JPH0693376B2 - Temperature measurement method in high frequency induction heating device - Google Patents
Temperature measurement method in high frequency induction heating deviceInfo
- Publication number
- JPH0693376B2 JPH0693376B2 JP13532986A JP13532986A JPH0693376B2 JP H0693376 B2 JPH0693376 B2 JP H0693376B2 JP 13532986 A JP13532986 A JP 13532986A JP 13532986 A JP13532986 A JP 13532986A JP H0693376 B2 JPH0693376 B2 JP H0693376B2
- Authority
- JP
- Japan
- Prior art keywords
- induction heating
- frequency induction
- magnetic flux
- heating device
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は高周波誘導加熱装置における温度測定方法に
関するものである。The present invention relates to a temperature measuring method in a high frequency induction heating device.
プラズマ浸炭を行なう場合等では、被処理物の温度を測
定することが必要となっている。When performing plasma carburization, it is necessary to measure the temperature of the object to be treated.
従来、非接触にて前記の様な被処理物の温度を測定する
場合、輻射温度計などが用いられていたが輻射率のばら
つきにより温度が正確に測定出来なかった。Conventionally, a radiation thermometer or the like has been used in the case of measuring the temperature of the object to be treated in a non-contact manner, but the temperature could not be accurately measured due to variations in emissivity.
そこでこの発明は、前記の様な従来の温度測定法を改良
して温度測定の精度を上げることのできる高周波誘導加
熱装置における温度測定法を提供することを目的とす
る。Therefore, an object of the present invention is to provide a temperature measuring method in a high-frequency induction heating device, which can improve the temperature measuring accuracy by improving the conventional temperature measuring method as described above.
この高周波誘導加熱装置における温度測定方法は非接触
にて温度を測定する際に、磁気変態点を温度定点として
検出することにより、非接触式温度計の校正を行い、温
度測定の精度を上げる点に特徴がある。The temperature measurement method in this high-frequency induction heating device is to improve the accuracy of temperature measurement by calibrating the non-contact type thermometer by detecting the magnetic transformation point as the temperature fixed point when measuring the temperature in a non-contact manner. Is characterized by.
以下、図示するこの発明の実施例により説明する。第１
図に、この発明による温度測定方法を採用した高周波誘
導加熱装置を示した。Hereinafter, description will be made with reference to the illustrated embodiment of the present invention. First
The figure shows a high-frequency induction heating apparatus that employs the temperature measuring method according to the present invention.
ここで、スペーサー７を介して２段に積まれた強磁性体
である被処理物１の周囲を加熱用コイル２が取り囲むよ
うに配置され、この加熱用コイル２への通電により発生
する磁束６で被処理物１が誘導加熱される。Here, the heating coil 2 is arranged so as to surround the workpiece 1 which is a ferromagnetic material stacked in two stages via the spacer 7, and the magnetic flux 6 generated by energizing the heating coil 2 is generated. The object to be processed 1 is induction heated.
また、被処理物１の近傍には誘導起電力を測定する磁束
検出用コイル３が設けられ、さらに加熱用コイル２の外
側には非接触にて被処理物１の温度を測定する赤外線温
度計４が設けられている。Further, a magnetic flux detecting coil 3 for measuring an induced electromotive force is provided near the object to be processed 1, and an infrared thermometer for measuring the temperature of the object to be processed 1 in a non-contact manner outside the heating coil 2. 4 are provided.
ここで、被処理物１は温度を上げていくと材質に固有の
磁気変態温度Tcにおいて、強磁性から常磁性に相転移
し、磁束検出用コイル３に発生する誘導起電力が急激に
減少する。Here, as the temperature of the object to be processed 1 rises, the phase transition from ferromagnetic to paramagnetic occurs at the magnetic transformation temperature Tc peculiar to the material, and the induced electromotive force generated in the magnetic flux detecting coil 3 sharply decreases. .
この誘導起電力の減少から、磁気変態温度Tcを検出し、
赤外線温度計４の指示値を較正する事により温度測定精
度を高める。From this decrease in induced electromotive force, the magnetic transformation temperature Tc is detected,
By calibrating the indicated value of the infrared thermometer 4, the temperature measurement accuracy is improved.
すなわち、強磁性体を高周波誘導加熱すると被処理物１
内の磁束６は第２図に示すように、近似的に表皮深さδ
FeWの表皮効果５の部分のみを真空の磁束密度のμｒ倍
（μｒは比透磁率）の密度で分布する。That is, when the ferromagnetic material is subjected to high frequency induction heating, the object to be processed 1
As shown in FIG. 2, the magnetic flux 6 in the inside is approximately the skin depth δ.
