JPH0699153A - Method and apparatus for cleaning surface of solid continuously - Google Patents

Method and apparatus for cleaning surface of solid continuously

Info

Publication number
JPH0699153A
JPH0699153A JP1701591A JP1701591A JPH0699153A JP H0699153 A JPH0699153 A JP H0699153A JP 1701591 A JP1701591 A JP 1701591A JP 1701591 A JP1701591 A JP 1701591A JP H0699153 A JPH0699153 A JP H0699153A
Authority
JP
Japan
Prior art keywords
chamber
vacuum
closed
chambers
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1701591A
Other languages
Japanese (ja)
Other versions
JP2528388B2 (en
Inventor
Yoshiaki Yokoyama
芳昭 横山
Fujio Kobayashi
冨士男 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP3017015A priority Critical patent/JP2528388B2/en
Publication of JPH0699153A publication Critical patent/JPH0699153A/en
Application granted granted Critical
Publication of JP2528388B2 publication Critical patent/JP2528388B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide a cleaning method and an apparatus which remove a quantity of liquid and solid stuck on the surface of a solid efficiently at a low running cost without oxidizing the material to be treated and can recover the liquid and the solid almost in the original condition. CONSTITUTION:The first vacuum heating chamber 14, the second vacuum heating chamber 24, and the third vacuum heating chamber 36, having a closed space and equipped with a heating means, an evacuation means, a condensation means, and a pressurization means by non-oxidizing gas are installed jointly. A material to be treated is fed into the heating chambers in sequence and heated at different temperatures in each of these chambers so that the deposit is removed by evaporation. The deposit removed is condensed for recovery. A front vacuum replacement chamber 3 for the preliminary heating of the material to be treated is placed in front of the first vacuum heating chamber 14, while at the rear of the third vacuum heating chamber 36 is placed a back vacuum replacement chamber 47 for cooling the material to be treated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、物品の表面に付着した
水、油、亜鉛メッキ等の液体ないし固体を除去するため
の方法並びに装置であって、例えば、鉄板上にメッキさ
れた亜鉛や銅及び表面に付いた水や油等を除去するため
に利用される固体表面の連続清浄方法及び装置に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for removing water, oil, liquids or solids such as zinc plating, etc. adhering to the surface of an article, such as zinc plated on an iron plate or The present invention relates to a method and an apparatus for continuously cleaning a solid surface used for removing copper, water, oil and the like adhering to the surface.

【0002】[0002]

【従来の技術】従来、例えば自動車の表面の亜鉛メッキ
や油分などを取り除くための方法としては、トリクレ
ン、酸洗、ショット加工、又は、空気中にての酸化除去
などが知られている。
2. Description of the Related Art Conventionally, trichlene, pickling, shot processing, or oxidation removal in air is known as a method for removing galvanization or oil content on the surface of an automobile.

【0003】これらのうちでは酸洗が最も一般的である
が、その洗滌液が公害を惹き起こす虞れがあるだけでな
く、ランニングコスト、作業員の養成確保の点で問題が
ある。また、ショット加工法もランニングコストが高
く、亜鉛が付着したショット粒子の処理が困難などの問
題を抱えている。
Of these, pickling is the most common, but there is a possibility that the washing solution may cause pollution, and there are problems in running cost and securing training of workers. Further, the shot processing method also has a problem that the running cost is high and it is difficult to process shot particles to which zinc is attached.

【0004】一方、酸化加熱除去法は、処理品自身に酸
化物などができ、また、脱亜鉛性能が悪い。従って、鉄
板などを再利用するために溶解した場合、酸化鉄、酸化
亜鉛などのノロ(不溶解物質)や亜鉛が溶解炉炉壁に浸
入し、その結果炉自身の寿命を縮めるといった欠点があ
る。
On the other hand, in the oxidation heat removal method, oxides and the like are formed on the treated product itself, and the dezincification performance is poor. Therefore, when the iron plate or the like is melted for reuse, noro (insoluble substance) such as iron oxide and zinc oxide and zinc penetrate into the furnace wall of the melting furnace, and as a result, the life of the furnace itself is shortened. .

