JPH07104128B2 - Displacement / tilt measuring device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a displacement / tilt measuring device, and more particularly, to a displacement / tilt measuring device capable of independently and simultaneously measuring the displacement and the tilt of an inspection object. The present invention relates to a tilt measuring device.

[Prior Art] Some measuring devices irradiate a test object with light and measure the displacement of the test object or the tilt angle from the reflected light.

Such a measuring device is, for example, as described in JP-A-51-38737, in a coating device, a gas of a predetermined pressure is jetted from an air bag roll to levitate the web while running in a non-contact state. When the coating liquid is applied, it is convenient to use it to measure the displacement and inclination of the web so that the running state of the web can be accurately known.

That is, the gap (floating amount) between the airbag and the web may change due to fluctuations in tension during traveling of the web. Further, in the case where the negative pressure chamber is provided to facilitate the formation of the bead of the coating liquid, when the gap between the side wall of the negative pressure chamber and the web changes, the pressure in the negative pressure chamber is affected and the bead upper surface side. The web may fluctuate due to a change in the air pressure difference between the bottom surface and the bottom surface.

[Problems to be Solved by the Invention] Due to these reasons, coating unevenness that streaks in the width direction may occur, and this coating unevenness requires coating of a uniform film thickness as in a photographic light-sensitive material. Then, it is not preferable because it induces sensitivity variations and the like. Particularly in the case of silver halide light-sensitive materials, it is required to apply uniformly with a film thickness of several tens of microns, so high productivity is required and stable and uniform application is required. Moreover, defective products are distributed to users. It is required to prevent this.

For this reason, if the running state of the web can be known accurately, it becomes possible to control so as to prevent the fluctuation of the web based on this measurement information. Furthermore, by analyzing the measurement information, it is possible to know the cause of the web fluctuation, it is possible to effectively deal with the occurrence of coating unevenness, and product management is ensured and the occurrence of defective products can be prevented in advance. It will be possible.

Therefore, the web traveling in a non-contact state is irradiated with light from a semiconductor laser, the reflected light is detected by a position detection sensor via a light receiving optical system, and if the displacement and inclination of the web can be measured, The running state of the web can be accurately controlled, and the above-described analysis, control and management can be performed more accurately. In this case, when the displacement and the inclination of the web are measured by dedicated measuring devices, the device becomes large, and particularly, the web of the coating device is measured.
It is not preferable when the arrangement space is limited.

The present invention has been made in view of the above points, and an object of the present invention is to provide a displacement / tilt measuring device capable of measuring the displacement and the tilt of a test object independently and simultaneously.

[Means for Solving the Problems] In order to solve the above problems, the present invention causes light from a light source to enter an inspection object and inputs the emitted light to a position detection sensor via a light receiving optical system. The light-receiving optical system is composed of a lens and a cylindrical lens, and one of them is inclined with respect to the inclination of the inspection object so that the inspection surface of the inspection object and the sensor surface of the position detection sensor have an image-forming relationship with respect to the displacement of the inspection object. The inspection surface of the inspection object and the sensor surface of the position detection sensor are configured to be in a focal relationship, the displacement of the inspection object in the imaging relationship, the inclination of the inspection object in the focal relationship, respectively, It is also characterized by simultaneous measurement.

[Operation] In the present invention, the light from the light source is incident on the inspection object, and the reflected light is input to the position detection sensor via the light receiving optical system including the lens and the cylindrical lens, and the image forming relationship of the light receiving optical system is changed. The displacement of the inspection object and the inclination of the inspection object due to the focus relationship are measured independently and simultaneously.

At this time, the light receiving optical system is arranged so that the inspection surface of the inspection object and the sensor surface of the position detection sensor have an image-forming relationship with respect to the displacement of the inspection object, and the inspection surface of the inspection object is inclined with respect to the inclination of the inspection object. And the sensor surface of the position detection sensor are in focus. Therefore, when the displacement is detected, the influence of the inclination of the inspection surface is not exerted, and when the inclination is detected, the influence of the displacement of the contribution surface is not exerted, so that the single measuring device can perform the measurement independently and simultaneously.

