JPH0672046U - Lighting equipment for inspection equipment - Google Patents
Lighting equipment for inspection equipmentInfo
- Publication number
- JPH0672046U JPH0672046U JP1182093U JP1182093U JPH0672046U JP H0672046 U JPH0672046 U JP H0672046U JP 1182093 U JP1182093 U JP 1182093U JP 1182093 U JP1182093 U JP 1182093U JP H0672046 U JPH0672046 U JP H0672046U
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspection
- light emitter
- opening
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
(57)【要約】
【目的】 異なる方向からの斜め照明と、同軸落射照明
が可能な、コンパクトな照明装置を提供する。
【構成】 フラットなベ−ス１２の外周部に複数個の第
１発光体を配置する。第１発光体１４の光軸は検査対象
１を指向する。第１発光体１４の内側には複数個の第２
発光体１５を配置する。第２発光体１５はベ−ス１２の
中心を指向し、その光はミラ−面１６で検査対象１の方
向に方向転換させられる。ベ−ス１２の中央には検査用
カメラ２の視野を開く開口１３があり、開口１３と検査
用カメラ２の間にはハ−フミラ−１７が置かれ、このハ
−フミラ−１７が、第３発光体１９からの光を検査用カ
メラ２と同軸の落射照明に転換する。
(57) [Abstract] [Purpose] To provide a compact lighting device capable of oblique illumination from different directions and coaxial epi-illumination. A plurality of first light emitters are arranged on the outer periphery of a flat base 12. The optical axis of the first light emitter 14 points the inspection target 1. Inside the first light emitter 14, a plurality of second light emitters are provided.
The light emitter 15 is arranged. The second light emitter 15 is directed toward the center of the base 12, and its light is redirected by the mirror surface 16 toward the inspection target 1. At the center of the base 12, there is an opening 13 that opens the field of view of the inspection camera 2, and a harf mirror 17 is placed between the opening 13 and the inspection camera 2. 3 Light from the light emitter 19 is converted into epi-illumination coaxial with the inspection camera 2.
Description
【０００１】[0001]
本考案は検査対象の像をとらえる検査用カメラに組み合わせる照明装置に関す る。 The present invention relates to an illumination device combined with an inspection camera for capturing an image of an inspection object.
【０００２】[0002]
検査対象の像をカメラでとらえて検査を行う手法は、現在では広汎に利用され ている。電子回路基板製造工程では、特にその使用例が多い。このような検査手 法において、画像認識性能を左右するのが照明装置である。光の方向により認識 率が異なることから、実用化されている照明装置では、様々な位置に発光体を配 置し、検査対象に応じ切り換え使用（あるいは同時使用）することが多い。特開 昭６４−２０４０２号公報、特開平２−２６８２６０号公報、特開平４−１６６ ７０９号公報等にその例を見ることができる。 The method of capturing an image of the inspection target with a camera and performing inspection is now widely used. In the electronic circuit board manufacturing process, there are many examples of its use. In such an inspection method, the illumination device affects the image recognition performance. Since the recognition rate differs depending on the direction of light, in many practical lighting devices, light emitters are placed at various positions and switched (or used simultaneously) depending on the inspection target. Examples can be found in JP-A-64-20402, JP-A-2-268260, JP-A-4-166709 and the like.
【０００３】[0003]
焦点距離の関係から、検査用カメラと検査対象との距離を大きくとれない場合 がある。そのような空間的制約にもかかわらず、多様なモ−ドで検査対象を照明 できる装置を提供しようとするものである。 Due to the focal length, there are cases where the distance between the inspection camera and the inspection target cannot be set large. Despite such spatial restrictions, the present invention aims to provide a device that can illuminate an inspection target in various modes.
【０００４】[0004]
本考案では、中央に開口を有するフラットなベ−スに２種類の発光体を装着す る。その一は、ベ−スの外周部に配置された複数個の第１発光体で、その光軸は 検査対象を指向する。その二は第１発光体の内側に配置された複数個の第２発光 体で、その光軸はベ−ス中心を指向する。この第２発光体からの光は、開口の外 側のミラ−面により検査対象方向に方向転換させられる。開口と検査用カメラの 間にはハ−フミラ−を置き、このハ−フミラ−に第３発光体の光を照射する。 In the present invention, two types of light emitters are mounted on a flat base having an opening in the center. The first is a plurality of first light emitters arranged on the outer periphery of the base, the optical axes of which are directed toward the inspection target. The second is a plurality of second light emitters arranged inside the first light emitter, the optical axis of which is directed to the center of the base. The light from the second light emitter is redirected to the direction to be inspected by the mirror surface outside the opening. A half mirror is placed between the opening and the inspection camera, and the half mirror is irradiated with the light of the third light emitter.