【0005】[0005]

【発明が解決しようとする課題】上述したように、従来
の清浄方法には多くの問題があった。そこで本発明は、
そのような問題のない固体表面の連続清浄方法及び連続
清浄装置を提供することを課題とする。
As described above, the conventional cleaning method has many problems. Therefore, the present invention is
An object of the present invention is to provide a continuous cleaning method and a continuous cleaning apparatus for a solid surface without such a problem.

【0006】[0006]

【課題を解決するための手段】本発明に係る清浄方法
は、被処理品を装入する密閉空間を有する密閉室を連設
し、被処理品を前記各密閉室内を順に通過させる過程に
おいて、前記密閉室内を個別に加熱すると共に真空に
し、又は、非酸化性ガスで加圧して加熱したり減圧した
りすることにより、前記被処理品に付着した固体並びに
液体を連続的に除去するようにしたことを特徴とする。
According to the cleaning method of the present invention, in the process of continuously providing a closed chamber having a closed space for charging the object to be treated, and allowing the object to be treated to pass through each of the enclosed chambers in order, By individually heating and vacuuming the sealed chamber, or by heating or depressurizing by pressurizing with a non-oxidizing gas, solids and liquids adhering to the article to be treated are continuously removed. It is characterized by having done.

【0007】また、本発明に係る清浄装置は、室温を上
昇させる加熱手段と、固体並びに液体を凝縮させる凝縮
手段と、前記凝縮手段を介して室内を減圧する減圧手段
と、室内を非酸化性ガスで加圧する加圧手段とを備えた
密閉室を適宜数連設し、前記複数の密閉室間において各
密閉室に設置された密閉ドアの開閉に伴って被処理品の
移動を可能にし、前記連設された密閉室の入口側及び出
口側に真空置換室を設置し、前記各密閉室における減
圧、加圧、加熱、凝縮、冷却をそれぞれ単独に制御可能
にしたことを特徴とする。
Further, the cleaning apparatus according to the present invention has a heating means for raising the room temperature, a condensing means for condensing solids and liquids, a decompressing means for decompressing the interior of the room through the condensing means, and a non-oxidizing interior of the room. An appropriate number of closed chambers provided with a pressurizing means for pressurizing with a gas are provided in series, and the object to be processed can be moved by opening and closing the closed doors installed in the closed chambers between the plurality of closed chambers. A vacuum substitution chamber is installed on the inlet side and the outlet side of the continuous sealed chambers, and decompression, pressurization, heating, condensation, and cooling in each of the sealed chambers can be independently controlled.

【0008】[0008]

【作 用】密閉空間内に装入した被処理品を真空状態で
各室において異なった温度に加熱し、又は、非酸化性ガ
スで加圧して加熱して付着物を各室において連続的に蒸
発させる。蒸発物は各密閉空間内を冷却、凝縮して連続
的に回収する。
[Operation] The objects to be treated placed in a closed space are heated in vacuum to different temperatures in each chamber, or pressurized with a non-oxidizing gas and heated to continuously deposit the deposits in each chamber. Evaporate. Evaporated substances are continuously collected by cooling and condensing in each closed space.

【0009】[0009]