[Embodiment] The displacement / tilt measuring apparatus of the present invention will be described below with reference to specific examples shown in the accompanying drawings.

1 and 2 are diagrams showing displacement detection of the displacement / tilt measuring device of the present invention.

In the figure, reference numeral 1 is a light source, which is composed of, for example, a semiconductor laser, and this light is applied to the inspection surface of the inspection object 2. The specularly reflected light reflected on this inspection surface is incident on the sensor surface of the position detection sensor 4 via the light receiving optical system 3, and this position detection sensor 4 is, for example, a two-dimensional semiconductor position detection element (PSD).
Alternatively, it is composed of a solid-state imaging device (CCD) or the like.

The light receiving optical system 3 includes a lens 5 and a cylindrical lens 6.
The light receiving optical system 3 is configured so that the inspection surface of the inspection object 2 and the sensor surface of the position detection sensor 4 have an image-forming relationship with respect to the displacement of the inspection object.

Therefore, as shown in FIG. 1, when the inspection object 2 is at the position indicated by the solid line, the image forming position of the position detection sensor 4 is indicated by the point a. When the inspection object 2 moves to the position indicated by the broken line, the reflected light is incident on the lens 5 in parallel, and the cylindrical lens 6 further moves the image forming position of the position detection sensor 4 to the point b. Thus, the displacement of the inspection object 2 can be known.

At this time, even if the inspection object 2 is tilted as shown in FIG.
Since the incident position of light on the inspection surface does not change, the imaging relationship does not change at the same incident point. Therefore, the position where an image is formed on the sensor surface of the position detection sensor 4 via the lens 5 and the cylindrical lens 6 is the point a, which is the same position as when the inspection object 2 is not tilted. This means that, as shown in FIG.
The same is true when the inspection object 2 is moved to the position indicated by the broken line and inclined, and the displacement is not affected by the inclination of the inspection surface of the inspection object 2.

3 and 4 are views showing tilt detection of the displacement / tilt measuring device of the present invention.

FIGS. 3 and 4 are views when FIGS. 1 and 2 are viewed from the side, and the light receiving optical system 3 from this position inspects the inspection object 2 with respect to the inclination of the inspection object 2. The surface and the sensor surface of the position detection sensor 4 are configured to have a focal relationship.

Therefore, as shown in FIG. 3, when the inspection object 2 is at the position indicated by the solid line, an image is formed at the point c of the position detection sensor 4. When the inspection object 2 is inclined as shown by the broken line and the inspection surface is inclined, the reflected light is reflected according to the inclination of the inspection surface,
It is incident on the lens 5. Since the cylindrical lens 6 does not act on this reflected light, it passes through as it is and moves to the point d on the sensor surface of the position detection sensor 4 to form an image, and the movement causes the inclination of the inspection surface of the inspection object 2 to be inclined. You can know.

Then, as shown in FIG. 4, even if the inspection object 2 moves from the solid line position to the broken line position and the inspection surface is displaced, the incident position of light on the inspection surface does not change, so that the focal point is the same at the same incident point. Relationship does not change.

Therefore, the position imaged on the sensor surface of the position detection sensor 4 via the lens 5 and the cylindrical lens 6 does not change at the point d, and therefore is not affected by the displacement of the inspection surface during tilt detection.

In this way, the displacement and inclination of the inspection object can be measured independently and simultaneously, and the state of the inspection object can be accurately grasped by a small measuring device.

FIG. 5 shows a specific embodiment in which the displacement / tilt measuring device is applied to a coating device.

In the figure, reference numeral 11 is a web which is a support to which the coating liquid is applied, and is conveyed at high speed through an air bag roll 12. An injection hole 12a is formed in the air bag roll 12, and air of a predetermined pressure in the air bag roll 12 is blown from the injection hole 12a to the web 11 so that the web 11 is supported in a non-contact state. There is.

