JPH06826Y2 - Contact type temperature controller - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention detects various defects such as various mounted products such as ICs and LSIs while heating and cooling the mounted products in a mounted state. The present invention relates to a contact-type temperature controller used for testing or for stable use of a mounted product under a predetermined temperature condition.

[Conventional technology]

In order to detect defects in mounted products such as ICs and LSIs and to test various characteristics under certain temperature conditions, it is required to heat and cool these mounted products in the mounted state. Is required to be used stably under a predetermined temperature condition. In the prior art, the main parts constituting the mounted product are indirectly cooled or heated.

[Problems to be solved by the device]

However, because some parts are not heated or cooled by the method of indirectly heating or cooling only the main parts of the mounted product in this way, the defects of the mounted product are detected or various characteristics of the mounted product are tested with high accuracy. However, there is a drawback that the mounted product cannot be used stably under a predetermined temperature condition.

The object of the present invention is to avoid the above-mentioned drawbacks, to uniformly heat or cool an article to be heated or cooled, and to carry out a test or the like with high accuracy, or to maintain the article stably at a predetermined temperature. An object is to provide a contact type temperature controller that can be used.

[Means for Solving the Problems]

In order to solve the above problems, the present invention provides a temperature controller body using a Peltier effect element, and an article to be temperature-controlled so as to be movably attached to a heating and heat absorbing base of the temperature controller body. Fluid that is placed between the contactor that contacts the heating / cooling surface and the heating endothermic base and the contactor in a fluid-tight manner and urges the contactor toward the article while maintaining a heat exchange relationship with the heating endothermic base. The present invention provides a contact-type temperature controller characterized by comprising:

The contact-type temperature controller may have a plurality of contacts attached to the heat-absorption base, in which case the fluid may be in communication with each other between the plurality of contacts. .

[Action]

In this way, the heating and heat absorbing base of the temperature controller main body is brought into direct contact with the heating and cooling surface of the article through the fluid and the contactor, so that the article can be effectively heated or cooled in the mounted state, and accordingly, the failure of the article can be prevented. The article can be processed with high accuracy, such as detection and testing of various characteristics, or the article can be used stably at a predetermined temperature condition, and is disposed between the heating endothermic base and the contact. The fluid that urges the contact toward the article has the effect of maintaining the heat exchange relationship between the heating endothermic base and the contact, so that the heat conduction between the relatively movable heating endothermic base and the contact Is done well.

〔Example〕

An embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a contact type temperature controller 10 according to the present invention. The contact type temperature controller 10 uses a Peltier effect element for temperature control. The main body 12 of the temperature controller, the contactor 16 attached to the heating and heat absorbing base 14 of the main body 12 of the temperature controller so as to be movable, and contacting the heating and cooling surface 30a of the article 30 whose temperature is to be adjusted; And a contactor 16 are disposed in a fluid-tight manner between the contactor 16 and the contactor 16 and urge the contactor 16 toward the article while maintaining a heat exchange relationship with the heat-absorption base 14. In FIG. 1, reference numeral 32 is a printed circuit board to which the article 30 is attached. Actually, one printed circuit board 32 has many articles 30.
Are attached, and the contact 16 is therefore attached to this article 30.
The heating and heat absorbing base 14 is provided according to the number and position of

The temperature controller body 12 is in the form of a thermo module in which one surface serves as a heat absorbing surface and the other surface serves as a heat radiating surface depending on the direction of the current flowing through the Peltier effect element. When a current is applied, it becomes a heating surface (heat dissipation surface), and when an electric current is applied in the other direction, it becomes a heat absorption surface (cooling surface). This heating endothermic base 1
In the illustrated embodiment, 4 is made of a heat conductive plate having a slight thickness.

The contactor 16 is the heating endothermic base 1 of the temperature controller body 12.
4, the fluid 18 is engaged in the vertical hole 20, and the fluid 18 is fixed around the vertical hole 20 on the lower surface of the heating and heat-absorbing base 14 in the vertical hole 20 and slidably comes into close contact with the contactor 22. Is kept fluid tight by.