【実施例】本発明に係る清浄方法の実施態様を、より具
体的に説明する。被処理品に付着している水、油、金属
メッキ等の液体及び固体を除去する場合には、この被処
理品を各密閉室内に順次装入し、各密閉空間内を減圧手
段によって個別に所望圧力に減圧した後加熱手段で加熱
すると共に真空にし、又は、加圧手段により非酸化性ガ
スを供給し、この非酸化性ガスによる熱伝達の作用で加
熱後真空にし、被処理品に付着した金属、水、油等の沸
点以上の温度まで加熱し、その金属等を蒸発させるよう
にする。その後、加熱状態のままで減圧することによっ
て蒸気を回収し、回収経路の途中に設けた凝縮手段で、
蒸発物を収容し、且つ、凝縮させる。
EXAMPLES The embodiments of the cleaning method according to the present invention will be described more specifically. When removing water, oil, liquids and solids such as metal plating adhered to the object to be processed, load the object to be processed into each closed chamber one by one, and individually in each closed space by decompression means. After the pressure is reduced to the desired pressure, it is heated by the heating means to make it vacuum, or the pressurizing means supplies non-oxidizing gas, and the heat transfer effect of this non-oxidizing gas makes it vacuum and then adheres to the object to be treated. The metal or the like is heated to a temperature above the boiling point of the metal, water, oil or the like to evaporate the metal or the like. After that, the steam is recovered by depressurizing it in the heated state, and the condensation means provided in the middle of the recovery path,
It contains the evaporant and condenses it.

【0010】なお、非酸化性ガスとしてはチッ素、アル
ゴン等の不活性ガスを使用し、密閉容器内を加圧、昇温
又は冷却する際、製品が酸化されないようにする。この
ガスは、予熱室に循環させて処理品を予熱するためにも
使用する。
An inert gas such as nitrogen or argon is used as the non-oxidizing gas so that the product is not oxidized when the pressure inside the closed container is increased, heated or cooled. This gas is also used to circulate in the preheating chamber to preheat the processed product.

【0011】次に、本発明の清浄方法を実施するために
使用される清浄装置の実施例を図面に依拠して説明す
る。加熱炉本体1内は、断熱性の密閉ドアで仕切られて
複数の密閉可能な室に分けられている。各室の底部には
被処理品を入れたトレイ60を搬送するための自走ロ−
ラ−(コロロ−ラ−)が設置されており、そのコロ軸が
室外に出されており、自走ロ−ラ−駆動装置に取り付け
られている。各室は、中空形状のレトルトの外側に断熱
材を配してある。
Next, an embodiment of a cleaning device used for carrying out the cleaning method of the present invention will be described with reference to the drawings. The inside of the heating furnace main body 1 is partitioned by a heat-insulating closed door to be divided into a plurality of airtight chambers. At the bottom of each chamber is a self-propelled roll for transporting a tray 60 containing the products to be processed.
A roller (color roller) is installed, the roller shaft is exposed to the outside of the room, and is attached to a self-propelled roller driving device. In each chamber, a heat insulating material is arranged outside the hollow retort.

【0012】一番前(図において左端)の室は前部真空
置換室3であり、その側部及び後部(次室側)に密閉ド
ア4、5が設けられている。6は密閉ドア4を開閉する
ドアシリンダ−、7は密閉ドア5を開閉するドアシリン
ダ−である。
The frontmost chamber (the left end in the figure) is the front vacuum displacement chamber 3, and sealing doors 4 and 5 are provided on the side and rear (next chamber side) thereof. Reference numeral 6 is a door cylinder that opens and closes the closed door 4, and 7 is a door cylinder that opens and closes the closed door 5.

【0013】また、8は被処理品を入れたトレイ60を
前部真空置換室3内に搬入するための搬入駆動装置(シ
リンダ−)であり、9は前部真空置換室3内で処理され
た被処理品を次室に送り込むためのシリンダ−である。
前部真空置換室3には更に、室内を真空にするための真
空ポンプ10、及び、被処理品から除去された金属、
水、油等を回収する凝縮手段11が設置されると共に、
予熱ガスを供給するガス循環パイプ12と、ガスを回収
する回収パイプ13が接続される。
Reference numeral 8 is a loading drive device (cylinder) for loading the tray 60 containing the article to be processed into the front vacuum displacement chamber 3, and 9 is processed in the front vacuum displacement chamber 3. It is a cylinder for sending the processed product to the next chamber.
The front vacuum replacement chamber 3 further includes a vacuum pump 10 for evacuating the chamber, and metal removed from the workpiece.
Condensing means 11 for collecting water, oil, etc. is installed, and
A gas circulation pipe 12 for supplying the preheated gas and a recovery pipe 13 for recovering the gas are connected.