【０００５】[0005]
【作用】 第１、第２発光体からの光は各々異なる角度から検査対象に当る。第３発光体 からの光は、ハ−フミラ−で反射されて検査用カメラの光軸方向から検査対象に 当る。検査対象によって反射された光は、ハ−フミラ−を通って検査用カメラに 入る。Operation The light from the first and second light emitters strikes the inspection object from different angles. The light from the third light emitter is reflected by the half mirror and hits the inspection target from the optical axis direction of the inspection camera. The light reflected by the inspection object enters the inspection camera through the half mirror.
【０００６】[0006]
図に基づき一実施例を説明する。１は水平に支持した検査対象で、ここでは電 子回路基板を想定している。２は検査対象の上に配置した検査用カメラである。 検査用カメラ２のレンズ筒３に照明装置１０を固定する。 An embodiment will be described with reference to the drawings. 1 is an object to be inspected that is supported horizontally, and an electronic circuit board is assumed here. Reference numeral 2 denotes an inspection camera arranged on the inspection object. The illumination device 10 is fixed to the lens barrel 3 of the inspection camera 2.
【０００７】 照明装置１０は、レンズ筒３を受け入れ固定するブロック１１と、ブロック１ １に連結したベ−ス１２とを備える。ベ−ス１２はフラットな円盤形状をしてお り、中央には検査用カメラ２の視野を開く円形の開口１３を有する。The illumination device 10 includes a block 11 that receives and fixes the lens barrel 3, and a base 12 connected to the block 11. The base 12 has a flat disk shape, and has a circular opening 13 at the center for opening the visual field of the inspection camera 2.
【０００８】 べ−ス１２の外周部には発光ダイオ−ドからなる第１発光体１４を複数個、環 状に配置する。第１発光体１４の各々の光軸は、検査対象１の、検査視野に含ま れる個所を指向する。第１発光体１４の内側には、発光ダイオ−ドからなる複数 個の第２発光体１５を環状に配置する。第２発光体１５の光軸は検査対象１では なくベ−ス１２の中心を指向する。開口１３の外側には環状であり且つ傾斜した ミラ−面１６が設けられ、このミラ−面１６が第２発光体１５からの光を検査対 象１の方向に方向転換させる。A plurality of first light emitters 14 each composed of a light emitting diode are arranged in a ring shape on the outer peripheral portion of the base 12. The optical axis of each of the first light emitters 14 is directed to a portion of the inspection target 1 included in the inspection visual field. Inside the first light emitter 14, a plurality of second light emitters 15 made of light emitting diodes are annularly arranged. The optical axis of the second light emitter 15 is directed not to the inspection object 1 but to the center of the base 12. An annular and inclined mirror surface 16 is provided outside the opening 13, and the mirror surface 16 redirects the light from the second light emitter 15 in the direction of the inspection target 1.
【０００９】 開口１３と検査用カメラ２との間にはハ−フミラ−１７を４５°の角度で配置 する。検査対象１の像はハ−フミラ−１７を介して検査用カメラ２に取り込まれ ることになる。１８はハ−フミラ−１７と向かい合わせに４５°の角度で配置さ れたミラ−、１９はミラ−１８の上に配置された第３発光体である。第３発光体 １９は高輝度タイプの発光ダイオ−ドからなる。A half mirror 17 is arranged between the opening 13 and the inspection camera 2 at an angle of 45 °. The image of the inspection object 1 is taken into the inspection camera 2 via the half mirror 17. Reference numeral 18 denotes a mirror arranged at an angle of 45 ° so as to face the half mirror 17, and 19 denotes a third light emitter arranged on the mirror 18. The third light emitter 19 is composed of a high brightness type light emitting diode.
【００１０】 第１、第２、第３発光体１４、１５、１９とも、必要に応じ各種の色の発光ダ イオ−ドを取り混ぜて使用する。２０は照明装置１０の制御装置である。For each of the first, second and third light emitters 14, 15, and 19, light emitting diodes of various colors are mixed and used as needed. Reference numeral 20 is a control device of the lighting device 10.
