JPH0710143Y2 - バルブ装置 - Google Patents

バルブ装置

Info

Publication number
JPH0710143Y2
JPH0710143Y2 JP1988092136U JP9213688U JPH0710143Y2 JP H0710143 Y2 JPH0710143 Y2 JP H0710143Y2 JP 1988092136 U JP1988092136 U JP 1988092136U JP 9213688 U JP9213688 U JP 9213688U JP H0710143 Y2 JPH0710143 Y2 JP H0710143Y2
Authority
JP
Japan
Prior art keywords
valve
vent
valves
raw material
valve mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988092136U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0214873U (enrdf_load_html_response
Inventor
道夫 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP1988092136U priority Critical patent/JPH0710143Y2/ja
Publication of JPH0214873U publication Critical patent/JPH0214873U/ja
Application granted granted Critical
Publication of JPH0710143Y2 publication Critical patent/JPH0710143Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP1988092136U 1988-07-12 1988-07-12 バルブ装置 Expired - Lifetime JPH0710143Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988092136U JPH0710143Y2 (ja) 1988-07-12 1988-07-12 バルブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988092136U JPH0710143Y2 (ja) 1988-07-12 1988-07-12 バルブ装置

Publications (2)

Publication Number Publication Date
JPH0214873U JPH0214873U (enrdf_load_html_response) 1990-01-30
JPH0710143Y2 true JPH0710143Y2 (ja) 1995-03-08

Family

ID=31316591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988092136U Expired - Lifetime JPH0710143Y2 (ja) 1988-07-12 1988-07-12 バルブ装置

Country Status (1)

Country Link
JP (1) JPH0710143Y2 (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11499481B2 (en) 2014-07-02 2022-11-15 Nuovo Pignone Tecnologie Srl Fuel distribution device, gas turbine engine and mounting method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6951228B2 (en) * 2003-12-04 2005-10-04 B Braun Medical Inc. Bulk compounder manifold
JP5202101B2 (ja) * 2008-05-21 2013-06-05 旭有機材工業株式会社 ミキシングバルブ及びそれを用いたミキシング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11499481B2 (en) 2014-07-02 2022-11-15 Nuovo Pignone Tecnologie Srl Fuel distribution device, gas turbine engine and mounting method

Also Published As

Publication number Publication date
JPH0214873U (enrdf_load_html_response) 1990-01-30

Similar Documents

Publication Publication Date Title
CA2229476C (en) Fluid control apparatus
US11427911B2 (en) Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
US20060060253A1 (en) Integrated gas valve
KR930008355A (ko) 유체 흐름 조절 시스템
JPS62286220A (ja) 半導体装置の製造方法
JPH0710143Y2 (ja) バルブ装置
US7299825B2 (en) Gas-panel assembly
JP2007324529A (ja) ガス導入装置、この製造方法及び処理装置
JP2000193119A (ja) バルブマニホ―ルド装置
JP3479043B2 (ja) マトリックス型多重断続バルブ装置
EP0299661A3 (en) Fluid handling
JPS5812024B2 (ja) セレクタ弁装置用モジュ−ル
US4670138A (en) Apparatus for controlling an infinitesimal flow rate of fluid
JPH07175B2 (ja) 反応容器のガス取入れ装置
JP2021071168A (ja) バルブ装置および流体制御装置
US10830259B1 (en) Solenoid high pressure indexing valve system
US12181054B2 (en) Linear actuated 3 way spool valve with constant total flow
WO2019188240A1 (ja) 流量制御装置
JPH06161562A (ja) 自動切換弁
WO2006130774A1 (en) Gas-panel assembly
KR20230077649A (ko) 유체 제어 밸브 및 유체 제어 장치
KR20210052297A (ko) 유체 제어 장치 및 반도체 제조 장치
JPH04290602A (ja) 流体制御機構付マニホールド
US20220349489A1 (en) Fluid delivery mounting panel and system
JP2643192B2 (ja) 排気ガス再循環装置