JPH07105040B2 - Head switching mechanism for magnetic disk surface inspection - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk surface projection inspection apparatus for removing projections existing on the surface of a magnetic disk and inspecting the results.

[Prior Art] Magnetic disks used as storage devices for computer systems are becoming more and more dense due to the miniaturization of magnetic media and improvement in performance. Therefore, the surface of the magnetic disk is required to be extremely smooth. In the manufacture of magnetic disks, after the magnetic film is applied, it is ground (grinded) to make it smooth, but even if it is polished, there is a protrusion that hinders the smoothness (glide) to some extent, so that it is further burnished. The protrusion is removed by a process called. These smoothed discs are inspected for the presence or absence of protrusions, but since a large amount of fine particles are generated in the polishing process, it is possible to prevent them from entering the inspection device and its surroundings. Avoiding the above, the burnish and the inspection of the result are the next step, and are performed by one device called a smoothing inspection device (glide tester). Therefore, the glide tester is provided with both the burnishing function and the inspection function.

FIG. 2 is a plan view showing an outline of the structure of a head switching and moving mechanism of a conventional glide tester, and a burnish head 2 for burnishing a magnetic disk 1.
The projection inspection head 5 for performing the projection inspection is disposed so as to be supported by the support tools 2a and 5a forming an angle θ with each other. The supports 2a and 5a are fixed to the carriages 3 and 6, respectively, and are moved in the direction of arrow R (radial direction of the magnetic disk) by the drive motors 4 and 7. As these operations, first, with the carriage 6 retracted and the projection inspection head separated from the magnetic disk 1, the carriage 3 advances and the burnish head contacts the surface of the magnetic disk 1 to remove the projection. , The removal of the entire surface is completed.
Next, the burnishing head 2 moves backward, and instead, the protrusion inspection head 5 moves forward to perform inspection. The range of inspection is from the outside to the center of the magnetic disk 1.

By the way, in such a glide tester, a magnetic disk inspection line is configured with other inspection devices and various inspections are performed by a flow method, but since many inspection stations are continuous, the width dimension of each device is It is required to be compact and as small as possible. On the other hand, in FIG. 1, the angle θ formed by the two sets of carriages 3 and 6 is set to be nearly a right angle due to the arrangement of the mechanism, so that the space occupancy rate is large. However, in this case, it is difficult to reduce the angle θ to reduce the lateral dimension of the device because of mechanical difficulty. On the other hand, there is a need for a method that can be made compact by a simple method.

[Object of the Invention] An object of the present invention is to provide a compact head switching mechanism in a glide tester.

[Means for Solving the Problems] The present invention makes contact with the surface of a rotating magnetic disk,
A burnish head that removes protrusions existing on the surface,
A head switching mechanism of a magnetic disk surface protrusion inspection device comprising a protrusion inspection head for inspecting protrusions remaining on the surface from which protrusions have been removed by a burnish head,
X with burnish head and protrusion inspection head attached
It has an X, Y carriage mechanism composed of an axis carriage and a Y axis carriage carrying an X axis carriage.

In the X, Y-axis carriage mechanism, the burnish head and the projection inspection head are switched by the movement of the X-axis carriage, and they are set at operating positions on a constant radius on the surface of the magnetic disk. Further, each set head moves on the above-mentioned fixed radius by the movement of the Y-axis carriage to perform each operation.

[Operation] In the magnetic disk surface inspection head switching mechanism according to the present invention, as is clear from the above description of the mechanism, the burnish head and the protrusion inspection head are the same X-axis.
Since it is attached to the shaft carriage, the space occupancy rate is considerably reduced and the device is made compact as compared with the case where two sets of carriages forming a substantially right angle are provided.

[Embodiment] FIG. 1 is a schematic plan view showing the structure of an embodiment of a magnetic disk surface inspection head switching mechanism according to the present invention. In the figure, a constant radius line 1a of the magnetic disk 1 is indicated by a burnish head 2 and a projection inspection head 5.
The burnish head 2 and the projection inspection head 5 are the X-axis carriage 8 by the rotation of the drive motor 9.
By the movement of, the movement is switched to the position of the radius line 1a and the respective operations are performed. Each movement is X
The Y-axis carriage 10 carrying the axis carriage 8 is moved by the rotation of the drive motor 11, and the burnish or protrusion inspection is performed from the outside of the magnetic disk 1 to the center along the radius line 1a. The stopper 12 is the rightmost limit position of the X-axis carriage 8 when the head 2 is in the operating position. A stopper is provided in addition to this, but it is omitted here.

Here, the sizes of the conventional mechanism and the mechanism according to the present invention are compared.

In the conventional mechanism shown in FIG. 2, the length from the center of the magnetic disk 1 to the (rear end) of the drive motor 4 is A.
The head 5 side is also the same. Next, in FIG. 1, assuming that the head support 2a, the Y-axis carriage 10 and the like have the same length as the second head support 2a and the carriage 3, the vertical size dimensions of the two are substantially the same. . However, in the lateral direction, in the case of FIG. 2, since the carriages 3 and 6 are at right angles, the distance A ′ between the end portions of the drive motors 4 and 7 is
It is almost 1.4A. On the other hand, in the case of FIG. 1, since the support tool 2a is attached at a right angle to the moving direction of the X-axis carriage 8, the length of the X-axis carriage 8 is set to the carriage 3
And the moving range B is almost equal to A.
That is, compared with the case of FIG. 2, FIG. 1 has a smaller lateral dimension and can be made compact.

EFFECTS OF THE INVENTION As is clear from the above description, in the magnetic disk surface inspection head switching mechanism according to the present invention,
With respect to the carriage of the burnish head and the projection inspection head, which were conventionally provided in the directions of two axes orthogonal to the center of the magnetic disk, the carriage is set to the X and Y axis directions orthogonal to each other at a position away from the center, and the head and support are provided. By mounting the tool in the Y-axis direction, the dimension in the X-axis (horizontal) direction can be reduced, which contributes to downsizing of the glide tester in the magnetic disk inspection line.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view showing the structure of an embodiment of a magnetic disk surface inspection head switching mechanism according to the present invention, and FIG. 2 is a plan view of the structure of a conventional head switching mechanism. is there. 1 ... Magnetic disk, 1a ... Radial line, 2 ... Burnish head, 2a ... Supporting tool, 3,6 ... Carriage, 5 ... Projection inspection head, 5a ... Supporting tool, 4, 7, 9 , 11 …… Drive motor, 8 …… X-axis carriage, 10 …… Y-axis carriage, 12 …… Stopper.

Claims (2)

[Claims] 1. A surface of a rotating magnetic disk is contacted,
In the magnetic disk surface protrusion inspection apparatus, the burnish head for removing protrusions existing on the surface, and the protrusion inspection head for inspecting protrusions remaining on the surface after the protrusions are removed by the burnish head, X with the nish head and the projection inspection head attached
A switching mechanism for a magnetic disk surface inspection head, comprising an X, Y carriage mechanism comprising an axis carriage and a Y axis carriage carrying the X axis carriage. 2. The X-axis carriage for switching between the burnish head and the projection inspection head by moving in the X-axis direction, and setting each of them to an operating position on a constant radius of the surface of the magnetic disk, The X, Y-axis carriage mechanism comprising the Y-axis carriage for moving the set burnishing head and the projection inspection head respectively on the fixed radius. Head switching mechanism for magnetic disk surface inspection.