JPH0675191A - Axis aligning device and axis aligning method using it - Google Patents

Abstract

PURPOSE:To quickly and accurately align optical axes when a laser beam is transmitted in a long distance. CONSTITUTION:As a movable mirror device, a mirror holder 12e which is rotatably provided at the upper part of a supporter 12c made to stand on the supporting table 12b of a laser axis and which axially supports a mirror 12d with a recessed upper inside part as a holding part, an interlocking arm 12g which is provided so as to be interlocked with the mirror 12d on the upper outside of the holding part and whose lower end is faced to the holder 12e, a fixed arm 12h fixed to the supporter 12c, a rough adjustment mechanism 37 which turns the holder 12e by making a rod 37a moving forward and backward by an adjustment signal abut on the arms 12g and 12h and plural fine adjustment mechanisms 38 which are made to intervene between the mechanism 37 and the surface of the mirror holder opposite to both arms 12g, 12h and cylindrically formed so as to be finely made to contract or elongate by receiving the adjustment signal are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alignment device used for long-distance transmission of laser light and an alignment method therefor,
In particular, the present invention relates to an axis alignment device provided with a technique for aligning optical axes quickly and accurately by interlocking rough adjustment and fine adjustment, and an axis alignment method using the same.

[0002]

2. Description of the Related Art Conventionally, when measuring a distance between remote places using a laser beam, an axis aligning device for aligning an optical axis of the laser beam with a target position separated by a long distance has been widely used. .

FIG. 11 is a view showing the arrangement of such an axis aligning device. This axis-aligning device reflects a laser beam 1 generated by a laser light source (not shown) in the order of a coarse adjustment movable mirror device 2, a fine adjustment movable mirror device 3 and a total reflection mirror 4 to make the total reflection mirror 4 Has a laser light transmission system for transmitting to a half mirror 5 at a long distance position and transmitting it to a predetermined irradiation target (not shown) by reflection of the half mirror 5, and further, a laser transmitted through the half mirror 5. A position detector 6 for detecting the optical axis position of light, and a computer for issuing an adjustment signal for the laser optical axis based on a predetermined target value when the optical axis position measurement signal is input via a position detector interface 7. 8 and this adjustment signal are used as a coarse adjustment actuator 2a or a fine adjustment movable mirror for coarsely adjusting the tilt and rotation directions (hereinafter, referred to as vertical and horizontal directions) of the coarse adjustment movable mirror device 2. An actuator interface 9 is provided for inputting the longitudinal and lateral angle of over 3 in the fine adjustment actuator 3a for fine adjustment.

Next, FIG. 12 is a block diagram showing another conventional alignment device. This device separately detects the position and angle of the laser beam axis and performs axis alignment. Specifically, the device reflects the laser beam 11 generated by a laser light source (not shown) and receives a control signal. First movable mirror device 1 that can be vertically and horizontally rotated by an actuator 12a
2, a second movable mirror device 13 that reflects the laser light received from the movable mirror device 12 and is rotatable in the vertical and horizontal directions by an actuator 13a, and is reflected by the second movable mirror device 13 to be illustrated. The optical axis direction of the laser light 11 transmitted to the irradiation target is set to the half mirror 1.
4, a direction detector 18 for detecting via the half mirror 15, the total reflection mirror 16 and the lens 17, and a position detector 20 for detecting the optical axis position of this laser light from the half mirror 15 via the lens 19. Both detectors 18, 20
The position or direction data detected by the amplifier 21 or the amplifier 22 and the interface 23 are taken in, and a computer 24 for issuing an adjustment signal of the laser optical axis based on a predetermined target value held in advance, and this adjustment signal Is input to the actuator 12a of the first movable mirror device 12 or the actuator 13a of the second movable mirror device 13 with the actuator driver 25.

Next, such an actuator 12a,
First and second movable mirror device 12 including 13a,
The configuration of 13 will be described with reference to FIGS. 13A to 13C, but here, for convenience of description, the first movable mirror device 12 will be described as an example. This movable mirror device 12
Is a column 12c standing upright on the support base 12b, and is rotatably attached to the upper part of the column around the column, and the upper part is formed in a concave shape, and the inside of the upper part of the concave part is a holding part. As a mirror holder 12e that rotatably holds the reflecting mirror 12d, the reflecting mirror 1 is provided on the outside of an upper part of a holding portion of both holding portions of the mirror holder 12e.
The horizontal axis 1 of the reflection mirror 12d is linked to 2d.
It is fixedly attached to 2f, and its lower end 12
Interlocking arm 12g in which g'faces the mirror holder 12e
And an L-shaped fixed arm 12h having a tip upwardly fixed to a position opposite to the interlocking arm 12g from the column body, and the interlocking arm 12g receiving an adjustment signal from the computer 24.
An actuator 12a that presses to rotate the reflection mirror 12d and an actuator 12a 'that also receives a signal from the computer 24 to press the fixed arm 12h to rotate the mirror holder 12e are provided.

