JPH0666845A - E-o probe - Google Patents

Abstract

PURPOSE:To efficiently detect the electric field of a material to be inspected by providing a holding part having compliance property which is situated on the opposite side to the side on which E-O crystal is mounted, of a glass plate. CONSTITUTION:An E-O probe comprises a glass block 1; a transparent electrode 2; an E-O crystal 3; a reflecting film 4; a cable 5; an electrode connecting part 6; and a holding part having vertical compliance property for supporting a glass plate 7. It further has an adhesive layer 9 interposed between the glass block 1 and the E-O crystal 3, and a resin film 13 for enclosing the adhesive layer 9 and the reflecting film 4. The resin film 13 is brought into contact with a material 11 to be inspected, whereby, the distance between the material 11 to be inspected and the E-O crystal 3 is kept to be a fixed minute space, and the electric field of the material 11 to be inspected can be efficiently detected without breaking the material 11 to be inspected or the E-O crystal 3 by the holding part 8 having vertical compliance property.

Description

Detailed Description of the Invention

[0001]

This invention relates to EO probes, especially
E to detect high-speed signals on the wiring patterns of minute LSIs
-O probe related.

[0002]

2. Description of the Related Art Conventionally, an EO probe of this kind has been disclosed, for example, in P7-P12 of the document "Application of Charged Particle Beam to Industry of Japan Society for the Promotion of Science, 132nd Committee, 109th Study Group".
It is written in.

The EO crystal can detect a higher speed electric signal by reducing the electrostatic capacity,
It is made as small as 100 μm square and has a structure in which ITO (Indium Tin Oxide) transparent electrodes are sandwiched and adhered to a glass block for holding, and in order to detect the electrical signal of the inspected object more efficiently, the inspected object is inspected. Alcohol was added between the product and the EO crystal.

[0004]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention Conventional EO described above
The probe has the EO crystal on the tip attached with a minute adhesion surface, but the alcohol put between the probe and the object to be inspected penetrates into the adhesion surface, and the EO crystal is easily removed over time, making it practically useable. It has the drawback of not having it.

Further, the conventional EO probe is
Since the crystal is a thin plate, when the laser light is incident vertically, the reflected light from the dielectric multilayer reflective film is returned on the same optical axis as the incident light, separating the input light and the output term. In addition, when the incident light is incident on the dielectric multilayer reflective film at an angle, it is not necessary for the input light and the reflected light to interfere, but the input light is transmitted from the glass block to the EO crystal. When entering, it causes reflection on the boundary surface, the loss of laser light increases, the reflected light on the boundary surface runs into the glass block,
There is a drawback that it becomes noise and pollutes the signal.

[0006]

The EO probe of the first invention comprises a glass block obtained by shaving the apex of square-thickened quartz glass in a plane parallel to the bottom surface, and an inclined surface and a shaving surface of the glass block. A transparent electrode deposited at the same time, a thin plate of EO crystal adhered to the scraped surface of the glass block, and a thin plate of the EO crystal located on the surface opposite to the surface bonded to the glass block. Wavelength 700 μm ~
A dielectric multilayer reflective film that reflects a laser beam of 900 μm, an adhesive portion between the glass block and the thin plate of the EO crystal, a resin film that is in contact with an object to be inspected having a large amount of the dielectric multilayer reflective film, and the transparent film. An electric wire that is electrically connected to the electrode,
An electrode connecting portion that connects the electric wire and the transparent electrode, a glass plate that holds the glass block, the electrode connecting portion, and the electric wire, and a vertical direction that is located on the opposite side of the glass plate to which the EO crystal is attached. And a holding unit having compliance with the above.

In the EO probe of the second invention, a glass block in which the apex portion of square-shaped quartz glass is cut into a V-shaped groove, and a transparent vapor deposited at the same time on the inclined surface and the cut surface of the glass block are transparent. An electrode and a triangular prism type EO crystal bonded to the scraped V-shaped groove of the glass block;
Wavelength 700 μm-900 μm located on the EO crystal and on the side opposite to the side bonded to the glass block
Holding a dielectric multilayer reflective film that reflects the laser beam, an electric wire that is electrically connected to the transparent electrode, an electrode connecting portion that connects the electric wire and the transparent electrode, the glass block, the electrode connecting portion, and the electric wire. And a glass plate.

