JPH07104264B2 - Conveying structure of line type environmental test equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a line type environmental test device for applying a low-temperature or high-temperature thermal shock to a test piece such as a semiconductor or a printed circuit board.

[0002]

2. Description of the Related Art As a conventional line type environmental test device,
Known is a system configured to supply constant temperature air from a constant temperature air supply device to a constant temperature tank covered with a heat insulating material, in which a belt conveyor or a pallet on a guide rail is moved into the constant temperature tank. There is.

[0003]

However, in the case of such a conventional line type environmental testing device, it is necessary to attach and detach the test piece at the entrance and exit of the device because the pallet moves only in one direction. You need at least two workers. Further, since the line-type environmental test device is a serial type, there is a problem that it takes up a lot of space for installation even if it does not have a height, and there is a disadvantage that it cannot be installed in a room with a small space. Therefore, the present invention has been made in view of the above circumstances, and an object thereof is to provide an environmental test apparatus which requires a smaller installation space than conventional ones and allows the DUT to be attached and detached at one place.

[0004]

That is, the present invention provides a thermostatic chamber covered with a heat insulating material, a thermostatic air supply device for supplying low-temperature or high-temperature thermostatic air into the thermostatic chamber, and a shutter for opening and closing the thermostatic chamber. In an environmental testing device comprising a chamber for attaching and detaching a device under test communicated through a guide rail, two sets of guide rails slidably supporting pallets installed above and below the constant temperature chamber and parallel to each guide rail. And a pallet mounted on the end of the temperature-controlled room that is not adjacent to the attachment / detachment chamber, A lifter for lifting and lowering, a lifter for lifting and lowering a pallet mounted in the loading and unloading chamber, and a rail-shaped support mounted on a sidewall of the loading and unloading chamber and capable of changing a width interval on an extension line of an upper guide rail. Material and a pusher that pushes the pallet on the upper guide rail inside the temperature-controlled room into the detachable chamber, and a puller that pulls the pallet on the lifter inside the temperature-controlled chamber into the lower guide rail. This object is achieved by the transportation structure of the line type environmental testing device consisting of and.

[0005]

In the device according to the present invention, the pallet placed on the lower guide rail is intermittently conveyed by the conveying means in the direction opposite to the attaching / detaching chamber, and the pallet placed on the upper guide rail is conveyed. It is configured to be intermittently conveyed in the detachable chamber direction by the means. Then, when the pallet is placed on the rail-shaped support means of the attachment / detachment chamber, the lifter rises and moves so as to support the pallet, and after the lifter is stopped, the support means retracts to the side wall side. Next, the lifter descends, and then the puller guides the pallet in the loading / unloading chamber to the lower guide rail. After that, the transport means moves the entire lower pallet and places the most advanced pallet on the lifter. Then, the lifter rises and is positioned on the extension line of the pallet of the upper guide rail. Further, the upper conveying means conveys the entire pallet toward the loading / unloading chamber, and the most advanced pallet is pushed into the loading / unloading chamber by the pusher. At this time, the pallet is located above because the rail-shaped supporting means is projected, and the pallet is replaced here. While repeating the above operation, the shutter effectively shuts off the temperature-controlled room and the detachable room, and opens the temperature-controlled room only when the pallet is replaced.

[0006]

The present invention will be described in detail below with reference to the embodiments shown in the drawings. In the figure, 1 is a front sectional view of an apparatus according to the present invention, which is adjacent to a temperature-controlled room 2 made of a heat insulating material, and a temperature-controlled room 2 for attaching / detaching a pallet for mounting a DUT. An opening / closing shutter 5 is attached to a communication port 4 between the constant temperature chamber 2 and the attachment / detachment chamber 3. Inside the temperature-controlled room 2, two sets of guide rails 6 and 7 are installed vertically in two steps in the longitudinal direction of the temperature-controlled room 2, and the rails have an L-shaped cross section, and a pallet is placed on the guide rails. 8 is mounted. Incidentally, FIG.
On the right side (side not adjacent to the attachment / detachment chamber 3), there is no guide rails 6 and 7 that are about the size of one pallet, but instead only the height of the upper and lower guide rails 6 and 7. A lifter 10 that moves up and down is installed. A support member having an L-shaped cross section is attached to the lifter 10 so as to come into contact with the guide rails 6 and 7. The lifter 10 raises the pallet 8 to a predetermined height according to an instruction from a control device (not shown).

A lifter 12 designed to support the pallet 8 at the same height as the guide rails 6 and 7 installed in the temperature-controlled room 2 is also mounted in the detachable chamber 3.
Further, as shown in FIG.
Rail-like support members 13 and 14 are installed so that the pallet 8 can be supported even without them. The support members 13 and 14 are arranged so that the support members 13 and 14 can move in and out in the side wall direction by means such as a cylinder mechanism. It is configured.