These actuators 12a and 12a '
Is a micrometer with a motor driven by a small motor. The tip of the advancing / retreating rod 12k pushes the arms 12g and 12h as shown in FIGS. It controls the angle in the vertical and horizontal directions, and the advancing / retreating rod 12k can be controlled with a minimum feed of about 6 μm.

[0007]

However, in the above-described axis aligning device, when the minimum feed by the actuators 12a and 13a is about 0.6 μm, the movable mirror device 1 is used.
Even if the change in the angles of 2 and 13 is small, there is a problem that the optical axis is largely displaced after long-distance transmission, and it takes a long time for the axis alignment work.

Further, since a slight deformation of the mirror holder 12e, a slight deformation of the support base 12b, etc. occur due to a change in ambient temperature, it is assumed that the axis alignment control is performed based on the initial target value of the optical axis. , There is a problem that the optical axis is not aligned.

The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide an axis aligning device which enables quick and highly accurate optical axis alignment when transmitting laser light over a long distance. To do. Another object of the present invention is to provide an axis aligning method for always aligning the optical axis to an accurate position even if the optical axis system changes due to ambient temperature or the like.

[0010]

According to a first aspect of the present invention, a laser beam from a laser light source is reflected and guided to an alignment section, and a reflection optical axis of the laser beam obtained by the alignment section. And an optical axis of the laser light, wherein the movable mirror device has a movable mirror device that receives the adjustment signal to make the deviation between the target optical axis and the target optical axis zero. And a support erected on a support stand provided on the base, rotatably attached to the upper part of the support about the support as a center of rotation, and the upper part is formed in a concave shape, and the inside of the upper part of the concave part is used as a holding part. A mirror holder that holds the mirror rotatably, and one of both holding portions of the mirror holder is attached so as to interlock with the mirror on the outside of an upper portion of a certain holding portion, and the lower end portion of the holding portion faces the mirror holder. Interlocking arm, a fixed arm located on the opposite side of the interlocking arm and fixed to the column, and an advancing / retreating rod for advancing / retreating based on the adjustment signal received from the axis alignment section. A coarse adjustment mechanism for contacting a fixed arm to rotate the mirror, and a coarse adjustment mechanism interposed between the main body of the coarse adjustment mechanism and the mirror holder surface on the opposite side of the both arms, and adjusting from the axis alignment section. This is an axis aligning device that includes a plurality of fine adjustment mechanisms formed in a tubular shape that slightly expands and contracts in response to a signal, and that roughly adjusts and finely adjusts the optical axis with the same movable mirror device.

The invention according to claim 2 measures the optical axis of the reflected laser light obtained from the laser light source through the movable mirror device, and based on the deviation between the measured optical axis and the target optical axis, the reflected optical axis is measured. When the deviation is equal to or larger than a predetermined fine adjustment range, an adjustment signal that causes the reflected light axis to fall within the fine adjustment range is given to the movable mirror device to adjust the axis of the movable mirror device. The coarse adjustment mechanism is operated, then the reflected light axis position is measured again, and when the deviation falls within the predetermined fine adjustment range, the reflected light axis falls within the predetermined minimum value of fine adjustment. Such an adjustment signal is given to the movable mirror device to operate the fine adjustment mechanism of the movable mirror device, and when the reflected optical axis position exceeds the predetermined fine adjustment range during this fine adjustment, based on the position. Adjusting signal to the movable mirror Giving the location by operating the coarse adjustment mechanism and a fine adjustment mechanism of the movable mirror device, a shaft mating method to enter the central region of the fine adjustment range while offsetting the coarse and fine adjustment.

In the invention corresponding to claim 3, the reflected laser light obtained from the laser light source via the movable mirror device is transmitted to a predetermined irradiation target, and the optical axis of the reflected laser light is measured. In the axis alignment method for aligning the reflection optical axis based on the deviation between the measurement optical axis and the target optical axis,
On the transmission side near the laser light source, the transmission side optical axis direction and the transmission side optical axis position of the reflected laser light from the movable mirror device are measured, and the transmission side optical axis direction and the transmission side optical axis position are set to the target. The transmission side optical axis direction deviation and the transmission side optical axis position deviation are obtained by comparison with the optical axis, and an adjustment signal for canceling both the transmission side optical axis deviations is given to the movable mirror device and the coarse mirror of the movable mirror device is given. The adjustment mechanism and the fine adjustment mechanism are operated, and then, on the reception side close to the irradiation target, the reception side optical axis position of the reflected laser light from the movable mirror device is measured, and the reception side optical axis position is set to the target. The receiving side optical axis position deviation is obtained by comparing with the optical axis, and an adjustment signal for eliminating the receiving side optical axis position deviation is given to the movable mirror device to operate the fine adjustment mechanism of the movable mirror device. After fine adjustment The transmission side optical axis direction and the transmission side optical axis position of the reflected laser light are updated as the target optical axis, and the reception side optical axis position of the reflected laser light is measured again, and coarse adjustment and fine adjustment are linked. This is an axial alignment method that constantly adjusts the optical axis while performing the above.