【0014】14は前部真空置換室3に連設された第1
真空加熱室で、入口側にドアシリンダ−15により開閉
駆動される密閉ドア16を備える。また、第1真空加熱
室14には、当該室内を加熱するためのヒ−タ−17
と、当該室内と連通していて被処理品より除去された蒸
発物類を凝縮させる凝縮手段18、19と、凝縮手段1
8、19を介して当該室内を減圧する減圧手段たる真空
ポンプ20とを有する。真空ポンプ20には排気管が取
り付けられる。21は真空バルブ、22はフィルタ−で
ある。第1真空加熱室14には更に、室内の雰囲気を攪
拌する攪拌ファン23が1又は複数設けられる。
Reference numeral 14 designates a first vacuum connection chamber 3 connected to the front vacuum displacement chamber 3.
The vacuum heating chamber has a closed door 16 which is opened and closed by a door cylinder 15 on the inlet side. The first vacuum heating chamber 14 has a heater 17 for heating the chamber.
And condensing means 18 and 19 which are in communication with the chamber and condense evaporants removed from the article to be treated, and condensing means 1
It has a vacuum pump 20 as a pressure reducing means for reducing the pressure inside the chamber via 8 and 19. An exhaust pipe is attached to the vacuum pump 20. Reference numeral 21 is a vacuum valve, and 22 is a filter. The first vacuum heating chamber 14 is further provided with one or a plurality of stirring fans 23 that stir the atmosphere inside the chamber.

【0015】24は第2真空加熱室で、大体第1真空加
熱室14と同じ構成とされる。即ち、25は密閉ドア2
6を開閉するドアシリンダ−、27はヒ−タ−、28、
29は凝縮手段である。また、30は真空ポンプ、31
は真空バルブ、32はフィルタ−、33は攪拌ファンで
ある。第2真空加熱室24の場合は、更に後部にも密閉
ドア34が設けられ、ドアシリンダ−35により開閉駆
動される。
Reference numeral 24 denotes a second vacuum heating chamber, which has substantially the same structure as the first vacuum heating chamber 14. That is, 25 is the closed door 2
The door cylinder for opening and closing 6, 6 is a heater, 28,
29 is a condensing means. Further, 30 is a vacuum pump, 31
Is a vacuum valve, 32 is a filter, and 33 is a stirring fan. In the case of the second vacuum heating chamber 24, a hermetically closed door 34 is further provided at the rear part and is opened and closed by a door cylinder 35.

【0016】36は第3真空加熱室で、これも上記同
様、密閉ドア37、密閉ドア37を開閉駆動するドアシ
リンダ−38、凝縮手段39、40、真空ポンプ41、
真空バルブ42、フィルタ−43並びに冷却ファン44
が設けられる。また、後部側にも密閉ドア45とドアシ
リンダ−46が設置される。
Reference numeral 36 denotes a third vacuum heating chamber, which is also the same as the above, which is a closed door 37, a door cylinder 38 for opening and closing the closed door 37, condensing means 39, 40, a vacuum pump 41,
Vacuum valve 42, filter-43 and cooling fan 44
Is provided. Further, a hermetic door 45 and a door cylinder 46 are also installed on the rear side.

【0017】47は第3加熱室36に続く後部真空置換
室で、ドアシリンダ−48によって開閉駆動される密閉
ドア49と、室内を真空にする真空ポンプ50と、凝縮
手段51と、室内に搬送されたトレイ60を搬出する搬
出駆動装置(エアシリンダ−)52とを備える。
Reference numeral 47 is a rear vacuum replacement chamber following the third heating chamber 36, which is a closed door 49 which is driven to open and close by a door cylinder 48, a vacuum pump 50 which vacuums the interior of the chamber, a condensing means 51, and the interior of the chamber. And a carry-out drive device (air cylinder) 52 for carrying out the tray 60 that has been ejected.