[0008]

Next, the present invention will be described in detail with reference to the drawings.

FIG. 1 is a sectional view showing a first embodiment of the present invention, and FIG. 2 is a partially enlarged view for explaining the same embodiment.

The EO probe shown in FIG. 1 has a glass block 1, a transparent electrode 2, an EO crystal 3, and a reflective film 4.
, The electric wire 5, the electrode connecting portion 6, the glass plate 7,
A holding portion 8 that supports the glass plate 7 and has vertical compliance is configured. The partially enlarged view of FIG. 2 is an enlarged view of a portion where the EO crystal 3 is attached to the glass block 1, and the glass block 1 and the EO crystal 3 are shown.
There is an adhesive layer 9 between them, and there is a resin film 13 that surrounds the adhesive layer 9 and the reflective film 4.

The glass block 1 is made of square-thickness quartz glass, and the apex portion of the square-thickness is formed by cutting off the surface parallel to the bottom surface of the glass block 1 as shown in FIG. A transparent electrode 2 made of a material such as ITO (Indium Tin Oxide) is collectively vapor-deposited on the scraped selective surface 9 and the inclined surface of the glass block 1. The EO crystal 3 is a thin plate of a crystal having a Kerr effect (Pockesel effect) such as LiNbO3 or LiTaO3, and the adhesive layer 9
It is attached to the tip surface 10 via. This E-O
The surface of the crystal 3 on the side of the inspected object 11 has a wavelength of 700 μm to 9 μm.
There is a dielectric multilayer reflective film 4 that reflects a laser beam 12 of 00 μm.

Laser beam 1 incident on EO crystal 3
Reference numeral 2 has a diameter of several microns to several tens of microns and is reflected by the dielectric multilayer reflection film 4, and at this time, it is deflected in proportion to the electric field from the inspection object 11. The electrode connecting portion 6 is a portion that electrically connects the transparent electrode 2 and the electric wire 5, and is a product obtained by applying a metal paste such as dotite and drying and curing it. The glass plate 7 holds the electrode connecting portion 6 and the electric wire 5, and has a structure in which no force is directly applied to the transparent electrode 2 when a tensile force is applied to the electric wire 5. The resin film 13 has a thickness of several microns, and the object to be inspected 11
To contact. The contact force is applied from the upper part of the holding part 8,
Due to the vertical compliance of the holding portion 8, an excessive force is applied to the object to be inspected 11 or EO.
The crystal 3 is protected so as not to be destroyed.

FIG. 3 is a sectional view showing a second embodiment of the present invention, and FIG. 4 is a partially enlarged view for explaining the same embodiment.

The EO probe shown in FIG. 3 has a glass block 101, a transparent electrode 102, and an EO crystal 103.
, The reflection film 104, the electric wire 105, and the electrode connecting portion 106.
And a glass plate 107.

FIG. 4 shows the glass block 10 in FIG.
1 is an enlarged view of a portion where EO crystal 103 is attached to 1,
There is an adhesive layer 108 between the glass block 101 and the EO crystal 103.

The glass block 101 is made of square-thickness quartz glass, and the apex of the square-thickness is cut into a V-shaped groove as shown in FIG. A transparent electrode 102 made of a material such as ITO is collectively vapor-deposited on the scraped V-shaped tip surface 109 and slope of the glass block 101. E-
The O crystal 103 is made of a crystal having a Kerr effect (Pockesel effect) such as LiNbO3 or LiTaO3, and is formed in a triangular prism shape matching the V-shaped tip surface 109 of the glass block 101. Installed. Inspected object 110 of this EO crystal 103
The dielectric multilayer reflection film 104 that reflects the laser beam 111 having a wavelength of 700 μm to 900 μm is provided on the side surface.