[0013]

Therefore, according to the invention corresponding to the first aspect, since the coarse adjusting mechanism and the fine adjusting mechanism are integrally provided on the same movable mirror device by taking the above means, the optical axis When adjusting, the coarse adjustment and the fine adjustment can be performed in conjunction with each other. Moreover, since the fine adjustment mechanism is added, it is possible to remarkably improve the axial alignment accuracy of the movable mirror device, as compared with the case where only the coarse adjustment mechanism is provided.

The invention corresponding to claim 2 is as follows.
The coarse adjustment mechanism of the movable mirror device is operated so that the deviation between the measurement optical axis and the target optical axis falls within a predetermined fine adjustment range, and then the movable mirror is moved so that the deviation falls within the minimum value for fine adjustment. When the fine adjustment mechanism of the device is operated and the deviation exceeds the fine adjustment range during this fine adjustment, the coarse adjustment mechanism and the fine adjustment mechanism of the movable mirror device are interlocked with each other so that the central region of the fine adjustment range is constantly maintained. Since the fine adjustment is performed with, the optical axis can always be adjusted to an accurate position.

The invention according to claim 3 is a movable mirror which detects the transmitting side optical axis direction and the transmitting side optical axis position of the reflected laser light in advance on the transmitting side which is less affected by the alignment accuracy than the receiving side. The optical axis is adjusted by the device, and then the optical axis is finely adjusted by the movable mirror device based on the receiving side optical axis position detected on the receiving side, so that the optical axis can be adjusted quickly and accurately over a long distance. be able to.

Further, since the target optical axis is constantly updated in the transmitting side optical axis direction and the transmitting side optical axis position after fine adjustment on the receiving side, the optical axis system is slightly displaced due to the ambient temperature change. Accurate alignment can be performed even when the target optical axis changes.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing the configuration of a first embodiment of an alignment device according to the present invention. This axis aligning device reflects a laser beam generated from a laser light source (not shown) and determines the vertical and horizontal angles of this reflection by the actuator 3
Movable mirror device 31 for coarse and fine adjustment by 1a
A half mirror 32, which is arranged at a long distance from the movable mirror device 31, reflects the laser light reflected by the movable mirror device 31 to an irradiation target (not shown) and partially transmits it, and the half mirror 32. A position detector 33 for detecting the optical axis position of the transmitted laser light, and the optical axis position is fetched from the position detector 33 via an interface 34, and the optical axis is adjusted based on a target optical axis value held in advance. Calculator 35 as an axis alignment unit that generates a signal
And an actuator interface 36 for inputting this optical axis adjustment signal to the actuator 31b.

The movable mirror device 31 has substantially the same structure as the first and second movable mirror devices shown in FIG. 13, but instead of the actuators 12a and 13a, a new first actuator 31a and a new second actuator 31a are provided. As the actuator 31a ', a plurality of coarse adjustment mechanisms 37 and fine adjustment mechanisms 38 as shown in FIGS. 2 and 3 are provided. In the figure, the same parts as those in FIG. 13 are designated by the same reference numerals and detailed description thereof will be omitted, and only different parts will be described here.

That is, these actuators 31a,
The configuration of 31a 'will be described with reference to FIGS. 2 and 3, but here, for convenience of description, the first actuator 31a will be described as an example. This actuator 31a
Is a plurality of coarse adjustment mechanisms 37 for rotating the reflection mirror 12d by abutting an advancing / retreating rod 37a that moves forward / backward on the basis of an adjustment signal received from the computer 35 with the interlocking arm 12g and the fixed arm 12h, and the coarse adjusting mechanism. A plurality of fine adjustment mechanisms 38 are formed between the main body of 37 and the mirror holder surface on the opposite side of the arms 12g and 12h, and receive the adjustment signal from the computer 35 to be expanded and contracted minutely. It consists of and.