【００１１】 上記装置の動作は次のようになる。第１発光体１４に点灯すると、そこからの 光は検査対象１を斜めから照らす。第２発光体１５に点灯すると、そこからの光 はミラ−面１６で反射され、検査対象１をより垂直に近い角度から照らす。第３ 発光体１９に点灯すると、そこからの光はミラ−１８とハ−フミラ−１７で反射 され、検査対象１を真上から、つまり検査用カメラ２の光軸方向から照らす落射 照明となる。制御装置２０は３種類の発光体を単独で、あるいは２種類づつ組み 合わせて、あるいは３種類同時に、点灯させる。すなわち全部で７通りの照明モ −ドが可能である。照明モ−ドの選択は、予め定めたプログラムにより行う。画 像認識結果をフィ−ドバックして直ちに最適モ−ドを選択させることも可能であ る。The operation of the above device is as follows. When the first light-emitting body 14 is lit, the light from the first light-emitting body 14 illuminates the inspection target 1 obliquely. When the second light emitter 15 is turned on, the light from the second light emitter 15 is reflected by the mirror surface 16 and illuminates the inspection target 1 from a more vertical angle. When the third light emitter 19 is turned on, the light from the third light emitter 19 is reflected by the mirrors 18 and 17 and becomes epi-illumination that illuminates the inspection target 1 from directly above, that is, from the optical axis direction of the inspection camera 2. . The control device 20 lights the three kinds of light emitters individually, or in combination of two kinds, or simultaneously in three kinds. That is, a total of seven illumination modes are possible. The lighting mode is selected by a predetermined program. It is also possible to feed back the image recognition result and immediately select the optimum mode.
【００１２】[0012]
本考案では、第１発光体と第２発光体により異なる角度からの斜め照明を、第 ３発光体とハ−フミラ−により同軸落射照明を、それぞれ得るものであるが、ハ −フミラ−のため空間的にゆとりのない場所に置く第２発光体に関しては、厚み をとる斜め配置をやめてベ−ス中心を向いた配置とし、その光をミラ−面で反射 して検査対象に当てるようにしたので、全体として厚みを節約した、コンパクト な構成とすることができた。 In the present invention, oblique illumination from different angles is obtained by the first light emitting body and the second light emitting body, and coaxial epi-illumination is obtained by the third light emitting body and the hammilla. For the second light emitter, which is placed in a space that does not have space, the oblique arrangement with the thickness is stopped and the arrangement is made to face the center of the base, and the light is reflected by the mirror surface and applied to the inspection object. Therefore, it was possible to have a compact structure that saved thickness as a whole.
【図１】照明装置の断面図である。FIG. 1 is a cross-sectional view of a lighting device.
【図２】発光体の配置を示す、部分的に破断した照明装
置の下面図である。FIG. 2 is a bottom view of the partially broken illumination device showing the arrangement of the light emitters.
１ 検査対象 ２ 検査用カメラ １０ 照明装置 １２ ベ−ス １３ 開口 １４ 第１発光体 １５ 第２発光体 １６ ミラ−面 １７ ハ−フミラ− １９ 第３発光体 DESCRIPTION OF SYMBOLS 1 Inspection target 2 Inspection camera 10 Illumination device 12 Base 13 Opening 14 1st light emitter 15 2nd light emitter 16 Miller surface 17 Haar miller 19 3rd light emitter
Claims (1)
ットなベ−ス。 ｂ．前記ベ−スの外周部に配置され、各々の光軸が、前
記開口の延長上に存在する検査対象を指向するよう設定
された複数個の第１発光体。 ｃ．前記第１発光体の内側に配置され、各々の光軸がベ
−ス中心を指向するよう設定された複数個の第２発光
体。 ｄ．前記開口の外側に設けられ、前記第２発光体からの
光を検査対象方向に方向転換させるミラ−面。 ｅ．開口と前記検査用カメラの間に設けられ、検査対象
の像を検査用カメラに入射させるハ−フミラ−。 ｆ．前記ハ−フミラ−に光を照射し、検査対象に対し検
査用カメラと同軸の落射光を与える第３発光体。1. An illumination device for an inspection device, comprising: a. A flat base with an opening in the center that opens the field of view of the inspection camera. b. A plurality of first light emitters arranged on an outer peripheral portion of the base, each optical axis of which is set so as to direct an inspection target existing on an extension of the opening. c. A plurality of second light emitters arranged inside the first light emitter, each optical axis being set so as to be directed to the center of the base. d. A mirror surface that is provided outside the opening and that redirects light from the second light emitter to an inspection target direction. e. A half mirror provided between the opening and the inspection camera to make an image of the inspection object incident on the inspection camera. f. A third light emitter that irradiates the half mirror with light and gives incident light to the inspection object coaxial with the inspection camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1993011820U JP2596494Y2 (en) | 1993-03-17 | 1993-03-17 | Lighting equipment for inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1993011820U JP2596494Y2 (en) | 1993-03-17 | 1993-03-17 | Lighting equipment for inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0672046U true JPH0672046U (en) | 1994-10-07 |
