JPH0710358Y2 - レチクル整合装置 - Google Patents

レチクル整合装置

Info

Publication number
JPH0710358Y2
JPH0710358Y2 JP1987134237U JP13423787U JPH0710358Y2 JP H0710358 Y2 JPH0710358 Y2 JP H0710358Y2 JP 1987134237 U JP1987134237 U JP 1987134237U JP 13423787 U JP13423787 U JP 13423787U JP H0710358 Y2 JPH0710358 Y2 JP H0710358Y2
Authority
JP
Japan
Prior art keywords
reticle
glass
mask
glass mask
reference pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987134237U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6438640U (enrdf_load_stackoverflow
Inventor
邦彦 本多
Original Assignee
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー電子工業株式会社 filed Critical セイコー電子工業株式会社
Priority to JP1987134237U priority Critical patent/JPH0710358Y2/ja
Publication of JPS6438640U publication Critical patent/JPS6438640U/ja
Application granted granted Critical
Publication of JPH0710358Y2 publication Critical patent/JPH0710358Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987134237U 1987-09-02 1987-09-02 レチクル整合装置 Expired - Lifetime JPH0710358Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987134237U JPH0710358Y2 (ja) 1987-09-02 1987-09-02 レチクル整合装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987134237U JPH0710358Y2 (ja) 1987-09-02 1987-09-02 レチクル整合装置

Publications (2)

Publication Number Publication Date
JPS6438640U JPS6438640U (enrdf_load_stackoverflow) 1989-03-08
JPH0710358Y2 true JPH0710358Y2 (ja) 1995-03-08

Family

ID=31392809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987134237U Expired - Lifetime JPH0710358Y2 (ja) 1987-09-02 1987-09-02 レチクル整合装置

Country Status (1)

Country Link
JP (1) JPH0710358Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6436349B1 (en) 1991-03-04 2002-08-20 Bayer Corporation Fluid handling apparatus for an automated analyzer

Also Published As

Publication number Publication date
JPS6438640U (enrdf_load_stackoverflow) 1989-03-08

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