The coarse adjustment mechanism 37 is a micrometer with a motor such as the actuator 12a,
The interlocking arm 12g and the mirror holder 12e are controlled by controlling the advancing / retreating rod 37a so that the advancing / retreating rod 37a can freely move back and forth.
The distance between the reflection mirror 12d and the reflection mirror 12d held by the mirror holder 12e is changed in the vertical direction.

The fine adjustment mechanism 38 changes the length by a minute amount by applying a voltage to a piezoelectric element such as a cylindrical barium titanate. The minute adjustment mechanism 38 expands and contracts slightly based on the optical axis adjustment signal. By changing the distance of the coarse adjustment mechanism 37 to the mirror holder 12e, the projecting condition of the rod 37a protruding from the mirror holder 12e is changed, and as shown in FIG.
The rotation of the reflecting mirror 12d in the vertical direction is controlled by changing the distance from the mirror holder 1g and the mirror holder 1 as shown in FIG.
It has a function of controlling the lateral rotation of the mirror holder 12e by changing the distance between the 2e and the fixed arm 12h.

The position detector 33 is, for example, a four-divided detector (QPD), and a laser beam having a diameter of about 60 mm is formed by a convex lens, which is a half of 10 mm which is the diameter of the detector.
The measurement is performed with the laser beam condensed to mm and the laser beam shift being about 1/12. Since the position resolution of this detector is about 40 μm, the positional deviation of the laser light can be measured with an accuracy of about 0.5 mm.

Next, an axis aligning method using the axis aligning device in the first embodiment will be described with reference to the flow chart of FIG. Since the measurement position x of the optical axis and the deviation of the measurement position from the target position have the same value when the target position is taken as a reference, they will be described here as the measurement position x.

First, in the position detector 33 arranged on the reception side near the irradiation target, the measurement position x of the optical axis of the reflected laser light is measured.
Is measured (ST1). Next, the computer 35 determines whether or not the measurement position x is greater than or equal to the maximum value χ _m of the predetermined fine adjustment range with respect to the target position of the optical axis (ST2). An adjustment signal that falls within this fine adjustment range is given to the movable mirror device 31.

In the movable mirror device 31, the coarse adjustment mechanism 37 is operated based on the adjustment signal, and the reflection mirror 12 is moved.
The optical axis of the reflected laser light from d is roughly adjusted (ST3).
Then, it returns to ST1 again.

In ST2, when the measurement position x is within the predetermined fine adjustment range, the computer 35 compares the measurement position x with the fine adjustment minimum value χ _o (ST4), and the fine adjustment minimum value χ _o.
In the above case, the movable mirror device 31 is provided with an adjustment signal such that the measurement position x falls within the fine adjustment minimum value χ _o .

In the movable mirror device 31, the fine adjustment mechanism is operated based on the adjustment signal, and the reflection mirror 12 is moved.
The optical axis of the reflected laser light from d is finely adjusted (ST5).
Here, when the measurement position x is within the minimum value χ _{o of the} fine adjustment, the process returns to ST1.

When the measurement position x of the optical axis exceeds the predetermined fine adjustment range χ _r during the fine adjustment of ST5 (ST6), the computer 35 gives an adjustment signal based on the position to the movable mirror device 31. . In the movable mirror device 31, the coarse adjustment mechanism 37 and the fine adjustment mechanism 38 are operated based on the adjustment signal to cancel the coarse adjustment and the fine adjustment while the measurement position x is the central region of the fine adjustment range χ _r . Adjust to enter (ST7). After this adjustment, the process returns to ST1 again, and the position measurement of the reflected laser optical axis is continued.

As described above, according to the first embodiment,
By providing the coarse adjustment mechanism 37 and the fine adjustment mechanism 38 in the same movable mirror device 31, it is possible to remarkably improve the alignment accuracy. For example, the conventional alignment accuracy is
It is about 1 mm at 10 m. On the other hand, in the movable mirror device 31 of the present embodiment, when the vertical arm length of the interlocking arm 12g is 60 mm and the minimum feed of the actuator 31a is 0.25 μm, the alignment accuracy 250 m ahead is 250 × 10 ^3. mm x 0.25 x 10 ^-3 mm / 60 mm
= About 1 mm.

Further, since no extra fine adjustment movable mirror device 3 dedicated for fine adjustment is required, the number of constituent elements is reduced,
It is possible to improve reliability, perform quick adjustment, and reduce light transmission loss due to reflection of the mirror of the fine adjustment movable mirror device 3.

Further, by correlating the coarse adjustment and the fine adjustment with each other, fine adjustment is always possible, and the optical axis is always placed at the correct position even if the optical axis system changes with time due to changes in ambient temperature. Since they are matched, the reliability in long-term transmission is also improved.

