JPH07103866B2 - Clean pump - Google Patents

Description

TECHNICAL FIELD The present invention relates to a pump for circulating and pumping high-purity chemicals, pure water and the like used in a surface treatment apparatus for precision parts such as electronic parts and IC parts. It is a thing.

[Prior Art] In the manufacturing process of electronic parts, IC parts, etc., the purity of chemicals used has a great influence on the quality of products. Therefore, the magnet pump shown in FIG. 5 and the bellows pump shown in FIG. 6 are often used.

However, the magnet pump 50 shown in FIG. 5 has a casing.
A bearing 54 is required to support the main shaft 53 of the impeller 52 provided inside the 51, and dust generated from the bearing 54 is a problem. In addition, there are restrictions on the construction of the machine in terms of material,
There is a problem that sufficient corrosion resistance may not be obtained.
In FIG. 5, 55 is an inlet, 56 is an outlet, 57 is an outer magnet, and 58 is an inner magnet.

The bellows pump 60 shown in FIG.
Since the liquid is fed by elastic deformation of 62, there is no part where dust is generated except the check valves 63 and 64, which is convenient in that respect. However, since the liquid is fed by the elastic deformation of the bellows 62, the discharge amount of the magnet pump is
It has the disadvantage of being less than 1/10 and high in cost. In addition,
In FIG. 6, 65 is a pump head, 66 is a suction / discharge pipe, 67 is a body, 68 is a slipper ring of a drive shaft 70, 69
Is the center housing.

[Problems to be Solved by the Invention] An object of the present invention is to provide a clean pump that does not generate dust, can feed a large amount of liquid with a simple structure, and has excellent corrosion resistance.

[Technical Means for Solving the Problems] In order to solve the above problems, the present invention relates to a pump chamber, an impeller that can be revolved in the pump chamber, and a revolvable holding device that revolvably holds the impeller. In a clean pump including a mechanism and a drive mechanism that revolves the impeller by using a drive source, the axis of the shaft of the drive mechanism that drives the shaft of the impeller and the center line of the pump chamber are aligned. And one end of the shaft of the impeller is eccentric by a predetermined distance from the center line of the pump chamber, is rotatably fixed to the shaft of the drive mechanism, and a part of the shaft of the impeller is An action portion attached to an isolation member that isolates the pump chamber side and the drive mechanism side in a swingable state around a swing center, and further attached to the shaft of the impeller via a support portion. Has a cylindrical shape surrounding the shaft of the impeller so as to accelerate the liquid on its inner surface, and one end of the shaft of the impeller is eccentrically rotated by the drive source around the shaft center of the drive mechanism. In this case, the impeller shaft itself does not rotate, but it keeps an inclined angle with respect to the center line of the pump chamber and stably revolves to eccentrically rotate the cylindrical action member of the impeller. A gist of the clean pump is characterized in that the liquid is sucked in the axial direction of the pump chamber and is driven to the peripheral wall side of the pump chamber to be discharged.

[Operation] The impeller is rubbed with respect to its center line in the pump chamber by the revolvable holding mechanism and the drive mechanism. Therefore, the liquid sucked into the pump chamber from the suction port is driven toward the peripheral wall of the pump chamber by the impeller in the pump chamber and discharged from the discharge port. Since there is no friction portion due to the rotation of the impeller in the pump chamber and the impeller shaft does not slide, no dust is generated, and the liquid is discharged from the discharge port in a clean state. Further, the amount of liquid discharged can be increased by increasing the rotation speed of the impeller. Further, in the present invention,
In the impeller having the tubular action member, the action member eccentrically rotates in the pump chamber due to the revolution of the shaft of the impeller, and as a result, it acts as if the inner diameter of the impeller changes.

Therefore, in the present invention, the liquid that has flowed in from the axial direction of the pump chamber rotates inside the impeller, that is, along the inner surface of the cylindrical action member, and jumps out from the end of the inner surface of the action member in the outer circumferential direction. It is sufficiently accelerated until a velocity is obtained, and a large centrifugal force is applied to it to fly out of the impeller (referred to as a first action). Therefore, the pressure in the pump chamber becomes higher toward the outer peripheral portion (peripheral wall side) of the pump chamber, and is discharged from, for example, a discharge port provided in the outer peripheral portion.

Further, by the above-described second action, not only the force for discharging the liquid is applied, but also the action of rotating the liquid by the revolution of the shaft of the impeller (referred to as the second action) and the rotation of the action member of the impeller. Also by the operation of pushing out the liquid on the outer side surface (referred to as the third action),
The force for ejecting the liquid can be further increased.

In particular, the liquid first accelerated by the second action is further accelerated by the rotation of the action member, so that the ejection travel can be efficiently increased from that point as well.

That is, in the present invention, the pump can be operated very efficiently by comprehensively utilizing the first to third operations.

