JPH0684632A - Coil component - Google Patents

Coil component

Info

Publication number
JPH0684632A
JPH0684632A JP25549092A JP25549092A JPH0684632A JP H0684632 A JPH0684632 A JP H0684632A JP 25549092 A JP25549092 A JP 25549092A JP 25549092 A JP25549092 A JP 25549092A JP H0684632 A JPH0684632 A JP H0684632A
Authority
JP
Japan
Prior art keywords
coil
core
conductor layer
coil component
coil conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP25549092A
Other languages
Japanese (ja)
Inventor
Yoichi Midorikawa
要一 緑川
Minoru Takatani
稔 高谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP25549092A priority Critical patent/JPH0684632A/en
Publication of JPH0684632A publication Critical patent/JPH0684632A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a coil component being employed in magnetic head, inductor, or transformer in which the size and thickness are reduced by the use of thin film while simplifying the production process. CONSTITUTION:Core 5 section is made of a ferromagnetic oxide block and then a coil conductor layer 6 and a dielectric layer 7 are laminated thereabout through thin film deposition technology thus forming a coil.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気ヘッド、インダク
タ、あるいはトランス等に用いられるコイル部品に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coil component used in a magnetic head, an inductor, a transformer or the like.

【0002】[0002]

【従来の技術および発明が解決しようとする課題】イン
ダクタ、あるいはトランス等に用いられるコイル部品と
して、印刷法あるいはシ−ト法によるものがあるが、こ
れらは粉体を樹脂等に混入してペースト状にしたもの、
あるいはシート状にしたものを重ねて成形、焼成するも
のであるため、ミクロンオーダーの厚みムラの発生が避
けられず、これにより、ミクロンオーダーの膜を形成し
ようとすると、絶縁不良あるいは断線の問題が発生し、
その結果、インダクタ、トランスあるいは磁気ヘッドと
してこのレベルまで薄形化したものを得ることができな
いという問題点があった。また、コンピュータメモリ等
に用いられるハードディスク用の従来の薄膜磁気ヘッド
は、磁路を構成するセンダストやパーマロイ等の磁性体
が導電性を有するため、磁性体層とコイル導体層との間
の絶縁のために樹脂層を形成しており、各層の樹脂層に
ついて、硬化、研磨、樹脂層上への膜形成の工程を数十
ターン形成のために行っており、このために製造に大変
な手間を要し、コスト高を招いている。
2. Description of the Related Art As a coil component used for an inductor or a transformer, there is a coil method by a printing method or a sheet method. In the form of
Alternatively, since sheet-shaped products are stacked and molded and fired, it is inevitable that micron-order thickness unevenness will occur, and if a micron-order film is to be formed, problems such as insulation failure or wire breakage will occur. Occurs,
As a result, there is a problem that it is not possible to obtain an inductor, a transformer, or a magnetic head that is thinned to this level. Further, in a conventional thin-film magnetic head for a hard disk used for a computer memory or the like, a magnetic substance such as sendust or permalloy forming a magnetic path has conductivity, so that the insulation between the magnetic layer and the coil conductor layer is prevented. Therefore, the resin layer is formed, and for each resin layer, the steps of curing, polishing, and forming a film on the resin layer are performed for several tens of turns. Costly.

【0003】本発明は、上記した実情に鑑み、磁気ヘッ
ド、インダクタ、あるいはトランスに用いられるコイル
部品において、薄膜を用いることにより小形化、薄形化
が可能でしかも製造工程が簡略化できコストダウンが図
れるコイル部品を提供することを目的とする。
In view of the above-mentioned circumstances, the present invention makes it possible to reduce the size and thickness of a coil component used in a magnetic head, an inductor, or a transformer by using a thin film, simplify the manufacturing process, and reduce the cost. It is an object of the present invention to provide a coil component capable of achieving the above.

【0004】[0004]

【課題を解決するための手段】本発明は、上記目的を達
成するため、コア部を強磁性酸化物ブロックにより作製
し、その周囲に薄膜形成技術によるコイル導体層と絶縁
体層との積層構造でなるコイルを形成したことを特徴と
する。
In order to achieve the above object, the present invention provides a laminated structure of a coil conductor layer and an insulator layer around the core portion made of a ferromagnetic oxide block by a thin film forming technique. It is characterized in that a coil is formed.

【0005】[0005]

【作用】本発明においては、予めブロック状に形成され
たコア部の外周に、薄膜形成技術により、印刷法による
場合よりもはるかに薄い厚さのコイル導体層と絶縁体層
との積層構造が実現される。
In the present invention, the laminated structure of the coil conductor layer and the insulator layer, which is much thinner than that by the printing method, is formed on the outer periphery of the core portion formed in advance in a block shape by the thin film forming technique. Will be realized.