Next, a second embodiment of the present invention will be described. FIG. 6 is a view showing the configuration of the second embodiment of the axis aligning device according to the present invention. This axis alignment device is arranged on the optical axis of laser light generated from a laser light source (not shown) and has a first movable mirror device 41 having an actuator 41a for adjusting the optical axis, and the first movable mirror device. And an actuator 42 for reflecting the laser light from the movable mirror device 41 and adjusting the optical axis.
a second movable mirror device 42 having a, a transmission side half mirror 43 arranged on the optical axis of the laser beam reflected by the second movable mirror device 42, and a predetermined side from the transmission side half mirror 43. The laser light transmitted by the transmission half mirror 43 is transmitted by the reception half mirror 44 that reflects the laser light transmitted through the transmission half mirror 43 to an irradiation target (not shown) and is reflected by the transmission half mirror 43. A detection half mirror 45 that reflects and transmits the laser light, and a total reflection mirror 46 and a convex lens 47 in the optical axis direction of the laser light that has passed through the detection half mirror 45.
Direction detector 48 for detecting via the direction detector 4 and this direction detector 4
An amplifier 49 that amplifies the optical axis direction detected in 8 and a first position detector 51 that detects the optical axis position of the laser light reflected by the detection half mirror 45 via a convex lens 50.
And the amplifier 52 that amplifies the optical axis position detected by the position detector 51, detects the direction and position of the laser optical axis on the transmission side, and the optical axis of the laser light transmitted through the receiving side half mirror 44. The second position detector 54, which detects the position via the convex lens 53, and the amplifier 55, which amplifies the position of the optical axis detected by the position detector 54, detect the optical axis position on the receiving side. A computer 57 which takes in the data of the direction and position of the optical axis from 52 and 55 via an interface 56 and generates an optical axis adjustment signal based on a predetermined target value, and an actuator based on the optical axis adjustment signal. 41a and an actuator driver 58 that drives the actuator 42a. The first and second movable mirror devices 41 and 42 have the same configuration as the movable mirror device 31.

The direction detector 48 is provided at the focal point of the convex lens 47 arranged at the rear stage of the half mirror, and the direction deviation Δθ is obtained by the equation (1), where the positional deviation is Δr and the focal length is a. And, for example, a PSD detector is used. Δθ = Δr / a (1)

Here, the accuracy of the direction detector 48 is about 20 μm.
If the focal length of the convex lens 47 is 600 mm, Δθ = 3.3 × 10 ⁻⁵ , so that the laser light is 2
The accuracy when transmitted 50 m ahead is about 8.3 mm.

Next, a method of aligning such an aligning device will be described with reference to the flowchart of FIG. First, the laser light generated from the laser light source (not shown)
First movable mirror device 41, second movable mirror device 4
2. The transmission side half mirror 43 and the reception side half mirror 44 propagate the laser beam to an irradiation target (not shown) to form laser optical axes of these optical systems. Here, the angle θ indicating the direction of the laser optical axis on the transmission side, which is partially reflected by the transmission half mirror 43, is measured by the direction detector 48 (ST1.
1). The calculator 57 obtains the transmission side optical axis angle deviation | θ−θ _o | as the transmission side optical axis direction deviation from the angle target value θ _o held in advance for this measured angle θ, and this transmission side optical axis angle deviation And the angle allowable width Δθ _o held in advance are compared (ST12), and the transmission side optical axis angle deviation is calculated as the angle allowable width Δθ _o.
The second movable mirror device 42 is adjusted to be smaller (ST13), and the process returns to ST1 again.

Next, when it is judged in ST12 that the transmission side optical axis angle deviation is smaller than the allowable angle width Δθ _o , the position detector 51 detects the position x of the laser optical axis partially reflected by the transmission side half mirror 43. (ST14). Calculator 57
Is the target position value x held in advance for this measurement position x.
_The transmission side optical axis position deviation | x−x _o | is obtained from _o, and the transmission side optical axis position deviation is compared with the position allowable width Δx _o held in advance (ST15). The position of the optical axis is adjusted while keeping the angle θ by moving the first and second movable mirror devices 41 and 42 so as to maintain the parallel relationship so as to be smaller than the allowable width Δx _o (ST
16) Then, the process returns to ST4 again.

Further, when it is determined in ST15 that the transmission side optical axis position deviation is smaller than the position allowable width Δx _o , the reception side finely adjusts the optical axis position. That is, first, the position detector 54 measures the position X of the laser optical axis that has partially passed through the receiving half mirror 44 (ST17). When the measurement position X is outside the measurement range of the position detector 54, the optical axis cannot be measured, so the process returns to ST11 and the optical axis is adjusted again on the transmitting side. When the measurement position X is within the measurement range of the position detector 54, , And proceeds to the next process (ST18).