[Embodiment] The present invention will be described below with reference to FIGS. In the clean pump 1, a head cover 6 is attached to a casing 5 with a screw 21 via a packing 7, and a diaphragm 8 is screwed to the casing 5 by being pressed by a cap. A pump chamber 10 is formed by the above-mentioned members, that is, the casing 5, the head cover 6, the packing 7, the diaphragm 8 and the cap 9, and the shaft 11a of the impeller 11 penetrates the center 8a of the diaphragm 8 in the pump chamber 10. The inclination angle θ is maintained with respect to the center line 10a of the.

As described above, the shaft 11a of the impeller 11 penetrates the center 8a of the diaphragm 8 and projects into the drive chamber 12 located outside the pump chamber 10. In the drive chamber 12, the central portion of the diaphragm 8 is located in the drive chamber 12. The link nut 13 and the nut 14 fitted into the shaft 11a tighten the flange 11c of the shaft 11a.

The shaft 11a of the impeller 11 is a coupling 16 having an eccentricity e.
It is fixed to the inner ring 15a of the ball joint 15 provided inside. The coupling 16 is attached to the drive motor 17, and the axis 17a of the drive motor 17 and the axis 1 of the coupling 16
6a is aligned with the center line 10a of the pump chamber 10. Motor 1
The eccentricity e of the inner ring 15a of the ball joint 15 due to the rotation of 7
The shaft 11a of the impeller 11 is revolved around the center line 10a of the pump chamber 10 while maintaining the inclination angle θ while holding the shaft 17a. As shown in FIG. 3, the link nut 13 swings around a center 8a of the diaphragm 8 by a universal joint 20 composed of a base link 19 and a pump base 18.
This universal joint 20 is the center of the diaphragm 8.
The link pin 19a on the pump base 18 and the ring pin 13a on the base link 19 provided on a straight line orthogonal to each other at 8a have a known structure, and can rotate in all directions.

As shown in FIG. 2, the pump chamber 10 and the impeller 11 are circular, and the suction port 6a opens on the center line 10a of the pump chamber 10,
The discharge port 5a opens on the tangent line of the pump chamber 10. Specifically, the shaft 11a of the impeller 11 is provided with a support portion 11e that projects from the shaft 11a in a disk shape in the circumferential direction.
A cylindrical action member 11f (perpendicular to the support portion 11e) is provided at the peripheral end of the so as to surround the shaft 11a around the shaft 11a. Further, the acting member 11f is arranged in a substantially donut-shaped tubular portion 10b provided in the pump chamber 10. Therefore, when the shaft 11a revolves, the acting member 11f revolves while swinging in the tubular portion 10b.

In the above structure, the fluid to be pumped (pure water, plating solution, etc.) is introduced into the pump chamber 10 through the suction port 6a, and the impeller 11
Filled within. The impeller 11 revolves inside the pump chamber 10 while maintaining an inclination angle θ with respect to the center line 10a of the pump chamber 10 by the rotation of the drive motor 17. At this time, the center of the diaphragm 8
Since the universal joint 20 constituted by the link nut 13 and the like supports 8a, the impeller 11 does not rotate. Therefore, the diaphragm 8 that separates the pump chamber 10 from the drive chamber 12 is not twisted because the impeller 11 does not rotate, and is only deformed by the revolution of the impeller 11. The impeller 11 that revolves when driven by the drive motor 17 is the pump chamber.
Within 10, the center 8a of the diaphragm 8 is used as a fulcrum for so-called rasping movement. As shown in FIG. 4, when the impeller 11 rotates from the position (a) by the angle θ _t to the position (b), the direction of the maximum peripheral speed v of the impeller 11 changes, so that the impeller 11 exerts a centrifugal force on the fluid. Is applied to send the fluid out of the impeller 11. Therefore, the pressure in the pump chamber 10 becomes higher toward the outer peripheral portion of the pump chamber 10, and the fluid is discharged from the discharge port.
It is discharged from 5a.

The above explanation has been made on the action and effect of the impeller 11 with respect to the fluid in the impeller 11, but as shown in FIG.
The axis 11b of 11 is the casing 5 and the throat portion 6b of the head cover 6.
Also, since the eccentricity amount e _t is held also with respect to the throat portion 5b of the casing 5, the fluid is rotated by the shaft 11a of the impeller 11 and each throat portion 5b, 6b, and by the casing 5 and the outer peripheral portion of the impeller 11. The action occurs. Then, by any of them, a centrifugal force for driving the fluid in the outer peripheral direction of the pump chamber 10 is generated. Therefore, in this embodiment, the fluid is pressurized and fed in three stages.

In the above-described embodiment, the pump chamber 10 and the drive chamber 12 are partitioned by the diaphragm 8, but the same effect can be expected by using a bellows instead. Further, in this case, the swing center of the universal joint 20 does not have to be the center of the diaphragm 8, but it is necessary to select a point having the least amount of deformation with respect to the bellows.

Further, the universal joint 20 is configured to have the pins that intersect at right angles, but the impeller 11 can be formed by other methods (for example, spherical bearings).
As long as the bearing can prevent the rotation of the bearing and can only perform the revolution, the same effect as that of the present embodiment can be expected.

