JPS63175278A - Switching mechanism for checking head of magnetic disk surface - Google Patents

Abstract

PURPOSE:To reduce the dimensions of a switching mechanism in the X axis direction by using an X axis carriage to which a burnishing head and a projection checking head are attached and a Y axis carriage to which the X axis carriage is mounted. CONSTITUTION:A fixed radius line 1a of a magnetic disk 1 is used as an action line of a burnishing head 2 and a projection checking head 5 respectively. Both heads 2 and 5 are switched with each other and performed their functions, when they are moved to the position of the line 1a with the shift of an X axis carriage 8 carried out by the revolution or a drive motor 9. A Y axis carriage 10 holding the carriage 8 is moved by the revolution of a drive motor 11 and carries out a burnishing or projection checking action up to the center from the outside of a magnetic disk 1 along the line 1a. Thus the space occupation factor is reduced since both heads 2 and 5 are attached to the carriage 8. Then a compact switching mechanism is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention removes protrusions existing on the surface of a magnetic disk and inspects the results thereof. It is used in a magnetic disk surface protrusion inspection device.

[Prior Art] Magnetic disks, which are used as storage devices in computer systems, are becoming increasingly dense due to miniaturization and improved performance of magnetic media. For this reason, the surface of the magnetic disk is required to be extremely smooth. In the manufacturing of magnetic disks, after the magnetic film is coated, it is polished (grinded) to make it smooth, but even after polishing, there are protrusions that impede the smoothness (glide) to some extent, so the polishing process is further performed. These smoothed disks, which have had protrusions removed in a process called 1-shu, are inspected for the presence of protrusions, but the polishing process produces a large amount of minute particles. In order to avoid contamination of the inspection equipment and its surroundings, inspection of the Verni Soshu and its results is carried out in the next step, using a single device called a smoothness inspection equipment (glide tester). There is. Therefore, the glide tester is provided with both a Verni-Sosh function and an inspection function.

Figure 2 shows the conventional glide tester. 2 is a plan view showing an overview of the structure of the switching and moving mechanism for the magnetic disk 1. The burner/shosh head 2 that burns and burns the magnetic disk 1 and the protrusion inspection head 5 that inspects the protrusion are at an angle θ to each other. The support members 2a and 5a are arranged so as to be supported by the support members 2a and 5a. The supports 2 and 5a are fixed to carriages 3 and 6, respectively, and are moved in the direction of arrow R (radial direction of the magnetic disk) by drive motors 4 and 7.

These operations are as follows: First, the carriage 6 retreats to inspect the protrusions. With the I-drive separated from the magnetic disk 1, the carriage 3 moves forward and the burnish head comes into contact with the surface of the magnetic disk 1 to inspect the protrusions. The burnishing head 2 retreats, and the removal of the entire surface is completed.
Instead, the protrusion inspection head 5 moves forward to perform the inspection, and the inspection range is from the outside to the center of the magnetic disk 1.

Now, such a glide tester constitutes a magnetic disk inspection line together with other inspection devices, and various inspections are performed using a flow method, but since many inspection stations are continuous, the width dimension of each device is There is a demand for compactness and miniaturization as much as possible. On the other hand, in Fig. 1, the angle θ formed by the two sets of carry I-jis 3 and 6 is set close to a right angle in terms of the arrangement of one mechanism, so the space occupation rate is large. In this case, it is difficult to reduce the lateral dimension of the device by reducing the angle θ because it is mechanically difficult. In response to this, there is a need for a method that can be made compact in a simple manner.

[Object of the Invention] An object of the present invention is to provide a compact head switching mechanism in a glide tester.

[Means for Solving the Problems] The present invention provides a method for contacting the surface of a rotating magnetic disk,
A head switching mechanism for a magnetic disk surface protrusion inspection device comprising a burnishing head for removing protrusions existing on the surface and a protrusion inspection head for inspecting protrusions remaining on the surface from which the protrusions have been removed by the burnish head. It has an X, Y carriage mechanism consisting of an X-axis carriage to which a burnie head and a protrusion inspection head are attached, and a Y-axis carriage on which the X-axis carriage is mounted.

It is.

