JPH0695125B2 - Semiconductor device test equipment - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device test apparatus for simultaneously testing a plurality of electrical characteristics of a semiconductor device.

[Conventional technology]

A semiconductor device (hereinafter referred to as an IC) is manufactured by a manufacturing device and then subjected to various tests. Among them, a conventional test device for testing electrical characteristics is shown in a perspective view in FIG. It is configured. That is, a rectangular tray 2 which is driven by a driving device and moves in a direction indicated by an arrow A in the drawing is disposed on a moving passage 1a of a base 1 formed in an L shape in plan view. A test mechanism 3 is provided above the tray 2 which is stopped at the end of the passage 1a.
Reference numeral 4 denotes an IC stored in the tray 2 after being tested for electrical characteristics by the test mechanism 3. On the other hand, a plurality of trays 5 are juxtaposed on the base 1 in a direction orthogonal to the moving direction A of the trays 2, and above the trays 5 are indicated by arrows B and C in the figure. A vertically movable sorter 6 supported by a support member movable in the orthogonal direction is provided.

With this configuration, the plurality of ICs 4 whose electrical characteristics have been tested by the test mechanism 3 are housed in the tray 2, and the tray 2 moves in the direction of arrow A and is moved to the position indicated by reference numeral 2A. Stop. Simultaneously with the stop, the sorting device 6 moves back and forth, left and right and up and down to grip the IC 4, and the gripped IC 4 is stored in each tray 5. In this case, the classifying device 6 classifies the test results according to the test results and stores them in different trays 5.

[Problems to be Solved by the Invention]

However, in such a conventional test apparatus, since the test part and the classification part have an integrated structure, the test conditions are diversified at present, and the test time by the test mechanism 3 is long. When the number of tests is small, the rest time of the classifying device 6 is long and the operating rate is low. On the contrary, when the test time by the test mechanism 3 is short and the number of tests is large, the classifying device 6 is There is a problem in that the functions of the test mechanism 3 and the classifying device 6 are unbalanced and the respective functions are not fully utilized, such that the capacity of the test mechanism 3 is insufficient and the operating rate of the test mechanism 3 decreases.

The present invention has been made in view of the above points, and provides a semiconductor device test apparatus capable of maximizing the ability to respond to changes in test conditions due to product type changes and coping therewith. It is an object.

[Means for solving problems]

In order to achieve such an object, according to the present invention, a plurality of transfer trays in which semiconductor devices after an electrical characteristic test are stored are sequentially moved from a test section to a sorting section, and the semiconductors in the transfer trays are moved. In a semiconductor device test device in which devices are classified by test results according to test results and stored in a storage tray, a plurality of transfer trays provided in a transfer path of the transfer tray are sequentially stored and the classification is performed. A tray storage box to be conveyed to a unit, an information storage medium attached to the tray storage box, and information in which the coordinates of the semiconductor devices stored in the tray storage box and test results are associated with each other in the information storage medium. An information writing device for writing and an information reading device for reading the written information and operating the classification device are provided.

[Action]

Semiconductor devices whose electrical characteristics have been tested with test equipment
The tray storage box is stored in the transfer tray and is transferred, and is sequentially stored in the tray storage box during the transfer, and then the tray storage box is transferred to the sorting unit. In this case, information that associates the coordinates of the semiconductor devices in the tray storage box with the test results is written in the information storage medium attached to the tray storage box by the information writing device, and this information is read by the information reading device and classified. Since the device is operated, the semiconductor devices in the tray taken out from the tray storage box by this sorting device are sorted according to the test result and stored in the storage tray.

〔Example〕

FIG. 1 is a perspective view showing an embodiment of a semiconductor device test apparatus according to the present invention. In the figure, the test apparatus 10 is divided into a test unit 11 and a classification unit 12, and
A tray 14 for transporting is provided on 13 so as to be movable in a direction indicated by an arrow D in the figure. A test mechanism 15 similar to the conventional one is provided above the tray 14 stopped on the table 13, and a plurality of semiconductor devices 16 (hereinafter referred to as IC16) tested for electrical characteristics by the test mechanism 15. ) Is the tray
It is configured to be stored in 14.

Between the test section 11 and the sorting section 12, which is in the transport path of the tray 14 indicated by the arrow D, a tray storage box 17 formed in a rectangular box shape that opens upward is adjacent to the base 13 of the test section 11. It is placed on the floor, and inside the tray storage box 17,
Multiple trays 14 that house ICs 16 and move forward in the direction of arrow D
Are configured to be stacked one above the other and stored.
On the side surface of the tray storage box 17, it is possible to input / output or store information in which the test result of the IC 16 stored inside and the coordinates of the IC 16 in the tray 14 are associated with each other, for example, by optical communication. IC card 18 as information storage medium
Is mounted, and on the side of the IC card 18 side of the tray storage box 17, an information writing device 19 that writes the test result information to the IC card 18 in a contactless manner by, for example, optical communication, faces the IC card 18. It is provided.

