JPH07106401A - Substrate processing apparatus - Google Patents

Abstract

PURPOSE:To protect a substrate against damage while preventing generation of particles when the substrates are taken out from a plurality of cassettes and shifted to one side. CONSTITUTION:When a cassette 300 is mounted on first and second turn tables 80A, 80B at a substrate transfer section 40, the first turn table 80A is turned by 90 deg. to lift a first substrate delivery tool thus taking out a substrate W from the cassette 300. The first turn table 80A is then turned by 90 deg. and returned back to the original position. Subsequently, the second turn table 80B is rotated clockwise by 90 deg. to lift a second substrate delivery tool thus taking a substrate W from another cassette 3. The eccentric boards 82 of the first and second turn tables 80A, 80B has the center of rotation C shifted from the central position of a cassette positioning frame 94. Consequently, the substrate is shifted to one side at an interval narrower by that distance than the arranging interval of the cassettes 300.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate processing apparatus for processing a substrate such as a semiconductor substrate or a glass substrate (hereinafter simply referred to as "substrate"), and more particularly to a transfer apparatus for transferring a substrate.

[0002]

2. Description of the Related Art Conventionally, in this type of substrate processing apparatus, in order to process a large number of substrates at one time, for example, two cassettes each containing 25 substrates are conveyed, and a substrate group is formed from these cassettes. There is a device that can take out each of them and simultaneously process 50 substrates with a chemical solution. In such a substrate processing apparatus, if the distance between the substrate group taken out from one cassette and the substrate group taken out from the other cassette is wide, the processing tank becomes large and the substrates located at the ends of both substrate groups are processed. It is easy to cause unevenness. As a technique for solving such a problem, there is a substrate transfer device as disclosed in JP-A-4-187279.

As shown in FIGS. 15 and 16, the substrate transfer device in the technique of the above-mentioned conventional publication has two insertion holes 5 as shown in FIG.
02A, 502B formed cassette mounting table 50
0, and the substrate mounting portions 504A, 5A which are erected parallel to each other below the insertion holes 502A, 502B and above the insertion holes 502A, 502B.
First and second push-up members 506A, 5 having 04B
06B and the first and second push-up members 506A, 506
Lifting means (not shown) for moving B up and down, and slide drive means 5 for sliding the first and second push-up members 506A, 506B so as to move toward or away from each other.
10 are provided. In the substrate transfer device having such a configuration, first, the first and second cassettes 520A and 520B are placed in the insertion holes 502A and 502B of the cassette placement table 500 from the state shown in FIG. Then, the first and second push-up members 506 are moved by the elevating means.
A and 506B are raised to move the substrate mounting portion 504
A, 504B, a set of 25 substrates, one set of substrate groups 522A, 522
The substrate is taken out from the cassettes 520A and 520B while holding B, and the first and second push-up members 506A and 506B are brought closer by the slide driving means 510. As a result, as shown in FIG. 16, the substrate group 52 held by the first and second push-up members 506A and 506B.
2A and 522B are moved close to each other, and both substrate groups 522A and 522B are simultaneously transported by a substrate transport robot (not shown) to be collectively processed by the processing tank.

[0004]

In such a conventional substrate transfer apparatus, if the substrate mounting portions 504A and 504B have a large contact portion with the substrate, particles are likely to be generated when the substrate is attached or detached and is transported. I made it as small as possible. However, in the conventional device, the first and second push-up members 50 are
6A and 506B are pushed up, and the slide driving means 510 slides them to perform a width-shifting operation. Therefore, the substrates are easily vibrated at the substrate mounting portions 504A and 504B, and particles are easily generated. There was a problem that the substrates to be contacted with each other were damaged.
In addition, since the first and second push-up members 506A and 506B perform the sliding operation at a high position, the alignment accuracy of the substrate is not good. Therefore, even when the substrate is transferred by the robot, the substrate is damaged or particles are not transferred. There is also a problem that is likely to occur.

