, and allows electric power to be taken out from the capacitor. The purpose is to do. Further, the present invention intends to provide a power generation device incorporating an electronic circuit that can radiate signals such as radio waves, sound, and light as necessary.
【０００４】[0004]
【課題を解決するための手段】本発明では、圧電板に電
極対を設け、この圧電板を片端支持、両端支持または周
辺支持の状態で振動させ、この振動により圧電板が伸び
縮みするようにしておき、このとき圧電板に形成してあ
る電極対に発生した交流電圧を整流してコンデンサに蓄
え、必要に応じてコンデンサから電力を取り出すように
圧電発電装置を構成してある。According to the present invention, an electrode pair is provided on a piezoelectric plate, and the piezoelectric plate is vibrated while being supported at one end, at both ends or at its periphery, and the vibration causes the piezoelectric plate to expand and contract. The piezoelectric power generation device is configured so that the AC voltage generated at the electrode pair formed on the piezoelectric plate at this time is rectified and stored in a capacitor, and electric power is taken out from the capacitor as needed.
【０００５】圧電板が振動しやすく、かつ伸び縮みしや
すいように、最も振動振幅が大きくなる箇所に重りを取
り付けるようにするのが好ましい。また、２次元または
３次元的に振動を分割できるよう、振動板を組み合わ
せ、それぞれが圧電発電できるようにすることもでき
る。It is preferable to attach a weight to a portion where the vibration amplitude is the largest so that the piezoelectric plate easily vibrates and easily expands and contracts. Further, in order to divide the vibration two-dimensionally or three-dimensionally, a vibration plate may be combined so that each can generate piezoelectric power.
【０００６】さらに、コンデンサの電圧が設定値以上に
なったとき、コンデンサに蓄えられた電力を利用して、
電波、音波、光などの信号を発する電子回路を組み込む
こともできる。Furthermore, when the voltage of the capacitor exceeds a set value, the electric power stored in the capacitor is used to
Electronic circuits that emit signals such as radio waves, sound waves, and light can also be incorporated.
【０００７】[0007]
【実施例】この発明の実施例を図面に基づいて説明する
と、この圧電発電装置は図１のブロック図で示すよう
に、基本構成部１と付属回路２からなり、基本構成部は
圧電発電部３と整流器４とコンデンサ５からなり、付属
回路部２は、必要に応じ、電圧設定回路部６、時間設定
回路部７および信号発生回路部８からなる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. As shown in the block diagram of FIG. 1, this piezoelectric power generating device comprises a basic constituent part 1 and an auxiliary circuit 2, the basic constituent part being a piezoelectric power generating part. 3, the rectifier 4 and the capacitor 5, and the accessory circuit unit 2 includes a voltage setting circuit unit 6, a time setting circuit unit 7 and a signal generating circuit unit 8 as required.
【０００８】圧電発電部３は圧電板が振動して発電する
ところであり、カンチレバー形の一例を図２に示す。細
長い燐青銅板１０（例えば、0.5mm厚、15mm長、2mm幅）
の両面にそれぞれ圧電セラミック板１１（例えば、0.5m
m厚、10mm長、2mm幅）をはり付け、これをn−Si基板１
２に取り付ける。n−Si基板１２には溝１３を形成して
おき、表面は電気絶縁のため熱酸化してSiO2薄膜１４を
形成しておく。The piezoelectric power generator 3 is where the piezoelectric plate vibrates to generate electric power, and an example of a cantilever type is shown in FIG. Slender phosphor bronze plate 10 (for example, 0.5 mm thick, 15 mm long, 2 mm wide)
On both sides of the piezoelectric ceramic plate 11 (for example, 0.5m
m thickness, 10 mm length, 2 mm width) and glue this to n-Si substrate 1
Attach to 2. A groove 13 is formed in the n-Si substrate 12, and the surface thereof is thermally oxidized for electrical insulation to form a SiO2 thin film 14.
【０００９】各圧電セラミック板１１の両面には金属薄
膜の一対の電極１５を形成しておいて、これから基板上
に出力端子Ａ、Ａ'を導く。強制振動を受けると、燐青
銅板１０が上下に振動し、２枚の圧電セラミック板１１
が交互に伸び縮みし、各セラミック板１１に交流電圧が
それぞれ発生する。それらの交流電圧が重畳して出力端
子Ａ、Ａ'に表れるように結線する。この系を動かした
とき、容易にバイモルフ振動ができるように、圧電板の
カンチレバーの振動端に重り１６を接着しておくとよ
い。また、振動振幅が大きすぎて振動板が破壊するのを
避けるため、溝の深さを適当にすると共に、振幅制限の
ストッパ１７を設けるとよい。A pair of metal thin film electrodes 15 are formed on both surfaces of each piezoelectric ceramic plate 11, and output terminals A and A'are led from the electrodes 15 on the substrate. When subjected to forced vibration, the phosphor bronze plate 10 vibrates up and down, and the two piezoelectric ceramic plates 11
Alternately expand and contract, and an AC voltage is generated in each ceramic plate 11. The AC voltages are connected so that they are superimposed and appear at the output terminals A and A ′. A weight 16 is preferably attached to the vibrating end of the cantilever of the piezoelectric plate so that the bimorph vibration can be easily performed when the system is moved. Further, in order to prevent the vibration plate from being broken due to the vibration amplitude being too large, it is preferable to make the groove depth appropriate and provide the stopper 17 for limiting the amplitude.