Next, the computer obtains the receiving side optical axis position deviation | X−X _o | from the position target value X _o held in advance for this receiving side measurement position X, and obtains this receiving side optical axis position deviation. By comparing the position allowable width ΔX _o held in advance (ST19),
The first and second movable mirror devices 41, 42 are finely adjusted so that the receiving side optical axis position deviation becomes smaller than the position allowable width ΔX _o (ST20), and the process returns to ST17 again.

When the fine adjustment is finished and it is determined in ST19 that the position deviation of the optical axis on the receiving side is less than the allowable position width ΔX _o , the values of the measuring angle θ and the measuring position x on the transmitting side at this time are
The data of the target value is updated as the angle target value θ _o and the position target value x _o on the transmission side held by the computer 57 (ST
21) Then, the process returns to ST17 again to monitor the optical axis position on the receiving side. In this way, the axis aligning device 40 can align the optical axes of the entire optical system.

As described above, according to the second embodiment,
When aligning the optical axis, first, the laser optical axis is adjusted to the target value on the transmitting side close to the laser light source, so that the laser optical axis can be quickly and roughly adjusted, and after this coarse adjustment, the laser on the receiving side near the irradiation target is adjusted. Since the optical axis is finely adjusted, the optical axis can be aligned with high accuracy. Further, since the optical axis is first roughly adjusted on the transmitting side, which is less affected by the optical axis position, the optical axis can be quickly adjusted even if the initial position of the optical axis is largely deviated.

Further, since two detectors and two movable mirror devices are provided on the transmitting side so that the angle and position of the optical axis can be adjusted separately, the optical axis can be efficiently adjusted by a predetermined procedure. Can be combined. Next, a third embodiment of the present invention will be described. The configuration of the axis alignment device is similar to that of the second embodiment.

Next, the method of aligning the axis aligning device will be described with reference to FIG.
This will be described with reference to the flowchart of. This flow
Between ST15 and ST17, ST15a,
The figure shows an axial alignment method in which ST15b and ST15c are provided, the angle θ of the optical axis and the position x are adjusted on the receiving side, the angle θ is adjusted again, and then the position of the optical axis is finely adjusted on the receiving side.

That is, the angle and position of the optical axis are adjusted on the receiving side (ST11 to 16), and when it is determined in ST15 that the positional deviation is smaller than the allowable position width Δx _o , the direction detector 48 again determines the optical axis. The angle θ is measured (ST5a). The calculator 57 obtains the transmission side optical axis angle deviation | θ−θ _o | from the angle target value θ _o held in advance for this measured angle θ, and the transmission side optical axis angle deviation and the angle allowable width Δθ held in advance. _o is compared (ST15b), the second movable mirror device 42 is adjusted so that the transmission-side optical axis angle deviation is smaller than the allowable angle width Δθ _o (ST15c), and ST15 is again set.
Return to a.

Next, when it is judged in ST15b that the transmission side optical axis angle deviation is smaller than the angle permissible width Δθ _o , the receiving side measures the optical axis position in the same manner as described above (ST17), and fine adjustment ( In ST18 to 20), the target value is updated with the angle θ and the position x after the fine adjustment (ST21) and the position of the optical axis is continuously monitored.

As described above, according to the third embodiment,
Since the procedure for adjusting the angle θ again after adjusting the angle θ and the position x of the optical axis on the transmitting side is included, it is possible to bring the initial position when adjusting the optical axis position on the receiving side closer to the target value. Therefore, fine adjustment on the receiving side can be efficiently performed.

Next, a fourth embodiment of the present invention will be described with reference to FIG.
Will be explained. The axis aligning device 61 is different from the axis aligning devices of the second and third embodiments in that the detection half mirror 45 is omitted, the reflecting mirror of the second movable mirror device 42 is a half mirror, and the half mirror is transmitted. The laser optical axis is reflected by the total reflection mirror 61, and the position of the optical axis is detected by the position detector 51 via the convex lens 50. This optical axis position is detected by the amplifier 52 and the interface 5.
The configuration is such that it is input to the computer 57 via 6.

Next, a method of aligning such an aligning device will be described with reference to the flowchart of FIG. First, the position detector 51 on the transmission side measures the optical axis position x (ST31). Next, this optical axis position x and position target value x
sender optical axis position deviation between _o | x-x _o | a seeking to determine whether the position is greater than the allowable width Δx _o (ST32), deviation first movable mirror device is greater than [Delta] x _o Four
1 adjusts the optical axis position (ST33).

