JPH0682267A - Sensor with temperature drift compensation function - Google Patents

Sensor with temperature drift compensation function

Info

Publication number
JPH0682267A
JPH0682267A JP4259148A JP25914892A JPH0682267A JP H0682267 A JPH0682267 A JP H0682267A JP 4259148 A JP4259148 A JP 4259148A JP 25914892 A JP25914892 A JP 25914892A JP H0682267 A JPH0682267 A JP H0682267A
Authority
JP
Japan
Prior art keywords
sensor
learning
neural network
value
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4259148A
Other languages
Japanese (ja)
Inventor
Masamichi Nakayama
正道 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP4259148A priority Critical patent/JPH0682267A/en
Publication of JPH0682267A publication Critical patent/JPH0682267A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To automatically compensate the temperature drift of a sensor even if the non-linearity of temperature characteristic of the sensor is great without depending on the configuration or the detection method of the detection circuit of the sensor. CONSTITUTION:A data storage part 8 for learning stores a plurality of sets of three data, namely the measurement value of a sensor 2, that of a temperature sensor 4, and a reference compensation value which is a difference between the measurement value of the sensor 2 and that of a sensor 6 for calibration. An error calculation part 10 gives the measurement value by the temperature sensor and that by the sensor of a set of data for learning and the sensor measurement values as the input of a neural network 1, calculates the error between the output of the neural network and the reference compensation value which is stored in the data storage part for learning, and then changes the weighting of combination of the neural network based on the error.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、トルクセンサ等のいろ
いろな物理的変量を測定するセンサに関し、特に温度ド
リフトを補正する機能を持ったセンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor for measuring various physical variables such as a torque sensor, and more particularly to a sensor having a function of correcting temperature drift.

【0002】[0002]

【従来の技術】従来は、センサに温度ドリフトがある場
合、何ら補正を施さずにそのまま使用したり、検出回路
に人手で調節する温度補正回路を組み込んだりしてい
た。または、特開平3−53107号公報に見られるよ
うに、センサの出力値に対応するデータをROMから読
み出して、それを測定値とするものもある。
2. Description of the Related Art Conventionally, when a sensor has a temperature drift, it is used as it is without any correction, or a temperature correction circuit for manually adjusting the detection circuit is incorporated. Alternatively, as disclosed in Japanese Patent Laid-Open No. 3-53107, there is a method in which data corresponding to the output value of the sensor is read from the ROM and used as the measured value.

【0003】[0003]

【解決しようとする課題】ところが従来技術では、セン
サの特性が一定でない場合、センサごとに人手で温度補
正回路を調整しなければならないという問題点があっ
た。また、温度補正回路を組み込んだとしても、センサ
の温度特性の非線形性が強い場合には十分な補正を行な
うことができないという問題点もあった。特開平3−5
3107号公報の場合も、センサ出力と測定値を対応さ
せるROMを作るためのデータ測定等の手間が大変であ
る。そこで本発明は、上記の問題点を解決するために、
センサの検出回路の構成や検出方法に依存せず、センサ
の温度特性の非線形性が強い場合でも、センサの温度ド
リフトを自動的に補正することが可能であるセンサを提
供することを目的とする。
However, the conventional technology has a problem that the temperature correction circuit must be manually adjusted for each sensor when the characteristics of the sensor are not constant. Further, even if a temperature correction circuit is incorporated, sufficient correction cannot be performed if the temperature characteristics of the sensor have a strong non-linearity. Japanese Patent Laid-Open No. 3-5
Also in the case of Japanese Patent No. 3107, it is troublesome for data measurement and the like to make a ROM that associates the sensor output with the measured value. Therefore, the present invention, in order to solve the above problems,
An object of the present invention is to provide a sensor that can automatically correct the temperature drift of the sensor regardless of the non-linearity of the temperature characteristic of the sensor regardless of the configuration and detection method of the detection circuit of the sensor. .