The present invention solves the above-mentioned problems of the prior art. When a substrate is taken out from a plurality of cassettes, width-shifted and collectively conveyed, the substrate is less likely to be damaged or particles are not generated. The purpose is to provide a device.

[0006]

In order to solve the above-mentioned problems, the present invention according to claim 1 comprises a plurality of cassettes each having a lower opening and accommodating a substrate group consisting of a plurality of substrates in a standing alignment state. In a substrate processing apparatus for picking up and aligning each of the substrate groups and transporting the substrate groups to another processing means, a first substrate transfer tool having a first substrate mounting portion for holding the substrate groups in an upright alignment state, First elevating means for vertically moving the first substrate transfer tool from the lowered position to the elevated position via the substrate transfer position, and another substrate group are connected to the substrate group held by the first substrate mounting portion. A second substrate transfer tool having a second substrate mounting portion that holds the substrate in a standing aligned state with a predetermined interval, and a second elevating means for vertically moving the second substrate transfer tool between the lowered position, the substrate transfer position, and the raised position. And the first and First and second holding the second cassette
Cassette holding means each having a cassette holding portion,
The first cassette holding unit is provided so as to rotate around a first rotation axis in a predetermined transfer path, and the stop position in the transfer path is the cassette transfer position for transferring the first cassette and the substrate transfer position. And a cassette transfer position where the second cassette holder is rotationally driven around a second rotation axis along a predetermined transfer path, and a stop position on the transfer path transfers the second cassette. A second rotation drive portion provided so as to be in a position,
At least one of the first rotation shaft and the second rotation shaft is held at a position where the cassette rotation transfer means is provided at a position eccentric with respect to the center position of the cassette holding portion and the first and second substrate transfer tools are in the raised position. And a substrate transfer means for receiving and transferring both substrate groups.

According to a second aspect of the present invention, in the substrate processing apparatus according to the first aspect, in the substrate processing apparatus according to the first aspect, the first and second elevating means, the cassette rotation transfer means, and the substrate transfer means. The control means outputs a command to the first rotation drive section to rotate the first cassette holding section holding the first cassette from the cassette transfer position to the substrate transfer position. , Outputting a command to the first elevating means to raise the first substrate transfer tool from the lowered position to hold and take out the substrate group from the first cassette at the first substrate mounting portion, and perform the first rotation drive. And outputs a command to retract the unit from the substrate transfer position, and rotationally drives the second cassette holder holding the second cassette from the cassette transfer position to the substrate transfer position with respect to the second rotation drive unit. And outputs a command for raising the second substrate transfer tool to the second elevating means and holding and taking out the substrate group from the second cassette at the second substrate placing portion. It is configured to output a command to the substrate transfer means to receive and transfer the substrate group held at the raised position by the first and second substrate transfer tools.

[0008]

The substrate processing apparatus of the present invention controls the first and second elevating means, the cassette rotating and conveying means, and the substrate conveying means to take out and align the substrate groups from the plurality of cassettes and deliver them to the substrate conveying means. The substrate group is transported to another processing unit by this substrate transport unit.

That is, the first and second cassette holders hold the first cassette and the second cassette, respectively. Next, with respect to the first rotation drive section of the cassette rotary transport means,
It is driven to rotate from the cassette transfer position to the substrate transfer position. Then, the first substrate transfer tool is raised to the raised position with respect to the first elevating means, and the substrate group in the first cassette is held and taken out by the first substrate mounting portion through the lower opening of the cassette. Then, the first rotation drive unit is retracted from the substrate transfer position. Then, the second cassette holder holding the second cassette is rotationally driven from the cassette transfer position to the substrate transfer position with respect to the second rotation drive unit, and the second substrate transfer tool is moved to the first elevating means. The substrate group is raised and the substrate group is held and taken out from the second cassette by the second substrate mounting portion.