【００１０】図示していないが、圧電発電部３をモノリ
シックに形成することもできる。シリコン基板を用い
た、シリコンの重りを先端に持った加速度センサが知ら
れているが、これと同じように、シリコン基板の異方性
エッチング技術と組み合わせ、窒化シリコン薄膜のカン
チレバーの先端にシリコンの重りを設け、窒化シリコン
薄膜のカンチレバーの表面に、例えば、圧電材料である
ZnO薄膜をスパッタ形成し、ポーリングして、横方向圧
電効果が得られるようにする。こうすれば、はり合わせ
技術の不用なすべてモノリシックの圧電発電装置が形成
でき、一層の小型化および量産化ができる。Although not shown, the piezoelectric power generating section 3 can be formed monolithically. Accelerometers with a silicon weight on the tip using a silicon substrate are known, but in the same way as this, in combination with the anisotropic etching technology of the silicon substrate, the tip of the silicon nitride thin film cantilever is made of silicon. A weight is provided on the surface of the silicon nitride thin film cantilever, for example, a piezoelectric material.
A ZnO thin film is sputtered and poled to obtain the lateral piezoelectric effect. This makes it possible to form an all-monolithic piezoelectric power generation device that does not require the bonding technique, and further downsize and mass-produce it.
【００１１】ダイアフラム形の圧電発電部の例を図５に
示す。n−Si基板２２に、例えば円形溝２３を形成し、
この溝を塞ぐように、表裏に一対の電極２５の付いたポ
リフッ化ビニリデン（PVDF）の板ないし膜２１を張り、
その中央に重り２６を設け、振動によりPVDF膜２１が伸
び縮みし、一対の電極１５、１５間に交流の圧電起電力
が発生するようにする。PVDF膜２１の振動を妨げないよ
うに、n−Si基板１２の裏面から円形溝２３に達する孔
２４をあけておくとよい。FIG. 5 shows an example of a diaphragm-type piezoelectric power generating section. For example, a circular groove 23 is formed on the n-Si substrate 22,
A polyvinylidene fluoride (PVDF) plate or film 21 having a pair of electrodes 25 is attached to the front and back to cover this groove.
A weight 26 is provided in the center of the PVDF film 21 so that the PVDF film 21 expands and contracts due to vibration, and an alternating piezoelectric electromotive force is generated between the pair of electrodes 15, 15. A hole 24 reaching the circular groove 23 from the back surface of the n-Si substrate 12 may be formed so as not to interfere with the vibration of the PVDF film 21.
【００１２】両端支持形の圧電発電部の例は特に示さな
いが、断面で見ると、図５とほとんど同じ構造になる。Although an example of a piezoelectric power generating portion of both ends supported type is not shown in particular, a cross-section shows almost the same structure as that of FIG.
【００１３】図１の整流部４は、ダイオードを組み合わ
せた全波でも半波整流回路でもよいし、さらには倍電圧
整流回路でもよい。ダイオードとして、p−n接合ダイオ
ードでもショットキダイオードでもよい。圧電発電部の
起電力が小さいときは、立ち上がり電圧の低いショット
キダイオードが好都合である。The rectifying unit 4 in FIG. 1 may be a full-wave or half-wave rectifying circuit in which diodes are combined, or a voltage doubler rectifying circuit. The diode may be a pn junction diode or a Schottky diode. When the electromotive force of the piezoelectric power generation unit is small, a Schottky diode having a low rising voltage is convenient.
【００１４】図３は交流圧電起電力を倍電圧整流したと
きの整流部の回路図であり、図４はそれに対応する構成
図である。n−Si基板３３にp−n接合ダイオードD1、D2
を組み合わせた整流部とMOSキャパシタC1、C2のコンデ
ンサとをモノリシックに形成して構成する。さらに、前
述のように、圧電発電部をn−Si基板上にモノリシック
の形に構成すれば、全体として、非常にコンパクトな圧
電発電部の基本構成部ができ上がるFIG. 3 is a circuit diagram of a rectifying unit when an AC piezoelectric electromotive force is rectified by double voltage, and FIG. 4 is a configuration diagram corresponding thereto. The p-n junction diodes D 1 and D 2 are formed on the n-Si substrate 33.