【0004】[0004]

【課題を解決するための手段】上記課題を解決するため
に、本発明は、トルク等の物理的変量を計測するセンサ
と、温度センサと、較正用センサと、前記センサの計測
値、前記温度センサの計測値、および前記センサの計測
値と前記較正用センサの計測値との差である基準補正値
の3つのデータを対応させて複数組記憶する学習用デー
タ記憶部と、計測時は前記センサの計測値と前記温度セ
ンサの計測値を、較正時はそれぞれの学習用データ記憶
部のデータを選択的に入力するニューラルネットワーク
部と、一組の学習用データの温度センサ計測値とセンサ
計測値を前記ニューラルネットワークの入力として与
え、その時の前記ニューラルネットワークの出力と前記
学習用データ記憶部に記憶されている基準補正値の誤差
を計算し、その誤差に基づいて前記ニューラルネットワ
ークの結合の重みを変化させる誤差計算部と、前記ニュ
ーラルネットワークの出力と前記学習用データ記憶部に
記憶されている基準補正値との二乗誤差の総和が所定値
以上の場合は学習を繰り返し、所定値未満の場合は学習
終了と判断する学習終了判定部と、計測時の前記ニュー
ラルネットワークの出力に、前記センサの実際の測定値
を加算して温度ドリフト補正値を求める加算部と、を設
けたことを特徴とするものである。
In order to solve the above-mentioned problems, the present invention provides a sensor for measuring a physical variable such as torque, a temperature sensor, a calibration sensor, a measured value of the sensor, and the temperature. A learning data storage unit that stores a plurality of sets of three values of the measurement value of the sensor and the reference correction value that is the difference between the measurement value of the sensor and the measurement value of the calibration sensor, and the learning data storage unit during measurement. A neural network unit for selectively inputting the measured values of the sensor and the measured value of the temperature sensor to the data of each learning data storage unit at the time of calibration, and the temperature sensor measured value and sensor measurement of a set of learning data A value is given as an input to the neural network, the error between the output of the neural network at that time and the reference correction value stored in the learning data storage unit is calculated, and the error is calculated. If the sum of squared errors between the error calculation unit that changes the connection weight of the neural network based on the neural network output and the reference correction value stored in the learning data storage unit is greater than or equal to a predetermined value, Learning is repeated, and a learning end determination unit that determines learning end if less than a predetermined value, and an addition unit that adds the actual measurement value of the sensor to the output of the neural network at the time of measurement to obtain a temperature drift correction value. And are provided.

【0005】[0005]

【作用】本発明の温度ドリフト補正装置は、図1に示す
ようにセンサ本体に常時取り付けられる部分100と、
較正時のみ取り付ける部分200から構成される。今、
センサ2の較正を行うために、較正時のみ取り付ける部
分200を取り付けた状態とする。まずスイッチ1とス
イッチ2をB側にセットし、温度ドリフトを有するセン
サの検出回路出力と、温度センサの検出回路出力と、較
正用センサの検出回路出力と温度ドリフトを有するセン
サの検出回路出力の差分である基準補正値を複数個サン
プリングして学習用データ記憶部に保持し、その学習用
データのうち、温度ドリフトを有するセンサの検出回路
出力と、温度センサの検出回路出力とをニューラルネッ
トワークへ入力しする(図2参照)。その時のニューラ
ルネットワークの出力と学習用データの補正値の差分を
誤差として、誤差逆伝播法によって温度ドリフトを有す
るセンサの温度特性の学習を行なうものである。学習を
終了した後は、較正時のみ取り付ける部分200を取り
外し、スイッチ1とスイッチ2をA側にセットし、温度
ドリフトを有するセンサの検出回路出力と、温度センサ
の検出回路出力を入力とするニューラルネットワークに
よって、温度ドリフトを有するセンサの温度補正を行な
うものである。センサの温度特性を学習したニューラル
ネットワークに、温度ドリフトを有するセンサの検出回
路出力と、温度センサの検出回路出力を入力として与え
ると、その二つの入力に対応する温度ドリフト補正値が
ニューラルネットワークの出力として現れ、その補正値
を温度ドリフトを有するセンサの検出回路出力と足し合
わせることで、温度ドリフトを有するセンサの温度補正
が行なわれる。
The temperature drift compensating device of the present invention comprises a portion 100 which is always attached to the sensor body as shown in FIG.
It is composed of a part 200 to be attached only at the time of calibration. now,
In order to calibrate the sensor 2, the portion 200 to be attached only during calibration is attached. First, the switch 1 and the switch 2 are set to the B side, and the detection circuit output of the sensor having the temperature drift, the detection circuit output of the temperature sensor, the detection circuit output of the calibration sensor and the detection circuit output of the sensor having the temperature drift are set. A plurality of reference correction values, which are differences, are sampled and held in a learning data storage unit, and of the learning data, the detection circuit output of the sensor having a temperature drift and the detection circuit output of the temperature sensor are sent to a neural network. Input (see Figure 2). Using the difference between the output of the neural network and the correction value of the learning data at that time as an error, the temperature characteristic of the sensor having the temperature drift is learned by the error back propagation method. After the learning is completed, the portion 200 to be attached only during calibration is removed, the switches 1 and 2 are set to the A side, and the detection circuit output of the sensor having the temperature drift and the detection circuit output of the temperature sensor are input. The network corrects the temperature of a sensor having a temperature drift. When the detection circuit output of the sensor having temperature drift and the detection circuit output of the temperature sensor are given as inputs to the neural network that learned the temperature characteristics of the sensor, the temperature drift correction values corresponding to the two inputs are output from the neural network. Then, the correction value is added to the detection circuit output of the sensor having the temperature drift to correct the temperature of the sensor having the temperature drift.