As a result, both the substrate groups are held in the raised position by the first and second substrate mounting portions of the first and second substrate transfer tools, respectively. Due to the placement of the mounting portions, the substrates of both substrate groups are supported in a continuous and substantially evenly aligned state. Here, the first and second cassette holders rotate about the first and second rotation shafts, but at least one of the rotation centers is eccentric with respect to the central position of the cassette holder. The distance between the two substrate groups held by the first and second substrate placement portions is equal to the distance between the rotation shaft and the position eccentric to the center position of the cassette holder, and the first cassette and the second cassette are placed. It will be narrower than the specified interval. Then, the substrate transport means transfers the aligned substrate group and transports it to another processing means.

[0011]

Preferred embodiments of the present invention will be described below in order to further clarify the structure and operation of the present invention described above.

FIG. 1 is a perspective view showing a substrate processing apparatus 10 according to an embodiment of the present invention. FIG. 2 shows a plan view of the substrate processing apparatus 10. As shown in FIGS. 1 and 2, the substrate processing apparatus 10 includes a cassette loading / unloading stage 20, a cassette transfer robot 30, a substrate transfer unit 40, a substrate transfer robot 200, a substrate processing unit 220, and a cassette cleaning unit. Bowl 24
It has 0 and. The cassette 300 used in this embodiment is provided with a substrate alignment storage groove therein, and 25 substrates W can be stored in the substrate alignment storage groove in a standing alignment state.

First, the general operation of the substrate processing apparatus 10 will be described. In the substrate processing apparatus 10, the cassette 300 storing the unprocessed substrate Wa from the outside of the substrate processing apparatus 10.
When two cases are carried into the carry-in position 22 of the cassette carry-in / carry-out stage 20, these cassettes 300 are carried to the substrate transfer section 40 by the cassette carrying robot 30.
Then, the unprocessed substrate Wa in the cassette 300 is transferred to the cassette 300 by the substrate transfer unit 40 and the substrate transfer robot 200.
The substrate is transferred to the substrate processing unit 220 by the substrate transfer robot 200. In the substrate processing unit 220, various chemical solutions are processed on the unprocessed substrate Wa. The processed substrate Wb is transferred to the substrate drying unit 23 by the substrate transfer robot 200.
0, and is subjected to a drying process, and then the substrate transfer section 4
Transported to 0. On the other hand, the empty cassette 300 from which the unprocessed substrate Wa has been previously taken out by the substrate transfer unit 40 is transferred to the cassette cleaning device 240 by the cassette transfer robot 30 and cleaned. And this washed cassette 300
Are transferred to the substrate transfer section 40 by the cassette transfer robot 30. Next, the substrate transfer unit 40 transfers the processed substrate Wb to the cleaned cassette 300, and the cassette transfer robot 30 transfers the cassette 300 to the cassette loading / unloading stage 2
0 to the carry-out position 24, and from there, the substrate processing apparatus 10
Take it out.

In such a substrate processing apparatus 10, the substrate transfer section 40 is provided as described above. The substrate transfer unit 40 transfers the unprocessed substrate Wa from the cassette 300 transferred by the cassette transfer robot 30.
0, the processed substrate Wb from the substrate transfer robot 200 is stored in the cassette 300, and the cassette 300 is further transferred to the cassette transfer robot 30. At that time, the cassette 300 is placed on the carry-in position 22 and the carry-out position 24. In order to match the orientation of the substrate to be placed with the orientation of the substrate processed in the processing tank of the substrate processing unit 220, the cassette 300
It has a mechanism to rotate the direction of 90 degrees. The configuration of the substrate transfer section 40 will be described below with reference to FIGS. 3 to 6.