The laser beam 111 incident on the EO crystal 103 has a diameter of several microns to several tens of microns,
The light is vertically incident on one surface of the V-shaped tip surface 109, is reflected by the dielectric multilayer reflective film 104, and is emitted from the V-shaped surface opposite to the incident surface. When passing through the EO crystal 103, it is deflected in proportion to the electric field from the inspection object 110. The electrode connecting portion 106 includes the transparent electrode 102 and the electric wire 10.
5 is an electrically connected portion, which is a product obtained by applying a metal paste such as doutite and drying and curing it. The glass plate 107 holds the electrode connecting portion 106 and the electric wire 105, and has a structure in which no force is directly applied to the transparent electrode 102 when a tensile force is applied to the electric wire 105.

[0018]

As described above, the present invention has a resin film that covers the reflective film attached to the tip of the EO crystal, and the resin film contacts the object to be inspected so that the object to be inspected. And E
The O-crystal 3 is kept at a constant minute interval, and a holding portion having vertical compliance allows the inspection object,
Alternatively, the electric field of the object to be inspected can be efficiently detected without damaging the EO crystal.

Further, there is an effect that peeling is prevented by permeation of alcohol into the EO crystal adhesive layer.

Further, according to the present invention, a glass block in which the apex of quartz glass having a rectangular shape is cut into a V-shaped groove, a triangular prism type EO crystal bonded to the groove, and a dielectric for reflecting a laser beam. By having a body multilayer reflection film and by injecting a laser beam perpendicularly to the V-shaped face, when entering the EO crystal from the glass block, reflection at the boundary face is eliminated, and the loss of laser light is reduced at the same time. The effect that the reflected light at the boundary surface does not run into the glass block and becomes a noise to contaminate the signal, and a good detection signal can be obtained.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a first embodiment of the present invention.

FIG. 2 is a partially enlarged view for explaining the first embodiment.

FIG. 3 is a sectional view of a second embodiment of the present invention.

FIG. 4 is a partially enlarged view for explaining the second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Glass block 2 Transparent electrode 3 EO crystal 4 Reflective film 5 Electric wire 6 Electrode connection part 7 Glass plate 8 Holding part 9 Adhesive layer 10 Tip surface 11 Inspected object 12 Laser beam 13 Resin film

Claims (2)

[Claims] 1. A glass block in which the apex of square-thickness quartz glass is cut off in a plane parallel to the bottom surface, and a transparent electrode which is vapor-deposited simultaneously on the inclined surface and the cut surface of the glass block,
A thin plate of EO crystal adhered to the scraped surface of the glass block, and a wavelength 700 located on the thin plate of the EO crystal and on the surface opposite to the surface bonded to the glass block.
a dielectric multilayer reflective film that reflects a laser beam of μm to 900 μm, an adhesive portion between the glass block and the thin plate of the EO crystal, and a resin film that is in contact with an object having many dielectric multilayer reflective films. An electric wire electrically connected to the transparent electrode, an electrode connecting portion connecting the electric wire and the transparent electrode, a glass plate holding the glass block, the electrode connecting portion and the electric wire, and an EO crystal of the glass plate An E-O including a holding portion located on the opposite side to the attached side and having vertical compliance.
probe. 2. A glass block in which the apex portion of square-thickness quartz glass is cut into a V-shaped groove, and a transparent electrode which is vapor-deposited simultaneously on the inclined surface and the cut surface of the glass block,
Triangular prism type EO crystal adhered to the scraped V-shaped groove of the glass block, and a wavelength of 700 μm-900 μm located on the side of the EO crystal opposite to the side adhered to the glass block. A dielectric multilayer reflective film that reflects a laser beam, an electric wire that is electrically connected to the transparent electrode, an electrode connecting portion that connects the electric wire and the transparent electrode, a glass that holds the glass block, the electrode connecting portion, and the electric wire. An E-O probe comprising a plate.