A coating liquid supply device 13 is located close to the airbag roll 12, and flow rate pumps 15a and 15b are provided in the liquid supply paths 14a and 14b.
The different types of coating liquids are supplied by the driving. In this embodiment, two types of coating liquids are supplied, but one or more types may be used. Vertical narrow slits 16a, 16b are formed above the liquid supply paths 14a, 14b, and the coating liquid is formed by the slits 16a, 16b.
And flows onto the slide surface 17 of the coating liquid supply device 13. The slide surface 17 is inclined toward the direction of the airbag roll 12, the coating liquid that has flowed out forms a layer and flows down, and is applied to the web 11 from the lower end of the slide surface 17, and the lower end of the slide surface 17 A bead of coating liquid 18 between the web 11
Is formed.

A pressure adjusting box 19 is provided on the lower surface side of the bead 18. The lower surface side air pressure is reduced by the pressure adjusting box 19 and the bead 18 is pressed from top to bottom to ensure the application.

Although various solutions are used as the coating solution, particularly a hydrophilic colloid solution which is a photographic light-sensitive material, a hydrophilic binder such as gelatin or polyvinyl alcohol, and a viscosity of 4
Suitable for low viscosity coating compositions of -40 cp. Further, the coating liquid containing the volatile solvent can suppress evaporation on the slide surface by the positive pressure.

As the web to which the hydrophilic colloid solution is applied, a support for a photographic light-sensitive material such as a plastic film such as polyethylene terephthalate, triacetyl cellulose or polypropylene, or paper is used.

On the side of the airbag roll 12 of this web 11, a back layer is formed.
20 may be formed, and the silver halide photographic light-sensitive material may be applied to both surfaces of the web 11 coated with the coating solution in this way.

A displacement / tilt measuring device 21 is provided inside the air bag roll 12, and the displacement of the gap L between the web 11 and the air bag roll 12 and the widthwise inclination of the web 11 are measured by the bead 18 of the coating liquid.
Is to be measured in the vicinity of the formation part.

The displacement / tilt measuring device 21 is constructed as shown in FIGS. 1 to 4, and its explanation is omitted.

Therefore, the displacement / tilt measuring device 21 can measure the displacement of the web 11 as the inspection object and the inclination in the width direction independently and simultaneously. Therefore, by analyzing this measurement information, it is possible to know the cause of the fluctuation of the web, it is possible to effectively deal with the occurrence of coating unevenness, and product management is ensured and the occurrence of defective products is prevented in advance. It will be possible.

[Advantages of the Invention] As described above, according to the present invention, the light from the light source is made incident on the inspection object, and the reflected light is input to the position detection sensor through the light receiving optical system including the lens and the cylindrical lens. The optical system has an image-forming relationship between the inspection surface of the inspection object and the sensor surface of the position detection sensor with respect to the displacement of the inspection object.
On the other hand, the inspection surface of the inspection object and the sensor surface of the position detection sensor are configured to have a focal relationship with respect to the inclination of the inspection object. Since it came to measure each independently and simultaneously,
Since the influence of the inclination of the inspection surface is not detected when the displacement is detected, and the influence of the displacement of the inspection surface is not detected when the inclination is detected, the measurement can be performed by a single measuring device.

[Brief description of drawings]

1 and 2 are diagrams showing a displacement detecting structure of a displacement / tilt measuring device of the present invention, and FIGS. 3 and 4 are diagrams showing a tilt detecting structure of a displacement / tilt measuring device of the present invention, and FIG. The figure is a diagram showing a specific embodiment in which the displacement / tilt measuring device is applied to a coating device. In the figure, reference numeral 1 is a light source, 2 is an inspection object, 3 is a light receiving optical system, and 4 is a position detection sensor.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tomohide Mizukoshi, No. 1, Sakura-cho, Hino City, Tokyo Konica Co., Ltd. (56) References JP 59-154313 (JP, A) JP 62-218803 (JP) , A)

Claims (1)

[Claims] 1. Light from a light source is incident on an inspection object, and this reflected light is input to a position detection sensor via a light receiving optical system. This light receiving optical system comprises a lens and a cylindrical lens. So that the inspection surface of the inspection object and the sensor surface of the position detection sensor have an imaging relationship with respect to the displacement of Displacement / inclination, wherein the displacement of the inspection object is measured in the image forming relationship, and the inclination of the inspection object is measured in the focal relationship independently and simultaneously. measuring device.