On the other hand, on the table 20 of the classification unit 12, a plurality of classification storage trays 21 of ICs 16 are placed in parallel, and below the tray storage box 17, the tray storage box 17 is indicated by an arrow E in the figure. As shown, the test unit 11 is configured to be moved and stored. IC card 18 in the tray storage box 17 moved to the sorting section 12 side
An information reading device 22 for reading the test result information written in the IC card 18 from the IC card 18 in a contactless manner by, for example, optical communication is provided corresponding to the IC card 18 on the side. Then, above the tray 21, the arrows F and G are shown in the figure.
A vertically movable sorter 23 supported by a support member that is movable in the orthogonal direction shown in FIG.
The trays 14 are taken out one by one onto the table 20, and the ICs 16 are picked up by moving in each direction based on the test result read by the information reading device 22 and stored in each tray 21 according to the test result. Is configured.

The operation of the test apparatus configured as above will be described.
The electrical characteristics were tested by the test mechanism 15 of the test section 11.
The IC16 is stored in the tray 14 for transportation.
Is driven by a driving device and conveyed in the direction of arrow D. Each of the plurality of trays 14 sequentially conveyed is stopped above the tray storage box 17, and is sequentially stored in the tray storage box 17 while being vertically stacked. At this time, information in which the coordinates of the IC 16 in the tray 14 stored in the tray storage box 17 and the test result of the IC 16 are associated with each other is written in the IC card 18 in a contactless manner by, for example, optical communication of the information writing device 19. When this operation is repeated and the tray storage box 17 is filled with the tray 14, the tray storage box 17 is driven by the driving device and conveyed to the sorting unit 12.

When the tray storage box 17 stops in the sorting unit 12, the sorting device 23 takes out the tray 14 from the tray storage box 17, and at the same time, the information reading device 22 associates the coordinates of the IC 16 from the IC card 18 with the test result. The information is read and the sorting device 23 is operated by this, and each IC 16 is sorted according to the test result and stored in each storage tray 21.

In this way, the test apparatus 10 is separated into the test section 11 and the separation section 12, and the tray storage box 17 moves between them, so that the type of the IC 16 is changed and the test conditions such as the number of simultaneous measurement and the test time are changed. Even if it fluctuates, it does not affect the processing capacity,
For example, when the test time is long, if a plurality of test units are provided for one classification unit, the processing capacities of both units become the same, and the processing capacities do not become unbalanced as in the conventional case.

Although an IC card capable of transmitting and receiving information by optical communication is illustrated as the information storage medium in this embodiment, an information storage medium such as a floppy disk may be used. However, by using optical communication as the communication between the information writing device, the information reading device, and the information storage medium as in the present embodiment, it is possible to perform communication in a non-contact state. The mechanism for inserting and removing the information storage medium is not required, the cost is reduced and the durability is improved.

Further, in the present embodiment, an example in which the classification function is an automatic device has been shown, but a person may perform information that is extracted using a computer or the like and displayed on a display or paper.

〔The invention's effect〕

As is apparent from the above description, according to the present invention, in the semiconductor device test apparatus, the information storage medium is attached to the transport tray for the tested semiconductor device housing provided in the test section separated from the classification section, Write information that associates the coordinates of the semiconductor device in the tray with the test result,
After moving the transport tray to the sorting unit, the sorting device is operated by the information read from the information storage medium, and the semiconductor devices in the transport tray taken out from the tray storage box are sorted according to the test results and a plurality of semiconductor devices are sorted. Since the tray storage box is configured to be stored in the storage tray, the tray storage box can be moved between the separated test section and classification section to classify and store the semiconductor devices according to test results. Even if the test conditions change due to the change of the device type, the processing capacity of the test section and the classification section does not become unbalanced as in the past, and the processing capacity of the test section and the classification section is maximized. In addition, in order to balance the processing capacity, it is only necessary to increase or decrease the number of test units, and it is possible to reduce the equipment cost. Further, since the test unit and the classification unit are independent, communication interference does not occur between them, and the operation rate is improved.

[Brief description of drawings]

FIG. 1 is a perspective view of a test device showing an embodiment of a semiconductor device test device according to the present invention, and FIG. 2 is a perspective view of a conventional semiconductor device test device. 10 …… Test device, 11 …… Test section, 12 …… Classification section, 14
...... Transport tray, 15 …… Test mechanism, 16 …… Semiconductor device, 17 …… Tray storage box, 18 …… IC card, 19 …… Information writing device, 21 …… Storage tray, 22 …… Information reading Device, 23 …… Sorting device.

Claims (1)

[Claims] 1. A plurality of carrying trays each containing a semiconductor device after an electrical characteristic test are sequentially moved from a test section to a sorting section, and the semiconductor devices in the carrying tray are sorted by test results by the sorting apparatus. In a test device for a semiconductor device that sorts and stores in a storage tray, a tray storage box that is provided in a test unit separated from the sorting unit and sequentially stores the plurality of transport trays and moves to the sorting unit. An information storage medium attached to the tray storage box, an information writing device that writes information in which the coordinates of the semiconductor device stored in the tray storage box and test results are associated with each other into the information storage medium, and this writing And an information reading device for operating the classification device by reading the stored information.