【0018】また、上記の外に図示してないがチッ素等
のガスボンベが配備され、調圧バルブ及び圧力計を備え
た配管を介し、各真空加熱室14、24、36に接続さ
れる。
Although not shown, a gas cylinder made of nitrogen or the like is arranged outside the above, and is connected to each of the vacuum heating chambers 14, 24 and 36 through a pipe equipped with a pressure regulating valve and a pressure gauge.

【0019】上記構成において、トレイ60に入れられ
た被処理品が、搬入駆動装置8の作用で前部真空置換室
3内に搬入されると、ドアシリンダ−6の作用で密閉ド
ア4が閉じる。その際密閉ドア5は閉じていて、室内は
密閉される。そこで、真空ポンプ10の作用で室内が真
空にされると共に、ガス循環パイプ12を通し、後部真
空置換室47で温められたチッ素ガスが供給され、以て
被処理品が真空置換にて予熱される。
In the above structure, when the article to be processed put in the tray 60 is carried into the front vacuum displacement chamber 3 by the action of the carry-in drive device 8, the closed door 4 is closed by the action of the door cylinder 6. . At that time, the closed door 5 is closed and the room is closed. Therefore, the inside of the chamber is evacuated by the action of the vacuum pump 10, the nitrogen gas warmed in the rear vacuum replacement chamber 47 is supplied through the gas circulation pipe 12, and the object to be processed is preheated by the vacuum replacement. To be done.

【0020】次いで、ドアシリンダ−7の作用で密閉ド
ア5が、また、ドアシリンダ−15の作用で密閉ドア1
6が開き、トレイ60はシリンダ−9の作用で押圧さ
れ、自走ロ−ラ−によって第1真空加熱室14内に送り
込まれる。そこにおいて密閉ドア16が閉じると、真空
ポンプ20が動作し、室内が真空にされると共にヒ−タ
−17によって加熱され、以てトレイ60内の被処理品
より、室温に応じて水、油等が蒸発して除去される。
Next, the closed door 5 is operated by the door cylinder 7, and the closed door 1 is operated by the door cylinder 15.
6 is opened, the tray 60 is pressed by the action of the cylinder 9, and is fed into the first vacuum heating chamber 14 by the self-propelled roller. When the airtight door 16 is closed there, the vacuum pump 20 is operated, and the chamber is evacuated and heated by the heater 17, so that water or oil depending on the room temperature is discharged from the article to be treated in the tray 60. Etc. are evaporated and removed.

【0021】除去された蒸発物は、凝縮手段18、19
に取り込まれて凝縮される。この第1真空加熱室14で
の加熱は比較的低温にて行ない、主として水、油等の液
体の除去回収を行なう。
The removed evaporate is condensed by the condensing means 18, 19.
Is taken in and condensed. The heating in the first vacuum heating chamber 14 is performed at a relatively low temperature, and mainly liquids such as water and oil are removed and recovered.

【0022】続いて密閉ドア26が開扉し、被処理品は
第2真空加熱室24へ搬送され、密閉ドア26閉扉後、
上記第1真空加熱室14同様に、減圧、加熱が行なわ
れ、また、蒸発物類の凝縮が行なわれる。第2真空加熱
室24における加熱は第1真空加熱室14におけるより
も高温で行ない、亜鉛メッキ等の固体を真空蒸発させ
る。
Subsequently, the closed door 26 is opened, the product to be processed is transferred to the second vacuum heating chamber 24, and after the closed door 26 is closed,
Similar to the first vacuum heating chamber 14, depressurization and heating are performed, and evaporation materials are condensed. The heating in the second vacuum heating chamber 24 is performed at a temperature higher than that in the first vacuum heating chamber 14, and the solid such as zinc plating is evaporated in vacuum.