| JP2596494Y2 JP2596494Y2 (en) | 1999-06-14 |
Family
ID=11788425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1993011820U Expired - Lifetime JP2596494Y2 (en) | 1993-03-17 | 1993-03-17 | Lighting equipment for inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2596494Y2 (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001235366A (en) * | 1999-12-30 | 2001-08-31 | Mitsutoyo Corp | Method and device for calibrating open-loop light intensity |
| WO2002016918A1 (en) * | 2000-08-22 | 2002-02-28 | Ccs Co., Ltd. | Surface inspecting illumination device and surface inspecting apparatus |
| JP2002071578A (en) * | 2000-08-30 | 2002-03-08 | Ibiden Co Ltd | Visual inspection apparatus and method of visually inspecting printed wiring board using the same |
| JP2002237967A (en) * | 2001-02-13 | 2002-08-23 | Tb Optical Co Ltd | Light-emitting diode illumination light source |
| WO2004015363A1 (en) * | 2002-08-08 | 2004-02-19 | Matsushita Electric Industrial Co., Ltd. | Illumination device, recognizing device with the illumination device, and part mounting device |
| JP2005242386A (en) * | 2005-05-02 | 2005-09-08 | Mitsutoyo Corp | Image probe |
| JP2005274538A (en) * | 2004-03-26 | 2005-10-06 | Algol:Kk | Apparatus for visual inspection of object to be inspected |
| JP2006275651A (en) * | 2005-03-28 | 2006-10-12 | Shinshu Univ | Device for inspecting appearance of inspected object |
| JP2012103256A (en) * | 2010-11-12 | 2012-05-31 | Koh Young Technology Inc | Inspection device |
| JP2014517914A (en) * | 2011-04-18 | 2014-07-24 | イスメカ セミコンダクター ホールディング エス アー | Inspection device |
| JP2017167222A (en) * | 2016-03-14 | 2017-09-21 | マイクロネット株式会社 | Illumination device for microscopes, microscope having the same, and microscope system having the same |
| JP2018537654A (en) * | 2015-09-24 | 2018-12-20 | ユニバーシティ・オブ・サウス・アラバマ | Illumination device for spectral imaging |
-
1993
- 1993-03-17 JP JP1993011820U patent/JP2596494Y2/en not_active Expired - Lifetime
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001235366A (en) * | 1999-12-30 | 2001-08-31 | Mitsutoyo Corp | Method and device for calibrating open-loop light intensity |
| JP4608089B2 (en) * | 1999-12-30 | 2011-01-05 | 株式会社ミツトヨ | Open loop light intensity calibration method and apparatus |
| WO2002016918A1 (en) * | 2000-08-22 | 2002-02-28 | Ccs Co., Ltd. | Surface inspecting illumination device and surface inspecting apparatus |
| US6837595B2 (en) | 2000-08-22 | 2005-01-04 | Ccs Co., Ltd. | Surface inspecting illumination device and surface inspecting apparatus |
| JP2002071578A (en) * | 2000-08-30 | 2002-03-08 | Ibiden Co Ltd | Visual inspection apparatus and method of visually inspecting printed wiring board using the same |
| JP4564677B2 (en) * | 2001-02-13 | 2010-10-20 | キリンテクノシステム株式会社 | LED light source |
| JP2002237967A (en) * | 2001-02-13 | 2002-08-23 | Tb Optical Co Ltd | Light-emitting diode illumination light source |
| WO2004015363A1 (en) * | 2002-08-08 | 2004-02-19 | Matsushita Electric Industrial Co., Ltd. | Illumination device, recognizing device with the illumination device, and part mounting device |
| CN1300546C (en) * | 2002-08-08 | 2007-02-14 | 松下电器产业株式会社 | Illumination device, recognizing device with the illumination device, and part mounting device |
| JP2005274538A (en) * | 2004-03-26 | 2005-10-06 | Algol:Kk | Apparatus for visual inspection of object to be inspected |
| JP2006275651A (en) * | 2005-03-28 | 2006-10-12 | Shinshu Univ | Device for inspecting appearance of inspected object |
| JP4601473B2 (en) * | 2005-03-28 | 2010-12-22 | 国立大学法人信州大学 | Equipment for inspecting the appearance of inspection objects |
| JP2005242386A (en) * | 2005-05-02 | 2005-09-08 | Mitsutoyo Corp | Image probe |
| JP2012103256A (en) * | 2010-11-12 | 2012-05-31 | Koh Young Technology Inc | Inspection device |
| JP2014517914A (en) * | 2011-04-18 | 2014-07-24 | イスメカ セミコンダクター ホールディング エス アー | Inspection device |
| JP2018537654A (en) * | 2015-09-24 | 2018-12-20 | ユニバーシティ・オブ・サウス・アラバマ | Illumination device for spectral imaging |
| JP2017167222A (en) * | 2016-03-14 | 2017-09-21 | マイクロネット株式会社 | Illumination device for microscopes, microscope having the same, and microscope system having the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2596494Y2 (en) | 1999-06-14 |
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