JPH068109Y2 - ウエハー搬送用ベルト - Google Patents

ウエハー搬送用ベルト

Info

Publication number
JPH068109Y2
JPH068109Y2 JP1988043093U JP4309388U JPH068109Y2 JP H068109 Y2 JPH068109 Y2 JP H068109Y2 JP 1988043093 U JP1988043093 U JP 1988043093U JP 4309388 U JP4309388 U JP 4309388U JP H068109 Y2 JPH068109 Y2 JP H068109Y2
Authority
JP
Japan
Prior art keywords
wafer
belt
fluororesin
contact portion
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988043093U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01147340U (de
Inventor
敏雄 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Valqua Industries Ltd
Original Assignee
Nippon Valqua Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Valqua Industries Ltd filed Critical Nippon Valqua Industries Ltd
Priority to JP1988043093U priority Critical patent/JPH068109Y2/ja
Publication of JPH01147340U publication Critical patent/JPH01147340U/ja
Application granted granted Critical
Publication of JPH068109Y2 publication Critical patent/JPH068109Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Belt Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Structure Of Belt Conveyors (AREA)
JP1988043093U 1988-03-31 1988-03-31 ウエハー搬送用ベルト Expired - Lifetime JPH068109Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988043093U JPH068109Y2 (ja) 1988-03-31 1988-03-31 ウエハー搬送用ベルト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988043093U JPH068109Y2 (ja) 1988-03-31 1988-03-31 ウエハー搬送用ベルト

Publications (2)

Publication Number Publication Date
JPH01147340U JPH01147340U (de) 1989-10-12
JPH068109Y2 true JPH068109Y2 (ja) 1994-03-02

Family

ID=31269494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988043093U Expired - Lifetime JPH068109Y2 (ja) 1988-03-31 1988-03-31 ウエハー搬送用ベルト

Country Status (1)

Country Link
JP (1) JPH068109Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700111949A1 (it) * 2017-10-05 2019-04-05 Morello Forni Di Morello Marco & C S A S Metodo di formatura della pasta da pizza e macchina per la sua attuazione

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132888Y2 (de) * 1981-05-22 1986-09-25

Also Published As

Publication number Publication date
JPH01147340U (de) 1989-10-12

Similar Documents

Publication Publication Date Title
EP0513275B1 (de) Waferträger
EP0778611A3 (de) Greifer für eine Vorrichtung zum Transport von Halbleiterplättchen und Verfahren zur Bewegung von einem Plättchen
US8388412B2 (en) Retaining ring with shaped profile
TWI739972B (zh) 末端執行器及用於該末端執行器之真空夾
KR20110104993A (ko) 기판 이동 시스템, 장치 및 방법
JP6073192B2 (ja) 基板洗浄装置、基板洗浄システムおよび基板洗浄方法
JPH068109Y2 (ja) ウエハー搬送用ベルト
CN102427916B (zh) 用于保持半导体衬底的保持设备
KR101667151B1 (ko) 진공 흡착장치
KR102432439B1 (ko) 기판 이송 모듈용 슬립 방지 척
WO2009005959A1 (en) Techniques for handling substrates
JP2012245597A (ja) 搬送アームおよびそれを用いた吸着装置
KR102488697B1 (ko) 반도체 칩 패키지 이송용 패드 및 그 제조 방법
JP7287332B2 (ja) ロボットハンド
JPH073137U (ja) 半導体ウエハ搬送用ハンド
JPH063587U (ja) 表面平板状物体の搬送治具
WO2000054941A9 (en) Wafer gripping fingers
KR0181901B1 (ko) 반도체 웨이퍼 운반용 진공튀저
JPS6132888Y2 (de)
JP2020119923A (ja) 半導体基板搬送用部材及びそれを有する半導体素子製造装置
US6526640B1 (en) Tool for installing seal ring
KR980009713U (ko) 반도체 웨이퍼 이송장치용 진공패들
JP2010129565A (ja) シート状体搬送具
JPS63198350A (ja) ウエハ−ス搬送用ベルト
KR20000015150A (ko) 웨이퍼 반송용 로봇의 아암 브레이드