As shown in FIG. 3, the substrate transfer section 40 is provided.
Is a first turntable 80A which is provided on substantially the same plane as the upper plate 42 of the substrate processing apparatus 10 and is rotatably supported.
Also, a first rotation drive device 100 for rotationally driving the second turntable 80B (FIG. 4) and the first turntable 80A.
A, a second rotation driving device 100B that rotationally drives the second turntable 80B, and a first substrate transfer tool 110A.
And a first substrate transfer tool 110B (FIG. 4) and a first elevator drive device 1 for vertically driving the first substrate transfer tool 110A.
30A and the second substrate transfer tool 110B, which is installed below the second substrate transfer tool 110B and drives the second substrate transfer tool 110B up and down.
A second lifting drive mechanism (not shown) having substantially the same configuration as the lifting drive device 130A is provided.

As shown in FIG. 5, a table insertion hole 52A and a table insertion hole 52B are formed in the upper plate 42. Further, a lower plate 46 is provided in parallel with the upper plate 42, and a ring gear 54 including an outer gear 54a and an inner gear 54b is formed in the lower plate 46 at concentric positions in the table insertion holes 52A and 52B, respectively. Has been done.

Next, the first and second turntables 80A,
80B will be described. 4 and 5 show a state in which the first turntable 80A is rotated counterclockwise by 90 ° and the second turntable 80B is not rotated. Since the first and second turntables 80A and 80B have almost the same configuration, the first turntable 80A will be described.

The first turntable 80A includes an eccentric plate 82 (see FIG. 4) having a substantially rectangular shape and one side having an arc shape, a lower disk 86 rotatably supported by the ring gear 54, an eccentric plate 82 and a lower circle. It has an integral structure including a connecting member 84 for connecting and fixing the plate 86, and is supported so as to rotate at the rotation center C of the eccentric plate 82. The eccentric plate 82 includes
A transfer tool insertion hole 92 is formed, and a cassette positioning frame 94 and a cassette clamp (not shown) are provided around the transfer tool insertion hole 92.
Is installed. The cassette positioning frame 94 is provided at a position on the arc side with respect to the rotation center C of the eccentric plate 82. Therefore, when the cassette 300 is placed on the cassette positioning frame 94 and the first turntable 80A is rotated, the second turntable 8 is rotated more than when the cassette 300 is placed and rotated with the center of the cassette 300 aligned with the rotation center C.
It will approach 0B.

First and second turntables 80A, 80
First and second rotary drive devices 100A for rotationally driving B,
As shown in FIG. 6, 100B includes first and second rotation cylinders 102A and 102B, a locking member 107 fixed to the lower disk 86, and a stopper 106 having stop portions 108 on both sides. 1st and 2nd rotation cylinder 102
One end of each of A and 102B is pivotally supported by the lower plate 46, and the tip of the piston rod 104 thereof is fixed to each of the lower circular plates 86 of the first and second turntables 80A and 80B. The first and second rotary drive devices 100A, 10
With the configuration of 0B, the first and second rotation cylinders 102
When A and 102B are driven, the piston rod 104 moves back and forth, so that the first and second turntables 80A and 80B are moved.
Are rotated within a range of 90 ° due to the restriction of the stopper 106.

The first and second substrate transfer tools 110A and 110B shown in FIG. 4 are provided corresponding to the first and second turntables 80A and 80B, respectively, and have substantially the same structure. 1 board transfer tool 110A
Will be described. As shown in FIG. 3, the first substrate transfer tool 110A includes a first elevating and lowering part 112A and a first elevating and lowering part 112A.
A supporting pipe 114 for supporting the elevating and lowering part 112A,
And a first lifting drive device 130A. First above
The first substrate mounting portion 11 is provided on the upper and lower mounting portions 112A.
5A is formed, and the first substrate mounting portion 115A is formed.
The substrate alignment holding groove 116 is configured to hold the substrate W.