【0006】[0006]

【実施例】以下、本発明の実施例を図面に基づいて説明
する。図4は本発明をトルクセンサに適用した例で、1
はニューラルネットワーク、4は温度センサ、5は温度
センサの検出回路、8は学習用データ記憶部、9は基準
補正値計算部、10は誤差計算部、11は学習終了判定
部、13はトルクセンサ、14はトルクセンサの検出回
路、15は較正用トルクセンサ、16は較正用トルクセ
ンサの検出回路、17はモータ、18はA/Dコンバー
タ、19はD/Aコンバータである。トルクセンサの温
度特性の学習は図5に示すように行なわれ、まずスイッ
チ1とスイッチ2をB側にセットし、スイッチ3とスイ
ッチ4とスイッチ5を閉じ、その他のスイッチはすべて
開けておき、モータの温度とトルクを適当に変化させ
て、その時の温度センサ、トルクセンサ、較正用トルク
センサの検出回路出力を、それぞれA/Dコンバータに
よってディジタル信号に変換し、温度センサの検出回路
出力と、トルクセンサの検出回路出力と、基準補正値計
算部によって計算された基準補正値を、学習用データと
して学習用データ記憶部に保持する。学習用データはモ
ータの温度やトルクを様々に変化させて、n組分取得す
る。学習用データ取得後は、スイッチ1とスイッチ2は
B側にセットしたままで、スイッチ6とスイッチ7とス
イッチ8とスイッチ9を閉じ、その他のスイッチはすべ
て開けておき、一組の学習用データの温度センサ検出回
路出力とセンサ検出回路出力をニューラルネットワーク
の入力として与え、その時のニューラルネットワークの
出力と学習用データの基準補正値の誤差を誤差計算部で
計算し、その誤差に基づいて誤差逆伝播法によってニュ
ーラルネットワークの結合の重みを変化させる。これを
すべての学習用データの組に対して行なった後に、スイ
ッチ9を開けてスイッチ10を閉じ、一組の学習用デー
タの温度センサ検出回路出力とセンサ検出回路出力をニ
ューラルネットワークの入力として与え、その時のニュ
ーラルネットワークの出力と学習用データの基準補正値
との誤差の二乗を誤差計算部で計算する。すべての学習
用データの組に対する二乗誤差の総和を計算してその値
を終了判定値と比較し、二乗誤差の総和が終了判定値以
上の場合は学習を繰り返し、二乗誤差の総和が終了判定
値未満の場合は学習を終了する。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 4 shows an example in which the present invention is applied to a torque sensor.
Is a neural network, 4 is a temperature sensor, 5 is a temperature sensor detection circuit, 8 is a learning data storage unit, 9 is a reference correction value calculation unit, 10 is an error calculation unit, 11 is a learning end determination unit, and 13 is a torque sensor. , 14 is a torque sensor detection circuit, 15 is a calibration torque sensor, 16 is a calibration torque sensor detection circuit, 17 is a motor, 18 is an A / D converter, and 19 is a D / A converter. Learning of the temperature characteristic of the torque sensor is performed as shown in FIG. 5. First, the switch 1 and the switch 2 are set to the B side, the switch 3, the switch 4 and the switch 5 are closed, and all other switches are opened. The temperature and torque of the motor are appropriately changed, and the detection circuit outputs of the temperature sensor, torque sensor, and calibration torque sensor at that time are converted into digital signals by the A / D converters, respectively, and the detection circuit output of the temperature sensor, The detection circuit output of the torque sensor and the reference correction value calculated by the reference correction value calculation unit are held in the learning data storage unit as learning data. The learning data is acquired for n sets by variously changing the temperature and torque of the motor. After acquisition of the learning data, the switches 1 and 2 are still set to the B side, the switches 6, 7, 8 and 9 are closed, all other switches are opened, and a set of learning data is set. The temperature sensor detection circuit output and the sensor detection circuit output of are given as inputs of the neural network, the error between the neural network output and the reference correction value of the learning data at that time is calculated by the error calculation unit, and the error inverse is calculated based on the error. The weight of the neural network connection is changed by the propagation method. After doing this for all the learning data sets, the switch 9 is opened and the switch 10 is closed, and the temperature sensor detection circuit output and the sensor detection circuit output of one set of learning data are given as inputs to the neural network. The error calculator calculates the square of the error between the output of the neural network and the reference correction value of the learning data at that time. Calculate the sum of squared errors for all learning data sets and compare that value with the end judgment value.If the sum of squared errors is greater than or equal to the end judgment value, learning is repeated, and the sum of squared errors is the end judgment value. If less than, learning is finished.