【0006】[0006]

【実施例】図1(a)〜(e)はインダクタとして用い
られる本発明によるコイル部品の一実施例の製造工程を
示し、(f)はその斜視図であり、(g)は磁気ヘッド
としての適用例を示す正面図である。図1(a)の斜視
図に示すように、本発明においては、磁性フェライトブ
ロック状のコア5を焼き固め等により直方体状に形成す
る。なお、本実施例のものは、該コア5の寸法を、縦
0.4mm、横0.2mm、高さ0.4mmに設定した。そし
て該コア5の周囲に、蒸着もしくはスパッタリング等の
薄膜形成技術により、図1(b)〜(d)の断面図に示
すように、銀等の金属製のコイル導体層6と絶縁体層7
とを交互に積層してコイル部品素材1Aを作製する。
1 (a) to 1 (e) show a manufacturing process of an embodiment of a coil component used as an inductor according to the present invention, (f) is a perspective view thereof, and (g) is a magnetic head. It is a front view which shows the application example of. As shown in the perspective view of FIG. 1A, in the present invention, the magnetic ferrite block-shaped core 5 is formed into a rectangular parallelepiped shape by baking or the like. In this embodiment, the core 5 has dimensions of 0.4 mm in length, 0.2 mm in width and 0.4 mm in height. A coil conductor layer 6 and an insulator layer 7 made of a metal such as silver are formed around the core 5 by a thin film forming technique such as vapor deposition or sputtering as shown in the cross-sectional views of FIGS.
And are alternately laminated to produce the coil component material 1A.

【0007】より具体的には、図2に示すように、ま
ず、芯部のコア5を接着あるいは機械的固定手段により
位置決めし、該コア5の外周に蒸着あるいはスパッタリ
ング等により巻き始めのコイル導体層6gを例えば1ミ
クロン程度の膜厚に形成し(a)、そのコイル導体層6
gの半分を覆って蒸着あるいはスパッタリング等により
2酸化珪素等の絶縁体層7gを数ミクロンの厚みに形成
し(b)、次に前記コイル導体層6gと一部を重ねて銀
等でなる片側コイル導体層6hを形成する(c)。続い
て前記コイル導体層6hの一部を覆って絶縁体層7hを
形成し(d)、その上に前記片側コイル導体層6hに一
部を重ねて他側コイル導体層6iを形成する(e)。こ
の後、図1(b)〜(e)の工程を必要タ−ン数繰り返
した後、巻き終りのコイル導体層6jを形成し(f)、
コイル部品素材1Aを作製する。
More specifically, as shown in FIG. 2, first, the core 5 of the core is positioned by adhesion or mechanical fixing means, and the coil conductor is wound around the outer periphery of the core 5 by vapor deposition or sputtering. The layer 6g is formed to have a film thickness of, for example, about 1 micron (a), and the coil conductor layer 6 is formed.
An insulating layer 7g made of silicon dioxide or the like is formed to a thickness of several microns by vapor deposition or sputtering so as to cover half of g (b), and then the coil conductor layer 6g is partially overlapped with one side made of silver or the like. The coil conductor layer 6h is formed (c). Subsequently, an insulator layer 7h is formed so as to cover a part of the coil conductor layer 6h (d), and the other side coil conductor layer 6i is formed by partially overlapping the one side coil conductor layer 6h (e). ). After that, after repeating the steps of FIGS. 1B to 1E by the required number of turns, a coil conductor layer 6j at the end of winding is formed (f),
The coil component material 1A is produced.

【0008】実際には多数個取りで同時に素材1Aが形
成されるから、多数の素材1Aを含むものから個々のコ
ア部間に薄膜形成された積層部分を切断、加工して個々
の素材1Aを得、続いて図1(e)の断面図及び図1
(f)の斜視図に示すように、上下端に引き出し電極と
なる銀等でなる導体層6aを焼き付けやメッキにより形
成して、その導体層6aのみを露出させて外周全面を絶
縁体層7aで覆い、インダクタとしてのコイル部品1を
作製する。例えばコンピュータメモリ等に用いられるハ
ードディスク用の磁気ヘッドの場合には、図1(g)に
示すように、コア9の一部に、コア5の表裏面を露出さ
せたもの(図1(d)に示したもの)を組み込み、ガラ
ス等により接着する。10は磁気ギャップである。
Actually, since the material 1A is formed simultaneously by taking a large number of pieces, the material 1A is cut off from a material containing a large number of material 1A and a laminated portion formed between individual core portions is processed to form the individual material 1A. 1 and then the cross-sectional view of FIG.
As shown in the perspective view of (f), a conductor layer 6a made of silver or the like, which serves as extraction electrodes, is formed on the upper and lower ends by baking or plating, and only the conductor layer 6a is exposed to expose the entire outer periphery to the insulator layer 7a. Then, the coil component 1 as an inductor is manufactured. For example, in the case of a magnetic head for a hard disk used in a computer memory or the like, as shown in FIG. 1 (g), the core 9 has a part of the front and back surfaces exposed (see FIG. 1 (d)). (Shown in step 1) is incorporated and bonded with glass or the like. 10 is a magnetic gap.