At ST32, the transmission side optical axis position deviation is Δx _o.
If it is smaller, the direction detector 48 on the transmitting side measures the angle θ of the laser optical axis (ST34). Similarly, the angle deviation | θ of the optical axis on the transmission side between the measured angle θ and the target angle value θ _o
−θ _o | is determined, and it is determined whether or not the transmission side optical axis angle deviation is larger than the angle allowable width Δθ _o (ST35).

If the deviation is larger than the allowable angle width Δθ _{o in} ST35, the second movable mirror device 42 is adjusted to reduce the transmission-side optical axis angle deviation (ST36), and the transmission-side optical axis angle deviation is set to the angle. When the width becomes smaller than the allowable width Δθ _o , the position detector 54 on the receiving side starts measuring the optical axis position (ST37).

Here, it is judged whether or not the optical axis position is within the measurement range of the detector on the receiving side (ST38). If it is not within the measurement range, the optical axis is aligned again from ST31 and the measurement range is determined. If yes, take a measurement.

Similarly, the receiving side obtains the receiving side optical axis position deviation between the measured position x and the position target value x _o, and determines whether this receiving side optical axis position deviation is larger than the position allowable width Δx _o. If it is determined (ST39) and the optical axis position deviation on the receiving side is larger than the position allowable width Δx _{o, the} optical axis position x is slightly reduced while the first and second movable mirror devices 41 and 42 maintain the parallel relationship. Adjust (ST40).

Further, in ST39, if the optical axis position deviation on the receiving side is smaller than the allowable position width Δx _o , the measured position x and the measured angle θ at that time are set as a new target position value x _o and a new target angle value θ _o. (ST41), and the optical axis system is continuously monitored by these target values.

As described above, according to the fourth embodiment,
By providing the position detector 51 for the change of the first movable mirror device 41 and the direction detector 48 for the change of the second movable mirror device 42 on the transmitting side so as to have a one-to-one correspondence, The optical axis can be easily adjusted.

Although the first to fourth embodiments have been described for the case where the optical axis is always kept constant at a predetermined target value,
The present invention is not limited to this, and the present invention can be similarly implemented even if a predetermined target value in the computer 57 is appropriately replaced by a program or the like so as to follow the optical axis. In addition, the present invention can be modified in various ways without departing from the scope of the invention.

[0055]

As described above, the present invention has the following effects.

According to the invention of claim 1, the coarse adjustment mechanism and the fine adjustment mechanism are integrally provided on the same movable mirror.
Since the optical axis is adjusted by interlocking the rough adjustment and the fine adjustment, it is possible to provide an axis aligning device which can quickly and accurately align the optical axis when transmitting laser light over a long distance.

According to the second aspect of the invention, the coarse adjustment mechanism of the movable mirror device is operated so that the deviation between the measurement optical axis and the target optical axis falls within a predetermined fine adjustment range, and then the deviation is finely adjusted. The fine adjustment mechanism of the movable mirror device is operated so as to be within the minimum value of the adjustment, and when the deviation exceeds the fine adjustment range during this fine adjustment, the coarse adjustment mechanism and the fine adjustment mechanism of the movable mirror device are Since the fine adjustment is always performed in the central region of the fine adjustment range by interlocking with, it is possible to provide an axis alignment method that can always align the optical axis to an accurate position even if the optical axis system changes due to ambient temperature or the like. .

According to the third aspect of the present invention, the transmitting side, which is less affected by the alignment accuracy than the receiving side, detects the transmitting side optical axis direction and the transmitting side optical axis position of the reflected laser light in advance and uses the movable mirror device. Since the optical axis is adjusted and then the optical axis is finely adjusted by the movable mirror device based on the optical axis position on the receiving side detected on the receiving side, the optical axis can be adjusted quickly and accurately over a long distance. Also, by constantly updating the target value for coarse adjustment in the optical axis direction and optical axis position after fine adjustment of the optical axis, even if the optical axis system changes due to ambient temperature etc., the optical axis will always be in the correct position. It is possible to provide an axis aligning method capable of aligning.

[Brief description of drawings]

FIG. 1 is a diagram showing the configuration of a first embodiment of an alignment device according to the present invention.

FIG. 2 is a diagram showing a configuration of a movable mirror device in the embodiment.

FIG. 3 is a diagram showing a configuration of an actuator of a movable mirror device in the embodiment.

FIG. 4 is a diagram schematically showing the operation of the movable mirror in the same embodiment.

FIG. 5 is a flowchart showing an axis aligning method in the embodiment.

FIG. 6 is a diagram showing a configuration of a second embodiment of an axis aligning device according to the present invention.

FIG. 7 is a flowchart showing an axis aligning method in the embodiment.

FIG. 8 is a flowchart showing a third embodiment of the axis aligning method according to the present invention.

FIG. 9 is a diagram showing the configuration of a fourth embodiment of the axis aligning device according to the present invention.