The first lifting drive device 130A is
The motor 132 and the power transmission mechanism 13 for the motor 132
4, a vertical feed screw shaft 136, a guide member 138 installed upright along the vertical feed screw shaft 136, a support pipe 114 fixed and guided by the guide member 138, and a vertical feed screw. And a connecting member 142 screwed onto the shaft 136. With this configuration, when the motor 132 is rotationally driven, the vertical feed screw shaft 136 rotates via the power transmission mechanism 134. Vertical feed screw shaft 136
Rotation of the guide member 138 via the connecting member 142.
The supporting pipe 114 and the first elevating and lowering portion 112A are integrally moved up and down while being guided by.

Next, the structure of the substrate transfer robot 200 will be described. As shown in FIG. 7, the substrate transfer robot 200 includes a traveling unit main body 202, a pair of left and right arm rotating shafts 204 protruding substantially horizontally from the traveling unit main body 202, and an axis rotation for rotating the arm rotating shaft 204. Means 206
And a substrate chuck 210 that is fixed to each of the arm rotation shafts 204 and holds the substrates W together in a standing aligned state. The pair of substrate chucks 210 are provided with a pair of opposed surfaces 212 and substrate alignment holding grooves 216 and 218 on the rear surfaces 214 thereof, which have the same pitch as the substrate alignment storage grooves of the cassette 300.

With the structure of the substrate transfer robot 200, when the shaft rotating means 206 is driven, the arm rotating shaft 20 is rotated.
The substrate chuck 210 is rotated via 4. The unprocessed substrate Wa is held by the substrate alignment holding groove 216 by the rotation of the substrate chuck 210, or the substrate alignment holding groove 218.
Thus, the processed substrate Wb (see FIG. 1) is held. The substrate transfer robot 200 holding the unprocessed or processed substrate W carries in or carries the substrate processing unit 220 and the substrate transfer unit 40 by the carrying operation of the traveling unit body 202. The substrate transfer robot 200 uses the unprocessed substrate W.
When carrying a, the pair of facing surfaces 212 of the substrate chuck 210 are placed in a posture in which they face each other, while when carrying the processed substrate Wb, the back faces 214 are placed in a posture of facing each other. As a result, the unprocessed substrate Wa and the processed substrate Wb are held by different substrate alignment holding grooves 216 and 218, so that the processed substrate Wb comes into contact with the substrate alignment holding groove 216 holding the unprocessed substrate Wa. Contamination is prevented.

FIG. 8 is a block diagram showing a control system of the substrate processing apparatus 10 described above. In FIG. 8, the substrate processing apparatus 10 is mainly configured by an electronic control unit 410 including a CPU, and by the control of the electronic control unit 410, the drive means 420 of the cassette transfer robot 30 and the first rotation drive unit 10.
0A and the drive means 430 of the second rotary drive device 100B,
The driving means 440 of the first lifting drive device 130A and the second lifting drive device, and the driving means 4 of the substrate transfer robot 200.
Is configured to drive 50.

Next, the cassette 300 containing the unprocessed substrate Wa is placed on the loading position 22 of the cassette loading / unloading stage 20, is transferred by the substrate transfer section 40, and is further processed by the substrate transfer robot 200. The processed substrate Wb that has been processed by the substrate processing unit 220 is transferred from the substrate transfer robot 200 to the substrate transfer unit 40.
The operation up to carrying to the carry-out position 24 of the cassette carry-in / out stage 20 via the will be described.

First, the cassette carrying robot 3 shown in FIG.
0 holds the two cassettes 300 placed at the carry-in position 22, further rotates 180 °, and conveys them to the first and second turntables 80A and 80B. In the first and second turntables 80A and 80B, the cassette 300 is positioned by the cassette positioning frame 94. As shown in FIG. 9, both cassettes 300 are placed so as to face the same direction.

Next, by driving the first rotation cylinder 102A, the first turntable 80A rotates 90 ° counterclockwise in the drawing (FIG. 10). At this time, the first
The eccentric plate 82 of the turntable 80A has a center of rotation C
However, since the cassette 300 is located at the tip on the arc side of the rotation center C, the cassette 300 is closer to the second turntable 80B than when the cassette 300 is placed with its center aligned with the rotation center C. It will be.