Only the skin effect 5 portion of F e W is distributed with a density of μr times the magnetic flux density of vacuum (μr is the relative permeability).
被処理物１が磁気変態温度Tcにて強磁性体から常磁性体
に相転移を起こすと被処理物１内の磁束６の分布は比透
磁率μｒ＞＞１からμｒ＝１に減少するのに伴い第２図
から第３図に示した様に磁束検出用コイル３と交鎖する
磁束６が減少する。When the object 1 undergoes a phase transition from the ferromagnetic material to the paramagnetic material at the magnetic transformation temperature Tc, the distribution of the magnetic flux 6 in the object 1 decreases from relative permeability μr >> 1 to μr = 1. Along with this, as shown in FIGS. 2 to 3, the magnetic flux 6 crossing the magnetic flux detecting coil 3 decreases.
従って、磁束検出用コイル３に発生する誘導起電力は第
４図の様になり、この変化から被処理物１の材質に固有
の磁気変態温度Tcを検出し、赤外線温度計４の指示値を
較正する。Therefore, the induced electromotive force generated in the magnetic flux detecting coil 3 is as shown in FIG. 4, and the magnetic transformation temperature Tc peculiar to the material of the object to be processed 1 is detected from this change, and the indicated value of the infrared thermometer 4 is set. Calibrate.
この発明による高周波誘導加熱装置における温度測定方
法の実施例は以上の通りであり次に述べる効果を挙げる
ことができる。The embodiment of the temperature measuring method in the high frequency induction heating apparatus according to the present invention is as described above, and the following effects can be obtained.
温度測定方法を改良して温度測定の精度を上げることの
できる高周波誘導加熱装置における温度測定方法とな
る。The temperature measuring method in a high-frequency induction heating device is capable of improving the temperature measuring accuracy by improving the temperature measuring method.
第１図はこの発明による温度測定方法を採用した高周波
誘導加熱装置の全体図、第２図は被処理物が強磁性金属
の場合における磁束線図、第３図は常磁性金属の磁束線
図、第４図は検出コイルの誘導起電力特性図である。 １……被処理物、２……加熱用コイル、 ３……磁束検出用コイル、 ４……赤外線温度計、５……表皮効果、 ６……磁束、７……スペーサー。FIG. 1 is an overall view of a high-frequency induction heating apparatus adopting the temperature measuring method according to the present invention, FIG. 2 is a magnetic flux diagram when the object to be processed is a ferromagnetic metal, and FIG. 3 is a magnetic flux diagram of a paramagnetic metal. 4 is an induced electromotive force characteristic diagram of the detection coil. 1 ... Object to be treated, 2 ... Heating coil, 3 ... Magnetic flux detecting coil, 4 ... Infrared thermometer, 5 ... Skin effect, 6 ... Magnetic flux, 7 ... Spacer.
Claims (1)
おいて、 磁束検出コイルを用いて前記強磁性体内の磁束による誘
導起電力を検出し、当該誘導起電力の変化から前記強磁
性体内の磁気変態点を検出し、非接触温度計の指示値を
較正することを特徴とする高周波誘導加熱装置における
温度測定方法。1. In an induction heating apparatus using a ferromagnetic material as an object to be processed, a magnetic flux detection coil is used to detect an induced electromotive force due to a magnetic flux in the ferromagnetic body, and the change in the induced electromotive force causes a change in the ferromagnetic body. A method for measuring temperature in a high-frequency induction heating device, characterized by detecting the magnetic transformation point of the above and calibrating the indicated value of the non-contact thermometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13532986A JPH0693376B2 (en) | 1986-06-11 | 1986-06-11 | Temperature measurement method in high frequency induction heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13532986A JPH0693376B2 (en) | 1986-06-11 | 1986-06-11 | Temperature measurement method in high frequency induction heating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62291891A JPS62291891A (en) | 1987-12-18 |
| JPH0693376B2 true JPH0693376B2 (en) | 1994-11-16 |
Family
ID=15149217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13532986A Expired - Lifetime JPH0693376B2 (en) | 1986-06-11 | 1986-06-11 | Temperature measurement method in high frequency induction heating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0693376B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3724857B2 (en) * | 1995-09-18 | 2005-12-07 | 株式会社瀬田技研 | Temperature control device and start method for electromagnetic induction heating device |
-
1986
- 1986-06-11 JP JP13532986A patent/JPH0693376B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62291891A (en) | 1987-12-18 |
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