JPH0679390B2 - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPH0679390B2 JPH0679390B2 JP16123087A JP16123087A JPH0679390B2 JP H0679390 B2 JPH0679390 B2 JP H0679390B2 JP 16123087 A JP16123087 A JP 16123087A JP 16123087 A JP16123087 A JP 16123087A JP H0679390 B2 JPH0679390 B2 JP H0679390B2
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- recording medium
- optical recording
- layer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、書換え可能な光磁気ディスクなどに用いら
れ、磁気カー（Kerr）回転効果あるいはファラデー効果
などの磁気光学効果を用いて読み出すことのできる光磁
気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention is used for a rewritable magneto-optical disk and the like, and is capable of reading by using a magneto-optical effect such as a magnetic Kerr rotation effect or a Faraday effect. The present invention relates to a magneto-optical recording medium.
［従来の技術］ 従来、情報を熱磁気的に記録し、磁気光学的に再生する
光磁気記録媒体は、透明な有機物基板上あるいはガラス
基板上に誘電体からなる保護層、垂直磁化膜の記録層、
金属膜からなる反射層など種々の組合せで、スパッタ法
あるいは蒸着法により成膜したものである。このうち、
垂直磁化膜としてはGdTbFe,DyFe,GdCo,TbCo,TbDyFe,TbF
eCoなどの希土類−3d遷移金属の非晶質合金薄膜が量産
に適し、かつ読出しノイズが少ないこと等から所望とさ
れている。また、ディスク基板としては、量産性および
価格の点からポリカーボネート（PC）とポリメチルメタ
クリレート（PMMA）が有望とされている。しかしPC基板
は、その高い分子配向性から複屈折が大きく、読み出し
ノイズが大きくなるという欠点を有する。[Prior Art] Conventionally, a magneto-optical recording medium that thermomagnetically records information and reproduces it magneto-optically is a recording medium of a protective layer made of a dielectric material and a perpendicular magnetization film on a transparent organic substrate or a glass substrate. layer,
Various combinations such as a reflective layer made of a metal film are formed by sputtering or vapor deposition. this house,
GdTbFe, DyFe, GdCo, TbCo, TbDyFe, TbF as perpendicular magnetization film
An amorphous alloy thin film of a rare earth-3d transition metal such as eCo is suitable for mass production and has a small read noise, so that it is desired. Further, as the disk substrate, polycarbonate (PC) and polymethylmethacrylate (PMMA) are considered promising in terms of mass productivity and price. However, the PC substrate has a drawback that it has a large birefringence due to its high molecular orientation and a large read noise.
基板と記録層の間の中間層は、記録層である垂直磁化膜
の酸化保護と、カーエンハンス効果の双方を目的として
形成され、AlN,SiNなどの窒化物、SiO,SiO2などの酸化
物のほか、ZnS,MgF2,SiCなどの種々の誘電体が用いられ
ている。この中で窒化ケイ素は屈折率が基板よりも大き
く、膜の緻密性が高いことから特に有望とされている。The intermediate layer between the substrate and the recording layer is formed for the purpose of both oxidation protection of the perpendicularly magnetized film that is the recording layer and the car-enhancement effect, and nitrides such as AlN and SiN and oxides such as SiO and SiO 2 . Besides, various dielectrics such as ZnS, MgF 2 and SiC are used. Of these, silicon nitride is particularly promising because it has a higher refractive index than the substrate and the film is highly dense.
［発明が解決しようとする問題点］ 記録層に用いられる希土類−3d遷移金属非晶質合金は非
常に酸化されやすく、空気中に数日放置するだけで表面
酸化により力−回転角は大きく低下する。この酸化を防
ぐ目的で記録層を窒化ケイ素からなる保護膜ではさみこ
むことが行われており効果をあげている。[Problems to be Solved by the Invention] The rare earth-3d transition metal amorphous alloy used for the recording layer is very likely to be oxidized, and the force-rotation angle is greatly reduced by surface oxidation only by leaving it in the air for several days. To do. In order to prevent this oxidation, the recording layer is sandwiched with a protective film made of silicon nitride, which is effective.