【0009】このように、コア5の外周に薄膜形成技術
により、コイル導体層6と絶縁体層7とを交互に積層し
てコイル部品1を作製することにより、コイル1巻き当
りの厚さを数μm以下にすることができるので、コイル
部品1が小形化、薄形化される。
As described above, the coil conductor layer 6 and the insulating layer 7 are alternately laminated by the thin film forming technique on the outer periphery of the core 5 to produce the coil component 1, so that the thickness per coil winding can be increased. Since the thickness can be set to several μm or less, the coil component 1 can be miniaturized and thinned.

【0010】[0010]

【発明の効果】本発明によれば、強磁性酸化物でなるコ
アを芯部として、その外周に薄膜形成技術により、コイ
ル導体層と絶縁体層とを交互に積層してコイル部品を作
製するので、コイル導体層を薄形にしても断線や絶縁不
良が発生するおそれがなくなり、小形化、薄形化が達成
できる。また、コア自体が絶縁性を有するので、コイル
導体との電気的絶縁処理を施す必要がなく、磁気ヘッド
を得る場合の製造工程が簡略化され、コストダウンが達
成できる。
According to the present invention, a core made of a ferromagnetic oxide is used as a core, and a coil conductor layer and an insulator layer are alternately laminated on the outer periphery of the core to form a coil component. Therefore, even if the coil conductor layer is thin, there is no risk of disconnection or insulation failure, and it is possible to achieve downsizing and thinning. Further, since the core itself has an insulating property, it is not necessary to electrically insulate the coil conductor, the manufacturing process for obtaining the magnetic head is simplified, and the cost can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)本発明によるコイル部品のコアの一例を
示す斜視図、(b)〜(e)はコア周囲の薄膜形成工程
を示す断面図、(f)は該実施例の斜視図、(g)は該
実施例を磁気ヘッドに適用した例を示す正面図である。
FIG. 1A is a perspective view showing an example of a core of a coil component according to the present invention, FIGS. 1B to 1E are sectional views showing a thin film forming process around the core, and FIG. 1F is a perspective view of the embodiment. , (G) are front views showing an example in which the embodiment is applied to a magnetic head.

【図2】該実施例の製造工程を示す平面図である。FIG. 2 is a plan view showing a manufacturing process of the example.

【符号の説明】[Explanation of symbols]

1 コイル部品 1A コイル部品素材 5 コア 6、6g〜6j コイル導体層 6a 引き出し電極 7、7a、7g、7h 絶縁体層 DESCRIPTION OF SYMBOLS 1 Coil component 1A Coil component material 5 Core 6, 6g-6j Coil conductor layer 6a Extraction electrode 7, 7a, 7g, 7h Insulator layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】コア部を強磁性酸化物ブロックにより作製
し、その周囲に薄膜形成技術によるコイル導体層と絶縁
体層との積層構造でなるコイルを形成したことを特徴と
するコイル部品。
1. A coil component in which a core is made of a ferromagnetic oxide block, and a coil having a laminated structure of a coil conductor layer and an insulator layer is formed around the core by a thin film forming technique.
JP25549092A 1992-08-31 1992-08-31 Coil component Withdrawn JPH0684632A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25549092A JPH0684632A (en) 1992-08-31 1992-08-31 Coil component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25549092A JPH0684632A (en) 1992-08-31 1992-08-31 Coil component

Publications (1)

Publication Number Publication Date
JPH0684632A true JPH0684632A (en) 1994-03-25

Family

ID=17279481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25549092A Withdrawn JPH0684632A (en) 1992-08-31 1992-08-31 Coil component

Country Status (1)

Country Link
JP (1) JPH0684632A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011165809A (en) * 2010-02-08 2011-08-25 Murata Mfg Co Ltd Electronic component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011165809A (en) * 2010-02-08 2011-08-25 Murata Mfg Co Ltd Electronic component

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Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19991102