【0007】次にスイッチ1とスイッチ2をA側にセッ
トすれば、温度ドリフトの補正を行なうことができる。
モータによってトルクが発生されると、トルクセンサが
それを検出し、トルクセンサがおかれている環境の温度
を温度センサが検出し、それぞれ検出回路からアナログ
信号が出力され、さらにA/Dコンバータによってディ
ジタル信号に変換される。この二つのディジタル信号が
ニューラルネットワークの入力となり、トルクセンサの
温度特性を学習したニューラルネットワークが、二つの
入力に対応するトルクセンサの温度ドリフト補正値を出
力し、その出力をトルクセンサの検出回路の出力と足し
合わせて、D/Aコンバータによってアナログ信号に変
換した後に、補正後のトルクセンサ出力とする。
Next, by setting the switches 1 and 2 to the A side, the temperature drift can be corrected.
When torque is generated by the motor, the torque sensor detects it, the temperature sensor detects the temperature of the environment in which the torque sensor is placed, and an analog signal is output from each detection circuit. Converted to digital signal. These two digital signals are input to the neural network, and the neural network that learned the temperature characteristics of the torque sensor outputs the temperature drift correction value of the torque sensor corresponding to the two inputs, and outputs the output of the torque sensor detection circuit. The output is added and converted into an analog signal by the D / A converter, and the corrected torque sensor output is obtained.

【0008】[0008]

【発明の効果】本発明は、以上述べたように構成されて
いるので、以下に述べるような効果がある。 ニューラルネットワークで温度ドリフトを有するセ
ンサの温度補正を行なうことにより、人手による温度補
正回路の調整が不要になり、センサの温度特性の非線形
性が強い場合でも温度ドリフトを補正することができ
る。 センサの温度特性の学習に用いるデータは、センサ
の温度を一定に保った状態でサンプリングする必要はな
く、その温度にバラツキがあっても学習ができる。
Since the present invention is constructed as described above, it has the following effects. By performing the temperature correction of the sensor having the temperature drift by the neural network, it is not necessary to manually adjust the temperature correction circuit, and the temperature drift can be corrected even when the temperature characteristic of the sensor has a strong non-linearity. The data used for learning the temperature characteristic of the sensor does not need to be sampled while keeping the temperature of the sensor constant, and the data can be learned even if the temperature varies.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の原理的構成を示す図FIG. 1 is a diagram showing a basic configuration of the present invention.

【図2】学習時の処理の流れを示す図FIG. 2 is a diagram showing a flow of processing during learning.

【図3】学習用データのデータ構造を示す図FIG. 3 is a diagram showing a data structure of learning data.

【図4】本発明をトルクセンサに適用した例を示す図FIG. 4 is a diagram showing an example in which the present invention is applied to a torque sensor.

【図5】トルクセンサに適用した場合の学習時の処理の
流れを示す図
FIG. 5 is a diagram showing the flow of processing during learning when applied to a torque sensor.