FIG. 10 is a flow chart showing an axis alignment method in the same embodiment.
Chart.

FIG. 11 is a diagram showing a configuration of a conventional axis aligning device.

FIG. 12 is a diagram showing a configuration of a conventional axis aligning device.

FIG. 13 is a diagram showing a configuration of a conventional movable mirror device.

[Explanation of symbols]

12b ... support base, 12c ... posts, 12d ... reflection mirror,
12e ... Mirror holder, 12f ... Horizontal axis, 12g ... Interlocking arm, 12h ... Fixed arm, 31, 41, 42 ... Movable mirror device, 31a, 31a ', 41a, 42a ... Actuator, 37 ... Coarse adjusting mechanism, 37a. rod,
38 ... Fine adjustment mechanism.

Claims (3)

[Claims] 1. An adjustment signal for reflecting a laser beam from a laser light source to guide it to an axis-aligning section, and for making a deviation between a reflection optical axis of the laser beam obtained by the axis-aligning section and a target optical axis zero. In the alignment device having a movable mirror device for receiving and aligning the reflected laser optical axis, the movable mirror device includes a support provided upright on a support table provided on the optical axis of the laser light. A mirror holder that is rotatably attached to the upper part of the pillar around the pillar as a center of rotation, and has an upper part formed in a concave shape, and a mirror holder that rotatably holds the mirror with the inside of the upper part of the concave part being a holding part; Of the two holding parts of the holder, the interlocking arm that is attached to the outside of the upper part of a certain holding part so as to interlock with the mirror and has its lower end facing the mirror holder, and the interlocking arm. A fixed arm, which is located on the opposite side and fixed to the column, and an advancing / retreating rod that moves forward / backward based on the adjustment signal received from the axis aligning unit are brought into contact with the interlocking arm and the fixed arm to rotate the mirror. A coarse adjustment mechanism to be moved, and a main body of the coarse adjustment mechanism and the mirror holder surface on the opposite side of the both arms, and is made into a cylindrical shape which receives an adjustment signal from the axis alignment portion and slightly expands and contracts. An axis aligning device comprising a plurality of formed fine adjustment mechanisms, wherein the optical axis is roughly adjusted and finely adjusted by the same movable mirror device. 2. An axis alignment for measuring an optical axis of a reflected laser beam obtained from a laser light source through a movable mirror device and aligning the reflected optical axis based on a deviation between the measured optical axis and a target optical axis. In the method, when the deviation is equal to or larger than a predetermined fine adjustment range, an adjustment signal that causes the reflected optical axis to fall within the fine adjustment range is given to the movable mirror device to operate the coarse adjustment mechanism of the movable mirror device. After that, the position of the reflected light axis is measured again, and when the deviation is within the predetermined fine adjustment range, the adjustment signal that causes the reflected light axis to fall within a predetermined fine adjustment minimum value is moved. When the reflected optical axis position exceeds the predetermined fine adjustment range during the fine adjustment, the adjustment signal based on the position is given to the movable mirror device. Give to the movable Mira -A method for aligning an axis, characterized in that the coarse adjustment mechanism and the fine adjustment mechanism of the device are operated so that the coarse adjustment and the fine adjustment are canceled to enter the center region of the fine adjustment range. 3. A reflected laser light obtained from a laser light source through a movable mirror device is transmitted to a predetermined irradiation target, and the optical axis of the reflected laser light is measured, and the measurement optical axis and the target optical axis are measured. In the axial alignment method for aligning the reflected optical axis based on the deviation between, the transmitting side near the laser light source, the transmitting side optical axis direction and the transmitting side optical axis position of the reflected laser light from the movable mirror device. By comparing the transmission side optical axis direction and the transmission side optical axis position with the target optical axis to determine the transmission side optical axis direction deviation and the transmission side optical axis position deviation, and eliminate the both transmission side optical axis deviations. Is supplied to the movable mirror device to operate the coarse adjustment mechanism and the fine adjustment mechanism of the movable mirror device, and then, on the receiving side near the irradiation target, the reflected laser light from the movable mirror device. of The receiving side optical axis position is measured, the receiving side optical axis position is compared with the target optical axis to obtain the receiving side optical axis position deviation, and the adjustment signal for eliminating the receiving side optical axis position deviation is moved. The fine adjustment mechanism of the movable mirror device is operated by giving it to the mirror device, and after the fine adjustment, the transmission side optical axis direction and the transmission side optical axis position of the reflected laser light are updated as the target optical axis, and
An axis aligning method characterized in that the position of the optical axis of the reflected laser beam on the receiving side is measured again and the optical axis is constantly adjusted while the coarse adjustment and the fine adjustment are linked.