In the above X-axis and Y-axis carriage mechanism, the burnish head and protrusion inspection head are switched by moving the X-axis carry head, and each is set at an operating position on a fixed radius on the surface of the magnetic disk. be done. In addition, each set head is moved on the above-mentioned fixed radius by the movement of the Y-axis carry direction, and performs its respective operation. As is clear from the above explanation of the mechanism, the burnishing head and protrusion inspection head are attached to the same X-axis carriage in the switching mechanism for switching to and from the front. Compared to the case where two sets of carry wheels are provided, the space occupation rate is considerably reduced and the structure is made more compact.

[Embodiment J] Figure 1 is a schematic plan view showing the structure of an embodiment of a switching mechanism for a magnetic disk surface inspection head according to the present invention. To Niche N/Do 2 and protrusion inspection-
The burnish head 2 and protrusion inspection head 5 are switched by moving to the position of this radius line 1a by the movement of the X-axis carriage 8 due to the rotation of the drive motor 9, and perform their respective operations. I do. Each movement is performed by a Y-axis carriage 10 on which an X-axis carriage 8 is mounted.
is moved by the rotation of the drive motor 11, and the bar 2' is moved along the radius line 1a from the outside to the center of the magnetic disk 1.
/l is used to inspect protrusions. Note that the stopper 12 is the right-hand limit position of the X-axis carriage 8 when the head 2 is in the operating position. In addition to this, there are also strikes and
Soba is served, but it is omitted here.

Here, the sizes of the conventional mechanism and the 81 mechanism according to the present invention will be compared.

In the conventional mechanism shown in FIG. 2, the length from the center of the magnetic disk 1 to the rear end of the drive motor 4! : Set as A. In FIG. 1, the head support 2a, Y-axis carriage 10, etc.
Nohe...! Assuming that the board support 2a and the carriage 3 have the same length, their longitudinal dimensions are almost the same. However, in the tangential direction, since the carriages 3 and 6 are in the right angle direction in the case of FIG. 2, the distance A' between the ends of the drive motors 4 and 7 is approximately 1.4A. In the case of FIG. 1, the support 2a is attached perpendicular to the moving direction of the X-axis carriage 8, so if the length of the X-axis carriage 8 is equal to the carriage 3, its movement range B is A. approximately equal to. That is, compared to the case of FIG. 2, the size in the tangential direction in FIG. 1 can be made smaller and more compact.

[Effects of the Invention] As is clear from the above explanation, the magnetic disk surface inspection head switching mechanism according to the present invention has the following effects:
In contrast to the conventional two axes that are orthogonal to each other at the center of the magnetic disk, there are two axes that are orthogonal to each other at a position away from the center of the carriage. By installing the shaft and support in the Y-axis direction, the dimensions in the X-axis (tank) direction can be reduced, making the glide tester for magnetic disk inspection lines more compact. This contributes to

[Brief explanation of the drawing]

FIG. 1 is a plan view showing the structure of an embodiment of a magnetic disk surface inspection head switching mechanism according to the present invention, and FIG. 2 is a plan view showing the structure of a conventional head switching mechanism. 1...Magnetic disk, 1a...Radius line. 2... Burnish head, 2a... Support tool. 3.6...Carriage, 5...Protrusion inspection/1. 5a... Support tool, 4.7.9.11... Drive motor. 8...X-axis carry Iji, IO...Y-axis carriage. 12...Sto Soba 4

Claims (2)

[Claims] (1) A burnish head that contacts the surface of a rotating magnetic disk to remove protrusions existing on the surface, and inspects protrusions remaining on the surface from which the protrusions have been removed by the burnish head. In a magnetic disk surface protrusion inspection apparatus comprising a protrusion inspection head, an X, Y carriage mechanism includes an X-axis carriage to which the burnish head and the protrusion inspection head are attached, and a Y-axis carriage on which the X-axis carriage is mounted. 1. A switching mechanism for a magnetic disk surface inspection head, comprising: (2) the X-axis carriage, which switches between the burnish head and the protrusion inspection head by moving in the X-axis direction, and sets each of them at an operating position on a constant radius on the surface of the magnetic disk; The magnetism according to claim 1, further comprising the X and Y axis carriage mechanism including the Y axis carriage for moving the set burnish head and the protrusion inspection head respectively on the fixed radius. Switching mechanism for disk surface inspection heads.