In the temperature-controlled room 2, upper and lower guide rails 6 and 7 are provided.
Shafts 15 and 16 that are mounted parallel to each other and that can reciprocate in the axial direction and can rotate in the circumferential direction;
A projecting piece 18 radially joined to 5 and 16 at a predetermined interval (more than the length of the pallet 8) and feed mechanisms 17 and 19 for axially moving and rotating the shafts 15 and 16 in the circumferential direction.
A transporting means consisting of and is installed. In addition, as this conveying means, the one described in the invention (Jitsuko 3-2840) filed by the present applicant is used.

Regarding the above-mentioned conveying means, the upper one conveys only the pallet 8 to the front of the shutter 5, and the lower one conveys the pallet 8 in front of the shutter 5 only to the feeding mechanism side. Since the pallet 8 cannot be taken out or pushed in from the attachment / detachment chamber 3, the cylinder 20 mounted on the lifting device 22 and the pallet 8 inserted in the cylinder 20 are pushed below the guide rail 6. A pusher 26 including a piston 24 is installed below the guide rail 7, and a cylinder 28 mounted on the lifting device 27 and a pallet in the attachment / detachment chamber 3 inserted into the cylinder 28 are drawn into the temperature-controlled room 2. A puller 32 consisting of the piston 30 and is installed.

With the above-mentioned structure, the device according to the present invention has the above-mentioned lifter, shutter, pusher,
By controlling the puller and the feeding mechanism with the control device, the test article can be moved efficiently. The details will be described below with reference to a simple diagram.

FIG. 4 (a) shows a state in which three pallets 8 are placed on the guide rails 6 and 7, respectively. The lifters 10 and 12 are lowered and the communication port 4 is opened. The rail-shaped support members 13 and 14 are projected.
The pallet 8 is placed on the lifter 12. The upper pallet 8 is pushed into the attachment / detachment chamber 3 by the pusher 26, while the pallet 8 is moved by the action of the lower transfer mechanism, and the tip is placed on the lifter 10 (FIG. 4 (b)). The pallet 8 is taken out by an operator or a magic hand, and the pallet 8 in the attachment / detachment chamber 3 is drawn into the temperature-controlled room 2 by the action of the puller 32. The pallet 8 on the lifter 10 is lifted and positioned at the same height as the guide rail 6 (Fig. 4 (c)). While the new pallet 8 is placed on the support members 13 and 14, the communication port 4 is closed and the lifter 12 is lifted to support the new pallet 8. The upper pallet 8 is transferred to the attachment / detachment chamber 3 side by the action of the transfer mechanism 17 (FIG. 4 (d)). The support members 13 and 14 in the attaching / detaching chamber 3 are retracted, and the lifter 12
Then, the pallet 8 is supported (FIG. 4 (e)). The lifter 10 and the lifter 12 are lowered and the communication port 4 is opened (the same as the state of FIG. 4A).

[0012]

As described above, according to the transport structure of the present invention, the pallets are always arranged in six or more rows, and the length can be reduced to about half that of the conventional line type environmental testing device. The pallet can be attached and removed in one place, and its utility value is high.

[Brief description of drawings]

FIG. 1 is a front sectional view of an apparatus according to the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a sectional view taken along line BB of FIG.

FIG. 4 is a schematic sectional view showing the movement of the device according to the present invention.

[Explanation of symbols]

 1 Device 2 Constant Temperature Room 3 Attachment / Detachment Room 4 Communication Port 5 Shutters 6 and 7 Guide Rails 8 Pallets 10 and 12 Lifters 13 and 14 Rail Supports 15, 16 Shafts 17 and 19 Feeding Mechanism 18 Projection Pieces 20 and 28 Cylinders 22 and 27 Lifting device 24, 30 Piston 26 Pusher 32 Puller

Claims (1)

[Claims] 1. A thermostatic chamber covered with a heat insulating material, a thermostatic air supply device for supplying low-temperature or high-temperature thermostatic air into the thermostatic chamber, and a device under test communicating with the thermostatic chamber via a shutter that opens and closes. In an environmental testing device consisting of a detachable chamber, two sets of guide rails slidably supporting the pallets installed above and below in the temperature-controlled room, and mounted parallel to each guide rail and reciprocating in the axial direction. A conveyance means that is rotatable in the circumferential direction and has projecting pieces in a radial direction at predetermined intervals, a lifter for moving up and down a pallet mounted at an end portion not adjacent to the attachment / detachment chamber of the temperature-controlled room, and the attachment / detachment A lifter for moving up and down the pallet mounted in the chamber, a rail-shaped support member mounted on the side wall of the detachable chamber and capable of changing the width interval on the extension line of the upper guide rail, and a constant member installed at the top of the temperature-controlled room. Conveyor structure of line type environmental test equipment consisting of pusher that pushes the pallet on the upper guide rail in the greenhouse into the detachable chamber and puller that pulls the pallet on the lift in the detachable chamber installed in the constant temperature chamber to the lower guide rail. .