【符号の説明】[Explanation of symbols]

1…ニューラルネットワーク 2…温度ドリフトを有するセンサ 4…温度センサ 6…較正用センサ 8…学習用データ記憶部 9…基準補正値計算部 10…誤差計算部 11…学習終了判定部 12…検出対象 13…トルクセンサ 15…較正用トルクセンサ 16…較正用トルクセンサの検出回路 1 ... Neural network 2 ... Sensor having temperature drift 4 ... Temperature sensor 6 ... Calibration sensor 8 ... Learning data storage unit 9 ... Reference correction value calculation unit 10 ... Error calculation unit 11 ... Learning end determination unit 12 ... Detection target 13 ... torque sensor 15 ... calibration torque sensor 16 ... calibration torque sensor detection circuit

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】トルク等の物理的変量を計測するセンサ
と、 温度センサと、 較正用センサと、 前記センサの計測値、前記温度センサの計測値、および
前記センサの計測値と前記較正用センサの計測値との差
である基準補正値の3つのデータを対応させて複数組記
憶する学習用データ記憶部と、 計測時は前記センサの計測値と前記温度センサの計測値
を、較正時はそれぞれの学習用データ記憶部のデータを
選択的に入力するニューラルネットワーク部と、 一組の学習用データの温度センサ計測値とセンサ計測値
を前記ニューラルネットワークの入力として与え、その
時の前記ニューラルネットワークの出力と前記学習用デ
ータ記憶部に記憶されている基準補正値の誤差を計算
し、その誤差に基づいて前記ニューラルネットワークの
結合の重みを変化させる誤差計算部と、 前記ニューラルネットワークの出力と前記学習用データ
記憶部に記憶されている基準補正値との二乗誤差の総和
が所定値以上の場合は学習を繰り返し、所定値未満の場
合は学習終了と判断する学習終了判定部と、 計測時の前記ニューラルネットワークの出力に、前記セ
ンサの実際の測定値を加算して温度ドリフト補正値を求
める加算部と、を設けたことを特徴とする温度ドリフト
補正機能付センサ。
1. A sensor for measuring a physical variable such as torque, a temperature sensor, a calibration sensor, a measurement value of the sensor, a measurement value of the temperature sensor, and a measurement value of the sensor and the calibration sensor. A learning data storage unit that stores a plurality of sets of three sets of reference correction values that are differences from the measured values of, and a measured value of the sensor and a measured value of the temperature sensor during measurement, and a calibrated value during calibration. A neural network section for selectively inputting data in each learning data storage section, and a temperature sensor measurement value and a sensor measurement value of a set of learning data are given as inputs to the neural network, and the neural network An error between the output and the reference correction value stored in the learning data storage unit is calculated, and the connection weight of the neural network is calculated based on the error. If the sum of squared errors of the error calculation unit to be changed and the output of the neural network and the reference correction value stored in the learning data storage unit is equal to or more than a predetermined value, learning is repeated, and if less than the predetermined value, A learning end determination unit that determines that learning has ended, and an addition unit that adds an actual measurement value of the sensor to the output of the neural network at the time of measurement to obtain a temperature drift correction value are provided. Sensor with temperature drift correction function.
【請求項2】ニューラルネットワークの出力と前記学習
用データ記憶部に記憶されている基準補正値との誤差が
所定値以上の場合は学習を繰り返し、所定値未満の場合
は学習終了と判断する学習終了判定部を付加したことを
特徴とする請求項1記載の温度ドリフト補正機能付セン
サ。
2. Learning which repeats learning when an error between the output of the neural network and the reference correction value stored in the learning data storage unit is a predetermined value or more, and when the error is less than the predetermined value, learning is judged to be finished. The sensor with a temperature drift correction function according to claim 1, further comprising an end determination unit.
【請求項3】学習終了判定部が終了を判定した場合は、
較正用センサ、学習用データ記憶部、誤差計算部および
学習終了判定部を一体構造として取り外せるようにした
ことを特徴とする請求項2記載の温度ドリフト補正機能
付センサ。
3. When the learning end determination unit determines the end,
The sensor with temperature drift correction function according to claim 2, wherein the calibration sensor, the learning data storage unit, the error calculation unit, and the learning end determination unit are detachable as an integrated structure.
JP4259148A 1992-09-01 1992-09-01 Sensor with temperature drift compensation function Pending JPH0682267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4259148A JPH0682267A (en) 1992-09-01 1992-09-01 Sensor with temperature drift compensation function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4259148A JPH0682267A (en) 1992-09-01 1992-09-01 Sensor with temperature drift compensation function

Publications (1)

Publication Number Publication Date
JPH0682267A true JPH0682267A (en) 1994-03-22

Family

ID=17330006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4259148A Pending JPH0682267A (en) 1992-09-01 1992-09-01 Sensor with temperature drift compensation function

Country Status (1)

Country Link
JP (1) JPH0682267A (en)

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Publication number Priority date Publication date Assignee Title
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