Further, although the motor 10 is used as the drive source, the drive source is not limited to the motor as long as the drive source stably revolves the impeller 11 in the pump chamber 10.

In the above embodiment, four balance holes 11 are provided in the impeller 11.
Although the d is provided, the balance hole 11d is formed in the left and right chambers of the impeller 11 (the suction port 6a side and the diaphragm 8 in FIG. 1).
It is provided to maintain the balance of pressure on the side), and there are no particular restrictions on its size and number, but the pump chamber
The centerline 10 of the impeller shaft 11a inclined with respect to the centerline 10a of 10
In order to revolve around a, it is necessary to take into consideration the balance of the entire mass of the impeller.

In addition, in order to make the impeller 11 rotate smoothly, a coupling
Balance weights may be added to 16.

Furthermore, although the inner surface shape of the pump chamber 10 and the inner and outer surface shapes of the impeller 11 are not particularly restricted, the surface of the impeller 11 and
The efficiency of the pump can be improved by providing a groove or the like on the inner surface of the casing 5 in consideration of the flow line of the liquid. Further, in the above embodiment, the shaft center 17a of the drive motor 17 as the drive source, the shaft center 16a of the coupling 16 and the center line 10a of the pump chamber 10 are arranged so as to maintain consistency, From the operating principle of 1., it is sufficient if, for example, the axial center 16a of the coupling 16 and the center line 10a of the pump chamber 10 are arranged so as to maintain consistency. That is, it suffices that the axial center of the drive mechanism that drives the impeller 11 and the center line 10a of the pump chamber 10 be arranged so as to maintain consistency. Therefore, for example, the shaft of the drive mechanism includes the shaft of the drive motor 17 and the shaft of the coupling 16 (in the present embodiment, the shaft is coaxial).

[Effect] Since the present invention has the above configuration, it has the following excellent effects.

(A) Since the impeller is revolved around the pump chamber center line in the pump chamber and centrifugal force is added to the fluid to pump the fluid, it is possible to realize a discharge performance comparable to the conventional magnet system (spiral pump system).

(B) Since there is no impeller drive unit or bearing in the pump chamber, and the only moving part is the revolution holding mechanism of the impeller shaft outside the pump chamber, there is no check valve like the bellows pump system, and the cleanliness is better than that of the bellows pump. Is obtained.

(C) Since the pump section is composed of only five parts including packing, the cost is low. Further, since each part is fixedly joined, there is no need for lubrication. Further, since there is no restriction on the material, it is possible to use a material having excellent corrosion resistance, and it is possible to extend the life of the pump.

(D) Especially in the present invention, first, the liquid is rotated and accelerated by the revolution of the shaft of the impeller, and then the liquid is rotated along the inner surface of the tubular action member of the impeller to sufficiently accelerate the liquid. The remarkable effect is that the pump can be operated very efficiently.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows a front sectional view of one embodiment. FIG. 2 shows a side view of FIG. 1 partially cut away. FIG. 3 shows a perspective view of the revolution retaining mechanism of the impeller shaft. FIG. 4 shows a sectional view of the pump chamber. FIG. 5 shows a front view of the magnet pump. FIG. 6 shows a front view of the bellows pump. 10 …… Pump chamber 10a …… Pump chamber centerline 11 …… Impeller 11a …… Impeller shaft 8 …… Diaphragm (Mechanism that holds the impeller shaft so that it can revolve) 20 …… Universal joint (Holds the impeller shaft so that it can revolve) Mechanism …… 15 …… Ball joint (impeller shaft drive mechanism) 16 …… Coupling (impeller shaft drive mechanism) 17 …… Drive motor (impeller shaft drive mechanism)

Claims (1)

[Claims] 1. A pump chamber, an impeller arranged in the pump chamber and capable of revolving, a revolvable holding mechanism for revolvingly holding the impeller, and a drive mechanism for revolving the impeller using a drive source. In a clean pump provided with, the shaft center of the shaft of the drive mechanism that drives the shaft of the impeller and the center line of the pump chamber are aligned and arranged, and one end of the shaft of the impeller is the pump. The shaft is eccentric by a predetermined distance from the center line of the chamber and is rotatably fixed to the shaft of the drive mechanism, and a part of the shaft of the impeller is a separating member that separates the pump chamber side and the drive mechanism side. , The swing member is swingably mounted as a swing center, and further, the action member mounted to the shaft of the impeller via a support portion is mounted on the shaft of the impeller so as to accelerate the liquid on its inner surface. When the drive source is eccentric and one end of the impeller shaft rotates around the shaft center of the drive mechanism by the driving source, the pump chamber does not rotate on its own axis. By stably revolving while maintaining an inclination angle with respect to the center line of the pump chamber, the cylindrical action member of the impeller is eccentrically rotated and the liquid sucked from the axial direction of the pump chamber is pumped. A clean pump characterized by being configured to discharge to the peripheral wall side of.