Next, the motor 132 of the first elevating and lowering drive device 130A is driven to drive the first substrate transfer tool 11.
0A is the delivery tool insertion hole 9 of the first turntable 80A
2 and through the lower opening 304 of the cassette 300 to the elevated position (see FIG. 11). As a result, the first substrate mounting portion 115A of the first elevating and lowering unit 112A has a group of 25 unprocessed substrates W by the substrate alignment holding groove 116.
Hold a in the raised position.

Then, the first rotation cylinder 102A is driven to rotate the first turntable 80A by 90 ° in the clockwise direction in the drawing to return it to its original position (FIG. 12).
At this time, the first substrate transfer tool 110A is still in the raised position and holds the unprocessed substrate Wa. Next, by driving the second rotation cylinder 102B, the second turntable 80B rotates 90 ° clockwise in the drawing (FIG. 13). At this time, the first turntable 80A
Has been returned to its original position, the second turntable 80B does not collide with the side portion of the first turntable 80A.

Next, the second substrate transfer tool 110B is driven by driving the motor of the second elevator drive device (not shown).
Goes up to the raised position through the delivery tool insertion hole 92 of the second turntable 80B and the lower opening 304 of the cassette 300 (see FIG. 14). As a result, the second substrate placing portion 115B of the second elevating and placing unit 112B holds the other group of unprocessed substrates Wa at the raised position by the substrate alignment holding groove 116.

By the series of operations described above, the unprocessed substrate Wa held by the first substrate transfer tool 110A and the second substrate Wa
With the group of unprocessed substrates Wa held by the substrate transfer tool 110B, the space is narrowed to narrow the space between them and the unprocessed substrates Wa are aligned and arranged at predetermined continuous intervals. Next, the unprocessed substrates Wa that have been width-aligned and aligned are transferred to the substrate processing unit 220 by the substrate transfer robot 200 shown in FIG. 7.

On the other hand, the processed substrate Wb processed by the substrate processing unit 220 is carried out from the substrate carrying robot 200 via the substrate transfer unit 40 by the reverse operation of the above-described carrying operation to the carrying-out stage of the cassette carrying-in stage 20. Transport to position 24. This operation is performed in the reverse order of FIGS. 9 to 14 described above. That is, the substrate transfer robot 200
Is a first and second substrate transfer tool 1 for the processed substrate Wb.
It is delivered to 10A and 110B (see FIGS. 14 and 13).
Next, the processed substrate Wb is stored in the one cassette 300 by the lowering operation of the second substrate transfer tool 110B. Then, the second turntable 80B is rotated counterclockwise by 90 ° and returned to its original position (see FIGS. 12 and 11). Next, the first turntable is rotated 90 ° counterclockwise (see FIG. 10). By the lowering operation of the first substrate transfer tool 110A, the processed substrate Wb is stored in the other cassette 300, and further, the first turntable 80A is rotated clockwise by 90 ° (see FIG. 9). And both cassettes 3
00 is carried by the cassette carrying robot 30. As a result, a series of carrying operations is completed.

According to the substrate transfer section 40 of the above-described embodiment, the cassette 300 is placed at the eccentric positions of the first and second turntables 80A and 80B, and the cassettes 300 are rotated with a time lag to face each other. Since the substrate W stored in 300 is moved to the side, unlike the conventional technique, the substrate W is not pushed up by the pushing member, so that the substrate W does not vibrate during sliding and the substrate W is not damaged. And no particles are generated. Therefore, the substrate W
Can improve the yield.

Further, the first and second substrate transfer tools 110
Since A and 110B are not configured to move in the horizontal direction only by the raising and lowering operation, the first and second substrate transfer tools 110A and 110B are fixedly installed on the transfer line corresponding to the processing tank of the substrate processing unit 220. By doing so, it is not necessary to adjust the position of the substrate transfer robot 200 and the like, and thus maintenance is simplified.

