JPH069014Y2 - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPH069014Y2
JPH069014Y2 JP11547389U JP11547389U JPH069014Y2 JP H069014 Y2 JPH069014 Y2 JP H069014Y2 JP 11547389 U JP11547389 U JP 11547389U JP 11547389 U JP11547389 U JP 11547389U JP H069014 Y2 JPH069014 Y2 JP H069014Y2
Authority
JP
Japan
Prior art keywords
vapor deposition
shutter
substances
shutter plate
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11547389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353552U (enrdf_load_stackoverflow
Inventor
志朗 滝川
克任 花木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shinmaywa Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries Ltd filed Critical Shinmaywa Industries Ltd
Priority to JP11547389U priority Critical patent/JPH069014Y2/ja
Publication of JPH0353552U publication Critical patent/JPH0353552U/ja
Application granted granted Critical
Publication of JPH069014Y2 publication Critical patent/JPH069014Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11547389U 1989-09-29 1989-09-29 真空蒸着装置 Expired - Lifetime JPH069014Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11547389U JPH069014Y2 (ja) 1989-09-29 1989-09-29 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11547389U JPH069014Y2 (ja) 1989-09-29 1989-09-29 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0353552U JPH0353552U (enrdf_load_stackoverflow) 1991-05-23
JPH069014Y2 true JPH069014Y2 (ja) 1994-03-09

Family

ID=31663801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11547389U Expired - Lifetime JPH069014Y2 (ja) 1989-09-29 1989-09-29 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH069014Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0353552U (enrdf_load_stackoverflow) 1991-05-23

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