The rectifying section in which the above are combined and the capacitors of the MOS capacitors C 1 and C 2 are formed monolithically. Further, as described above, if the piezoelectric power generation unit is configured in a monolithic form on the n-Si substrate, a very compact basic configuration unit of the piezoelectric power generation unit is completed as a whole.
【００１５】例えばこの発明の圧電発電装置を地震警報
機として用いる場合、ある程度の地震があると、圧電発
電部には起電力が発生し、それがある程度の時間持続す
るので、コンデンサ５の両端電圧Ｖが徐々に上昇する。
図１に示す電圧設定回路部６は、この電圧Ｖがある設定
値を越えたとき、信号発生回路部８を作動させる。For example, when the piezoelectric generator of the present invention is used as an earthquake alarm, when a certain amount of earthquake occurs, an electromotive force is generated in the piezoelectric generator and lasts for a certain period of time. V gradually rises.
The voltage setting circuit section 6 shown in FIG. 1 operates the signal generating circuit section 8 when the voltage V exceeds a certain set value.
【００１６】信号発生回路部８が作動すると電波を発し
て、地震があったことを知らせる。送り出す電波は信号
化して、震度の大きさ、どの圧電発電装置からの信号で
あるか等が分かるようにすることもできる。電波の代わ
りに音や光を発生するようにしてもよい。When the signal generating circuit section 8 is activated, it emits a radio wave to notify that an earthquake has occurred. The transmitted radio wave can be converted into a signal so that the magnitude of the seismic intensity, which piezoelectric generator device the signal is from, and the like can be known. Sound or light may be generated instead of radio waves.
【００１７】時間設定回路７は、コンデンサ５に蓄えら
れた電荷を一定周期毎に取り出すようにしたり、一気に
大電力を消費させ、遠くまで電波を飛ばすようにするな
どの目的で備えるものである。これらの回路は、ｎ形シ
リコンの基板の上にＩＣとして形成できるので、前述の
基本構成部と共にモノリシック化できる。The time setting circuit 7 is provided for the purpose of, for example, taking out the electric charge stored in the capacitor 5 at regular intervals, or consuming a large amount of electric power at a stretch so that radio waves can be transmitted far. Since these circuits can be formed as an IC on an n-type silicon substrate, they can be monolithic together with the above-mentioned basic components.
【００１８】図６に示すものは、図２のバイモルフ振動
形の圧電発電部を３つ組み合わせ、振動を互いに直交す
る３つの成分に分離するようにしたものである。図６で
は重りがないが、取り付けてもよい。このようなカンチ
レバー形ではなく、ダイアフラム形や両端支持形の圧電
発電部を３つ組み合わせてもよい。FIG. 6 shows an arrangement in which three bimorph vibration type piezoelectric power generating sections shown in FIG. 2 are combined to separate vibration into three components orthogonal to each other. Although there is no weight in FIG. 6, it may be attached. Instead of such a cantilever type, three diaphragm-type or both-end-supported piezoelectric power generating units may be combined.
【００１９】[0019]
【発明の効果】請求項１の圧電発電装置は、振動により
圧電板を伸び縮みさせて、圧電板に形成してある電極間
に電圧を発生させ、これをコンデンサに蓄えるようにし
たものであり、バッテリなどの電源なしに、振動さえあ
れば発電装置として作用し、必要に応じて電力を取り出
すことができ、例えば、地震発生時にこの振動エネルギ
を電源として電波を発して警報を出す地震警報装置等に
使うことができる。さらに、基板としてシリコン等の半
導体を用いると、半導体ＩＣ技術を利用できるので、他
の電子回路と共にモノリシックに形成でき、量産性に富
み、信頼性が高く安価なものが得られる。According to the first aspect of the present invention, the piezoelectric power generation device expands and contracts the piezoelectric plate by vibration to generate a voltage between the electrodes formed on the piezoelectric plate and store the voltage in the capacitor. , Without a power source such as a battery, it acts as a power generator as long as there is vibration, and power can be taken out when necessary. For example, when an earthquake occurs, an earthquake warning device that emits radio waves using this vibration energy as a power source to issue an alarm. It can be used for etc. Furthermore, when a semiconductor such as silicon is used as the substrate, semiconductor IC technology can be used, so that it can be formed monolithically with other electronic circuits, and it is highly mass-producible, highly reliable, and inexpensive.