The present invention is not limited to the above-mentioned embodiments, but can be carried out in various modes without departing from the scope of the invention, and the following modifications can be made.

(1) In the above embodiment, the eccentric plate 82 is used for both the first turntable 80A and the second turntable 80B, but the invention is not limited to this. Even if it does, the same effect can be produced. In this case, it goes without saying that both turntables are constructed and operated so as not to collide with each other.

(2) The substrate transfer section 40 of the above embodiment is configured to slide or rotate by advancing and retracting one stroke by the air cylinders of the first and second rotary drive units 100A and 100B. The present invention is not limited to this, and may be a motor as long as it can slide or rotate.

(3) Further, the number of the cassettes 300 is not limited to two as in the above embodiment, and the number is not particularly limited as long as the arrangement is such that the substrates can be held at equal intervals by the substrate transfer tool. .

[0039]

As described above, according to the substrate processing apparatus of the present invention, the first and second cassette holding portions holding the first and second cassettes are rotated about the first and second rotating shafts. In addition, since at least one of the rotation centers is eccentric with respect to the center position of the cassette holding portion, the distance between the substrate groups is narrowed by the distance between the rotation center and the center position. As described above, since the substrate is not slid in the state of being pushed up by the pushing-up member, there is no vibration of the substrate at the time of sliding, and there is no damage to the substrate or generation of particles. Therefore, the yield of substrates can be increased.

Further, since the first and second substrate transfer tools are not configured to move in the horizontal direction only by moving up and down, for example, the first and second substrate transfer tools are used as processing tanks of other processing means. If it is fixedly installed on the transfer line corresponding to, the alignment adjustment with the substrate transfer means or the like becomes unnecessary, and thus the maintenance becomes simple.

[Brief description of drawings]

FIG. 1 is a perspective view showing the outer appearance of a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view showing a substrate processing apparatus according to the embodiment.

FIG. 3 is a sectional view showing a substrate transfer section according to the embodiment.

FIG. 4 is a plan view showing a main part of a substrate transfer section according to the embodiment.

5 is a cross-sectional view taken along line VV of FIG.

FIG. 6 is an explanatory diagram illustrating first and second rotation driving devices.

FIG. 7 is an explanatory diagram illustrating a substrate transfer robot.

FIG. 8 is a block diagram showing a control system of the substrate processing apparatus.

FIG. 9 is an explanatory diagram illustrating a transfer operation on the first and second turntables among operations of the substrate transfer unit.

FIG. 10 is an explanatory diagram illustrating a transfer operation on the first and second turntables subsequent to FIG. 9;

FIG. 11 is an explanatory view for explaining a rising operation of the first substrate transfer tool among the operations of the substrate transfer section.

FIG. 12 is an explanatory diagram illustrating a transfer operation on the first and second turntables following FIG. 11.

FIG. 13 is an explanatory diagram illustrating a transfer operation on the first and second turntables following FIG. 12.

FIG. 14 is an explanatory view for explaining a rising operation of the second substrate transfer tool among the operations of the substrate transfer section.

FIG. 15 is an explanatory diagram illustrating an operation of a conventional substrate transfer unit.

16 is an explanatory diagram illustrating an operation of the substrate transfer unit following FIG.

