JPH01138403A - Displacement and inclination measuring instrument - Google Patents

Displacement and inclination measuring instrument

Info

Publication number
JPH01138403A
JPH01138403A JP29640187A JP29640187A JPH01138403A JP H01138403 A JPH01138403 A JP H01138403A JP 29640187 A JP29640187 A JP 29640187A JP 29640187 A JP29640187 A JP 29640187A JP H01138403 A JPH01138403 A JP H01138403A
Authority
JP
Japan
Prior art keywords
displacement
inspection
inclination
sensor
relation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29640187A
Other languages
Japanese (ja)
Other versions
JPH07104128B2 (en
Inventor
Yukito Nakamura
Tokuji Takahashi
Kazumi Furuta
Tomohide Mizukoshi
Original Assignee
Konica Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Corp filed Critical Konica Corp
Priority to JP62296401A priority Critical patent/JPH07104128B2/en
Publication of JPH01138403A publication Critical patent/JPH01138403A/en
Publication of JPH07104128B2 publication Critical patent/JPH07104128B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To measure the displacement and inclination of an object body of inspection independently at the same time by constituting a photodetection optical system so that an inspection surface and the sensor surface of a position detection sensor are in image formation relation for the displacement of the object body and both surfaces are in in-focus relation for the inclination.
CONSTITUTION: Light beams from a light source 1 consisting of a semiconductor laser, etc., are projected on the inspection surface of the object body 2. Regularly reflected light beams from this inspection surface are made incident on the sensor surface of the position detection sensor 4 composed of a CCD, etc., through the photodetection optical system 3 consisting of a lens 5 and a cylindrical lens 6. At this time, the optical system 3 is so constituted that the inspection surface of the object body 2 and the sensor surface of the sensor 4 are in the image formation relation for the displacement of the object body 2 and also in the in-focus relation for the inclination of the body body 2. Therefore, when the displacement is detected, there is not any influence of the inclination of the detection surface and when the inclination is detected, on the other hand, there is not any influence of the displacement of the inspection surface, so they are measured by the single measuring instrument independently at the same time.
COPYRIGHT: (C)1989,JPO&Japio
JP62296401A 1987-11-25 1987-11-25 Displacement / tilt measuring device Expired - Lifetime JPH07104128B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62296401A JPH07104128B2 (en) 1987-11-25 1987-11-25 Displacement / tilt measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62296401A JPH07104128B2 (en) 1987-11-25 1987-11-25 Displacement / tilt measuring device

Publications (2)

Publication Number Publication Date
JPH01138403A true JPH01138403A (en) 1989-05-31
JPH07104128B2 JPH07104128B2 (en) 1995-11-13

Family

ID=17833068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62296401A Expired - Lifetime JPH07104128B2 (en) 1987-11-25 1987-11-25 Displacement / tilt measuring device

Country Status (1)

Country Link
JP (1) JPH07104128B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03218403A (en) * 1990-01-24 1991-09-26 Hitachi Ltd Device for measuring gap of blade tip

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154313A (en) * 1983-02-24 1984-09-03 Dainippon Screen Mfg Co Ltd Apparatus for measuring distance and slanting angle

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154313A (en) * 1983-02-24 1984-09-03 Dainippon Screen Mfg Co Ltd Apparatus for measuring distance and slanting angle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03218403A (en) * 1990-01-24 1991-09-26 Hitachi Ltd Device for measuring gap of blade tip

Also Published As

Publication number Publication date
JPH07104128B2 (en) 1995-11-13

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