【００２０】請求項２の圧電発電装置は、圧電板の振動
部に重りを取り付けたものであり、こうすることによ
り、圧電板が振動しやすく、したがって、伸び縮みも大
きくなって大きな電力を得ることができる。請求項３の
発電装置は、圧電板を組み合わせて３次元的振動を各振
動成分に分解できるようにしたものであり、振動の方向
を知るのに役立つ。請求項４の装置は、コンデンサの電
圧が設定値以上になったとき、該コンデンサの電力を利
用して、電波、音、光などの信号を放出する付属回路を
組み込んだものであり、地震警報装置として使う場合有
用である。According to another aspect of the piezoelectric power generating apparatus of the present invention, a weight is attached to the vibrating portion of the piezoelectric plate. By doing so, the piezoelectric plate is likely to vibrate, and therefore expansion and contraction are increased to obtain a large electric power. be able to. According to the third aspect of the power generator, the piezoelectric plate is combined so that the three-dimensional vibration can be decomposed into each vibration component, which is useful for knowing the direction of the vibration. The apparatus according to claim 4 incorporates an attached circuit that emits signals such as radio waves, sound, and light by using the electric power of the capacitor when the voltage of the capacitor exceeds a set value. It is useful when used as a device.
【図１】圧電発電装置のブロック図である。FIG. 1 is a block diagram of a piezoelectric power generation device.
【図２】カンチレバー形の圧電発電部の構成図である。FIG. 2 is a configuration diagram of a cantilever-type piezoelectric power generation unit.
【図３】倍電圧整流形の整流部回路図である。FIG. 3 is a circuit diagram of a voltage doubler rectifier unit.
【図４】図４に対応するモノリシック基板の断面図であ
る。4 is a cross-sectional view of a monolithic substrate corresponding to FIG.
【図５】ダイアフラム形圧電発電部の構成図である。FIG. 5 is a configuration diagram of a diaphragm-type piezoelectric power generation unit.
【図６】３次元構成の圧電発電部の斜視図である。FIG. 6 is a perspective view of a piezoelectric power generation unit having a three-dimensional structure.
１ 基本構成部 ２ 付属回路 ３ 圧電発電部 ４ 整流部 ５ コンデンサ １１ 圧電板としての圧電セラミック板 １５ 電極 １６ 重り ２１ 圧電板としてのＰＶＤＦ膜 ２５ 電極 ２６ 重り 1 Basic Components 2 Attached Circuit 3 Piezoelectric Generator 4 Rectifier 5 Capacitor 11 Piezoelectric Ceramic Plate as Piezoelectric Plate 15 Electrode 16 Weight 21 PVDF Film as Piezoelectric Plate 25 Electrode 26 Weight
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【手続補正書】[Procedure amendment]
【提出日】平成６年３月１１日[Submission date] March 11, 1994
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】図１[Name of item to be corrected] Figure 1
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図１】 [Figure 1]
Claims (4)
２５）を設け、該圧電板が振動して伸び縮みすることに
より該電極対に交流電圧を発生させ、これを整流してコ
ンデンサ（５）に蓄え、必要に応じ該コンデンサから電
力を取り出すようにした圧電発電装置。1. A pair of electrodes (15,
25) is provided so that the piezoelectric plate vibrates and expands and contracts to generate an AC voltage in the electrode pair, which is rectified and stored in the capacitor (5), and electric power is taken out from the capacitor as necessary. Piezoelectric generator.
を取り付けた請求項１に記載の圧電発電装置。2. A weight (16, 26) for the vibrating portion of the piezoelectric plate.
The piezoelectric generator according to claim 1, wherein the piezoelectric generator is attached.
各振動成分に分解できるようにした請求項１または２に
記載の圧電発電装置。3. The piezoelectric power generator according to claim 1, wherein the piezoelectric plates are combined so that three-dimensional vibration can be decomposed into respective vibration components.
たとき、該コンデンサの電力を利用して、電波、音、光
などの信号を放出する付属回路（２）を組み込んだ請求
項１、２または３に記載の圧電発電装置。4. An integrated circuit (2) incorporating a circuit (2) for emitting a signal such as radio wave, sound or light by using the electric power of the capacitor when the voltage of the capacitor exceeds a set value. The piezoelectric power generation device according to 2 or 3.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5268317A JPH07107752A (en) | 1993-09-30 | 1993-09-30 | Piezoelectric generating device |
| US08/812,070 US5801475A (en) | 1993-09-30 | 1997-03-06 | Piezo-electricity generation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5268317A JPH07107752A (en) | 1993-09-30 | 1993-09-30 | Piezoelectric generating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07107752A true JPH07107752A (en) | 1995-04-21 |
Family
ID=17456858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5268317A Pending JPH07107752A (en) | 1993-09-30 | 1993-09-30 | Piezoelectric generating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07107752A (en) |
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