しかしながら樹脂基板と窒化ケイ素の付着力は小さく、
かつ記録層、窒化ケイ素の内部応力が大きいため、高
温、高湿下での環境試験を行った場合、光磁気記録媒体
の樹脂基板からの剥離が発生するという欠点があった。However, the adhesion between the resin substrate and silicon nitride is small,
In addition, since the recording layer and silicon nitride have a large internal stress, there is a drawback that the magneto-optical recording medium is peeled from the resin substrate when an environmental test is performed under high temperature and high humidity.
そこで、種々の誘電体を付着層として用いることが考え
られるが、PC基板との付着力の大きいMgF2,SiO等でも、
PMMA基板との付着力は小さく、特にPMMA基板についても
良好な付着力を示す誘電体物質は得られていなかった。Therefore, it is conceivable to use various dielectric as an adhesion layer, even larger MgF 2, SiO, etc. adhesion to the PC board,
The adhesion to the PMMA substrate is small, and no dielectric substance showing good adhesion has been obtained even for the PMMA substrate.
本発明は以上述べたような従来の問題点を解決するため
になされたもので、長期信頼性の優れた光磁気記録媒体
を提供することを目的とする。The present invention has been made to solve the conventional problems described above, and an object thereof is to provide a magneto-optical recording medium having excellent long-term reliability.
［問題点を解決するための手段］ 本発明は、樹脂基板と光磁気記録体層との間に、窒化ケ
イ素よりなる層および酸化セリウムよりなる層を、前記
酸化セリウム層を前記樹脂基板と接触させて積層したこ
とを特徴とする光磁気記録媒体である。[Means for Solving the Problems] In the present invention, a layer made of silicon nitride and a layer made of cerium oxide are provided between the resin substrate and the magneto-optical recording layer, and the cerium oxide layer is brought into contact with the resin substrate. It is a magneto-optical recording medium characterized by being laminated by making it.
［作用］ 種々の誘電体を付着層として検討した結果、酸化セリウ
ム（CeO2）は樹脂基板に対して高い付着力を有すること
が明らかとなった。しかし、CeO2は、膜の緻密度が低
く、かつ界面で記録層を酸化させるため、CeO2膜の単層
では十分な保護効果をあげることはできない。そこで、
CeO2付着層の上に窒化ケイ素よりなる層を積層すること
により、窒化ケイ素の優れた保護効果と、CeO2の樹脂基
板との大きな付着力の双方を併せ有する中間層を作製す
ることができる。この中間層を用いることにより樹脂基
板を用いた光磁気記録媒体の長期信頼性を高めることが
できる。[Function] As a result of examining various dielectrics as the adhesion layer, it was revealed that cerium oxide (CeO 2 ) has a high adhesion to the resin substrate. However, since CeO 2 has a low film density and oxidizes the recording layer at the interface, a single CeO 2 film cannot provide a sufficient protective effect. Therefore,
By stacking a layer made of silicon nitride on the CeO 2 adhesion layer, an intermediate layer having both the excellent protective effect of silicon nitride and the great adhesion of CeO 2 to the resin substrate can be prepared. . By using this intermediate layer, the long-term reliability of the magneto-optical recording medium using the resin substrate can be improved.
［実施例］ 次に本発明の実施例について図面を参照して詳細に説明
する。[Embodiment] Next, an embodiment of the present invention will be described in detail with reference to the drawings.
第１図は、本発明の一実施例を示す光磁気記録媒体の部
分断面図である。図中、１はPMMA基板、２はスパッタに
よるCeO2層（膜厚200Å）、３はスパッタによる窒化ケ
イ素層（膜厚800Å）、４は光磁気記録媒体層（スパッ
タによるTbFeCo膜、膜厚1,000Å）、５は保護層（スパ
ッタによる窒化ケイ素膜、膜厚1,000Å）である。FIG. 1 is a partial sectional view of a magneto-optical recording medium showing an embodiment of the present invention. In the figure, 1 is a PMMA substrate, 2 is a CeO 2 layer by sputtering (film thickness 200Å), 3 is a silicon nitride layer by sputtering (film thickness 800Å), 4 is a magneto-optical recording medium layer (TbFeCo film by sputtering, film thickness 1,000) Å) 5 is a protective layer (silicon nitride film by sputtering, film thickness 1,000 Å).