【0023】被処理物は更に第3真空加熱室36に送ら
れ、そこで更に高温に晒されて銅等の除去が行なわれ
る。次いで被処理物は後部真空置換室47に送られ、そ
こにおいてチッ素ガスで加圧されて冷却された後搬送さ
れる。その際温められたチッ素ガスは、ガス循環パイプ
12を経て前部真空置換室3に導かれる。なお、前部真
空置換室3と後部真空置換室47は、共に各真空加熱室
内への空気の流入を阻止し、被処理物の酸化を防止する
役目を果たす。
The object to be processed is further sent to the third vacuum heating chamber 36, where it is exposed to a higher temperature to remove copper and the like. Next, the object to be processed is sent to the rear vacuum displacement chamber 47, where it is pressurized with nitrogen gas, cooled, and then transported. At that time, the heated nitrogen gas is introduced into the front vacuum displacement chamber 3 through the gas circulation pipe 12. The front vacuum substitution chamber 3 and the rear vacuum substitution chamber 47 both serve to prevent the inflow of air into each vacuum heating chamber and prevent the oxidation of the object to be processed.

【0024】[0024]

【発明の効果】本発明は上述した通りであって、被処理
品の表面に付着した水、油、金属等の液体や固体を、従
来のような特別な清浄剤や燃焼炎等を使用することな
く、極めて良好にしかも多量に除去することができ、ま
た、密閉空間内で清浄処理するために、公害や作業環境
の汚染等の心配が全くなく、ランニングコストが安くて
自動化も容易であり、しかも付着物は真空蒸発によって
回収するために純粋に近いものが得られ、回収物自身の
再利用も可能なる特徴のある極めて有用な技術である。
As described above, the present invention uses liquids or solids such as water, oil and metals adhered to the surface of the article to be treated, and uses special detergents and combustion flames conventionally used. It can be removed very well and in large amounts without any problems. Moreover, since it is cleaned in a closed space, there is no concern about pollution or pollution of the working environment, the running cost is low and automation is easy. Moreover, since the adhered substance is recovered by vacuum evaporation, a substance which is almost pure can be obtained, and the recovered substance itself can be reused, which is a very useful technique.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る装置の実施例の正面図である。1 is a front view of an embodiment of the device according to the invention.

【図2】本発明に係る装置の実施例の平面図である。FIG. 2 is a plan view of an embodiment of the device according to the invention.

【符号の説明】[Explanation of symbols]

1 加熱炉本体 3 前部真空置換室 10 真空ポンプ 11 凝縮手段 12 ガス循環パイプ 14 第1真空加熱室 17 ヒ−タ− 18 凝縮手段 19 凝縮手段 20 真空ポンプ 24 第2真空加熱室 27 ヒ−タ− 28 凝縮手段 29 凝縮手段 30 真空ポンプ 36 第3真空加熱室 39 凝縮手段 40 凝縮手段 47 後部真空置換室 50 真空ポンプ 51 凝縮手段 1 Heating Furnace Main Body 3 Front Vacuum Displacement Chamber 10 Vacuum Pump 11 Condensing Means 12 Gas Circulation Pipe 14 First Vacuum Heating Chamber 17 Heater 18 Condensing Means 19 Condensing Means 20 Vacuum Pump 24 Second Vacuum Heating Chamber 27 Heater -28 Condensing means 29 Condensing means 30 Vacuum pump 36 Third vacuum heating chamber 39 Condensing means 40 Condensing means 47 Rear vacuum displacement chamber 50 Vacuum pump 51 Condensing means