[Explanation of symbols]

 10 ... Substrate processing apparatus 20 ... Cassette loading / unloading stage 22 ... Loading position 24 ... Unloading position 30 ... Cassette transfer robot 40 ... Substrate transfer section 42 ... Upper plate 46 ... Lower plates 52A, 52B ... Table insertion hole 54 ... Ring gear 54a ... Outer gear 54b ... Inner gear 80A ... First turntable 80B ... Second turntable 82 ... Eccentric plate 84 ... Coupling member 86 ... Lower disk 92 ... Transfer tool insertion hole 94 ... Cassette positioning frame 100A ... First rotation drive device 100B Second rotation drive device 102A First rotation cylinder 102B Second rotation cylinder 104 Piston rod 106 Stopper 107 Locking member 108 Stop portion 110A First substrate transfer tool 110B Second substrate transfer tool 112A ... 1st raising / lowering mounting part 112B ... 2nd raising / lowering mounting part 114 ... Supporting pad Ip 115A ... 1st board | substrate mounting part 115B ... 2nd board | substrate mounting part 116 ... Board | substrate alignment holding groove 130A ... 1st raising / lowering drive device 132 ... Motor 134 ... Power transmission mechanism 136 ... Vertical feed screw shaft 138 ... Guide member 142 ... Connecting member 200 ... Substrate transfer robot 202 ... Traveling unit main body 204 ... Arm rotating shaft 206 ... Shaft rotating means 210 ... Substrate chuck 212 ... Opposing surface 214 ... Back surface 216 ... Substrate alignment holding groove 218 ... Substrate alignment holding groove 220 ... Substrate processing unit 230 ... Substrate drying section 240 ... Cassette cleaning device 300 ... Cassette 304 ... Lower opening section 410 ... Electronic control device 420, 430, 440, 450 ... Driving means

Claims (2)

[Claims] 1. A substrate group is taken out from a plurality of cassettes each having a lower opening and accommodating a substrate group consisting of a plurality of substrates in an upright alignment state, aligned and conveyed to another processing means. In a substrate processing apparatus, a first substrate transfer tool having a first substrate mounting portion for holding the substrate group in an upright alignment state, and a first substrate transfer tool are moved up and down between a lowered position and a raised position through a substrate transfer position. A second substrate having a first elevating means to be driven and a second substrate placing portion for holding the other substrate group in a standing aligned state with a continuous interval with the substrate group held by the first substrate placing portion. A transfer device; second elevating means for moving the second substrate transfer device up and down between the lowered position, the substrate transfer position, and the raised position; and first and second cassette holders for holding the first and second cassettes. Have each The cassette holding means and the first cassette holding portion are rotationally driven around a first rotation axis in a predetermined transfer path, and the stop positions in the transfer path are the cassette transfer position for transferring the first cassette and the substrate transfer position. A cassette transport in which the first rotation drive unit and the second cassette holding unit, which are provided as described above, are rotationally driven around a second rotation axis along a predetermined transport path and the stop position on the transport path transfers the second cassette. A position and a second rotation drive unit provided so as to be the substrate transfer position,
At least one of the first rotary shaft and the second rotary shaft is held at a position where the cassette rotary transport means is provided at a position eccentric with respect to the central position of the cassette holding portion and the first and second substrate transfer tools are in the raised position. A substrate processing apparatus comprising: a substrate transfer unit that receives and transfers both substrate groups. 2. The substrate processing apparatus according to claim 1, further comprising control means for controlling the first and second elevating means, the cassette rotation transfer means, and the substrate transfer means, wherein the control means comprises the first rotation drive. A command to rotate the first cassette holding unit holding the first cassette from the cassette carrying position to the substrate transfer position, and to the first elevating means, move the first substrate transfer tool from the lowered position. A command is output to raise and raise the substrate group while holding the substrate group from the first cassette at the first substrate mounting portion, and to output a command to retract the first rotation drive unit from the substrate transfer position, and to perform the second rotation. A command is output to the drive unit to rotate the second cassette holding unit holding the second cassette from the cassette transfer position to the substrate transfer position, and the second substrate is transferred to the second lifting unit. The tool is raised to output a command to hold and take out the substrate group from the second cassette at the second substrate mounting portion, and the first and second substrate transfer tools are used to raise the substrate to the substrate transfer means. A substrate processing apparatus having a configuration for receiving a substrate group held by and outputting a command to convey the substrate group.