CeO2膜はCeO2焼結体ターゲットを用い、Ar＋O2ガスによ
り投入電力400Wで成膜した。スパッタガス圧は８×10-1
Paである。また、窒化ケイ素膜はSi多結晶体ターゲット
を用い、Ar＋N2ガスにより投入電力400Wで成膜した。ス
パッタガス圧は2.5×10-1Paである。さらに、TbFeCo膜
はFeCo合金ターゲット上にTbチップをのせた複合ターゲ
ットを用い、Arガスにより投入電力100Wで成膜した。ス
パッタガス圧は９×10-2Paである。The CeO 2 film was formed using a CeO 2 sintered target with Ar + O 2 gas at an input power of 400W. Sputtering gas pressure is 8 × 10 -1
Pa. The silicon nitride film was formed by using a Si polycrystal target with Ar + N 2 gas at an input power of 400W. The sputtering gas pressure is 2.5 × 10 -1 Pa. Further, a TbFeCo film was formed by using a composite target in which a Tb chip was placed on a FeCo alloy target and using Ar gas at an input power of 100W. The sputtering gas pressure is 9 × 10 -2 Pa.
以上のようにして作製された光磁気記録媒体を50℃、80
％RHの温・湿度条件で環境試験をしたところ、媒体は50
0時間経過後においてもPMMA基板から剥離しなかった。The magneto-optical recording medium manufactured as
As a result of an environmental test under the conditions of% RH temperature and humidity, the medium is 50
It did not peel off from the PMMA substrate even after 0 hour.
一方、上記実施例においてCeO2層を存在させないほかは
上記と同様にして光磁気記録媒体を作製し、同様の環境
試験を行ったところ、80時間後にPMMA基板から剥離し
た。On the other hand, when a magneto-optical recording medium was prepared in the same manner as in the above example except that the CeO 2 layer was not present and the same environmental test was conducted, it was peeled from the PMMA substrate after 80 hours.
また、本実施例におけるPMMA基板にかえてPC基板を用い
た場合も、基板と光磁気記録媒体との付着力は大きく増
加し、長期信頼性は向上した。Also, when the PC substrate was used instead of the PMMA substrate in this example, the adhesive force between the substrate and the magneto-optical recording medium was greatly increased, and the long-term reliability was improved.
［発明の効果］ 以上説明したように、本発明による光磁気記録媒体は基
板からの剥離が生じ難いので従来の光磁気記録媒体に比
べて長期信頼性が改善されるという効果を有する。[Advantages of the Invention] As described above, the magneto-optical recording medium according to the present invention is less likely to be peeled from the substrate, and thus has the effect of improving the long-term reliability as compared with the conventional magneto-optical recording medium.
第１図は本発明の一実施例を示す光磁気記録媒体の部分
断面図である。 １……PMMA基板 ２……CeO2層 ３……窒化ケイ素層 ４……光磁気記録媒体層 ５……保護層FIG. 1 is a partial sectional view of a magneto-optical recording medium showing an embodiment of the present invention. 1 ... PMMA substrate 2 ... CeO 2 layer 3 ... Silicon nitride layer 4 ... Magneto-optical recording medium layer 5 ... Protective layer
Claims (1)
化ケイ素よりなる層および酸化セリウムよりなる層を、
前記酸化セリウム層を前記樹脂基板と接触させて積層し
たことを特徴とする光磁気記録媒体。1. A layer made of silicon nitride and a layer made of cerium oxide are provided between a resin substrate and a magneto-optical recording medium layer.
A magneto-optical recording medium, wherein the cerium oxide layer is laminated in contact with the resin substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16123087A JPH0679390B2 (en) | 1987-06-30 | 1987-06-30 | Magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16123087A JPH0679390B2 (en) | 1987-06-30 | 1987-06-30 | Magneto-optical recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS647350A JPS647350A (en) | 1989-01-11 |
| JPH0679390B2 true JPH0679390B2 (en) | 1994-10-05 |
Family
ID=15731105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16123087A Expired - Lifetime JPH0679390B2 (en) | 1987-06-30 | 1987-06-30 | Magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0679390B2 (en) |
-
1987
- 1987-06-30 JP JP16123087A patent/JPH0679390B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS647350A (en) | 1989-01-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 13 Free format text: PAYMENT UNTIL: 20071005 |