JPH0690219B2 - 機械的な力及び力作用を測定するための装置 - Google Patents

機械的な力及び力作用を測定するための装置

Info

Publication number
JPH0690219B2
JPH0690219B2 JP2507906A JP50790690A JPH0690219B2 JP H0690219 B2 JPH0690219 B2 JP H0690219B2 JP 2507906 A JP2507906 A JP 2507906A JP 50790690 A JP50790690 A JP 50790690A JP H0690219 B2 JPH0690219 B2 JP H0690219B2
Authority
JP
Japan
Prior art keywords
tongues
tongue
bridge
layer
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2507906A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04504759A (ja
Inventor
ベルンハルト ワーグナー
ヴォルフガング ベネッケ
ヴェルナー リートミュラー
ウヴェ シュナッケンベルグ
Original Assignee
フラウンホッファー―ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー．ファオ．
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by フラウンホッファー―ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー．ファオ． filed Critical フラウンホッファー―ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー．ファオ．
Publication of JPH04504759A publication Critical patent/JPH04504759A/ja
Publication of JPH0690219B2 publication Critical patent/JPH0690219B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP2507906A 1989-06-23 1990-05-31 機械的な力及び力作用を測定するための装置 Expired - Fee Related JPH0690219B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3920645A DE3920645A1 (de) 1989-06-23 1989-06-23 Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
DE3920645.9 1989-06-23
PCT/DE1990/000412 WO1991000522A1 (de) 1989-06-23 1990-05-31 Vorrichtung zur messung mechanischer kräfte und kraftwirkungen

Publications (2)

Publication Number Publication Date
JPH04504759A JPH04504759A (ja) 1992-08-20
JPH0690219B2 true JPH0690219B2 (ja) 1994-11-14

Family

ID=6383446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2507906A Expired - Fee Related JPH0690219B2 (ja) 1989-06-23 1990-05-31 機械的な力及び力作用を測定するための装置

Country Status (5)

Country Link
US (1) US5335544A (enExample)
EP (1) EP0494143B1 (enExample)
JP (1) JPH0690219B2 (enExample)
DE (2) DE3920645A1 (enExample)
WO (1) WO1991000522A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006189431A (ja) * 2004-12-29 2006-07-20 Commiss Energ Atom マイクロファクトリー・コーム容量加速度計
JP2013503341A (ja) * 2009-08-26 2013-01-31 フリースケール セミコンダクター インコーポレイテッド 応力分離部を有するｍｅｍｓデバイスおよび製造方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05164775A (ja) * 1991-12-17 1993-06-29 Atsugi Unisia Corp 加速度センサ
US5461916A (en) * 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
DE4421337A1 (de) * 1994-06-17 1995-12-21 Telefunken Microelectron Ätzverfahren zur Herstellung von quasiplanaren, freitragenden Strukturen in Silizium
US5542295A (en) * 1994-12-01 1996-08-06 Analog Devices, Inc. Apparatus to minimize stiction in micromachined structures
US5610431A (en) * 1995-05-12 1997-03-11 The Charles Stark Draper Laboratory, Inc. Covers for micromechanical sensors and other semiconductor devices
US5817942A (en) 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US6161440A (en) 1997-08-14 2000-12-19 Alliedsignal Inc. Low metalization creep sensor
EP1050743A3 (en) * 1999-05-07 2003-08-13 Alps Electric Co., Ltd. Tuning fork gyroscope
DE19949605A1 (de) 1999-10-15 2001-04-19 Bosch Gmbh Robert Beschleunigungssensor
DE10049324B4 (de) * 2000-10-05 2005-11-03 Robert Bosch Gmbh Einrichtung zur Erfassung von Verformungen an Kraftfahrzeugbaugruppen
EP1495482A2 (en) * 2001-12-06 2005-01-12 Memgen Corporation Complex microdevices and appparatus and methods for fabricating such devices
US7185542B2 (en) * 2001-12-06 2007-03-06 Microfabrica Inc. Complex microdevices and apparatus and methods for fabricating such devices
US7372616B2 (en) * 2001-12-06 2008-05-13 Microfabrica, Inc. Complex microdevices and apparatus and methods for fabricating such devices
US7275452B2 (en) * 2003-03-25 2007-10-02 Kulite Semiconductor Products, Inc. Stop assembly for a beam type load cell
JP4453587B2 (ja) * 2005-03-24 2010-04-21 株式会社デンソー 加速度センサ
WO2012109266A2 (en) * 2011-02-07 2012-08-16 Ion Geophysical Corporation Method and apparatus for sensing underwater signals
DE102013216898B4 (de) * 2013-08-26 2023-02-09 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558263B1 (fr) * 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
DE8607653U1 (de) * 1986-03-20 1987-08-06 Robert Bosch Gmbh, 7000 Stuttgart Beschleunigungsaufnehmer
DE3611360A1 (de) * 1986-04-04 1987-10-08 Bosch Gmbh Robert Sensor zur selbsttaetigen ausloesung von insassenschutzvorrichtungen
US5111693A (en) * 1988-01-13 1992-05-12 The Charles Stark Draper Laboratory, Inc. Motion restraints for micromechanical devices
US4882933A (en) * 1988-06-03 1989-11-28 Novasensor Accelerometer with integral bidirectional shock protection and controllable viscous damping

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006189431A (ja) * 2004-12-29 2006-07-20 Commiss Energ Atom マイクロファクトリー・コーム容量加速度計
JP2013503341A (ja) * 2009-08-26 2013-01-31 フリースケール セミコンダクター インコーポレイテッド 応力分離部を有するｍｅｍｓデバイスおよび製造方法

Also Published As

Publication number Publication date
EP0494143A1 (de) 1992-07-15
US5335544A (en) 1994-08-09
DE3920645C2 (enExample) 1991-05-08
DE3920645A1 (de) 1991-01-10
EP0494143B1 (de) 1994-07-27
WO1991000522A1 (de) 1991-01-10
JPH04504759A (ja) 1992-08-20
DE59006644D1 (de) 1994-09-01

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