The temperature controller 10 is used by bringing a contactor 16 into close contact with a heating / cooling surface of an article 30 to be heated or cooled as shown in the figure. In this way, the temperature controller body 12
Since the heating and heat absorbing base 14 directly contacts the heating / cooling surface 30a of a large number of articles 30 via the fluid 18 and the contactor 16, the articles 30 can be effectively heated or cooled in the mounted state. Therefore, it is possible to perform processing of the article 30 such as detection of a defect of the article 30 and testing of various characteristics with high accuracy, or it is possible to stably use the article 30 under a predetermined temperature condition. Further, since the contactor 16 is allowed to tilt in the vertical hole 20 while maintaining the heat exchange relationship with the fluid 18, the contactor 16 can accurately contact the article 30 even if the temperature controller body 12 tilts.

FIG. 2 shows another embodiment of the present invention. In this embodiment,
The contact-type temperature controller 10 has a plurality of contacts 16 attached to the heating and heat-absorption base 14, and the fluid 18 communicates with each other by a communication hole 24 between the plurality of contacts 16 and The fluid tightness of the fluid 18 depends on the heating endothermic base 14
1. It is exactly the same as the embodiment of FIG. 1 except that it is maintained by an O-ring 26 located between the vertical hole 20 and the contact 16. In FIG. 2, reference numeral 16
Reference numerals A and 16B respectively denote an upper half portion and a lower half portion of the heating and heat absorbing base 16, and the communication hole 24 has these half portions 16 respectively.
It is formed between A and 16B. Further, in the figure, reference numeral 28 is a maintenance valve that connects the communication hole 24 to an external fluid supply source (not shown), and reference numeral 16a is a contact valve 16 which is in close contact with the upper wall of the vertical hole 20 so that the fluid pressure is It is a stopper that prevents the contactor 16 from being lost.

When the plurality of contacts 16 are pressurized by the common fluid 18 that communicates with each other in this way, the plurality of contacts 16 are not affected even if the article 30 to be heated or cooled has different heights and inclinations. It is possible to contact the corresponding articles 30 with equal pressure and thus heat or cool all the articles 30 evenly.

As the fluid used in the embodiments of FIGS. 1 and 2, a liquid or gel having good thermal conductivity is used.

[Effect of device]

According to the present invention, as described above, since the heating / absorption base of the temperature controller body using the Peltier effect element is directly contacted with the heating / cooling surface of the article through the fluid and the contactor, the article remains in the mounted state. It can be effectively heated or cooled, so that it is possible to perform processing of the article with high accuracy such as detection of defects of the article, testing of various characteristics, and stable use of the article under predetermined temperature conditions. In addition, the fluid between the heating and heat absorbing base and the contactor has a function of maintaining the heat conduction relationship between the heating and heat absorbing base and the contactor, which are relatively movable, and the inclination of the contactor with respect to the temperature controller main body is Since the contact is allowed, the contactor can be brought into contact with the article with high accuracy, so that the article can be effectively heated and cooled, and thus the article can be more effectively heated or cooled.

[Brief description of drawings]

1 and 2 are sectional views of different embodiments of the contact type temperature controller according to the present invention. 10 ----- Adhesion type temperature controller, 12 ----- Temperature controller body, 14 ----- Heating endothermic base, 16 ---
--- contactor, 18 ----- fluid, 22 ----- boot, 26 ----- O-ring, 30 ----- article.

Claims (2)

[Scope of utility model registration request] 1. A temperature controller body using a Peltier effect element, and a contact for contacting a heating / cooling surface of an article to be temperature-controlled, which is movably mounted on a heating / heat-absorbing base of the temperature controller body. And a fluid disposed between the heating endothermic base and the contact in a fluid-tight manner to urge the contact toward the article while maintaining a heat exchange relationship with the heating endothermic base. A close contact type temperature controller characterized in that 2. The contact type according to claim 1, wherein a plurality of contacts are attached to the heating and heat absorbing base, and the fluid is in communication with each other between the plurality of contacts. air conditioner.