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 被処理品を装入する密閉空間を有する密
閉室を連設し、被処理品を前記各密閉室内を順に通過さ
せる過程において、前記密閉室内を個別に加熱すると共
に真空にし、又は、非酸化性ガスで加圧して加熱したり
減圧したりすることにより、前記被処理品に付着した固
体並びに液体を連続的に除去するようにしたことを特徴
とする固体表面の清浄方法。
1. A closed chamber having a closed space for loading a treatment object is continuously provided, and in the process of sequentially passing the treatment object through each of the closed chambers, the closed chamber is individually heated and evacuated, Alternatively, the method for cleaning the surface of a solid is characterized in that the solid and the liquid adhering to the article to be treated are continuously removed by applying pressure with a non-oxidizing gas to heat or depressurize.
【請求項2】 室温を上昇させる加熱手段と、固体並び
に液体を凝縮させる凝縮手段と、前記凝縮手段を介して
室内を減圧する減圧手段と、室内を非酸化性ガスで加圧
する加圧手段とを備えた密閉室を適宜数連設し、前記複
数の密閉室間において各密閉室に設置された密閉ドアの
開閉に伴って被処理品の移動を可能にし、前記連設され
た密閉室の入口側及び出口側に真空置換室を設置し、前
記各密閉室における減圧、加圧、加熱、凝縮、冷却をそ
れぞれ単独に制御可能にしたことを特徴とする固体表面
の連続清浄装置。
2. A heating means for raising the room temperature, a condensing means for condensing solids and liquids, a decompressing means for decompressing the inside of the room through the condensing means, and a pressurizing means for pressurizing the inside of the room with a non-oxidizing gas. An appropriate number of closed chambers provided with are connected to each other, and the objects to be processed can be moved by opening and closing the closed doors installed in each closed chamber between the plurality of closed chambers. A continuous cleaning apparatus for solid surfaces, characterized in that vacuum replacement chambers are installed on the inlet side and the outlet side, and decompression, pressurization, heating, condensation, and cooling in each of the closed chambers can be independently controlled.
JP3017015A 1991-01-17 1991-01-17 Method and apparatus for continuously cleaning solid surface Expired - Fee Related JP2528388B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3017015A JP2528388B2 (en) 1991-01-17 1991-01-17 Method and apparatus for continuously cleaning solid surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3017015A JP2528388B2 (en) 1991-01-17 1991-01-17 Method and apparatus for continuously cleaning solid surface

Publications (2)

Publication Number Publication Date
JPH0699153A true JPH0699153A (en) 1994-04-12
JP2528388B2 JP2528388B2 (en) 1996-08-28

Family

ID=11932175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3017015A Expired - Fee Related JP2528388B2 (en) 1991-01-17 1991-01-17 Method and apparatus for continuously cleaning solid surface

Country Status (1)

Country Link
JP (1) JP2528388B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013250089A (en) * 2012-05-30 2013-12-12 Azbil Corp Humidity measurement system
JP2013250090A (en) * 2012-05-30 2013-12-12 Azbil Corp Dew point temperature measurement system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107413745A (en) * 2016-05-23 2017-12-01 惠州市鼎合智能装备有限公司 The cleaning of electrokinetic cell and the method and system of cleaning agent recovery

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4227922A (en) * 1977-06-09 1980-10-14 Encomech Engineering Services Ltd. Material separation
JPS5792127A (en) * 1980-11-28 1982-06-08 Oriental Eng Kk Continuous bright heat treatment of metal in furnace containing gaseous atmosphere
JPS6071077A (en) * 1983-09-29 1985-04-22 椛澤 均 Washing method and washer
JPS62117686A (en) * 1985-11-19 1987-05-29 株式会社 サンテツク Washing method and washer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4227922A (en) * 1977-06-09 1980-10-14 Encomech Engineering Services Ltd. Material separation
JPS5792127A (en) * 1980-11-28 1982-06-08 Oriental Eng Kk Continuous bright heat treatment of metal in furnace containing gaseous atmosphere
JPS6071077A (en) * 1983-09-29 1985-04-22 椛澤 均 Washing method and washer
JPS62117686A (en) * 1985-11-19 1987-05-29 株式会社 サンテツク Washing method and washer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013250089A (en) * 2012-05-30 2013-12-12 Azbil Corp Humidity measurement system
JP2013250090A (en) * 2012-05-30 2013-12-12 Azbil Corp Dew point temperature measurement system

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Publication number Publication date
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